Low Vacuum

Pump

Oil Rotary Vacuum Pump　VD / VS / PVD / PKS series

The oil rotary vacuum pumps are the leading vacuum pumps with high pumping efficiency and consistent
pumping performance. They can operate under the pressure between atmospheric pressure to 10Pa or lower.
A wide variety of product lineup is available for various kinds of operation.

VD40C

PKS-070B VS650A

Selection Guide

Model VD Ver.C VD
（Small type） PVD VS650A VS PKS

Double stage rotary Double stage rotary Double stage rotary Single stage rotary Single stage rotary
Structure Rotary plunger type
vane type vane type vane type vane type vane type
Driving type Direct Direct Belt Belt Direct Belt
Air cooled Air cooled
Cooling method Air cooled Air cooled Air cooled Water cooled
/Water cooled /Water cooled
Oil circulation system Forced Forced Differential pressure Differential pressure Forced Differential pressure
Oil-backflow Shutting off the oil Shutting off the oil Oil-backflow Shutting off the oil Shutting off the oil
Optional
prevention device circulation circulation prevention device circulation circulation

Note　IE3 motor is higher efficient than the conventional motor so the striking current tends to be higher. For the bigger pumps with 5.5kW motor or more,
there is possibility that pumps don't start running due to insufficient power voltage in case that power capacity is low. Please confirm the power
capacity before using bigger pump.
Low Vacuum Pump

Rotary Vane type Explanation image Rotary Plunger type Explanation image D e t a il o f f e a t u r e s

What is gas ballast…?

A vane is assembled in the rotor inside the cylinder. The
vane compresses and exhausts the gas inside the cylinder.
The oil lubricates and cools down the bearing part. It also
has a sealing function to secure air tightness of the vane
and the cylinder.
Excellent in compression efficiency and low vibration.
These are the most frequently used vacuum pumps for
industrial use.
The slide vane sliding on the vane guide part performs
piston motion by rotation of eccentric rotor, thereby
volume of the space surrounded by slide vane and
cylinder is varied and exhausted.
Robust and comparatively strong for foreign materials.
Workable for long term with appropriate regular
maintenance.
Gas ballast is a countermeasure when handling condensable
gas such as water vapor, etc. Condensable gas is
compressed through compression process inside oil vacuum
pump, condensed and changed to liquid which mixes
with vacuum pump oil. It is left inside in the case of dry
vacuum pump. In order to prevent this, it is possible to let
condensable gas exhaust without changing from air state
to liquid state by opening gas ballast valve and introducing
certain amount of air or nitrogen to the working chamber
inside pump.
What is helium tight type…?
It is one of optional selections of oil rotation vacuum pump.
This type is tested by the helium leak detector and has a
leak tightness specification with 1x10-6 (Pa･m3/s) or below.
 Oil Mist Trap　TM / TMX series

Features

The trap to eliminate oil smoke exhausted from oil rotary vacuum
pump.
Exhaust sound is reduced especially at the time of repeat operation
between ultimate pressure and atmospheric pressure.
Cartridge type filter makes filter replacement easy.

Specifications

Weight Dimensions
Model*1 Connecting flange(pump side / outlet side) Material For (pump model) Remarks*2
[kg] [mm]
TMX-1 Special (with adapter ) / G1 x 1/2 (with screwed cover) 1.1 dia. 106 x 193 VD151, VD201, PVD-180, PVD-360
TM201 VF40 / G1 x 1/2 (with screwed cover) 8.5 dia. 165.2 x 280 VD30C / VD301, VD40C / VD401 Low load type
VD30C / VD301, VD40C / VD401 High load type
TM401 VF40 / G1 x 1/2 (with screwed cover) 10 dia. 165.2 x 350
VD60C / VD601, VD90C / VD901 Low load type
VF40 (with adapter) / G2 (with screwed cover) dia. 285 x 520 VD60C / VD601, VD90C / VD901 High load type
TM-2 9.3
VG50 / G2 (with screwed cover) dia. 285 x 450 PKS-016
VF40 (with adapter) / VG50 dia. 285 x 525 VD60C / VD601, VD90C / VD901 High load type
TM-2F 9.8
VG50 / VG50 dia. 285 x 455 PKS-016
Main unit :soft steel
VF50 / G3 (with screwed cover) dia. 362 x 635 VS1501
TM-3 17 (SPCC)
VG80 / G3 (with screwed cover) dia. 362 x 735 PKS-030
Filter :glass wool
VF50 / VG80 dia. 362 x 600 VS1501
TM-3F 18
VG80 / VG80 dia. 362 x 700 PKS-030
VF50 / G4 (with screwed cover) dia. 442 x 945 VS2401
TM-4 35
VG100 / G4 (with screwed cover) dia. 442 x 1160 PKS-070
VF50 / VG100 dia. 442 x 900 VS2401
TM-4F 36
VG100 / VG100 dia. 442 x 1120 PKS-070
VF50 / VG100 dia. 450 x 1487 VS2401 High load type
TM-4S 64
VG100 / VG100 dia. 450 x 1387 PKS-070 High load type

*1　F: Flange connection type instead of screwed cover.　

