micromachines
Article
Finite Element Modeling and Test of Piezo Disk with Local
Ring Electrodes for Micro Displacement
Yonggang Liu 1,2, * , Shuliang Zhang 2 , Pengfei Yan 1 and Hiji Li 1
Citation: Liu, Y.; Zhang, S.; Yan, P.; Li,
H. Finite Element Modeling and Test
of Piezo Disk with Local Ring
Electrodes for Micro Displacement.
Micromachines 2022, 13, 951. https://
doi.org/10.3390/mi13060951
Academic Editor: Wei Li
Received: 25 May 2022
Accepted: 14 June 2022
Published: 16 June 2022
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Attribution (CC BY) license (https://
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4.0/).
Micromachines 2022, 13, 951. https://doi.org/10.3390/mi13060951
1 School of Mechatronics Engineering, Henan University of Science and Technology, Luoyang 471003, China;
yan15713883977@163.com (P.Y.); lihaiji26@163.com (H.L.)
2 Collaborative Innovation Center of Machinery Equipment Advanced Manufacturing of Henan Province,
Henan University of Science and Technology, Luoyang 471003, China; sl2226716700@163.com
* Correspondence: martin_lyg@163.com
Abstract: A new piezoelectric actuator combining interdigitated ring electrodes and a PZT-52(Lead
Zirconate Titanate) disk was investigated for the large displacement requirements of piezoelectric
actuators. Finite element models were established according to the structural characteristics of the
actuator and static analysis was carried out based on ANSYS software. Then Ø25 mm × 2 mm
samples were prepared. The displacement detection system was established, and the influence of
electrode structure on radial displacement was studied experimentally. A comparison between the
experimental results and the finite element analysis confirmed that the finite element model was
correct. The results showed that the effect of electrode width on displacement was small. With
decrease in electrode center distance and increase in the number of electrodes pairs, the radial
displacement increased correspondingly. The peak of radial displacement was 1.63 µm under a 200 V
voltage excitation voltage of 0.2 Hz. This was 2.5 times that for a conventional electrode piezo disk
with the same structure. The actuator demonstrated better displacement properties. The piezoelectric
disk could be valuable in applications involving micro-nano devices.
Keywords: piezoelectric disk; finite element modeling; ring electrodes; micro displacement
1. Introduction
A piezoelectric actuator is a device that uses the inverse piezoelectric effect of piezo-
electric materials. Such actuators can convert electrical energy into mechanical energy
under an electric field and produce precision mechanical displacement [1–3]. High preci-
sion micro-drive and micro-positioning technology are needed in the technical fields of
optical engineering [4], microelectronic manufacturing [5], aerospace [6], ultra-precision
manufacturing [7], micro-robotics [8,9], medicine and genetic engineering [10,11]. Preci-
sion actuators with a piezoelectric component as the core show micro/nano displacement
resolution. They play an important role in submicron and micro/nano ultra-precision
drive and control technology [12–14]. Piezoelectric ceramics possess the advantages of
convenient control, high power density, high displacement resolution, fast frequency re-
sponse, low power consumption, no noise, and strong anti-electromagnetic interference
ability [1]. They have developed into a unique driving form in the field of precision drive
and are applied in automatic assembly devices, micro-robot operation, micro-machinery
manufacturing, precision optical adjustment, precision positioning, nano-machining and
optical fiber operation [15–18].
The displacement of a piezoceramics actuator is relatively small, which limits their
application. To increase the displacement, some displacement amplification methods have
been proposed. Typical composite structures include thunder [19], rainbow [20], hon-
eycomb [21,22], Moonie-type [23,24], cymbal-type [25,26], active fiber composites [27,28]
and micro-fiber composites [29–33]. Using the cumulative effect of multiple piezoelectric
sheets, piezoelectric stacks have been widely used in the field of precision micro-drives.
https://www.mdpi.com/journal/micromachines
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Micromachines 2022, 13, 951 piezoelectric sheets, piezoelectric stacks have been widely used in the field of precision 2 of 15
micro-drives. However, due to limitations in structure, piezoelectric stacks are not easy to
connect into a large mass inertia block, so their driving ability is limited [2,34,35]. To in-
crease the due
However, driving capacity, multiple
to limitations in structure,piezoelectric stacks
piezoelectric are usually
stacks required,
are not easy and the
to connect cost
into a
of the driver is high. Moreover, the running speed of piezoelectric stacks
large mass inertia block, so their driving ability is limited [2,34,35]. To increase the driving is relatively low
[1]. For the
capacity, above reasons,
multiple piezoelectric
piezoelectric stacks are actuators
usuallywith microand
required, displacement
the cost ofand the low driv-
driver is
ing cost
high. have become
Moreover, a focal area
the running speed of research [36–40].stacks is relatively low [1]. For the
of piezoelectric
aboveInterdigital electrodes are
reasons, piezoelectric amongwith
actuators the most
microused periodic electrode
displacement and low structures
driving cost and are
have
used in amicroelectromechanical
become focal area of research [36–40]. systems, telecommunications, chemical sensing, piezo
acoustics, and biotechnology.
Interdigital electrodes are The among advantages
the mostof interdigital
used periodic geometry have attracted
electrode structures de-
and are
vice designers
used [41]. Sinkevicius et
in microelectromechanical al. [4] combined
systems, piezoelectricchemical
telecommunications, ringing sensing,
with a Pockels
piezo
cell. The piezoelectric
acoustics, and biotechnology.ringingThe amplitude
advantages distribution in the geometry
of interdigital aperture of theattracted
have Pockels cell
de-
vice
was designers
measured.[41]. Tu etSinkevicius et al. [4]
al. [42] designed combined
flexible piezoelectric
interdigital ringing
capacitive withusing
sensors a Pockels
a 3D
cell. The and
printing piezoelectric ringing amplitude
spraying process. The interdigitaldistribution
circuits inof the
the aperture
structureof the printed
were Pockelswith
cell
was measured.
conductive Tu etrubber
silicone al. [42] designed
filled flexible interdigital
with silver-coated glass fiber capacitive sensors
and carbon fiber.using a 3D
The effect
printing and spraying
of the spaces between process.
IEs was The interdigital
studied. circuitsmechanism
The response of the structure were printed
was modeled basedwith
on
conductive
the evolution silicone
of therubber filled with
microstructure ofsilver-coated
the sensors. Lai glasset fiber and
al. [43] carbon fiber.
presented The effect
a multiparam-
of thetheoretical
eter spaces between
modelIEs by was
using studied.
a parallel Theplate
response mechanism
capacitance model.wasThe
modeled
influencebased
of on
di-
the evolutionstructural,
mensional, of the microstructure
and material ofparameters
the sensors. on Laithe
et al. [43]generated
force presented by a multiparameter
the electro ad-
theoretical
hesive padmodel by using a parallel
with interdigitated plate capacitance
electrodes model. The
was investigated. A 3D influence
simulationof dimensional,
model was
structural, and material parameters on the force generated
created in COMSOL software (COMSOL Ltd. Stockholm, Sweden） to verify the accuracy by the electro adhesive pad
with interdigitated electrodes was investigated. A 3D simulation
of the above theoretical results. Zhang et al. [44] used 3D interdigital electrodes to improvemodel was created in
COMSOL software (COMSOL Ltd., Stockholm, Sweden) to
the performance of aligned nanofiber-based piezoelectric nanogenerators. The way inverify the accuracy of the above
theoretical results.voltage
which the output Zhangand et al. [44] used
current were3D interdigital
affected by theelectrodes
nanofiberstoand improve the per-
electrodes was
formance
studied. The of aligned nanofiber-based
performance was optimized piezoelectric nanogenerators.
by fabricating interdigital The way in which
electrodes the
with dif-
output voltage and current were affected by the nanofibers and electrodes
ferent densities of microstructures. Tian et al. [45] proposed wave number–spiral acoustic was studied. The
performance
tweezers to was optimized
achieve by fabricating
programmable interdigital
particle/cell electrodes with
manipulation. Some different
functionsdensities
were
of microstructures. Tian et al. [45] proposed wave number–spiral acoustic tweezers to
demonstrated experimentally including multiconfiguration patterning, parallel merging,
achieve programmable particle/cell manipulation. Some functions were demonstrated ex-
pattern translation, transformation, and rotation, as well as the dynamic translation of
perimentally including multiconfiguration patterning, parallel merging, pattern translation,
single microparticles along complex paths.
transformation, and rotation, as well as the dynamic translation of single microparticles
In this paper, a type of LRE (local ring electrode) piezoelectric disk was studied to
along complex paths.
generate radial expansions and contractions in a plane using the piezoelectric constant d33.
In this paper, a type of LRE (local ring electrode) piezoelectric disk was studied to
Finite element modeling was adopted to analyze the displacements of the piezoelectric
generate radial expansions and contractions in a plane using the piezoelectric constant d33 .
rings and the piezo actuator, respectively. Displacement experiments were carried out to
Finite element modeling was adopted to analyze the displacements of the piezoelectric rings
study the effect of the electrode structure on the displacement response of the piezoelectric
and the piezo actuator, respectively. Displacement experiments were carried out to study
disk.
the effect of the electrode structure on the displacement response of the piezoelectric disk.
2. Structural
2. Structural Principle
Principle of
of Actuator
Actuator
An LRE
An LRE piezo
piezo actuator
actuator in
in the
the shape
shape of of aa circular
circular column
column isis shown
shown schematically
schematically inin
Figure 1. The disk surface is divided into an electrode region and a non-electrode
Figure 1. The disk surface is divided into an electrode region and a non-electrode region. region.
The interdigitated
The interdigitated ring
ring electrodes
electrodes are
are concentrated
concentrated in in aa certain
certain district
district so
so that
that the
the driving
driving
signal can
signal canbebeoutput
output centrally.
centrally. TheThe electrode
electrode consists
consists of a series
of a series of branch
of branch electrodes
electrodes drawn
drawn
from thefrom the positive
positive and negative
and negative main electrodes,
main electrodes, respectively.
respectively. The electrodes
The electrodes on the
on the upper
upper
and andsurfaces
lower lower surfaces are in exactly
are in exactly the same theposition.
same position.

