NTN TECHNICAL REVIEW No.

742006

[ New Product ]

Ultra-Clean Bearing for Clean Environments

Ryouichi NAKAJIMA* Masaaki HONDA*

NTN manufactures Ultra-Clean bearings for clean environments used for a semiconductor and LCD panel fabrication equipments, vacuum evaporation systems, etc. NTN developed Ultra-Clean NC bearings and Ultra-Clean WB bearings to supply the demand for a long-life under high temperature and heavy load conditions.

1. Overview
Extremely low dust generation is needed for the bearings used in the systems and machines that manufacture semiconductor devices and liquid crystal display panels, as well as for those used in the vacuum evaporation systems for these products. Recently, demand has been mounting for longer maintenance intervals for these devices and systems. Given these demands, the bearings used in these situations must be capable of durable operation in high-temperature and high-load environments. To address these engineering challenges, NTN has developed a unique lubrication system, and with this, they have successfully developed unique Ultra-Clean NC bearings that feature long life in vacuums under high bearing pressure and unique Ultra-Clean WB bearings that boast long life in high-temperature environments. This report introduces these unique bearings.

Conventional oil-impregnated resin cages are made of sintered resin materials, and, consequently, their porosity, the ratio of pores to retain lubricating oil, was 20% at maximum. In contrast, NTNs newly developed

Fig. 1 Ultra-Clean NC bearing NCNetwork Cell

2. Introduction to NTN Ultra-Clean NC Bearings (Fig. 1)

For lubrication, the authors adopted a porous resin cage that was developed independently by NTN. This cage is impregnated with a low-vapor-pressure oil (Fig. 2).
*Industrial Engineering Dept. Industrial Sales headquarters
Pore
400

Fig. 2 Porous resin cage

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Ultra-Clean Bearing for Clean Environments

oil-impregnated porous resin cage features 35% or higher porosity thanks to a special manufacturing technique, allowing this cage to retain more lubricating oil. Compared to conventional ultra-clean bearings, NTNs new ultra-clean bearings are capable of longer life while maintaining low dust generation in high load applications.

Table 2 Test conditions

Test bearing Degree of vacuum Running speed Temperature Thrust load Deep groove ball bearing (#608) 8227 mm 10-5Pa 500 min-1 Ordinary temperature 196N

Under the test conditions summarized in Table 1, the test bearing was allowed to run for 150 hours, and the amount of resultant dust generated during the duration of the test was measured. As summarized in Fig. 3, the dust generated with the Ultra-Clean NC bearing was equivalent to the amount generated by bearing types usually used for clean applications (a low-dust-generating prefilled-grease type for vacuumuse and a special PTFE-coated type).

Rotating torque mNm

2.1 Evaluation of various characteristics 2.1.1 Evaluation of dust generation characteristics

50 40 30 20 10 0

Ultra-Clean NC bearing

Low-dust-generating prefilled-grease type for vacuum-use

Special PTFE-coated type

2.1.2 Rotating torque

NTN evaluated the rotating torque for the UltraClean NC bearing under the test conditions summarized in Table 2. As illustrated in Fig. 4, the Ultra-Clean NC bearing features a lower torque compared to the conventional bearing (special PTFEcoated type).

Fig. 4 Results of rotating torque

2.1.3 Endurance evaluation

Each bearing type was evaluated at each of the three thrust load levels specified in Table 3. As can be seen from the data in Fig. 5, the Ultra-Clean NC bearing boasts a longer life in all three loading

Table 1 Test conditions of dust generation

Test bearing Degree of vacuum Running speed Size of particles being counted Thrust load Temperature Duration Deep groove ball bearing (#608) 8227 mm 10-5Pa 50 min-1 0.2m or greater 9.8N Ordinary temperature 150 hrs.

Table 3 Test conditions of endurance test

Test bearing Degree of vacuum Running speed Temperature Thrust load End of life criterion Deep groove ball bearing (#608) 8227 mm 10-5Pa 500 min-1 Ordinary temperature 196N686N981N The point when a sudden increase in torque occurred

Number of dust particles generated

1000

Ultra-Clean NC bearing Low-dust-generating prefilled-grease type for vacuum-use Special PTFE-coated type
10000
Cessation of test run Cessation of test run Cessation of test run

100 1000 10

Life h Ultra-Clean NC bearing Low-dust-generating prefilled-grease type for vacuum-use Special PTFE-coated type

100

10 1 1

196N

686N

981N

Fig. 3 Results of dust generation test

Fig. 5 Results of endurance test

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NTN TECHNICAL REVIEW No.742006

conditions when compared to the conventional bearings. In particular, under a high-loading condition, the life of the authors Ultra-Clean NC bearing is more than 10 times as long compared to the conventional bearings subjected to the same demanding conditions.

results in Fig. 8, the rotating torque with the UltraClean WB bearing is much lower than that with the conventional bearing (special PTFE-coated type).

