No.

CP-SS-1876E

Panel Mount Mass Flow Controller

Overview
The MPC is a compact and lightweight digital mass flow
controller that can be mounted in a panel. The controller
incorporates a thermal micro-flow sensor developed by
Azbil Corporation and an extremely compact proportional
solenoid valve.
If used as a replacement for a purge meter, this low-cost con-
troller can be handled and installed as easily as the replaced
meter.

Features
• This is a compact (mask size: 48 × 48 mm, depth 73.7 mm)
and lightweight (approx. 300 g) mass flow controller.
• Utilizing the advanced digital control technology in-
corporated in the micro-f low sensor developed by
Azbil Corporation, flow rate can be controlled reliably
within 1 second throughout the entire control range, from
a low flow rate to the maximum flow rate.
• The controller is a solution for problems with purge me-
ters such as flow rate fluctuations due to pressure change,
the need for compensation when the fluid temperature or
pressure differs from design conditions, and the handling
of flow rate signal output.
• The two-line display shows the current flow rate and the set
flow rate. All operations can be carried out with the keys
on the unit, so no peripheral equipment such as a dedicated
setting device or a display unit is required.
• Pipe connection ports and wiring connectors are all
mounted on the back of the unit for easier installation.
The detachable connector terminal block facilitates wiring
work and replacement of the unit.
• Because the controller operates on 24 V DC, the high-price
dedicated ±15 V power supply that is required for conven-
tional mass flow controllers is not necessary.

Specifications
Model No.
MPC9500 MPC0002 MPC0005 MPC0020
Item
Valve type Proportional solenoid valve
Valve operation Normally closed (N.C.) when de-energized
Standard full scale (FS) flow rate 0.500 L/min 2.00 L/min 5.00 L/min 20.0 L/min
(nitrogen equivalent) *1 (standard) (standard) (standard) (standard)
Applicable gas type Air/nitrogen, argon, carbon dioxide (CO2)
The gas must be dry and not contain corrosive components (chlorine, sulfur, acid, etc.).
Also, it must be a clean gas, without dust or oil mist.
Control Control range *1 4 to 100 % FS *1 2 to 100 % FS *1
Responsiveness Within 1.0 s (typ.) to the setpoint ± 2 % FS
Accuracy Within ±2 % FS (at the standard temperature and differential pressure)
Repeatability Within ±1 % FS
Effect of temperature 0.1 % FS max. per 1 °C
Pressure Q ≥ 40 % FS 0.7 % FS max. 0.4 % FS max. 0.2 % FS max. 0.2 % FS max.
characteris- 10 % FS ≤ Q
tics 1.2 % FS max. 0.7 % FS max. 0.3 % FS max. 0.2 % FS max.
< 40 % FS
(per 0.1 MPa)
Q < 10 % FS 2 % FS max. 1.2 % FS max. 0.5 % FS max. 0.2 % FS max.
(Q: flow rate)