Figure 1. Schematic of an LRE piezo disk: 1. the constraint region; 2. the negative main electrodes;
3. the displacement monitoring mark; 4. the positive main electrodes.
Micromachines 2022, 13, x FOR PEER REVIEW 3 of 15
Micromachines 2022, 13, x FOR PEER REVIEW 3 of 15

Figure 1.
Figure 1. Schematic
Schematic of
of an
an LRE
LRE piezo
piezo disk:
disk: 1.
1. the
the constraint
constraint region;
region; 2.
2. the
the negative
negative main
main electrodes;
electrodes;
Micromachines 2022, 13, 951 3 of 15
3. the displacement monitoring mark; 4. the positive main electrodes.
3. the displacement monitoring mark; 4. the positive main electrodes.

The electrode
The electrode region region is is arranged
arranged in in two
two opposite
opposite regions
regions at at 90°
90° toto each
each other,
other, making
making
the The electrodemore
deformation region is arranged and
concentrated in two opposite regions
directional. A at 90◦ to
cylindrical each other,system
coordinate making is
the deformation more concentrated and directional. A cylindrical coordinate system is
the deformation
adopted consistent more concentrated
with the structuraland directional.
features, where AW cylindrical
is the coordinate
electrode width, system
P is theis
adopted consistent with the structural features, where W is the electrode width, P is the
adopted consistent
center distance
distance thewith
of the the electrodes
branch structuraland features,
α is thewhere
is the W isregion
electrode the electrode
angle. TheThewidth, P is
constraint
center of branch electrodes and α electrode region angle. constraint
the center
region is
is the distance
the constraint of
constraint and the branch
and location
location aselectrodes
as determined and
determined by α is the
by finite electrode
finite element
element analysis region
analysis and angle.
and displace-The
displace-
region
constraint region
ment experiments.
experiments. The is the constraint
The displacement and location
displacement monitoring
monitoring mark as determined
mark is is the
the siteby finite
site where
where the element analysis
the displacement
displacement
ment
and displacement experiments. The displacement monitoring mark isthe
thedetection
site where the
was
was extracted
extracted in
in finite
finite element
element analysis
analysis post-processing,
post-processing, and
and is
is also
also the detection point
point
displacement
identified in in an
an was extracted
actuator in finite element
displacement test. analysis post-processing, and is also the
identified
detection point actuator
identified displacement
in an actuator test.
displacement test.is divided into rings along the
Due to
Due to the
the characteristics
characteristics of of the
the electrode,
electrode, the the disk
disk is divided
divided into into rings
rings along
along thethe
Due to
centerline of the
of the characteristics
the branch
branch electrodes, of the
electrodes, as electrode,
as shown
shown in the disk
in Figure
Figure 2. 2.isA
A type
type 11 piezoelectric
piezoelectric ring in-in-
centerline
centerline of the branch electrodes, as shown in Figure 2. A type 1 piezoelectric ring ring
cludes O
cludes O1O 1, O3, O5 and O7. These have similar electric field distributions and the same po-
, O, 3O, O,5O andandO7. These have similar electric fieldfield
distributions and the the same po-
includes 1
larization axis.
axis. 3They 5 are O 7 . Theseto
assumed have
havesimilar
the sameelectric
same piezoelectric distributions
constants.and type 22same
A type pie-
larization They are assumed to have the piezoelectric
polarization axis. They are assumed to have the same piezoelectric constants. A type constants. A pie- 2
zoelectric ring
zoelectric ring includes
includes O 2, O4 and O6. These have similar electric field distributions and
O2,OO24, and O6. O These have similar electric field distributions and
piezoelectric ring includes O4 and 6 . These have similar electric field distributions
the same
the same polarization
polarization axis. axis. These
These are
are assumed
assumed to have
to have the samesame piezoelectric constants. constants.
and the same polarization axis. These are assumed to havethe the samepiezoelectric
piezoelectric constants.
The two
The two piezo-ring
twopiezo-ring
piezo-ringpairs pairs
pairs have
have opposite
opposite polarization
polarization directions.
directions. The piezoelectric con-
The have opposite polarization directions. The The piezoelectric
piezoelectric con-
constants
stants
stants are opposite
are opposite to each other. Because of the uniformity of the material, it is assumed
are opposite to eachto eachBecause
other. other. Because of the uniformity
of the uniformity of the material,
of the material, it is assumed
it is assumed that the
that the
that the mechanical
mechanical constantsconstants of of all
all piezo
piezo rings,
rings, including
including the the elastic
elastic modulus
modulus and and thethe
mechanical constants of all piezo rings, including the elastic modulus and the Poisson ratio,
Poisson ratio,
Poisson ratio, are the same.
are the same. are the same.

Figure 2.
Figure 2. Piezo-ring-pairs.
Figure 2. Piezo-ring-pairs.

Whenthe
When
When theLRE
the LREpiezo
LRE piezo
piezo disk
disk was
disk was
was applied
applied to an
applied toactuator,
to an actuator,
an actuator, the radial
the radial
the radial displacement
displacement and
and radial
displacement and
radial
force force
radialwere were superimposed
forcesuperimposed by piezo-ring
by piezo-ring
were superimposed pairs.
pairs. This
by piezo-ring This
structure
pairs. structure is mechanically
is mechanically
This structure connected
is mechanically con-
in
con-
nectedand
series
nected in series
in series and electrically
electrically
electrically
and connected
connectedconnected in parallel.
in parallel.in parallel.

3. Finite
3.
3. Element Analysis
Finite Element
Element Analysis
Analysis
3.1.
3.1. Piezo
Piezo Ring
Ring Analysis
Analysis
3.1. Piezo Ring Analysis
According
According toto the
the structural
structural characteristics
characteristics of
of the
the disk,
disk, aaa characteristic
characteristic piezo
piezo ring
ring was
was
According to the structural characteristics of the disk, characteristic piezo ring was
selected
selected for
for study,
study, as
asshown
shown in
inFigure
Figure3.3.
selected for study, as shown in Figure 3.

Figure 3.
Figure
Figure 3. The
3. The characteristic
The characteristic piezo
characteristic piezo ring.
piezo ring.
ring.

