Advantages of Aluminum

Vacuum
Jed Bothell
Atlas Technologies
April 2014
Advantages of Aluminum Vacuum
Presentation Outline
Advantages of Aluminum Vacuum
Properties of Aluminum
Vacuum
Mechanical
Physical
Surface Preparation and Cleaning
Manufacturing Considerations
Machining, Extruding
Joining: Welding, Brazing, Friction Stir
Aluminum Flanges & Fittings
Atlas Flanges & Fittings
Conventional O-ring seals
Economics of Aluminum
Summary
Advantages of Aluminum Vacuum

VACUUM PROPERTIES:
Lower levels of Hydrogen and Carbon desorption from Aluminum
• Aluminum has seven (7) orders of magnitude less Hydrogen
than in stainless steel 1
• Aluminum alloys have less carbon than stainless steel, including grade
316L
• Consequently reduced H2, CO, CO2 and CH4 outgassed species in
Aluminum

Able to reach UHV and XHV regimes, useful when working with Duterium

1. J.F. Norton, Trans. 8th AVS Vac. Symposium, pp.14 (1962)

Advantages of Aluminum Vacuum

VACUUM PROPERTIES:
Outgassing Rate
Aluminum 1 Stainless Steel 2, 3
Condition
Torr·l/sec·cm 2 Torr·l/sec·cm2
Unbaked
(After 10hr Pumping)
1x10 -10 3x10 -10
Baked
(After 24hr, 150°C Bakeout)
1x10 -13 6.3x10 -11

1. H. Ishimaru, JVST A 7(3), 2439 (1989)

2. H. F. Dylla, D. M. Manos, P. H. LaMarche, JVST A 11(5), 2623 (1993)
3. D. J. Stanteler, JVST A 10(4), 1879 (1992)
Advantages of Aluminum Vacuum

Cleaning and Surface Preparation

• Outgassing from vacuum surfaces minimized with,
dense, stable passivation layer 1
• Remove contaminated mill-scale oxide layer through
mechanical machining/abrasion and/or chemical
means.

• Allow dense oxide passivation layer to form.

• Bakeout at 150°C converts hydroxides and oxides in

to stable oxide.
1. J Garner, Handbook of Vacuum Technology, pp.509 – 552, Academic Press (1997)
Advantages of Aluminum Vacuum

MECHANICAL PROPERTIES
Deflection Thickness of Flat Plate Calculation*:
tp = (kPrp4/(Ed))1/3
Since the Modulus of Al is 1/3 of SS:

tAS = (ESS/EAl)1/3 = (19,000/7,474) 1/3 = 1.36 x SS

Aluminum Chambers need only be ~1.5x thicker than
Stainless to maintain the same or less deflection
tp = Thickness of plate
k = .0696 if Clamped, or = 0.171 of clamped
P = Atmospheric Pressure
rp = Radius of circular plate or small side of rectangular plate
E = Modulus of Elasticity: Al = 7,474 Kgf/mm2 & SS = 19,000 Kgf/mm2
d = Acceptable deflection
tAS = Acceptable deflection
* Mark’s Standard Handbook For Mechanical Engineers, by Avallone, E.A. and Baumeister, T; Ninth Edition, 1978 pp 5-52.
Advantages of Aluminum Vacuum

MECHANICAL PROPERTIES ...

Aluminum is Light Weight

1/3x the weight of stainless steel

Uses
- Minimizing floor structure in clean rooms
- Portable chambers
- Mechanically manipulated chambers
Aluminum Stainless Steel
Physical Properties
- Ease of handling 6061-T6 304

- Large chambers Thermal Conductivity

W/mK
167 16.2

Density
2.7 8.03
g/cc
Modulus of Elasticity 68.9 193
GPa
Advantages of Aluminum Vacuum

Mechanical Properties…

Aluminum has a Lower Young’s Modulus

1/3 that of stainless steel

Aluminum chambers absorb vibration better

Useful for optics (photon, electron, …)
Inspection tools (wafer repair, )
Aluminum Stainless Steel
Physical Properties
6061-T6 304
Thermal Conductivity 167 16.2
W/mK