*2　Select the high load when the pump repeatedly runs from atmosphere to vacuum in a short period or at the pressure higher than 10,000 Pa
(100mbar / 75 Torr) for a long period .

Oil Mist Trap　Oil Return Mechanism

Oil mist trap
Oil mist trap

Needle valve Features

Check valve

Oil mist
Oil mist Oil return from the oil mist trap into the oil rotary vacuum pump.
Four kinds of mechanisms are available for different working pressure
Pump
and operating situations.
Pump
Recovery Effect on ultimate
Details Recommended pressure range
method pressure
Oil return mechanism A Oil return mechanism B Oil return Oil returns into the pump case through
Semi-auto Low
mechanism A the check valve when the pump stops.
Oil mist trap Oil mist trap
Oil return Oil returns from the gas ballast port
Manual Some
Needle valve mechanism B through the needle valve.

Oil return Oil returns from the inlet port side

Manual High
mechanism C through the needle valve.
Oil mist Oil mist
Floating-type
oil return Oil return Oil collected in the floating type oil
Auto Low
Pump Pump mechanism D return returns from the inlet port side.
* Oil return mechanism is not workable with the oil mist Atmospheric [Pa] 1 10 102 1000 10000
trap TMX-1. pressure [Torr / mbar] 0.01 0.1 1 10 100
The TMX-1 has a check valve inside like the oil return
Continuously-workable pressure range
mechanism A.
Repeatable working pressure range
Oil return mechanism C Oil return mechanism D

ULVAC, Inc. Components Division www.ulvac.co.jp/en

Overseas Sales in Japan TEL +81-467-89-2261
USA : ULVAC Technologies, Inc. TEL +1-978-686-7550 PHILIPPINES : ULVAC SINGAPORE PTE LTD Philippines Branch TEL +63-46-437-7700
GERMANY : ULVAC GmbH TEL +49-89-960909-0 VIETNAM : ULVAC SINGAPORE PTE LTD Vietnam Representative Office TEL +84-8-6255-6762
CHINA : ULVAC (SHANGHAI) Trading Co.,Ltd. TEL (86)21-6127-6610 INDONESIA : ULVAC SINGAPORE PTE LTD Indonesia Representative Office TEL +62-21-8990-5070
TAIWAN : ULVAC TAIWAN, Inc. TEL +886-3-579-5688 THAILAND : ULVAC (THAILAND) LTD TEL +66-2-7388883
KOREA : ULVAC KOREA, Ltd. TEL +82-31-683-2922 MALAYSIA : ULVAC MALAYSIA SDN. BHD. TEL +60-3-5121-4700
SINGAPORE : ULVAC SINGAPORE PTE LTD TEL +65-6542-2700 INDIA : ULVAC, Inc., India Branch TEL +91-40-27007006
This catalog is subject to change without notice.
This catalog is published in order to sell this product in overseas. Please see Japanese catalog when purchasing in Japan.
1054E/2018052000SP
 Double Stage Rotary Vane type　VD series Ver.C

Features

With high efficiency (IE3) full multi-voltage motor developed by

ULVAC. For various kinds of application.
Single kind high efficient (IE3) full multi-voltage covers wide range voltage
from 200 to 240V / 380 to 460V.
Forced oil circulation makes pumping performance stable even near
atmospheric pressure. Suitable for repetitive and consecutive operation
between atmospheric and vacuum.
Various specification A, B and H are available in addition to standard
model.

Specifications
Model VD30C VD40C VD60C VD90C
m3/hr 30 40 60 90
50Hz L/min 500 670 1000 1500
cfm 17.66 23.54 35.31 52.97
Designed pumping speed
m3/hr 36 48 72 108
60Hz L/min 600 800 1200 1800
cfm 21.29 28.25 42.38 63.57
Pa 0.67
Gas ballast port
Torr 5×10-3
close
mbar 6.7×10-3
Ultimate pressure *1
Pa 2
Gas ballast port
Torr 1.5×10-2
open
mbar 2.0×10-2
Pa 1300 1360 1320 970
Gas ballast
50Hz Torr 9.8 10.2 9.9 7.3
port open
Maximum water mbar 13.0 13.6 13.2 9.7
vapor tolerance Pa 1400 1760 2800 2820 *2
Gas ballast
60Hz Torr 10.5 13.2 21.0 21.2
port open
mbar 14.0 17.6 28.0 28.2
Maximum water Gas ballast 50Hz g/h 190 270 430 480
vapor capacity port open 60Hz g/h 250 410 1100 1650 *2
Type Totally enclosed fan cooled 3 phase induction motor
Energy efficiency class IE3
kw (number of poles) 1.5(4) 2.2(4) 3.7(4)
Motor *3
HP (number of poles) 2 (4) 2.95(4) 4.96(4)
50Hz 200V～240V/380V～415V
Voltage *4
60Hz 200V～240V/380V～460V
Oil ULVOIL R-7
Oil capacity　　L 1.0 〜 2.5 2.5 〜 4.0
Cooling method Air cooled
Inlet VG40 equivalency / KF40 (optional) VG50 equivalency / KF50 (optional)
Outlet VG40 equivalency / KF40 (optional) VG40 equivalency / KF40 (optional)
Weight　　kg 58 60 90 133
External dimensions WxDxH　　mm 210 x 660 x 324 210 x 680 x 324 280 x 761 x 371 280 x 831 x 371
Applicable standard CE / cTUVus
Standard accessory A dose of oil, a set of manual
TM201: for low load operation TM401: for low load operation
Recommended oil mist trap (Optional) *5
TM401: for high load operation TM-2: for high load operation