There
There isis aaareduced
reducedelectric
reduced electricfield
fieldinin the
the electrodeless
electrodeless region.
region. Therefore,
Therefore, this this region
region can-
There electric field in the electrodeless region. Therefore, this region can-
cannot
not be be polarized.
be polarized.
polarized. The The electric
The electric field
electric field
field in in the
in the electrode
the electrode area
electrode area is
area is relatively
is relatively large.
relatively large. The electrode
large. The electrode
electrode
not
area can easily be polarized. The remanent polarization intensity is large. The piezoelectric
constant and dielectric constant are related to the polarization strength. To simplify the
analysis, it was assumed that the electrode region of the disk was fully polarized and had
Micromachines 2022, 13, x FOR PEER REVIEW 4 of 15

Micromachines 2022, 13, 951 4 of 15

area can easily be polarized. The remanent polarization intensity is large. The piezoelectric
constant and dielectric constant are related to the polarization strength. To simplify the
analysis,
the same it was assumed
piezoelectric that theand
constants electrode region
dielectric of the disk
constants. waswas
PZT-52 fullyadopted
polarized andbase
as the had
the same piezoelectric constants and dielectric constants. PZT-52 was adopted as the base
piezo disk. The dielectric constant and piezoelectric constant of PZT-52 observed are shown
piezo
in disk.
Table 1. The dielectric constant and piezoelectric constant of PZT-52 observed are
shown in Table 1.
Table 1. Dielectric and piezoelectric constants of PZT-52.
Table 1. Dielectric and piezoelectric constants of PZT-52.
Relative Dielectric Constant Piezoelectric Strain Constant/pC/N
Relative Dielectric Constant Piezoelectric Strain Constant/pC/N
ε T11
𝑇
ε T33
𝑇
d31 d33 d15
𝜀
350011 𝜀33
3250 d31
260 d33
575 d15
950
3500 3250 260 575 950

A piezo disk of Ø25 mm × 2 mm in size was used. For the electrode structure, α was
A piezo disk of Ø 25 mm × 2 mm in size was used. For the electrode structure, α was
90◦ , W was 0.8 mm and P was 1.6 mm. Seven electrode rings were arranged on the surface
90°, W was 0.8 mm and P was 1.6 mm. Seven electrode rings were arranged on the surface
of the element. The outer radii r1 of the piezo rings O1 ~O7 are shown in Table 2.
of the element. The outer radii r1 of the piezo rings O1~O7 are shown in Table 2.
Table 2. Outer radius of piezo rings.
Table 2. Outer radius of piezo rings.
Piezo
PiezoRings
Rings OO
11 O
O22 O33
O OO44 OO55 OO66 O77
O
r1/
r1/mm
mm 12.5
12.5 10.5
10.5 8.9
8.9 7.3
7.3 5.7
5.7 4.1
4.1 2.5
2.5

To study
To study the
the effect
effect of
of the
the radius
radius onon the
the displacement
displacement of of the
the piezo
piezo ring,
ring, a finite element
element
model of the piezo ring
model of the piezo ring O1 O 1 was established. A 10°
10 ◦ arc surface near 270°
270 ◦ of the piezo rings,
as shown
shown in in Figure
Figure 3,3, was
was selected
selected asas the
the positioning
positioning surface.
surface. It was assumed
assumed that the the
piezo ring
piezo ring was
was not
not affected
affected byby the
the others.
others. The piezo ring ring was
was analyzed
analyzed statically
statically with
with
ANSYS(ANSYS
ANSYS (ANSYSInc. Inc.,Pittsburgh,
Pittsburgh, USA). A static
PA, USA). Avoltage of 200 Vofwas
static voltage 200applied to the positive
V was applied to the
electrodeelectrode
positive and 0 V and
to the0Vnegative electrodeelectrode
to the negative of the piezo ring.
of the Thering.
piezo displacement cloud of
The displacement
O1 obtained
cloud is shownisin
of O1 obtained Figure
shown in4.Figure
The maximum displacement
4. The maximum was 0.29
displacement μm
was near
0.29 µm90° of
near
90 ◦ ofOring
ring 1. TheO1radial
. The radial displacement
displacement of the of thewas
ring ringnot
was not uniform
uniform due todue
thetolarge
the large and
and non-
non-uniform
uniform mesh. mesh.

Figure 4.
Figure 4. The displacement (m)
(m) cloud
cloud of
of piezo
piezo ring
ring O
O11.

To
Tostudy
studythetheeffect
effectofofthe radius
the radiusonon
thethe
displacement
displacement of the piezo
of the ring,ring,
piezo the displacement
the displace-
of rings
ment of O 1 ~O7Owere
rings also analyzed
1~O7 were statically
also analyzed with ANSYS.
statically with ANSYS.The maximum
The maximum displacements
displace-
under 200 V 200
ments under voltage are shown
V voltage in Figure
are shown 5. Under
in Figure 5. Under thethe
same
sameloading
loadingand and constraint
constraint
conditions,
conditions, thethe displacement
displacement of of the
the piezo
piezo ring
ring of
of the
the outer
outer circle
circle was
was large.
large. The
The peak
peak
displacement increased linearly with increase in the radius. When the radius exceeded
10.5 mm, the peak displacement was stable.
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Micromachines 2022, 13, 951 displacement

displacement increased
increased linearly
linearly with
with increase
increase inin the
the radius.
radius. When
When the
the radius
radius exceeded
exceeded
5 of 15
10.5 mm, the peak displacement was stable.
10.5 mm, the peak displacement was stable.

0.32
0.32 (O )
(O2) 2
(O ) (O )
0.28 (O3) 3 (O1) 1
0.28

displacement /μm
displacement /μm
(O )
0.24 (O4) 4
0.24 (O5)
(O5)

0.20
0.20 (O )
(O6) 6

0.16
0.16
(O )
(O7) 7
0.12
0.12
2 2 4 4 6 6 8 8 10 10 12 12 14 14
r 1 / mm
r1 / mm

Figure
Figure
Figure 5.
5.5. The
The
The maximum
maximum
maximum displacements
displacements
displacements of
ofof piezo
piezo
piezo ring
ring
ring versus
versus
versus the
the
the radius.
radius.
radius.

3.2.
3.2.
3.2. Single
Single
Single Electrode
Electrode
Electrode Ring
Ring
Ring Loading
Loading
Loading Analysis
Analysis
Analysis
According
According
According tototo the
thethe structural
structural
structural characteristics
characteristics
characteristics ofof
of the
thethe LREs
LREsLREs piezo
piezo
piezo disk,
disk,
disk, anan
an overall
overall
overall model
model
model
was established in ANSYS. The 10 ◦ arc surface near 270◦ of the LREs piezo disk, as shown
was established in ANSYS. The 10° arc surface near 270° of the
was established in ANSYS. The 10° arc surface near 270° of the LREs piezo disk, as shown LREs piezo disk, as shown
inin
in Figure
Figure
Figure 1,1,
1,
waswas
was constrained.
constrained.
constrained. ToToanalyze
analyze
analyze thethe influence
influence ofof single
single ring
ring loading
loading ononthethe dis-
dis-
placement
placement
placement of
ofof the
thethe actuator,
actuator,
actuator, a single
a single
a single electric
electric
electric ring
ring
ring loading
loading
loading analysis
analysis
analysis was
was
was carried
carried
carried out.
out.
out. AAA voltage
voltage
voltage
of
of 200
200 V
V was
was then
then applied
applied to
to the
the positive
positive electrode
electrode of
of the
the piezo
piezo ring,
of 200 V was then applied to the positive electrode of the piezo ring, and 0 V was appliedring, and
and 0
0 V
V was
was applied
applied
to the negative electrode. A static analysis was performed to obtain the radial displacement
totothethe negative
negative electrode.
electrode. AA static
static analysis
analysis was
was performed
performed toto obtain
obtain the
the radial
radial displace-
displace-
cloud
ment of the of
cloud LRE the piezo
LRE disk
piezo produced
disk by a piezo
produced by a ring,
piezo asring,
shownas in Figure
shown in 6.
Figure 6.
ment cloud of the LRE piezo disk produced by a piezo ring, as shown in Figure 6.

Figure
Figure
Figure 6.
6.6. The
The
The radial
radial
radial displacement
displacement
displacement (m)(m)
(m) of
ofof disk
disk
disk with
with
with OO O11 loading.
1 loading.