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 Model No.
MPC9500 MPC0002 MPC0005 MPC0020
Item
Pressure Standard differential pressure 0.2 MPa (inlet pressure: 0.2 MPa [gauge]; outlet pressure: 0.0 MPa [gauge])
Required differential pressure
0.05 MPa 0.1 MPa 0.15 MPa
*2
Operating differential
0.3 MPa max. 0.05 to 0.3 MPa
pressure range *3
Pressure resistance 0.5 MPa (gauge)
Tempera- Standard operating +25 °C
ture temperature
Allowable operating -10 to +50 °C (but 0 to +50 °C when the RS-485 communication function is used)
temperature
Allowable storage temperature -10 to +60 °C
Humidity Allowable operating humidity 10 to 90 % RH (without condensation)
Flow rate Method (1) Front panel keys
setting (2) External voltage input (for models with an analog I/O function only)
(3) Loader communications *5
(4) RS-485 communications *6
Setting resolution *1
Input voltage range 0–5 or 1–5 V DC (selectable by function settings)
Input impedance: 1 MΩ ± 10 % (for models with an analog input/output function only)
Flow rate Display method 7-segment 8-digit LED (4 digits each for instantaneous flow rate and set flow rate display)
display Display resolution *1
Indication accuracy ±2 % FS ± 1 digit (at standard temperature and differential pressure)
Totaliza- Display range 0.00 to 999,999.99 L 0.0 to 9,999,999.9 L 0 to 99,999,999 L
tion Display resolution 0.01 L 0.1 L 1L
Totalization backup cycle (1) Every 5 L (1) Every 20 L (1) Every 50 L (1) Every 200 L
(2) 1 hour after the previous backup
Flow rate Output scale 0 to full-scale flow rate (scale can be changed)
output *4 Rated output voltage range 0–5 or 1–5 V DC (selectable by function settings)
Maximum output voltage 7 V DC max. (max. output when the flow rate exceeds the range)
Accuracy ±0.5 % FS (min. input impedance of connected device: 100 kΩ)
Overall output accuracy: Indication accuracy ±0.5 % FS
Event Number of outputs 2
output Output rating 30 V DC, 15 mA max. (non-isolated open collector output)
Totalizer pulse output width 100 ms ±10 % (when totalizer pulse output is selected)
Totalizer pulse output rate 0.01 L/pulse 0.1 L/pulse 1 L/pulse
External Number of inputs 2
switch Required circuit type Non-voltage contacts or open collector
input
Terminal voltage with 2.0 ±0.5 V
contacts OFF
Terminal current with Approx. 0.5 mA (current to contacts)
contacts ON
Allowable ON contact 250 Ω max.
resistance
Allowable OFF contact 100 kΩ min.
resistance
Allowable ON residual voltage 1.0 V max. (with open collector)
Allowable OFF leakage current 50 μA max. (with open collector)
Commu- Method (1) Loader communication *5
nications (2) RS-485 communication (3-wire system) *6
Transmission speed 2400, 4800, 9600, 19200, 38400 bps (only 19200 bps for loader communications)
Power Rated power 24 V DC, current consumption: 300 mA max.
Allowable supply voltage 22.8 to 25.2 V DC (ripple: 5 % max.)
Gas-contacting material Brass (Ni plated), stainless steel, Teflon, fluoroelastomer
Connection method Rc 1/8
Mounting orientation Display vertical, outlet above inlet
Weight Approx. 300 g
Accessories Mounting bracket (81446917-001), connector
Standards compliance EN 61326-1:2013, EN 61326-2-3:2013
During EMC testing, the reading or output may fluctuate by the equivalent of ±5 % FS.

2
*1 L/min (standard) indicates the volumetric flow rate per minute (L/min) converted to conditions of 20 °C and 101.325 kPa (1 atm).
The standard temperature can be changed to 0, 25, or 35 °C.
The controllable flow rate range varies depending on the gas type. See the tables below.
MPC9500 MPC0002
Model
Control flow rate Setting and display Control flow rate Setting and display
range resolution range resolution
Gas type
L/min (standard) L/min (standard) L/min (standard) L/min (standard)
Air/nitrogen 0.020 to 0.500 0.002 0.08 to 2.00 0.01
Argon 0.020 to 0.500 0.002 0.08 to 2.00 0.01
Carbon dioxide 0.012 to 0.300 0.001 0.040 to 1.200 0.005

MPC0005 MPC0020
Model
Control flow rate Setting and display Control flow rate Setting and display
range resolution range resolution
Gas type
L/min (standard) L/min (standard) L/min (standard) L/min (standard)
Air/nitrogen 0.10 to 5.00 0.02 0.4 to 20.0 0.1
Argon 0.10 to 5.00 0.02 0.4 to 20.0 0.1
Carbon dioxide 0.06 to 3.00 0.01 0.3 to 16.0 0.1

*2 The differential pressure required for obtaining the full-scale flow rate (condition: outlet pressure = 0.0 MPa [gauge]).
*3 Operation is possible at less than the required differential pressure. However, the flow rate range narrows.
Please see the graphs of the relationship between differential pressure and flow rate when the valve is open fully (next page).
*4 This function is available only for models with an analog input/output function.
*5 The MLP200 Loader Package for the MPC series is required (sold separately).
*6 This function is available only for models with the RS-485 communication function.