Oil mist trap, other oil types, gas ballast valve, ISO flange, explosion-resistant motor,
Options
special type for special application (spec A, B and H)

*1　Measured with a Pirani gauge. (Apprx. 6.7X10-2Pa when measured with

a McLeod vacuum gauge.)
*2　VD90C is not allowed the continuous operation in the inlet pressure at P u m p i n g S p e e d C u r ve s
1,000Pa or more.
VD90C maximum water vapor tolerance / maximum water vapor
capacity (in the continuous operation) : 1000Pa / 600g/h
*3　Increased safety explosion-resistant motor and pressure proof
explosion-resistant motor are available as an option.
*4　Factory shipment setup is 200V class Δ delta connection.
Please change it to Y connection if working voltage is 400V class.
*5　High load operation means repeat pumping down between
atmospheric pressure and vacuum in short term or long time operation
at 10,000 Pa (75 Torr) or higher.

Applications

Evaporation and sputtering

Vacuum filling and gas exchange
Vacuum adsorption , transport and casting
Vacuum molding
Vacuum drying and freeze drying
Automated leak testing , etc

2
 Option
Independent oil
Specification Model Main Seal Material He Leak Test
filling (oiler)
Standard VD30C, VD40C, VD60C, VD90C Fluorine Rubber n/a n/a
Spec. A VD30C-A, VD40C-A Nitrile Rubber n/a n/a
Spec. B VD30C-B, VD40C-B Silicon Rubber - n/a
Spec. H VD30C-H, VD40C-H, VD60C-H, VD90C-H Fluorine Rubber - -

Model Explanation

E.g.) VD30C-02211-19030022
30m3/h (50Hz) / Standard / FKM / R-7 / Totally enclosed external fan motor / Multiple voltage / ISO-KF /
Without gas ballast valve / Without He leak test / English Instruction manual / English Warning label

Model Rev. Naming Pump head option External option

VD30 C - - 0 2 2 1 1 - 1 9 0 3 0 0 2 2
① ② ③ ④ ⑤ ⑥ ⑦ ⑧ ⑨ ⑩ ⑪ ⑫ ⑬

Model ①Structure ⑥Motor kind *2 ⑩Gas ballast valve

VD30：30m3/h（50Hz） 　0 : Standard 　1：Totally enclosed external 　0：None【std】
VD40：40m3/h（50Hz） 　1 : Independent oil 　　　fan motor【std】 　1：Manual gas ballast valve
VD60：60m3/h（50Hz） filling (oiler) 　2：Explosion-protection(indoor) ⑪He leak test
VD90：90m3/h（50Hz） ②Seal 　4：Flame-proof (indoor) 　0 : Without【std】
　1 : NBR ⑦Motor voltage 　1 : With (H type only)
Rev. 　2 : FKM【std】 　9：Multiple voltage【std】 ⑫Instruction manual
C：Current Rev. 　5 : Silicon＋NBR 　A：Other (specified voltage) 　1 : Japanese
③Oil ⑧Motor frequency 　2 : English
Naming *1
　1 : Mineral oil(R-4) 　0：Not select【std】 ⑬Warning label
None　：　Standard
　2：Mineral oil(R-7)【std】 　1：50Hz 　1 ： Japanese
　　A　：　Spec. A
　6：Fluorine oil (J60) 　2：60Hz 　2 ： English
　　B　：　Spec. B
④Vane ⑨Inlet/Outlet flange 　3 ： Simplified Chinese
　　H　：　Spec. H
　1 : Resin【std】 　3：Inlet/Outlet ISO-KF 　4 ： Traditional Chinese
⑤Exhaust valve plate 　4：Inlet/Outlet JIS【std】 　5 ： Korean
　1 : Stainless【std】 　7：Inlet ISO-KF
＊１　There is not any naming for standard type. A, B or H spec is selectable as option. Options for pump head and accessories are different
depending on the type.
＊２　Multiple voltage motor is not available in the case of explosion-protection and flame-proof motor. Voltage needs to be specified.

