Artificial MEMS Flow Sensor Inspired by Biological Cilia in Cochlea

Abstract Methodology
Artificial MEMS flow sensors inspired by biological cilia in 1) Modelling and Simulation of MEMS Sensor
cochlea are a new type of sensor technology that has the • Computational Fluid Dynamics Modelling
potential to revolutionize biomedical engineering. These • Finite Element Analysis
sensors are based on the same principles as the cilia found in
the inner ear, which detect sound waves and convert them 2) Design and Fabrication of MEMS Sensor
into electrical signals. The MEMS flow sensor uses a similar • Material Deposition on Silicon wafer
mechanism to detect fluid flow and convert it into an • Mask layer deposition
electrical signal. By leveraging this principle, researchers can • Etching of photoresist
create more accurate and reliable sensors that can be used in • Sacrificial layer stripping
a wide range of applications.

Introduction
Evolving over time, hair-like cells called “stereocilia” have
acted as the biological flow sensors. They are found in fish,
crickets, spiders, and even in our inner ear cochlea. They have
developed excellent resolution and sensitivity in flow sensing
by a process called mechanotransduction by which mechanical
forces are converted into electrical signals. This process is
useful for many physiological functions, including balance,
muscle contraction, cell growth and differentiation, and the
response of cells to mechanical forces. The majority of
currently available human-engineered sensors fall short of
Fig 2: Schematic of microfabrication technique for basic sensor[2]
the sensing capabilities attained by biological hair cell
sensors.
MEMS-based flow sensors offer a number of advantages over Expected Conclusion
traditional mechanical sensors. They are more accurate, The design of the MEMS flow sensor is presented, along with
capable of measuring and responding to minute changes in the results of finite element analysis and experimental tests.
the flow of fluids, and they can be made smaller than The results demonstrate the feasibility of the proposed MEMS
traditional mechanical sensors. This makes them ideal for flow sensor, and its potential for use in applications such as
applications that require a more precise and accurate flow sensing, drug delivery and medical diagnostics. , MEMS-
measurement of fluid flow. In addition, MEMS-based sensors based flow sensors can be used to measure and respond to
are more durable than traditional mechanical sensors, changes in the flow of blood, which is essential for the
meaning they can last longer and require less maintenance. diagnosis and treatment of a variety of medical conditions.
The primary working principle of the MEMS sensor to convert
flow into electrical signals is the graded height pillars which
respond to any disturbances in the flow resulting in tensile Time Planning
bending of the pillars, which excites the piezoelectric material Month Activity
to produce a electric signal which is the voltage output. (see
Fig 1) February Literature review
March Modelling & Analysis
April Designing & Microfabrication
May Prototype Testing
June Experimental Verifications

Fig 1: (a) Morphology of stereocilia in the bullfrog(4–8 μm) (b)
Schematic of the deflection of a column of stereocilia during
stimulation. (c) A transmission electron micrograph showing the tip
link between two adjacent stereocilia. (d) Tension induced in the tip
link opens ion channels.
Problem Statement
The purpose of this project is to design and fabricate a
microelectromechanical system (MEMS) flow sensor that
achieve high voltage sensitivity and low velocity detection of
flow of liquids by closely imitating the structure and function
of biological stereocilia. The proposed flow sensor will have
extensive applications in microfluidics, biomedicine and
automotive engineering.
References
1) Asadnia, M., Kottapalli, A., Karavitaki, K. et al. From
Biological Cilia to Artificial Flow Sensors: Biomimetic Soft
Polymer Nanosensors with High Sensing Performance. Sci
Rep 6, 32955 (2016). https://doi.org/10.1038/srep32955
2) Michelen, Abe. “Detailing MEMS Fabrication Techniques.”
Electronics360, 7 May 2017,
electronics360.globalspec.com/article/8638/detailing-mems-
fabrication-techniques.
Student: Shubhankar Shanware (S4868153)
Supervisor: Dr. A.G.P. Kottapalli, Faculty of Science and
Engineering, RUG