3
Relationship between Differential Pressure and Flow Rate When the Valve Is Open Fully (for Air)
MPC9500 MPC0002/0005
(1) (1)
1.0 (2) 8 (2)

(3)

Flow rate [L/min (standard)]

Flow rate [L/min (standard)] 0.8 (3)
6
(4)
0.6 (4)
4
0.4

2
0.2

0.0 0
0 10 20 30 40 50 60 0 20 40 60 80 100 120
Differential pressure [kPa] Differential pressure [kPa]

MPC0020
(1) (2)
30
(3) Note: Outlet pressure conditions
(1) 150 kPa(gauge)
25
Flow rate [L/min (standard)]

(4)
(2) 50 kPa(gauge)
(3) 0 kPa(gauge)
20 (4) -50 kPa(gauge)

15

10

0
0 40 80 120 160 200 240

Differential pressure [kPa]

• For an output pressure not shown on the graphs above, calculate the flow rate with one of the formulas below.
(1) When P2 ÷ P1 > 0.53, P1: inlet absolute pressure [kPa (abs)]
Q=C1 (P1-P2)P2 P2: outlet absolute pressure [kPa(abs)]
(2) When P2 ÷ P1 ≤ 0.53, (absolute pressure = gauge pressure +101.3 kPa)
Q=C2 · P1 Q: flow rate [L/min (standard)]
C1, C2: constant for the model
MPC9500: C1= 0.01054, C2=0.00526
MPC0002: C1= 0.05971, C2=0.02981
MPC0005: C1= 0.05971, C2=0.02981
MPC0020: C1= 0.16740, C2=0.08357

Example: For MPC0020, if inlet pressure = 120 kPa (gauge) and outlet pressure = 80 kPa (gauge):
P1=221.3 kPa(abs), P2=181.3 kPa(abs) → P2/P1=0.819
Q= 0.1674× (221.3-181.3)×181.3
=14.3 [L/min(standard)]

• For a gas other than air, use the formula below for conversion.
Flow rate = air flow rate ÷ specific gravity of the desired gas

Example) For MPC0020, if CO2 inlet pressure = 100 kPa (gauge) and outlet pressure = 0 kPa (gauge)
16.8 L/min(standard)÷ 1.53 = 13.6 L/min(standard)

Specific gravity of standard compatible gases (air = 1.0)

Argon = 1.38
Carbon dioxide (CO2) = 1.53

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Wiring Connectors
●● Connector specifications
Model No.: MCVW1.5 / 9-STF-3.5 (Phoenix Contact GmbH & Co.)
Wire type: Solid or stranded
Compatible wire: 0.08 to 1.5 mm 2 (28 to 16 AWG)
Exposed wire: 7 mm

7 mm

Screwdriver: Tip size 2.5 × 0.4 mm (flat tip)

●● Connector signal table

Pin No. Signal name Description Notes
1 POWER (24 V) Power + (24 V DC)
2 POWER GND Power ground
3 EV1 Event output 1 Open collector non-isolated output
4 EV2 Event output 2
5 DI1 External switch input 1 Open/ground switchover input
6 DI2 External switch input 2
7 (1) AI (1) Analog setting voltage input (1) For models with an analog input/output function
(2) DA (2) RS-485 communication DA (0–5 V or 1–5 V)
8 (1) AO Analog flow rate voltage output (2) For models with RS-485 communication
(2) DB (2) RS-485 DB
9 SIGNAL GND Signal ground Common terminal for input and output signals
Connected to the supply power ground inside this device.