Table 4 Test conditions of rotating torque

Test bearing Deep groove ball bearing (#608) 8227 mm 10-5Pa 500 min-1 Ordinary temperature 196N Degree of vacuum Running speed Temperature Thrust load

3. Introduction to NTN Ultra-Clean WB Bearings (Fig. 6)

Aware of the lubricating power of tungsten disulfide (hereafter, WS2), NTN adopted one rolling element made of this material (Fig. 7) in the Ultra-Clean WB bearing. When the WS2 rolling element rolls in the bearing, WS2 is transferred onto the rolling surface and functions as a solid lubricant. Additionally, since WS2 can withstand a maximum temperature of 400C, which is much higher heat resistance compared to conventional special PTFE coating, the Ultra-Clean WB bearing is an ideal choice for vacuum and hightemperature environments such as those on vacuum evaporation systems and sputtering systems.

25

Rotating torque mNm

20

15

Ultra-Clean WB bearing

Special PTFE-coated type

Fig. 8 Results of rotating torque

WS2 rolling element

3.1.2 Endurance 1) High-temperature (300C) endurance test

The applicable test conditions are summarized in Table 5, while the test results are illustrated in Fig. 9. The life of the Ultra-Clean WB bearing is more than five times as long as that of the conventional bearing (special PTFE-coated type).

Fig. 6 Ultra-Clean WB bearing WBWS2 Ball Lubrication with tungsten disulfide ball

2) High-load endurance test

The test conditions used are summarized in Table 6, while the test results obtained are illustrated in Fig. 10. The life of the Ultra-Clean WB bearing is more than nine times as long as that of the conventional bearing (special PTFE-coated type).

4. Conclusion
Fig. 7 WS2 ball

3.1 Evaluation of various performance considerations 3.1.1 Rotating torque

Under the test conditions summarized in Table 4, the rotating torque of the Ultra-Clean WB bearing in a vacuum was evaluated. As can be seen from the -82-

Products incorporating flat panel displays, such as personal computers and flat-panel TV sets, have become used more commonly, and demands are growing rapidly for bearings capable of use in the clean-environment manufacturing systems for these products. NTN believes that our Ultra-Clean NC bearings and Ultra-Clean WB bearings, which are enhanced variants of conventional Ultra-Clean

Ultra-Clean Bearing for Clean Environments

Table 5 Test conditions

Test bearing Degree of vacuum Running speed Temperature Thrust load End of life criterion Deep groove ball bearing (#608) 8227 mm 10-5Pa 1,550 min-1 300C 9.8N The point when a sudden increase in torque occurred Test bearing Degree of vacuum Running speed Temperature Thrust load End of life criterion

Table 6 Test conditions

Deep groove ball bearing (#608) 8227 mm 10-5Pa 500 min-1 Ordinary temperature 256 N The point when a sudden increase in torque occurred

10000 Cessation of test run

100000 Cessation of test run 10000

Endurance h

Endurance h Ultra-Clean WB bearing Special PTFE-coated type

1000

1000 100 10 1

100

10

Ultra-Clean WB bearing

Special PTFE-coated type

Fig. 9 Results of high temperature endurance test

Fig. 10 Results of heavy load endurance test

Table 7 Performance of Ultra-Clean bearing series

Ultra-Clean bearing Lubrication system Temperature range tolerance (C) Degree of vacuum tolerance (Pa) Load bearing capacity Low torque feature Dust generation Corrosion resistance Optimal Good Special PTFE-coating +260 10 atm Acceptable
-6

Ultra-Clean bearing Low dust-generating vacuum grease +200 10 atm

-5

Ultra-Clean NC bearing Porous resin cage + low vapor pressure oil +150 10 atm
-5

Ultra-Clean WB bearing Tungsten disulfide (WS2) +400 10-5atm

bearings, will satisfy the characteristics required of these manufacturing systems: low dust generation, tolerance of high vacuum conditions, and higher levels of endurance and heat resistance. NTN has already added new products to its Ultra-Clean bearing Series (see Table 7). We will continue to develop unique products that satisfy market needs, and we hope to contribute to improvements in various vacuum systems by helping extend their maintenance intervals and reduce their energy consumption.

Photos of authors

Ryouichi NAKAJIMA
Industrial Engineering Dept. Industrial Sales headquarters

Masaaki HONDA
Industrial Engineering Dept. Industrial Sales headquarters

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