ItIt can
can be seen
seenfrom
fromFigure
Figure 6 that the displacement of restricted
the restricted region at the
It can bebeseen from 6 that
Figure 6 that the
the displacement
displacement ofof
thethe region
restricted region at at
thethe lower
lower
lower
end end of the LREs piezo disk was essentially zero. The piezo ring O produced a
end ofofthe the LREs
LREs piezo
piezo disk
disk was
was essentially
essentially zero.
zero. The
The piezo
piezo ring
ring O1Oproduced
1 produced a maximum
a1 maximum
maximum
radial radial
tensile tensile
displacementdisplacement of 0.25 µm. The piezo rings O ~O were not excited,
radial tensile displacement ofof 0.25
0.25 μm.μm.TheThe piezo
piezo rings
rings O2O ~O2~O7 were2 not7excited, so the ra-
7 were not excited, so the ra-
so thedisplacement
dial radial displacement
was was A
small. small. A similar
similar static static analysis
analysis of the ofother
the other
piezo piezo
rings rings
was was
per-
dial displacement was small. A similar static analysis of the other piezo rings was per-
performed
formed separately.
separately. The
The algebraic
algebraic sum
sum of the individual displacement peaks was 1.47 µm
formed separately. The algebraic sum ofof
thethe individual
individual displacement
displacement peaks
peaks was was 1.47
1.47 μm
μm
when
when WW was
was 0.8
0.8 mm,
mm, PP was
was1.6
1.6 mm
mm and
and the
theelectrode
electrode ring
ring number
number was
was seven.
seven.
when W was 0.8 mm, P was 1.6 mm and the electrode ring number was seven.
3.3. Full Electrode Loading Analysis
3.3.
3.3. Full
Full Electrode
Electrode Loading
Loading Analysis
Analysis
The LRE piezo disk was loaded with full electrodes, and each piezo ring was simul-
TheThe
LRELRE piezo
piezo disk
disk was
was loaded
loaded with
with full
full electrodes,
electrodes, and
and each
each piezo
piezo ring
ring was
was simul-
simul-
taneously excited by a voltage to study the radial displacement. The positive electrodes
taneously
taneously excited
excited by a voltage to study the radial displacement. The positive electrodes
ofof
of all piezo ringsby a voltage
were loadedtowith
study200
theV,radial displacement.
and the The positive
negative electrodes wereelectrodes
loaded with
0 V. The constrained area was unchanged, and a static analysis was performed. The dis-
placement is shown in Figure 7. Due to the accumulation of piezo ring displacements,
Micromachines
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2022,13,
13,xx FOR
FOR PEER
PEER REVIEW
REVIEW 66 of
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15

Micromachines 2022, 13, 951 all 6 of 15

all piezo
piezo rings
rings were
were loaded
loaded withwith 200
200 V,
V, and
and the
the negative
negative electrodes
electrodes were
were loaded
loaded with
with 00 V.
V.
The constrained area was unchanged, and a static analysis was performed.
The constrained area was unchanged, and a static analysis was performed. The displace- The displace-
ment
ment isis shown
shown in in Figure
Figure 7. 7. Due
Due toto the
the accumulation
accumulation of of piezo
piezo ring
ring displacements,
displacements, the the max-
max-
the
imum
imummaximum displacement
displacement
displacement of
of the of the
the disk
disk disk reached
reached
reached 1.61
1.61 μmμm1.61
at
at the at the displacement
the displacement
µm displacement monitoring
monitoring
monitoring mark.
mark.
mark.
The The displacement
The displacement
displacement valuesvalues
values of theof
of the the full-electrode
full-electrode
full-electrode excitation
excitation
excitation werewere
were greater
greater
greater thanthan
than the the
sumsum
the sum of of
of the
the
the displacements
displacements
displacements of
oftheof single-electrode
the the single-electrode
single-electrode ringsrings
rings excitation
excitation
excitation separately.
separately.
separately. ThisThis
This showed
showed
showed thatthat
that the the
thedis-
dis-
displacement
placement
placement of of
thethe
of the diskdisk
disk was
was wasnotnot
not anan
an algebraic
algebraic
algebraic sum
sumsumof of
thethe
of the displacements
displacements
displacements of of each
of each
each ring.
ring.
ring.

Figure
Figure 7.
7. Radial
Radial displacement
displacement (m)
(m) of
of disk
disk under
under full electrode
fullelectrode loading.
electrodeloading.
loading.

4. Displacement
4. Displacement Test Test and
Testand Results
andResults Analysis
ResultsAnalysis
Analysis
4.1. Experimental Device
4.1. Experimental Device
PZT-52
PZT-52powderpowderwas
powder wasselected.
was selected. Samples
selected. Samples of ofØ25
ØØ 25 mm×
25mm
mm ×× 222 mm were prepared
mm were prepared using
using anan
atmospheric pressure-sintering process.
atmospheric pressure-sintering process. Electrodes Electrodes were
Electrodes were fabricated
were fabricated
fabricated byby screen
by screen printing.
screen printing.
printing.
Thermal
Thermal polarization
Thermal polarization was
polarization was adoptedto
was adopted
adopted topolarize
to polarizethe
polarize thesamples.
the samples.To
samples. Todetect
To detect
detect thethe
the displacements
displacements
displacements of
of
of
the the samples,
the samples, a displacement
samples, aa displacement detection
displacement detection experimental
detection experimental platform
experimental platform
platform was was
was built,built,
built, as as shown
as shown
shown in in
in Fig-
Fig-
Figure
ure
ure 8. 8.
8. It It included
It included
included anan
an excitation
excitation
excitation signaldevice,
signal
signal device,aaadisplacement
device, displacementacquisition
displacement acquisition and
acquisition and processing
and processing
processing
device,
device, a
a computer
computer for
for signal
signal recording
recording and
and analysis,
analysis, and
and a
a shock
shock
device, a computer for signal recording and analysis, and a shock absorption stand.absorption
absorption stand.
stand.

Figure 8.
Figure8.
Figure Experimental
8.Experimental platform
Experimentalplatform for
platformfor actuator
foractuator displacement
actuatordisplacement detection:
displacementdetection: 1.
1. Tektronix
detection: 1. AFG1022
TektronixAFG1022
Tektronix signal
AFG1022signal
signal
generator
generator (Tektronix,
(Tektronix, Inc.
Inc. Johnston,
Johnston, USA);
USA); 2.
2. Computer;
Computer; 3.
3. Pulian
Pulian TP-LINK
TP-LINK switch
switch
generator (Tektronix, Inc., Johnston, USA); 2. Computer; 3. Pulian TP-LINK switch (TP-Link Ltd.,
(TP-Link
(TP-Link Ltd.
Ltd.
Shen,
Shen, China);
China); 4.4. Spectral
Spectral confocal
confocal controller
controller IFC2451
IFC2451 (Micro-Epsilon
(Micro-Epsilon Measurement
Measurement Technology
Technology
Shen, China); 4. Spectral confocal controller IFC2451 (Micro-Epsilon Measurement Technology
Management
Management Company
Company Group.
Group. Bavaria,
Bavaria, Germany);
Germany); 5. 5. Samples;
Samples; 6. 6. Three-stage
Three-stage shock-absorbing
shock-absorbing
Management
stand; Company Group. Bavaria, Germany); 5. Samples; 6. Three-stageManagement
shock-absorbing stand;
stand;7.
7.Laser
Laserprobe
probeIFC2403-0.4
IFC2403-0.4(Micro-Epsilon
(Micro-EpsilonMeasurement
MeasurementTechnology
Technology ManagementCompanyCompany
7. Laser probe IFC2403-0.4 (Micro-Epsilon Measurement Technology Management Company Group.
Bavaria, Germany); 8. Antai ATA-2021 high voltage amplifier (Aigtek Electronic Technology Ltd.,
Xian, China); 9. Tektronix TDS2024C oscilloscope (Tektronix, Inc., Johnston, IA, USA).
Micromachines
Micromachines 2022,
2022, 13,
13, x
x FOR
FOR PEER
PEER REVIEW
REVIEW 7
7 of
of 15
15

Micromachines 2022, 13, 951 Group. 7 of 15

Group. Bavaria,
Bavaria, Germany);
Germany); 8.
8. Antai
Antai ATA-2021
ATA-2021 high
high voltage
voltage amplifier
amplifier (Aigtek
(Aigtek Electronic
Electronic Technology
Technology
Ltd.
Ltd. Xian,
Xian, China);
China); 9.
9. Tektronix
Tektronix TDS2024C
TDS2024C oscilloscope
oscilloscope (Tektronix,
(Tektronix, Inc.,
Inc., Johnston,
Johnston, IA,
IA, USA).
USA).