Dimensions

VD-C

Oil mist trap

（option）
Gas ballast port G3/8 Outlet port　VG40
Tap depth 14
Inlet port
（Q）
Oil supply port　G1
Tap depth 14
W1

(TM-2）
H5
W

(TM401）

A C
Totally enclosed
H4

fan cooled motor

L1
（TM201）
H3
H
H2

H1

R P
O
N Oil drain valve　Rc1/2
W2
M
L

ＴＹＰＥ Ａ Ｃ Ｈ Ｈ１ Ｈ２ Ｈ３ Ｈ４ Ｈ５ Ｌ Ｌ１ Ｍ Ｎ Ｏ Ｐ Ｑ Ｒ Ｗ Ｗ１ Ｗ２
ＶＤ３０Ｃ 73 210 324 281 287 561 631 － 660 363 395 365 150 ４－φ１１ 128 214 107 210
ＶＧ４０
ＶＤ４０Ｃ 73 230 324 281 287 561 631 － 680 383 395 365 150 ４－φ１１ 128 214 107 210
ＶＤ６０Ｃ 88 255 371 328 324 － 678 848 761 435 390 365 230 ４－φ１１ 92 264 132 280
ＶＧ５０
ＶＤ９０Ｃ 88 306 371 328 348 － 678 848 831 486 570 540 ２００／２３０ ８－φ１１ 182 264 132 280

3
 Small Size Double Stage Rotary Vane type　VD series

Features
Single kind high efficient (IE3) full multi-voltage covers wide range voltage
from 200 to 240V / 380 to 460V.
Forced oil circulation makes pumping performance stable even near
atmospheric pressure.
Suitable for repetitive and consecutive operation between atmospheric
and vacuum.

Specifications
Model VD151 VD201
m3/hr 14.4 20.2
50Hz L/min 240 336
cfm 8.47 11.89
Designed pumping speed
m3/hr 17.3 24.2
60Hz L/min 288 403
cfm 10.18 14.24
Pa 0.67
Gas ballast port
Torr 5×10-3
close
mbar 6.7×10-3
Ultimate pressure *1
Pa 6.7
Gas ballast port
Torr 5×10-2
open
mbar 6.7×10-2
Pa 500 1300
Maximum water vapor tolerance Gas ballast port Torr 3.8 9.8
open mbar 5.0 13.0
Maximum water vapor capacity g/h 40 138
Type Totally enclosed fan cooled 3 phase induction motor
Energy efficiency class IE1 *2
IE3
kw (number of poles) 0.55 (4) 0.75 (4)
Motor
HP (number of poles) 0.75 (4) 1 (4)
50Hz 200V～240V/380V～415V
Voltage *3
60Hz 200V～240V/380V～460V
Oil ULVOIL R-7
Oil capacity　L 0.7 〜 1.1
Cooling method Air cooled
Inlet KF25 equivalency
Outlet G1
Weight　kg 29 34.5
External dimensions WxDxH　mm 170 x 513 x 240 170 x 536 x 265
Applicable standard CE
Standard accessory A dose of oil, a set of manual
Recommended oil mist trap (Optional) TMX-1 + adapter flange
Options Oil mist trap

*1　Measured with a Pirani gauge. (Apprx. 6.7X10 Pa when measured with a McLeod vacuum gauge.)
-2

*2　The energy efficiency regulation is not applicable for this motor.

*3　Factory shipment setup is 200V class Δ delta connection. Please change it to Y connection if working voltage is 400V class.

P u m p i n g S p e e d C u r ve s

Applications
Vacuum filling and gas exchange
Vacuum adsorption , transport and casting
Vacuum molding VD201 50Hz

Vacuum drying and freeze drying

4
Small Size Double Stage Rotary Vane type　PVD series

Features

Legacy and small size double stage oil rotary vane pump.
Quiet and low speed rotation.
Enclosed belt cover for safety.

Specifications
Model *1
PVD-180 PVD-360
m3/hr 9 19
50Hz L/min 155 310
cfm 5.3 11.2
Designed pumping speed
m3/hr 11 22
60Hz L/min 186 372
cfm 6.5 13
Pa 0.67
Gas ballast port
Torr 5.0×10-3
close
mbar 6.7×10-2
Ultimate pressure *2
Pa 6.7
Gas ballast port
Torr 5×10-2
open
mbar 6.7×10-2
Type Totally enclosed fan cooled 3 phase induction motor
Energy efficiency class IE1*3 IE3
kw (number of poles) 0.4 (4) 0.75 (4)
Motor
HP (number of poles) 0.54 (4) 1 (4)
50Hz 200V
Voltage
60Hz 200V / 220V 200V / 220V / 230V
Oil ULVOIL R-7
Oil capacity　　L 0.3 0.5
Cooling method Air cooled
Inlet dia.28×dia.19 dia.34×dia.27
Outlet G3/4 G1
Weight　　Kg 33.5 43
External dimensions WxDxH　mm 265 x 470 x 321 303 x 488 x 321
Applicable standard -
Standard accessory A dose of oil, a set of manual
Recommended oil mist trap (Optional) TMX-1 + adapter flange
Oil mist trap, other oil types, explosion-resistant motor,
Options
special type for special application (spec B and H)

