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(2003) High-Temperature Annealing of AlGaNStressstructural and
(2003) High-Temperature Annealing of AlGaNStressstructural and
compositional changes
S. Rajasingam, A. Sarua, M. Kuball, A. Cherodian, M. J. Miles et al.
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JOURNAL OF APPLIED PHYSICS VOLUME 94, NUMBER 10 15 NOVEMBER 2003
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J. Appl. Phys., Vol. 94, No. 10, 15 November 2003 Rajasingam et al. 6367
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6368 J. Appl. Phys., Vol. 94, No. 10, 15 November 2003 Rajasingam et al.
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