One
One end
One end
end of of the
of the sample
the sample was
sample was fixed
was fixed
fixedonon
onanan acrylic
anacrylic sheet,
acrylicsheet,
sheet,andand
andthethe other
theother end
otherend was
endwas
wasfree.free. The
free. The
The
samples
samples were put
samples were put together together
togetheron on the
onthe shock-absorbing
theshock-absorbing
shock-absorbingstand.stand. The
stand.The Thelaser probe
laser
laser probe
probe was
waswasfixed
fixed on
on the
fixed on
the
bracket.
the
bracket. The
bracket.
TheThe light
light source
light was
source
source focused
waswas focused
focused on the
on on displacement
thethe displacement
displacement monitoring
monitoring
monitoring mark
mark
mark at the
at at top
thethe
toptop of
of
the
of sample.
thethe sample.
sample. When
When
When the radial
thethe displacements
radial
radial displacements
displacements were
were weredetected,
detected,
detected, the installation
thethe position
installation
installation position
position of the
of
of the
sample
the sample
sample and
andand the laser
the the
laser head
laser
head were
head
were as
as shown
were in
in Figure
as shown
shown 9.
9. The
in Figure
Figure The9. laser head
The laser
laser headheadwas
was 22was
mm
mm2 away
mm away
away from
from
the
the mark. During the test, the excitation signals were amplified by the high-voltage am-
from mark.
the During
mark. the
During test,
the the
test,excitation
the signals
excitation were
signals amplified
were amplified by the
by high-voltage
the high-voltage am-
plifier.
plifier. The
amplifier. TheThe signals
signals
signals were connected
were
were connected
connected to
to the oscilloscope
to the
the oscilloscope
oscilloscope at
at one end.
at one
one end.end.The other
The The end
otherother
end endwas
was wascon-
con-
nected
nected to
connected to the positive
to the
the and
positive
positive andandnegative
negative
negative poles of
of the
poles
poles samples
of the
the samples
samples to
to be
betotested. A
A switch
be tested.
tested. A switch
switch was
was wascon-
con-
nected
connected to
nected to thethe spectral
to spectral confocal
the spectral controller
confocal
confocal and
controller
controller the computer
andcomputer
and the the computerat the
at theat same frequency
the frequency
same same frequency to collect
to
to collect
the displacement
collect the data.
displacement The probe
data. The and samples
probe and were
samples placed
were separately
placed
the displacement data. The probe and samples were placed separately from the other de- from the
separately other
from de-
the
vices.
other They
They were
vices.devices. Theyplaced
were individually
were placed
placed on
on the
individually
individually theonstand. This
the stand.
stand. was
This This
was wasto
to reduce the
to reduce
reduce influence
thethe influence
influence of
of
noise
of on
noise the
on experimental
the experimental
noise on the experimental data. data.
data.

Figure 9.
Figure9. Installation
9. Installation position
Installation position of
position of the
of the sample
the sample and
sample and the
and the laser
thelaser head.
laserhead.
head.
Figure

4.2. Result
4.2. Result Analysis
Result Analysis
Analysis
4.2.
4.2.1.
4.2.1. Displacement
4.2.1. Displacement Response
Displacement Response
Response of of Single
of Single Electrode
Single Electrode
ElectrodeRing Ring Excitation
RingExcitation
Excitation
The
The linear
The linear range
linear range
range of of the
of the probe
the probe was
probe was 400
was 400 μm.
μm. The
400 µm. The starting
The starting point
starting point of
point of the
of the measuring
the measuring
measuring rangerange
range
was
was
was2.52.5 mm.
2.5mm.
mm.TheThe measurement
Themeasurement
measurementerror error was
was
error was 0.30.3
µmμm
0.3 μm andand
thethe
and resolution
resolution
the waswas
resolution 16
16 nm.
16 nm.
was ThisThis
nm. ena-
enabled
This ena-
bled assessment
assessment of theof the
radial radial displacement
displacement of of
the the sample.
sample. The The positive
positive
bled assessment of the radial displacement of the sample. The positive branch electrodes branch
branch electrodes
electrodes of
of
the the
LRE LRE piezo
piezo diskdiskwerewere connected
connected as aas a whole,
whole, as as were
were the the negative
negative
of the LRE piezo disk were connected as a whole, as were the negative branch electrodes. branch
branch electrodes.
electrodes. It
It
was was
It was necessary
necessary
necessary to
to to first
first cut
first cut
cut off
offoff other
other
other branch
branch electrodes
branchelectrodes
electrodeswhenwhen
whenthe the displacement
thedisplacement
displacementof of the
ofthe
theLRELRE
LRE
piezo
piezo disk
piezodisk driven
diskdriven
drivenby by
byaaa piezo
piezo ring
piezo ring was
ring was detected.
was detected.
detected. In In
In this way,
this way, only
way, only the
only the positive
the positive and
positive and negative
and negative
negative
electrodes
electrodes
electrodesof of the
ofthe given
thegiven piezo
givenpiezo
piezoringring could
ringcould
couldbebe energized.
beenergized.
energized.
AA
A −200~200 V sinusoidal voltage with aaa frequency
−−200~200
200~200 VV sinusoidal
sinusoidal voltage
voltage with
with frequency of of 0.2
0.2 Hz
Hz was applied
was applied
applied toto
to aaa given
given
given
piezo
piezo ring.
ring. The displacement
displacement response curve of the
the sample
sample was
piezo ring. The displacement response curve of the sample was obtained, as shown in
was obtained,
obtained, as
as shown
shown in
in
Figure
Figure 10. As can be seen from Figure 10, the displacement curve of the middle section is
Figure 10.
10. As
As can
can be
be seen
seen from
from Figure
Figure 10,
10, the
the displacement
displacement curve
curve of
of the
the middle
middle section
section is
is
nearly
nearly linear.
nearly linear. The
linear.The radial
Theradial tensile
radialtensile displacement
tensiledisplacement
displacementpeak peak
peakwaswas 0.27
was0.27 μm.
0.27µm.
μm.

0.25
0.25
/μm
displacement/μm

0.20
0.20
displacement

0.15
0.15

0.10
0.10

0.05
0.05

0.00
0.00 0 50 100 150 200
0 50 100 150 200
U /V
U /V
Figure
Figure 10. Displacement
10. Displacement
Figure10. response
Displacement response when
responsewhen the
whenthe
theOO is
O111 is loaded.
is loaded.
loaded.
Micromachines 2022, 13, x FOR PEER REVIEW 8 of 15

Micromachines 2022, 13, 951

x FOR PEER REVIEW 8 8of
of 15

To study the displacements of the LRE piezo disk, the piezo rings O1~O7 were ener-
gized separately. The radial displacements of the sample under single-electrode-ring ex-
To study
citation the displacements
were detected. The effectof
displacements ofofthe
the
theLRE
LRE piezo
piezo
piezo ringdisk,
disk,the
thepiezo
radius therings
piezo
on peakOO
rings 1~O 7 were
1 ~O ener-
7 were
displacement en-
is
gized
ergized separately. The
separately. radial
The displacements
radial displacements of the
of sample
the under
sample undersingle-electrode-ring ex-
single-electrode-ring
shown in Figure 11. For comparison, the displacement results of the single-electrode-ring
excitation
citation
loading in were
were detected.
detected.
Section The
The
3.2 are effectofofthe
effect
summarized theFigure
in piezoring
piezo ringradius
11. radiuson
on the
the peak
peak displacement
displacement is
shown in Figure 11. For comparison, the displacement results of the single-electrode-ring
loading
0.35 in Section
FEM
3.2 are summarized in Figure 11.
0.30 Test
/μm 0.35
0.25 FEM
0.30 Test
peak displacement