*1　PVD-B models (with oil back-flow prevention mechanism) are designated as PVD-180-B for the PVD-180 model and PVD-360-B for the PVD-360 models.
*2　Measured with a Pirani gauge. (Apprx. 6.7X10-2Pa when measured with a McLeod vacuum gauge.)
*3　The energy efficiency regulation is not applicable for this motor.

P u m p i n g S p e e d C u r ve s

Applications
Vacuum filling and gas exchange
Vacuum adsorption , transport and casting
Vacuum molding
Vacuum drying and freeze drying

5
 Small Size Double Stage Rotary Vane type　VD / PVD series

Dimensions

VD

A Inlet port KF25

B

Outlet
（Ｊ）

C
Oil supply port G3/4

Oil mist trap

TMX-1
（Option）

Totally enclosed
fan cooled motor
H4
H1
H

H2

H3
G E D
F
L

Drain valve Rc3/8

ＴＹＰＥ Ａ Ｂ Ｃ Ｄ Ｅ Ｆ Ｇ Ｈ Ｈ１ Ｈ２ Ｈ３ Ｈ４ Ｌ Ｗ
ＶＤ１５１ 238 154 33 260 120 130 65 － 240 213 228 396 513 170
ＶＤ２０１ 258 143 31.5 260 136 130 65 271 265 254 233 439 535.5 181

PVD

C D

B A
G

W1

W2
W

Oil mist trap

L TMX-1（Option）
Solenoid valve
Outlet Inlet port
（B-type） Outlet pipe screw(J)
（Oil supply port） O･D（M）／ I･D（N）
Screw
（P）

Totally enclosed Oil drain port　M12

H4

fan cooled motor

H2

H1
H

H3

F E
４－φ12 L2

ＴＹＰＥ Ａ Ｂ Ｃ Ｄ Ｅ Ｆ Ｇ Ｈ Ｈ１ Ｈ２ Ｈ３ Ｊ Ｌ Ｌ２ Ｍ Ｎ Ｐ Ｗ Ｗ１ Ｗ２
ＰＶＤ－１８０ 65 90 420 15 150 15 27 321 315 － 177 Ｇ３／４ 470 450 φ２８ φ１９ Ｇ３／４ 265 65 180
ＰＶＤ－１８０Ｂ 65 90 420 15 150 15 27 321 315 321 177 Ｇ３／４ 470 450 φ２８ φ１９ Ｇ３／４ 265 65 180
ＰＶＤ－３６０ 85 90 440 15 190 15 30.5 321 315 － 195.5 Ｇ１ 488 470 φ３４ φ２７ Ｇ１ 303.5 80 220
ＰＶＤ－３６０Ｂ 85 90 440 15 190 15 30.5 321 315 327 195.5 Ｇ１ 488 470 φ３４ φ２７ Ｇ１ 303.5 80 220

6
Single Stage Oil Rotary Vane type　VS series

Features

Lower ultimate pressure even it is single stage oil rotary vane pump.
Lower vibration structure compared with Rotary plunger model. Suitable
when installing at upper floor.
Forced oil circulation makes pumping performance stable even near
atmospheric pressure. Suitable for repetitive and consecutive operation
between atmospheric and vacuum.

Specifications
Model VS1501 VS2401
m3/hr 150 240
50Hz L/min 2500 4000
cfm 88.2 141.2
Designed pumping speed
m3/hr 180 288
60Hz L/min 3000 4800
cfm 105.9 169.4
Pa 5.3
Gas ballast port
Torr 3.9×10-2
close
mbar 5.3×10-2
Ultimate pressure *1
Pa 80
Gas ballast port
Torr 0.6
open
mbar 0.8
Type Totally enclosed fan cooled 3 phase induction motor
Energy efficiency class IE3
kw (number of poles) 5.5 (4) 7.5 (4)
HP (number of poles) 7.5 (4) 10 (4)
Motor
50Hz 200V～240V/380V～415V
Voltage
60Hz 200V～240V/380V～460V
Capacity 50Hz 40 55
(kVA) 60Hz 35 50
Oil ULVOIL R-7
Oil capacity　L 8.0 ～ 10.5
Cooling method Water cooled
Inlet VG80 equivalency
Outlet VG50 equivalency
Weight　kg 232 271
External dimensions WxDxH　mm 330×941×460 333×1061×460
Applicable standard -
Standard accessory A dose of oil, a set of manual
Recommended oil mist trap (Optional) TM-2
（F）+ adapter flange TM-3
（F）+ adapter flange
Oil mist trap, other oil types, gas ballast valve,
Options *2
ISO flange,explosion-resistant motor,
special type for special application (spec H and R)

*1　Measured with a Pirani gauge. (Apprx. 5.3X10-1Pa when measured with a McLeod vacuum gauge.)