Density 2.7 8.03

g/cc

Modulus of
Elasticity 68.9 193
GPa
Advantages of Aluminum Vacuum

PHYSICAL PROPERTIES: Thermal Conductivity

Aluminum Has a Very High Thermal Conductivity

10x the thermal conductivity of Stainless
21x the thermal diffusivity

Uses
- Faster and more complete bakeout
- Even bakeout (no condensing cold spots) Physical Properties
Aluminum Stainless Steel
6061-T6 304
- Thermal chambers
Thermal
Conductivity 167 16.2
W/mK
Density 2.7 8.03
g/cc

Modulus of Elasticity 68.9 193

GPa
Advantages of Aluminum Vacuum

PHYSICAL PROPERTIES : Thermal Conductivity Cont.

Aluminum consequently has
Low Thermal Gradients
-10W of heat from 6mmᶲ feedthrough on 1mᶲ x 6mm thick plate rises temp to: 6.6C in Al V.S. 83.8C in SS
Fast Thermal Time Constants
- Evenly spaced heating/cooling tubes 20cm apart produce a thermal time constant of 1min Al V.S. 19min
SS

PHYSICAL PROPERTIES: Thermal Emissivity

Aluminum Has a Very High Thermal Emissivity
10x that of stainless steel Physical Properties
Aluminum Stainless Steel
6061-T6 304
Aluminum does not readily absorb
radiant heat or radiate heat Thermal Emissivity .04 -.07 .3-.7
- Useful for Cryogenic Dewar's & cryostats & telescopes Density 2.7 8.03
g/cc

Modulus of Elasticity 68.9 193

GPa
Advantages of Aluminum Vacuum

Other Physical Properties…

Non-Magnetic:
- Useful for electron optics
μ Al = 1.000022
μ Austenitic SS = 1.003–1.007
μ Martinsitic SS= 49-95 (work hardened)

Can be anodized:
- Protects against many corrosives & halogens
- Not ideal for high vacuum however

Low Z (Low Neutron Nuclear Activation):

- Low residual radioactivity…
- X-ray transparent (relatively)
- Neutron transparent (relatively)
Advantages of Aluminum Vacuum
Aluminum Alloys / Versatile Material

Aluminum is available in many alloys with a wide variety of properties

Principal Alloying
Wrought Alloy Heat Treatable General Comments Vacuum Comments
Element

1xxx 99% Al No Good chemical resistance, poor strength Excellent

2xxx Cu Yes Good strength to weight ratio, poor corrosion properties Excellent

3xxx Mn No Moderate strength, good workability, used for cans Excellent

4xxx Si No Low melting temperature, used for welding fillers Excellent

5xxx Mg No Work hardens, good corrosion resistance Excellent

6xxx Mg-Si Yes Reasonable balance of strength to corrosion resistance Excellent

7xxx Zn Yes Very high strength, moderate corrosion resistance High Zn can pose problems
Advantages of Aluminum Vacuum
MANUFACTURING ADVANTAGES:

Vacuum chambers of almost unlimited design

possibilities…

• Plate-to-Plate
• Cylindrical
• Formed
• Monocoque (form solid billet)
• Extruded
Advantages of Aluminum Vacuum
Large Plate-to-Plate Chambers

Custom plate-to-plate
chamber manufactured
for NASA
Advantages of Aluminum Vacuum
Monocoque (Billet) Chambers

MANUFACTURING
ADVANTAGES:

Monocoque chambers are

machined from single piece
solid aluminum billet or
thick plate.
Advantages of Aluminum Vacuum
Spherical Hemispherical Chambers

MANUFACTURING
ADVANTAGES:

Just like stainless spherical

chambers are spun thin
plates of aluminum.
Advantages of Aluminum Vacuum
Joining Aluminum:
MANUFACTURING :
Aluminum brazing & welding technology is well understood with
many techniques:

-TIG (Tungsten Inert Gas) welding

- EBW (Electron beam welding)
-Brazing
- Vacuum
- Dip
- FSW (Fiction stir welding)
-Explosion bonding
Advantages of Aluminum Vacuum
Welding Aluminum

MANUFACTURING:

TIG Welding Aluminum:

- Design must account for

significant distortion after welding

- TIG Welds can generally not be

Machined and still hold vacuum
we recess welds if post machining
is required
Advantages of Aluminum Vacuum
Welding Aluminum

TIG Welding Aluminum:

Unlike TIG Welding Stainless:

- Due to high thermal conductivity
Try to weld similar masses
not thick to thin

- Aluminum TIG weld generally

require filler.
Advantages of Aluminum Vacuum
Welding Aluminum

Friction stir welding: Can be machined reliably and still be UHV quality
Advantages of Aluminum Vacuum
Brazing Aluminum

Vacuum brazing:
Clean & well suited for vacuum
products. Can not be easily
touched up with TIG welding later

Dip brazing:
Intricate aluminum assemblies can
be dip brazed in molten salts, can
be difficult to clean however
Advantages of Aluminum Vacuum
Atlas Flanges

EXW Explosion Welding (Bonding)

• Point source progressive discharge is detonated

• Plates are accelerated to contact each other
• Plasma is formed at the contact point, stripping
surface oxides and contaminants
• Extreme pressures at impact form metallic bond
• Interlayers prevent intermetallic formation
Atlas ATCR fittings:

All Metal Face Seal Fittings for

Aluminum:

Compatible with standard Swagelok

VCR fittings
Atlas ATCR fittings:

Atlas Chamber Mount:

Welded from inside the vacuum

vessel

The Robust female nut prevents

damage while in use on the
chamber
Standard Aluminum O-Ring Sealed Flanges
Advantages of Aluminum Vacuum

ECONIMICS:

Material pricing: Aluminum is by far less

expensive than Stainless.
• Aluminum ~$3.00 / lb
• Stainless 304 ~$6.00/ lb & 316L ~$7.00/ lb

Al needs to be ~1.5X thicker, but is 1/3 the

density, therefore…
Aluminum is ~$4.5 V.S. Stainless ~$17.8 – $20.8
for the same structural value

Stainless is ~ 4 X Aluminum per structural

equivalent members
Advantages of Aluminum Vacuum

ECONIMICS:

Machining & labor pricing:

Aluminum is less expensive than Stainless.

Manufacturing costs can be significantly less

expensive:

–Aluminum machines 5 X faster than Stainless

Advantages of Aluminum Vacuum

ECONIMICS:

General Rule Aluminum chambers can be less

expensive than those made of SS when they…

• Have intricate and/or extensive machining

• Are larger than about three (3) cubic feet
• Can be manufactured using plate material
• Can be extruded
• Have multiple o-ring seals
• Superior vacuum properties of Aluminum enable
cost savings in pumping components
Advantages of Aluminum Vacuum

ECONIMICS:

Cost of Ownership (COO) of Aluminum chambers

can be lower than Stainless

• Vacuum pumps can be smaller

–Because there is less H2, C and byproduct gasses

• There is less need for special H2 getter & water pumps

–Because there is less H2, C and byproduct gasses

• Shorter bake time

–Once baked Aluminum pumps much faster than SS
Summary

Reasons to use aluminum…

• Lower vacuum surface outgassing

• Lower Hydrogen permeability
• Efficient bakeout
• Excellent machinability
• Large and complex shapes
• Specific Properties
(magnetic, nuclear, chemical…)
• Light weight
• Lower cost
Repented in Scandinavia by:
Low2High Vacuum
Box 9084, S-400 92 Göteborg
Sweden

Tel +46 31 68 84 701 Tel

Tel +46 31 68 39 39 FAX

info@low2high.se

www.Low2High.se
Advantages of Aluminum
Vacuum

Thank you for your attention!