0.20
/μm

0.25
0.15
peak displacement

0.20
0.10
0.15
0.05
0.10
0.00
0.05 2 4 6 8 10 12
r1 / mm
0.00
2 4 6 8 10 12
Figure 11. The radiusr effect on the peak displacement of disk when each piezo ring is excited indi-
1 / mm
vidually.
Figure 11. The radius
radiuseffect
effectononthe peak
the displacement
peak of disk
displacement whenwhen
of disk each each
piezopiezo
ring isring
excited individually.
is excited indi-
vidually.
The law of displacement for the radius obtained in the finite element analysis and the
The lawwas
experiment of displacement
basically the for theThis
same. radius obtained
showed thatinthe
theradial
finite displacement
element analysis anddisk
of the the
experiment
Thealaw was basically
of displacement the same. This
forradius. showed
the radius that
obtained the radial
in the of
finite displacement of the disk
was not linear function of the As the outer radius the element analysis
piezo ring and the
increased, the
was not a linear
experiment function of thesame.
radius. Asshowed
the outer radius of the displacement
piezo ring increased, the
radial displacement of the disk gradually increased from the inside to the outside. disk
was basically the This that the radial of the The
radial
was notdisplacement
a sum of the
linearoffunction of disk gradually
the radius. increased
Aswhen
the outer from of
radius the inside
the piezoto theincreased,
outside. The
algebraic the displacement peak, all electrode rings werering the
excited individu-
algebraic
radial sum of
displacement the displacement peak, when all electrode rings were excited individually,
ally, was 1.56 μm. of the disk gradually increased from the inside to the outside. The
was 1.56 µm.
algebraic sum of the displacement peak, when all electrode rings were excited individu-
ally,
4.2.2.was 1.56 μm.
Micro
4.2.2. Micro Displacement Analysis
Displacement Analysis
According to to the
the results of
of the
the displacement
displacement test,
test, LRE
LRE piezo
piezo actuators
actuators were
were prepared,
4.2.2.According
Micro Displacement results
Analysis prepared,
with parameters for the electrode as follows: α—90 , W—0.8 mm, P—1.6 mm, an
with parameters for the electrode as follows: α—90°, W—0.8
◦ mm, P—1.6 mm, and andelec-
an
trode According
pair valuetoofthe results
seven. Forofcomparison,
the displacement test, LREpiezo
conventional piezoactuators
actuatorsofwere
the prepared,
same size
electrode pair value of seven. For comparison, conventional piezo actuators of the same
with parameters
werewere
prepared, for the
with electrode
fully covered aselectrodes
follows: α—90°,
on the W—0.8and mm, P—1.6 mm, and an sam-
elec-
size prepared, with fully covered electrodes onupper
the upper lower surfaces.
and lower The
surfaces. The
trode pair loaded
ples were value ofwith
seven. Forof
a sine comparison,
0.2ofHz, conventional piezo actuators of the same size
samples were loaded with a sine 0.2−200~200 V; the displacement
Hz, −200~200 response
V; the displacement is shown
response is
were prepared,
in Figure with fully covered electrodes on the upper and lower surfaces. The sam-
shown in 12.
Figure 12.
ples were loaded with a sine of 0.2 Hz, −200~200 V; the displacement response is shown
in Figure
1.8 12.
LREs piezo disk

1.2
1.8 LREs piezo disk
/μm

0.6
1.2
displacement

0.0
/μm

0.6 conventional piezo disk

displacement

-0.6
0.0 conventional piezo disk
-1.2
-0.6
-1.8
-1.2 -200 -100 0 100 200
U /V
-1.8
-200 -100 0 100 200
Figure
Figure 12. Displacement response
12. Displacement response of
of LRE
LRE piezo
piezo disk
disk and
and conventional
conventional piezo
piezo disk.
disk.
U /V

Figure
In12.
Figure 12, the peak
Displacement
value
response
of radial
of LRE
tensile
piezotensile
displacement
disk and conventional of
of thedisk.
piezo
LRE piezo actuator
In Figure 12, the peak value of radial displacement the LRE piezo actuator
was 1.63 µm. The value was larger than the 1.56 µm for the sum of the peak displacements
was 1.63 μm. The value was larger than the 1.56 μm for the sum of the peak displacements
in the test of single electrode ring radial
excitation described in Sectionthe4.2.1. This actuator
showed
in theIntest
Figure 12, the
of single peak value
electrode ringofexcitationtensile displacement
described in Sectionof 4.2.1.
LRE piezo
This showed that
that
was the radial
1.63 μm. displacement
The value was response
larger than of the disk was not a linear superposition of the
the radial displacement response of thethe 1.56was
disk μm not
for the sum of
a linear the peak displacements
superposition of the ring
ring
in displacements.
the test of single When
electrodethe full
ring electrodes
excitationwerewere loaded,
described the
in the
Sectionpiezo rings
4.2.1. squeezed
Thissqueezed and
showed that
displacements.
stretched each
When
other.
the full electrodes loaded, piezo rings and
the radial each
stretched displacement
other. response of the disk was not a linear superposition of the ring
The radial tensile displacement peak of the conventional electrode piezo actuator was
displacements. When the full electrodes were loaded, the piezo rings squeezed and
0.64 µm. The displacement of the LREs piezo actuator was 2.5 times that of the conventional
stretched each other.
Micromachines 2022, 13, x FOR PEER REVIEW 9 of 1

The radial tensile displacement peak of the conventional electrode piezo actuator wa
Micromachines 2022, 13, 951 9 of 15
0.64 μm. The displacement of the LREs piezo actuator was 2.5 times that of the conven
tional electrode piezo disk. It was evident that the LRE piezo actuator exhibited significan
displacements. Since the displacements of the LRE piezo actuator were superimposed on
electrode piezo disk. It was evident that the LRE piezo actuator exhibited significant
the displacements of the individual piezo rings, they exhibited more obvious hysteresi
displacements. Since the displacements of the LRE piezo actuator were superimposed on
characteristics.
the displacementsThere
of thewas a clear piezo
individual gap between theexhibited
rings, they ascending andobvious
more descending segments o
hysteresis
characteristics. There was a clear gap between the ascending and descending segmentsrespons
the displacement curve. The rising and falling segments of the displacement
curve
of of a conventional
the displacement curve. actuator
The risingessentially
and fallingcoincided.
segments of the displacement response
curve of a conventional actuator essentially coincided.
4.2.3. Effect of Electrode Width on Displacement
4.2.3. Effect of Electrode Width on Displacement
The electrode width is a key dimension. It determines the electric field strength of th
The electrode width is a key dimension. It determines the electric field strength of
sample. In the process of sample preparation, any errors in the width will impact the po
the sample. In the process of sample preparation, any errors in the width will impact the
larization ofofthe
polarization the piezoelectric materials.This
piezoelectric materials. This will
will affect
affect the the piezoelectric
piezoelectric performance o
performance
thethesample.
of sample.Therefore,
Therefore,the
the effect
effect of electrodewidth
of electrode widthononthe the displacements
displacements of LREs pie
of LREs
zoceramic disk
piezoceramic diskneeds
needstoto be
be studied.
studied. Some LREpiezo
Some LRE piezosamples
samples were
were prepared.
prepared. TheThe elec
trode widths
electrode widthswere
were0.8
0.8mm,
mm,0.90.9 mm,1
mm,1 mmmm and
and1.1
1.1mm.
mm.The The electrode
electrode center
center distance wa
distance
was 1.6 mm.
1.6 mm. There
There were
were sevenpairs
seven pairsof
of electrodes.
electrodes. The
Thesamples
samples areare
shown
shownin Figure 13. 13.
in Figure

Figure13.
Figure 13.LRE
LRE piezo
piezo sample
sample with
with different
different electrode
electrode widths.
widths.