P u m p i n g S p e e d C u r ve s

Applications 300
Gas Ballast Closed
Evaporation and sputtering Gas Ballast Open
250
Vacuum filling and gas exchange VS2401 60Hz

Vacuum adsorption , transport and casting

Pumping Speed [m3/hour]

200 VS2401 50Hz

Vacuum molding
Vacuum drying and freeze drying 150 VS1501 60Hz

Automated leak testing , etc

VS1501 50Hz

100

50

0
1 10 100 1000 10000 100000

Pressure [Pa]

7
 Single Stage Oil Rotary Vane type　VS650A / VS750A

Features

Large size and low vibration single stage oil rotary vane pump.
Selectable from air and water cooled type. Oil cooler is used for oil
temperature cooling for a air cooled model.
Equipped with a cartridge-type oil mist filter inside the oil tank.
Cleaning of the inside of the oil tank and replacement of the oil mist filter
are easy.

Specifications
Model VS650A-A VS650A-W VS750A-A VS750A-W
m3/h 650 750
50Hz L/min 10833 12500
cfm 383 441
Max. pumping speed
m3/h 750 n/a
60Hz L/min 12500 n/a
cfm 441 n/a
Pa 8
GP
Torr 6×10-2
close
mbar 8×10-2
Pa 70
GP1
Ultimate pressure *1
Torr 0.52
open
mbar 0.7
Pa 200
GP1･2
Torr 1.5
open
mbar 2.0
Pa 4500 2500 5500 2500
50Hz Torr 33.8 18.8 41.4 18.8
mbar 45 25 55 25
GP1 open
Pa 5500 2500 n/a
60Hz Torr 41.4 18.8 n/a
Max. water vapor mbar 55 25 n/a
tolerance *2 Pa 6000 3800 7500 4000
50Hz Torr 45.1 28.6 56.4 30.1
mbar 60 38 75 40
GP2 open
Pa 7500 4000 n/a
60Hz Torr 56.4 30.1 n/a
mbar 75 40 n/a
50Hz kg/h 17 11 24 13
GP1 open
Max. water vapor 60Hz kg/h 24 13 n/a
capacity *2 50Hz kg/h 26 15 34 19
GP2 open
60Hz kg/h 34 19 n/a
Type Totally enclosed external fan 3 phase AC motor
kw (poles) 22（4）
HP (poles) 29.5 (2)
Power 50Hz kW 8 11
Motor *3
consumption *4
60Hz kW 11 n/a
50Hz V 200V～240/380V～415 200V～240/380V～415
Voltage *5
60Hz V 200V～240/380V～460 n/a
50Hz kVA 130 200
Capacity
60Hz kVA 200 n/a
Oil ULVOIL R-7
Oil capacity　L 23～27 25～30 23～27 25～30
Cooling method Air cooled Water cooled Air cooled Water cooled
MPa － ≦ 0.5 － ≦ 0.5
Primary side pressure
psi － ≧ 72.5 － ≧ 72.5
Inlet/outlet differential MPa － ≧ 0.1 － ≧ 0.1
Cooling water pressure psi － ≧ 14.5 － ≧ 14.5
Capacity L/min － ≧ 3.0 － ≧ 3.0
℃ － 5～30 － 5～30
Temperature
F － 41～86 － 41～86
Inlet DN 100 ISO-K
Outlet DN 100 ISO-K
Weight　kg 806 800 802 796
External dimensions WxDxH　mm 1490×905×705 1490×841×705 1490×905×705 1490×841×705
Applicable standard －
Standard accessories Oil for one pump, 1 set of instruction manual
other oil types, flame-proof motor,
Options
specified voltage motor,JIS flange *6, gas ballast valve 2 (manual)

*1　Measured with a Pirani vacuum gauge.