& Thank you

Svenska Vakuumsällskape
Appendix
Advantages of Aluminum Vacuum

VACUUM PROPERTIES:
Unbaked System
• Desorbing H2O dominates gas load of both stainless steel and aluminum
• Approximately similar outgassing rate for aluminum and stainless steel

Baked System
• Water desorbs much faster from aluminum than stainless steel
• Baking aluminum at 150°C is more effective than baking stainless steel at
much higher temperatures 1
• Bakes out faster and more completely than stainless steel
1. J Garner, Handbook of Vacuum Technology, pp.509 – 552, Academic Press (1997)
Atlas Customers — Physics & Accelerators

ANL Argonne Lab SLAC Stanford Linear Accelerator

BNL Brookhaven Lab BESY Germany
CAMD Louisiana State University CERN Switzerland
FNL Fermi Lab DESY Germany
JNL Jefferson Lab ESRF France
LANL Los Alamos Lab KEK Japan
LBNL Lawrence Berkeley Lab MP Germany (Max Plank)
LLNL Lawrence Livermore Lab Soleil France
NASA National Aeronautics & NSRRC Taiwan
Space Administration
And many, many more!
Atlas Customers — Semiconductor, FAB and Solar

Applied Materials Varian

Novellus Systems IBM
Tokyo Electron General Electric
Ovonic ECD Unaxis
Maxim Intel
Toshiba Universal Display
KLA Zilog
Cymer Ulvac
Perkin Elmer Aixtron Genus…
Vergeson And many, many more!
World Leaders in Aluminum Vacuum

Be sure to request our latest catalogs…

• Atlas Flanges & Fittings

48-Page catalog

• Atlas Vacuum Chambers

12-Page Catalog
Welcome to the aluminum revolution!

The Aluminum vacuum

revolution has started —
In a remote corner of
Washington State,
in the rain shadow of the
Olympic Peninsula,
nestled along Puget
Sound, USA
Atlas delivers the aluminum revolution!

Modern aluminum vacuum components — with

lower cost and superior vacuum performance.

• Standard Flanges & Fittings

• Chambers
• Engineering & Technical Services
Atlas Flanges

Stainless Steel / Aluminum Bond Interface

• UHV rated to 1x10 -13 Torr

• Leak tested to < 1x10 -9 cc/sec of He

• Thermal Rating
Peak — 300°C (during weld-up)
Operational — (-)200°C to 250°C

• Mechanical Rating
Tensile — 15,000 psi (103 Mpa)
Shear — 10,000 psi (69 Mpa)
Atlas Standard Components
Aluminum & Aluminum/Stainless Products
Atlas CF and Wire-Seal flanges, ATCR tube fittings,
ISO Quick-Release / ISO Claw & Bolt flanges,
Pyrex Viewports, Tube & Pipe Transitions,
Neutron Windows, Quick-Disconnect,
Elbows, Tees and Crosses, Gaskets,
Fasteners, and more.
Bimetallic Flanges / Fittings

Available in all sizes and types…

• CF Flanges in US, Metric and ISO

• Flush, Tube and Weld-Neck mounts

• Rectangular

• Custom size and shapes

• Atlas ATCR TM metal-seal tube fittings…

Swagelok VCR and Parker-Hannifin VacuSeal
compatible
Advantages of Aluminum Vacuum
Aluminum advantages depend on the vacuum regime
• At low vacuum the advantages are mainly cost
• At high and ultra high vacuum aluminum offers many technical
advantages
• There are also many special physical properties that make it an
excellent choice
Atlas Flanges

UHV flange couplings require…

• Knife-edge sealing (metal gaskets)
• Matching of thermal expansion properties

Solutions…
Hard coated aluminum knife-edge (TiC with Al gasket)
• Longevity is an issue
• Problematic during thermal cycling (bakeout)

Atlas CF Flange TM (Bimetallic)

Stainless steel knife-edge (Cu gasket)
• Aluminum flange body
Advantages of Aluminum Vacuum