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    梅新灵
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    1. The document describes a plasma ignition test setup with argon, nitrogen, and oxygen gas flows controlled by mass flow controllers and fed into a vacuum chamber held at 1000 mTorr pressure for ignition and plasma generation using a radio frequency power supply at 2000W. 2. The test sequence is labeled Test 1 and involves igniting the plasma using only 1 standard liter per minute of argon gas before introducing any other gases. 3. Gas flows, pressure, power, voltages and currents are monitored on an control interface to ensure proper operation of the plasma ignition process.

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    1. The document describes a plasma ignition test setup with argon, nitrogen, and oxygen gas flows controlled by mass flow controllers and fed into a vacuum chamber held at 1000 mTorr pressure for ignition and plasma generation using a radio frequency power supply at 2000W. 2. The test sequence is labeled Test 1 and involves igniting the plasma using only 1 standard liter per minute of argon gas before introducing any other gases. 3. Gas flows, pressure, power, voltages and currents are monitored on an control interface to ensure proper operation of the plasma ignition process.

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    6 views1 page

    rps测试主界面

    Uploaded by

    梅新灵
    1. The document describes a plasma ignition test setup with argon, nitrogen, and oxygen gas flows controlled by mass flow controllers and fed into a vacuum chamber held at 1000 mTorr pressure for ignition and plasma generation using a radio frequency power supply at 2000W. 2. The test sequence is labeled Test 1 and involves igniting the plasma using only 1 standard liter per minute of argon gas before introducing any other gases. 3. Gas flows, pressure, power, voltages and currents are monitored on an control interface to ensure proper operation of the plasma ignition process.

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    of 1

    1 SLM

    N2 1000 mTorr 30 %

    V2
    1 SLM

    Ar RPS 腔体
    V3 V1
    5 SLM

    Butterfly Valve
    O2
    Pump
    V4
    MFC

    Ignition ON SEQUENCE Test 1（1T 1SLM Ar ignition）

    Purge ON Power 2000 W

    Item Setpoint Reading Unit


    AC OK
    Pressure 1000 999 mT

    Ar Flow 1 1 SLM
    Plasma On
    N2 Flow 1 1 SLM

    O2 Flow 1 1 SLM
    RPS Ready
    H2O Flow SLM

    Power 2000 2000 W


    VoDM
    AC Voltage V

    BUS Voltage V
    Purge OK
    BUS Current A

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