（Approx. 0.8Pa when measured with a McLeod vacuum gauge.)
*2　Water vapor tolerance and capacity are measured under following P u m p i n g S p e e d C u r ve s
cooling water capacity. Cooling water temperature at inlet port is
26℃ (78.8F).
900
VS650A-W VS750A-W Gas Ballast Closed
Gas Ballast Valve 1 Opened
800
50Hz 3 L/min. 5 L/min. Gas Ballast Valve 1+2 Opened VS650 60Hz
GP1 open ( VS750 50Hz )
60Hz 5 L/min. - 700
VS650 50Hz
50Hz 3 L/min. 5 L/min. 600
GP1・2 open
Pumping Speed ［m3/h］

60Hz 5 L/min. -
500

*3　Increased safety explosion-resistant motor and pressure proof

400
explosion-resistant flange motor are available as option. However,
multiple voltage cannot be selected. 300
*4　At ultimate pressure
*5　Factory shipment setup is 200V class Δ delta connection. Please 200
change it to Y connection if working voltage is 400V class.
*6　Size to connect pipe changes when JIS flange is selected for inlet/ 100
outlet port.
0
1 10 100 1000 10000 100000
Pressure ［Pa］

8
 Model Explanation

E.g.) VS650A-W-02222-192211131
650m3/h (50Hz) [750m3/h (60Hz)] / totally enclosed external fan motor / multiple voltage / ISO-K flange
Water cooling / 1 gas ballast valve (manual) / Japanese & English Instruction manual / Japanese Warning label

Model Rev. Naming Pump head option External option

VS650 A - W - 0 2 2 2 2 - 1 9 2 1 1 1 1 3 1
① ② ③ ④ ⑤ ⑥ ⑦ ⑧ ⑨ ⑩ ⑪ ⑫ ⑬ ⑭

Model Naming
650：650m3/h（50Hz） ⑥Motor kind ⑪Oil filter
equal option ⑨
　 750m3/h（60Hz）　 　1 : Totally enclosed external fan motor 　 1 : With oil filter
A : Air cooling
750：750m3/h（50Hz） 　4 : Flame-proof (indoor) *1 *2 ⑫Back flow prevention valve
*1
W : Water cooling
⑦Motor voltage 　 1 : With spring
Rev. 　9 : Multiple voltage ⑬Instruction manual
①Structure
A : Current Rev. 　A : Other (specified voltage) 　3 : Japanese ＆ English
　0 : Standard
⑧Inlet/Outlet flange ⑭Warning label
②Seal
　2 : ISO-K flange 　1 : Japanese
　2 : FKM
　4 : JIS flange 　2 : English
③Oil
⑨Cooling method 　3 : Simplified　Chinese
　2 : Mineral oil(R-7)
　1 : Air cooling 　4 : Traditional 　Chinese
④Vane
　2 : Water cooling 　5 : Korean
　2 : Resin
⑩Gas ballast valve
⑤Exhaust valve vane
　1 : 1 gas ballast valve (Manual)
　2 : Stainless
　3 : 2 gas ballast valves (Manual)

＊1 VS750A is only 50Hz. It is impossible to run at 60Hz.

＊2 Explosion-resistant is available with only motor.
Not attached thermostat and electrical box in the case of selecting explosion-resistant motor.
＊3 Multiple voltage motor is not available with Explosion-resistant motor.

Explanation image

①
● ⑦
●
⑨
●
⑧
● 1. Inlet 10. Oil Filter
②
●
⑫
● 2. Anti Suckback Valve 11. Oil Level Gauge
⑤
● 3. Cylinder 12. Oil Mist Filter Elements
⑬
● ⑮
●
4. Rotor 13. Oil Return Valve
⑭
● ④
● 5. Vane 14. Oil Return Line
③
● 6. Oil Feed Line
⑪
● 15. Outlet
⑥
● ⑩
●
7. Gas Ballast
8. Exhaust Valve
9. Oil Tank

Dimensions

VS650A

Inlet port
DN 100 ISO-K Oil suppy plag G1
W

C
W1

Outlet port
DN100 ISO-K
A
B
H1
H

Water outlet G1/2

H2

（Water cooling type）

Water inlet G1/2 D E G F
（Water cooling type）
L Oil drain plug　Rc1

ＴＹＰＥ Ａ Ｂ Ｃ Ｄ Ｅ Ｆ Ｇ Ｈ Ｈ１ Ｈ２ Ｌ Ｗ Ｗ１
ＶＳ６５０/VS750 887 951 308 1170 127 386.5 257 774 705 505 1541 850 486.5

9
 Rotary Plunger type　PKS series

Features

PKS series models are extremely durable rotary plunger vacuum

pumps with very stable pumping .
Robust and long-life and low-speed-rotatation pump with less rotary
sliding parts. Materials in the pump is highly resistant to abrasion.
The high-efficiency (IE3) multi-voltage motor, fully developed by ULVAC.
The enclosed belt cover and the inspection hole to check the rotation
direction and belt tension in safe. (PKS-070B)