AAsinusoidal
sinusoidal signal with
signal a frequency
with of 0.2ofHz
a frequency 0.2and
Hzanandamplitude of 200 Vofwas
an amplitude 200applied
V was applied
to the samples. The displacement time history is shown in Figure 14a, and the displacement
to the samples. The displacement time history is shown in Figure 14a, and the displace
responses are shown in Figure 14b. As shown in Figure 14b, the middle segment of the
ment responses are shown in Figure 14b. As shown in Figure 14b, the middle segment o
curve was linear. As the voltage increased, the displacement increased linearly. There was
athe curve
high levelwas linear. As the
of repeatability voltage
of the curvesincreased,
shown inthe displacement
multiple increased
displacement linearly.
tests. All the Ther
displacement curves were relatively close to each other. As the electrode width increased,tests. Al
was a high level of repeatability of the curves shown in multiple displacement
themaximum
the displacement curves were
radial elongations relatively
of the LRE piezo close to each
sample other.
increased fromAs1.68
theµmelectrode
to 1.81 µm,width in
creased,
while the maximum
the maximum radialradial elongations
contractions of the
increased LRE
from piezo
1.39 µm tosample increased
1.51 µm. from 1.68 μm
These values
did not change
to 1.81 significantly
μm, while with width.
the maximum Therefore,
radial the influence
contractions of thefrom
increased electrode
1.39width
μm to on1.51 μm
the radial displacement of the LRE piezo disk was small. There was a relatively
These values did not change significantly with width. Therefore, the influence of the elec small gap
between the rising
trode width on thecurve and displacement
radial the falling curve,ofwhich
the LREwaspiezo
causeddisk
by the
washysteresis effect of
small. There was a rel
the piezoceramics. During the voltage rise and fall, there was a gap in the displacement
atively small gap between the rising curve and the falling curve, which was caused by th
curve of the LRE piezo disk. The rising and falling intervals of the displacement response
hysteresis
curve did noteffect of the piezoceramics. During the voltage rise and fall, there was a gap in
coincide.
the displacement
When the voltage curvewas of200
theV,LRE
the piezo disk. The rising
peak displacement wasand falling
obtained intervals
with multipleof the dis
placement
electrode response
widths. curve
The finite did not
element coincide.
results for radial displacement and the test results are
summarized in Figure 15. The displacement curve was gentle. The increase in displacement
with increase in electrode width was relatively small. Both the test and the finite element
analysis were consistent with this law. This was because the electric field increased as the
electrode became wider, with the actuator showing better drive performance.
 0.5

displaceme
0.0

-0.5
es 2022, 13, x FOR PEER REVIEW -1.0 10 of 15
Micromachines 2022, 13, 951 10 of 15

-1.5
0 1000 2000 3000 4000 5000
2.0 W=1.1mm t / ms
W=1mm
1.5 W=0.9mm (a)
1.0

displacement / μm
W=0.8mm W=1.1mm
0.5 W=1mm
1.6 W=0.9mm
0.0
W=0.8mm
-0.5
0.8
-1.0

Δx / μm
-1.5 0.0
0 1000 2000 3000 4000 5000
t / ms
-0.8
(a)
W=1.1mm
-1.6
-200 -100 W=1mm
0 100 200
1.6 W=0.9mm
U/V
W=0.8mm
0.8 (b)
Δx / μm

Figure 14. Influence of electrode width on radial displacements: (a) Displacement time history ver-
0.0
sus width; (b) Displacement response versus width.

-0.8
When the voltage was 200 V, the peak displacement was obtained with multiple elec-
trode widths. The finite element results for radial displacement and the test results are
-1.6
summarized in -100
Figure 15. The 100
displacement curve was gentle. The increase in displace-
-200 0 200
ment with increase in electrode U/V width was relatively small. Both the test and the finite
element analysis were consistent with this law. This was because the electric field in-
creased as the electrode(b) became wider, with the actuator showing better drive perfor-
mance.
Figure 14. Influence of electrode
Figure width on
14. Influence of radial displacements:
electrode (a) Displacement
width on radial displacements:time history ver- time history versus
(a) Displacement
sus width; (b) Displacement response
width; (b) versusresponse
Displacement width. versus width.

When the voltage1.8

was 200 V, the peak displacement was obtained with multiple elec-
trode widths. The finite element results for radial displacement and the test results are
1.7
summarized in Figure 15. The displacement curve was gentle. The increase in displace-
peak displacement / μm

ment with increase in1.6

electrode width was relatively small. Both the test and the finite
element analysis were1.5consistent with this law. This was because the electric field in-
FEM
creased as the electrode
1.4
became wider, with theelongations
actuator showing better drive perfor-
mance. contractions
-1.4

-1.5
1.8
-1.6
1.7
0.8 0.9 1.0 1.1
peak displacement / μm

1.6 W / mm
1.5
Figure 15. Peak
FEM displacements versus the electrode width.
1.4 elongations
contractions
-1.4
Due to measurement error, the radial displacement under experimental conditions
would be larger. The piezoelectric constant used in finite element analysis is relatively
-1.5
small. The assumption of piezoelectric constant consistency causes errors in finite element
-1.6
models. These errors cause finite element analysis results to be small.
0.8 0.9 1.0 1.1
W / mm
 Due to measurement error, the radial displacement under experimental conditions
would be larger. The piezoelectric constant used in finite element analysis is relatively
Due to measurement error, the radial displacement under experimental condition
small. The assumption of piezoelectric constant consistency causes errors in finite element
would be larger. The piezoelectric constant used in finite element analysis is relativel
models. These errors cause finite element analysis results to be small.
small. The assumption of piezoelectric constant consistency causes errors in finite elemen
Micromachines 2022, 13, 951 11 of 15
models. These errors cause finite element analysis results to be small.
4.2.4. Effect of Electrode Center Distance and Number of Rings on Displacement
The electrode center distance
4.2.4. Effectisofanother keyCenter
Electrode dimension. It affects
Distance the number
and Number of elec-
of Rings on Displacement
trode rings on the sample
4.2.4.surface
Effect ofbecause
Electrodethe displacement
Center Distance and of the LRE of
Number piezo
Ringsdisk is su-
on Displacement
The electrode center distance is another key dimension. It affects the number of elec
perimposed by the displacement of each center
The electrode piezo ring. To research
distance is anotherthekeyeffect of the electrode
dimension. It affects the number of
trode rings on the sample surface because the displacement of the LRE piezo disk is su
center distance and theelectrode
number rings
of rings on displacement,
on the sample surface several
because samples were prepared.
the displacement of the LRE piezo disk is
perimposed by
superimposed by the
thedisplacement
displacement of each
of each piezo
piezo ring. To research the effect of the electrod
The piezo sample dimensions were Ø 25 mm × 2 mm. The width ofring. To research
the electrodes the
waseffect
0.8 of the electrode
center distance and the number of rings on displacement, several samples were prepared
mm, and the electrode center
centerdistance
distancesandwere
the number
1 mm, 1.2 of rings
mm,on 1.4displacement,
mm, 1.6 mmseveral
and 1.8 samples
mm, were prepared.
Thepiezo
piezosample
sample dimensions were
Ø25Ømm 25 mm
× 2 ×mm.
2 mm.TheThe width of the electrodes was 0.
in contrast to distancesThe
of 11, 9, 8, 7 anddimensions were
6 for the piezo rings. The samples arewidth
shown of the
in electrodes was
mm,
0.8 mm, and
andthetheelectrode centerdistances
electrode center distances werewere 1 mm,
1 mm, 1.2 mm,
1.2 mm, 1.41.6
1.4 mm, mm,mm1.6
andmm and 1.8 mm
1.8 mm,
Figure 16.
in
in contrast to distances of 11, 9, 8, 7 and 6 for the piezo rings. The samples areinshown i
contrast to distances of 11, 9, 8, 7 and 6 for the piezo rings. The samples are shown
Figure
Figure16.16.

Figure 16. LREs piezo sample with different center distance.

Figure 16. LREs piezo sample with different center distance.