●● Wiring example

Internal circuit
24 V DC
− + POWER (24 V) 1 +

POWER GND 2 −
EV1 3
Event output 1
EV2 4
Event output 2
DI1 5
(Output common)
DI2 6

AI / DA 7
Analog setting voltage input: DA
AO / DB 8
Analog flow rate voltage output: DB
SIGNAL GND 9
Analog input/output voltage common: SG

• Power source
24 V DC
−  + 1 POWER(24 V)

2 POWER GND

• Event output
Load 3 Event output 1

Load 4 Event output 2

+ −
9 SIGNAL GND

Handling Precautions
• Take care that the event output does not exceed the output rating of this device. In addition, when driving a relay, use
a relay with a built-in diode for coil surge absorption. Failure to do so may cause device failure.
• The power supply circuit and I/O circuit are not isolated.
Therefore, ensure that the power supply is isolated from the power supply of external devices. If this device and
external devices share a common power supply, faulty operation or device failure may result.

5
 • External switch input
5 External switch input 1

6 External switch input 2

9 SIGNAL GND

Handling Precautions
• When switching by relay, use an appropriate relay intended for microcurrent use (with gold contacts). Failure to do so
may cause faulty contact, resulting in malfunction.

• Analog input/output (for models so equipped)

0–5 or 1–5 V + 7 Analog setting voltage input
input −
8 Analog flow rate voltage output
0–5 or 1–5 V +
output − 9 SIGNAL GND

Handling Precautions
• Do not apply a negative voltage or a voltage exceeding 5 V to the analog setting voltage input terminal. Doing so may
cause malfunction or device failure.

• RS-485 communication (for models with RS-485 communication)

DA 7 DA

DB 8 DB

SG 9 SIGNAL GND

Model Selection Table

Basic model No.

Flow rate range

Type

Flow path material

Connection method

Gas type

(Reserved)

Optional function 1

Optional function 2

Optional function 3

Optional function 4

Appendix

Description

MPC Panel mount mass flow controller

9500 0.020–0.500 L/min (standard) *1
0002 0.08–2.00 L/min (standard) *1
0005 0.10–5.00 L/min (standard) *1
0020 0.4–20.0 L/min (standard) *1
B With an integrated display
B Brass
R Rc 1/8
N Air/nitrogen *2
0 -
0 No optional functions
1 With analog input/output
(without RS-485 communications)
2 With RS-485 communications
(without analog input/output)
0 No optional functions
0 No optional functions
0 No optional functions
D With inspection report
Y With traceability certification
0 Product version

*1 L/min (standard) indicates the volumetric flow rate per minute (L/min) converted to conditions of 20 °C and 101.325 kPa (1 atm).
The standard temperature can be changed to 0, 25, or 35 °C.
*2 This controller is set initially at the factory for air/nitrogen use. It can also be used for argon or carbon dioxide gases by changing
the settings.

6
External Dimensions
(Unit: mm)
9

Connector (included)

Mounting bracket (included)

2 61 12.7 44.8
Connection port (OUT)
48 Loader jack 3.5

2- H
No.1

EX
14
PV

9.5
10
44.8
48

SP

DISP

12
L OK SP1 SP2 SP3 EV1 EV2

ENT
2-Rc1/8

No.9
13.5 10 Connection port (IN)

Panel thickness: 2 to 7

• Panel cutout

Vertical gang-mounting
+0.5
0
(48×N -3)

45 +0.5
0 For horizontal gang-mounting

20 or more 45 +0.5
0
(48×N -3) +0.5
0
45 +0.5

45 +0.5

Individual mounting
0

0
20 or more

(N represents the number of

mounted devices)

7
 Please read “Terms and Conditions” from the following URL
before ordering and use.
http://www.azbil.com/products/factory/order.html
Specifications are subject to change without notice.

1-12-2 Kawana, Fujisawa

Kanagawa 251-8522 Japan
http://www.azbil.com/ 1st edition: Nov. 2017

No part of this publication may be reproduced or duplicated

8 without the prior written permission of Azbil Corporation.
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