Specifications
Model PKS-016 PKS-030 PKS-070B *1

m /hr
3
96 180 420
Designed pumping speed L/min 1600 3000 7000
cfm 57 106 247
Pa 2.7
Gas ballast port close Torr 2×10-2
mbar 2.7×10-2
Ultimate pressure *2
Pa 30 170 300
Gas ballast port open Torr 0.2 1.3 2.3
mbar 0.3 1.7 3.0
Pa 650 900 6000
Maximum water vapor tolerance Gas ballast port open Torr 4.9 6.8 45.1
mbar 6.5 9.0 60.0
Maximum water vapor capacity Gas ballast port open g/h 5 7 12
Type Totally enclosed fan cooled 3 phase induction motor
Energy efficiency class IE3
kw (number of poles) 2.2(4) 3.7(4) 11(6)
HP (number of poles)
Motor
50Hz 200V～240V/380V～415V
Voltage
60Hz 200V～240V/380V～460V
Capacity 50Hz 65
10 15
(kVA) 60Hz 75
Oil ULVOIL R-7
Oil capacity　L 6.5 8 20
Cooling method Air cooled Water cooled
Inlet VG50 VG80 VG100
Outlet VF50 VF80 VF100
Weight　kg 225 380
（W/O moter） 900
（W/O moter）
External dimensions WxDxH　mm 587×884×572 721×675×973 971×983×1190
Applicable standard CE、cTUVus *3

Standard accessory A dose of oil, a set of manual

Recommended oil mist trap (Optional) TM-2 TM-3 TM-4、TM-4S
Oil mist trap, other oil types, ISO flange, explosion-resistant motor,
Options
special type for special application (spec H and L)

*1　The PKS-070B model is improved with the change on cast iron shape, a larger oil level gauge, a larger capacity oiler, and an enclosed belt cover
with an inspection hole. It has the same mounting dimension and performance as the conventional model.
*2　Measured with a Pirani gauge. (Apprx.2.7 × 10-1Pa when measured with a McLeod vacuum gauge. )
*3　Expected to obtain in March 2018

P u m p i n g S p e e d C u r ve s

Applications
Vacuum heat treatment furnaces , sintering fumaces ,
brazing fumaces
Vacuum molding
Evaporation and sputtering
Vacuum drying and freeze drying
Vacuum distillation
solvent and powder

10
VS1501 / VS2401 / PKS series

Dimensions

VS

Oil mist trap

（Option）

Totally enclosed
fan cooled motor

Inlet port VG80 Gas ballast port G3/8 Outlet port VG50
Tap depth 22 Tap depth 17

W1

（TM－4）
W

H4
Oil supply port G1

（TM－3）
A B
Oil return port G1/4

H3
L1
External filter port outlet
G3/8

H
H1
H2

Water outlet G3/8

Water inlet G3/8 External filter port inlet

N
P M G3/8
L ４－φ15 Oil drain plug　Ｇ３／４

ＴＹＰＥ Ａ Ｂ Ｈ Ｈ１ Ｈ２ Ｈ３ Ｈ４ Ｌ Ｌ１ Ｍ Ｎ Ｐ Ｗ Ｗ１
ＶＳ１５０１ 116 340 460 420 391 1035 1365 941 571 394 286 77 333.5 163
ＶＳ２４０１ 116 422 460 420 393 1035 1365 1061 653 476 286 77 333.5 163

PKS

B A

PKS-016 PKS-030/PKS-070B
Oil supply port（Ｎ）
Oil drain port（Ｍ）
B A Inlet port（Ｊ）
Outlet port（Ｋ）
W1

Tap depth20
Tap depth16 Water outlet Oil mist trap
（Option）
W
（For anchor bolt）

Rc3／8 Inlet port（Ｊ）

93
W1

Tap depth18
C

Water inlet
Rc3／8
W

Outlet port
（Ｋ）
D

Tap depth25/070
F E Tap depth18/030
（For anchor bolt） Totally enclosed
L fan cooled motor
（TM－4）
H5
（TM－3）

Oil supply port（Ｎ）

H4
（TM－2）

Totally enclosed
H3

H2

fan cooled motor

H6

H1
H
H1
H2

G Oil drain valve F E C G

（For anchor bolt） D
（M）
（For anchor bolt）
L

ＴＹＰＥ Ａ Ｂ Ｃ Ｄ Ｅ Ｆ Ｇ Ｈ Ｈ１ Ｈ２ Ｈ３ Ｈ４ Ｈ５ Ｈ６ Ｊ Ｋ Ｌ Ｍ Ｎ Ｗ Ｗ１
ＰＫＳ－０１６ 70 260 190 440 60 700 ４－Φ１９ 572 550 350 1025 － － － ＶＧ５０ ＶＦ５０ 884 Ｒｃ３／８ Ｇ３／４ 587 247
ＰＫＳ－０３０ 80 485 112.5 225 25 470 ４－Φ２２ 973 624 － － 1345 － 610 ＶＧ８０ ＶＦ８０ 675 Ｒｃ１／２ Ｇ３／４ 712 137
ＰＫＳ－０７０ 93 655 173 346 25 537 ４－Φ２２ 1190 743 987 － － 1887 727 ＶＧ１００ ＶＦ１００ 983 Ｒｃ３／４ Ｇ１・１／４ 971 200

11