Figure 16. LREs piezo sample with different center distance.
A sinusoidal voltage of 0.2 Hz and 200 V was applied to the samples. The displace-
ment time history and the displacement
AAsinusoidal response
voltage are
of 0.2of
Hz shown
and in Figure 17. Asthe
can be seenThe displacement
sinusoidal voltage 0.2 Hz200 V was
and 200applied
V wastoappliedsamples.
to the samples. The displace
from Figure 17, with decrease in electrode
time history center distance,
and the displacement and increase
response are shown in in
piezo rings,
Figure thecan be seen from
17. As
ment time history and the displacement response are shown in Figure 17. As can be see
radial displacement of Figure
the LRE piezodecrease
17, with disk was significantly
in electrode center improved.
distance, andWhen P was
increase 1.8 rings, the radial
in piezo
from Figure 17, with decrease in electrode center distance, and increase in piezo rings, th
displacementwas
mm, the maximum displacement of the LRE1.32
only piezo
μm.diskWhen
was significantly
P was 1 mm, improved. When P was 1.8 mm, the
the maximum
radial displacement of the LRE piezo disk was
P wassignificantly improved. When P was 1.
displacement reached maximum
2.47 μm. At displacement
the samewas only
time, 1.32
the µm. When
maximum 1 mm, the
contractions maximum
increased displacement
reached 2.47 µm. At the same time, the maximum contractions increased from 1.09 the
from 1.09 μm to 2.13 μm.
mm, the maximum displacement was only 1.32 μm. When P was 1 mm, maximum
µm to
displacement
2.13 µm. reached 2.47 μm. At the same time, the maximum contractions increased
from 1.09 μm to 2.13 μm.
3.2 P=1mm P=1.2mm
2.4 P=1.4mm
3.2 P=1mm P=1.2mm
P=1.6mm
1.6
displacement / μm

2.4 P=1.4mm
P=1.8mm
P=1.6mm
0.8 1.6
displacement / μm

P=1.8mm
0.0 0.8

-0.8 0.0

-1.6 -0.8

-2.4 -1.6
0 1000 2000 3000 4000 5000
-2.4
t / ms
0 1000 2000 3000 4000 5000
(a) t / ms

Figure 17. Cont. (a)

13, Micromachines
x FOR PEER REVIEW
2022, 13, x FOR PEER REVIEW 12 of 15 12 of 15
Micromachines 2022, 13, 951 12 of 15

P=1mm P=1mm
2.4 P=1.2mm
2.4 P=1.2mm
P=1.4mm
P=1.4mm

displacement / μm
P=1.6mm

displacement / μm
1.2 P=1.6mm
1.2 P=1.8mm
P=1.8mm
0.0
0.0
-1.2
-1.2
-2.4
-200 -100 0 100 200
-2.4 U/V
-200 -100 0 100 200
U/V (b)
(b) center distance on radial displacements: (a) Displacement time
Figure 17. Influence of the electrode
history versus the electrode center distance; (b) Displacement response versus the electrode center
Figure 17. Influence of Figure 17. Influence
the electrode
distance. center of the electrode
distance center
on radial distance on radial
displacements: displacements:
(a) Displacement (a) Displacement
time
history versus the electrode center distance; (b) Displacement response versus the electrode center the electrode
time history versus the electrode center distance; (b) Displacement response versus
distance. center distance.
The radial displacements of the actuator with the same structure were obtained by
static analysis of ANSYS. The finite element results of the displacement were compared
The radial displacements of the actuator with the same structure were obtained by
The radial displacements
with the maximum of the actuator
value with the same
of the displacement structure
response wereinobtained
obtained byshown in
the test, as
static analysis of ANSYS. The finite element results of the displacement were compared
static analysis ofFigure
ANSYS. Thethefinite
18. As element
center distanceresults of the
decreased anddisplacement
the number ofwere piezo compared
rings increased, the
with the maximum value of the displacement response obtained in the test, as shown
with the maximum radial displacement
value of the increased significantly.
displacement response These results
obtained in jointly
the confirm
test, as the effect of elec-
shown
in Figure 18. As the center distance decreased and the number of piezo inrings increased,
trode
Figure 18. As the center center distance
distance on the
decreased radial
and displacement
the number of
of LREs
piezo piezo
rings disks. The
increased,curves
the are very
the radial displacement increased significantly. These results jointly confirm the effect
close, indicating
radial displacement increased that the finite
significantly. element
These model
results was
jointly accurate.
confirmof Due
the to error
effect in the
of elec- prepara-
of electrode center distance on the radial displacement LREs piezo disks. The curves
tion of samples and experimental error in displacement detection, as well as the assump-
trode center distanceare onvery
the radial displacement
close, indicating of LREs
that the finite piezo
element disks.
model Thewascurves are Due
accurate. veryto error in the
tions and calculation accuracy of the finite element analysis, the experimental value of the
close, indicating thatpreparation of samples
the finite element and
model experimental
was accurate.errorDueintodisplacement
error in thedetection,
prepara- as well as the
displacement was
assumptions and also slightly
calculation larger than the finite
accuracy ofdetection, element
the finite element results.
tion of samples and experimental error in displacement as wellanalysis, the experimental value
as the assump-
of the displacement was also slightly larger than the finite element results.
tions and calculation accuracy of the finite element analysis, the experimental value of the
displacement was also slightly
3
larger than the finite element results.
FEM
(11)
elongations
(9) contractions
peak displacement / μm

2 (8)
3 (7)
FEM
(11) (6)
elongations
(9) contractions
1
peak displacement / μm

2 (8)
-1 (7) (6)
(7)
(8) (6)
(9)
(11)
1 -2
-1 (6)
(7)
1.0 (8) 1.2 1.4 1.6 1.8
(9) P / mm
(11)
-2
Figure 18. Peak displacements versus the electrode center distance.
Figure 18. Peak displacements versus the electrode center distance.
5. Conclusions
1.2 1.41.0 1.6 1.8
5. Conclusions
To improve the radial displacement of piezo disks, a new piezo actuator with local
P / mm
To improve the radial displacement of piezo disks, a new piezo actuator with local
ring electrodes was proposed by combining interdigitated electrodes with a PZT-52 piezo
ring electrodes was proposed by combining interdigitated electrodes with a PZT-52 piezo
disk. According
Figure 18. Peak displacements versus the to electrode
the structural
centercharacteristics
distance. of the actuator, the factors affecting radial
disk. According to the structural characteristics of the actuator, the factors affecting radial
displacement were investigated for the piezo rings and the actuator. The displacement
displacement
response ofwere
the investigated
actuator under forsingle
the piezo ringsexcitation
electrode and the actuator. The displacement
and full electrode excitation was
5. Conclusions response of the actuator under single electrode excitation and full electrode excitation
obtained. Both finite element analysis and experimental investigation showedwas that the
To improveobtained.
the contribution
radial displacement
Both finite outerof
of theelement piezoringdisks,
analysis
piezo and
to aactuator
new piezo
theexperimental actuatorwaswith
investigation
displacement localthan
showed
greater thatthat
theof the
ring electrodes was proposed by combining interdigitated electrodes with a PZT-52 piezo
disk. According to the structural characteristics of the actuator, the factors affecting radial
displacement were investigated for the piezo rings and the actuator. The displacement
response of the actuator under single electrode excitation and full electrode excitation was
obtained. Both finite element analysis and experimental investigation showed that the
Micromachines 2022, 13, 951 13 of 15

inner ring. The variation law of radial displacement with radius was found to be basically
the same. Under a voltage excitation of 0.2 Hz and 200 V, the peak value of radial displace-
ment for the new actuator was 1.63 µm. This value was 2.5 times that of a conventional
electrode piezo disk of the same size. This indicated that the new disk had greater radial
displacement. The effect of electrode size on the radial displacement of the actuator was
studied by finite element analysis and experiment. The results showed that the influence
of electrode width on the driver was small. There was a linear relationship between the
center distance of the branch electrodes and the peak value of radial displacement. The
experimental results for the influence of the electrode structure on displacement were close
to the finite element analysis results, demonstrating that the finite element model of the
characteristics of the piezo ring and the actuator has reference value for the design and
preparation of LRE piezo disks.

Author Contributions: Conceptualization, Y.L.; methodology, P.Y. and S.Z.; investigation and data
analysis, Y.L., H.L. and S.Z.; writing—original draft preparation, H.L. and P.Y.; writing—review and
editing, Y.L. and S.Z. All authors have read and agreed to the published version of the manuscript.
Funding: This research was funded by the National Natural Science Foundation of China (50975079),
the Key Project of Science and Technology Development of Henan Province (212102210065) and the
Industry-University Research Cooperation Fund of Henan Province (182107000012).
Institutional Review Board Statement: Not applicable.
Informed Consent Statement: Informed consent was obtained from all subjects involved in the study.
Data Availability Statement: Data are available upon request from the corresponding author.
Conflicts of Interest: The authors declare no conflict of interest.

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