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Research Article
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Ligand Field-Induced Exotic Dopant for Infrared


Transparent Electrode: W in Rutile SnO2
Michitaka Fukumoto, Yasushi Hirose,* Benjamin A. D. Williamson, Shoichiro Nakao,
Koji Kimura, Koichi Hayashi, Yuki Sugisawa, Daiichiro Sekiba, David O. Scanlon,
and Tetsuya Hasegawa
reflection.[9] In a high-μ TCO, an appro-
Transparent conductive oxides (TCOs) exhibiting high near-infrared (NIR) priate amount of a singly charged donor
transmittance are one of the key materials for highly efficient thin-film solar must be doped into a host oxide semi-
cells with widened spectral sensitivity. To realize excellent NIR transparency conductor to minimize mobility-reducing
in a TCO film, developing a dopant providing high mobility (µ) carriers is ionized impurity scattering.[10] The con-
ventional strategy adopts a p-block dopant
quite important. Herein, it is demonstrated that W is a high-μ dopant in rutile
in a group adjacent to the cation of the
SnO2, which is unexpected from the conventional strategy. A combination host oxide semiconductor on the peri-
of electrical transport property measurements and hybrid density functional odic table (e.g., Al- or Ga-doped ZnO,
theory calculations reveals that W behaves as a singly charged donor (W5+) Sn-doped In2O3, and Sb-doped SnO2).[11]
showing minimized ionized impurity scattering. This charge state is realized Recent studies, however, revealed that
by the splitting of the W 5d t2g-states originating not only from the octahedral d-block (i.e., transition metal) dopants
are preferable to p-block ones to enhance
crystal field but also hybridization with the O 2p orbitals, whose contribu-
μ in typical s-orbital-based TCOs such as
tion has not been considered in transition metal-doped TCOs. Hybridization In2O3 [12–18] and SnO2:[19–21] In these TCOs,
between metal d orbital and O 2p orbitals would provide a new guide for donor d states possess energy levels suf-
designing a novel dopant of NIR transparent conductors. ficiently high relative to the conduction
band minimum (CBM) that they hybridize
minimally with the host cation s states of
1. Introduction the CBM, avoiding an increase in the electron effective mass
induced by p-block dopants due to the hybridization between
Transparent conductive oxides (TCOs) exhibiting high vis- the s states of the dopant and the host cation.
ible and near-infrared (NIR) transparency are increasingly in In a transition metal-doped TCO, splitting of donor d states
demand as transparent electrodes for next-generation thin-film by the ligand field also plays a crucial role in determining the
solar cells with widened spectral sensitivity.[1–8] A key require- charge state of the donor, which extends the choice of dopant
ment for a TCO film with excellent NIR transparency is high for achieving high μ. Group-6 Mo in In2O3 is such an example;
Hall mobility (µ) for carrier electrons with control of the car- Mo would be expected to behave as a multiply charged donor
rier density in a moderate range, which suppresses free-carrier in trivalent cation-based In2O3. In Mo-doped In2O3, however,

M. Fukumoto, Y. Hirose, S. Nakao, T. Hasegawa K. Hayashi


Department of Chemistry Frontier Research Institute for Materials Science
School of Science Nagoya Institute of Technology
The University of Tokyo Gokiso, Showa, Nagoya 466-8555, Japan
Bunkyo, Tokyo 113-0033, Japan Y. Sugisawa, D. Sekiba
E-mail: hirose@chem.s.u-tokyo.ac.jp Graduate School of Pure and Applied Sciences
B. A. D. Williamson University of Tsukuba
Department of Materials Science and Engineering 1-1-1 Tennoudai, Tsukuba, Ibaraki 305-8573, Japan
Norwegian University of Science and Technology (NTNU) D. O. Scanlon
Trondheim 7491, Norway Department of Chemistry
K. Kimura, K. Hayashi University College London
Department of Physical Science and Engineering 20 Gordon Street, London WC1H 0AJ, UK
Nagoya Institute of Technology D. O. Scanlon
Gokiso, Showa, Nagoya 466-8555, Japan Thomas Young Centre
University College London
Gower Street, London WC1E6BT, UK
D. O. Scanlon
The ORCID identification number(s) for the author(s) of this article Diamond Light Source Ltd.
can be found under https://doi.org/10.1002/adfm.202110832. Diamond House
Harwell Science and Innovation Campus
DOI: 10.1002/adfm.202110832 Didcot, Oxfordshire OX110DE, UK

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Jahn–Teller (J–T)-like distortion of MoO6 octahedra splits Mo 4d tion), the substitution of W for Sn was validated by X-ray fluo-
t2g states into an upper dxy state and lower dxz and dyz states. rescence holography (XFH).[22,23] The local environment around
While the energy level of the dxy state is far above the CBM and W reconstructed by XFH was almost equivalent to that of the
releases a carrier electron to the CBM, the dxz and dyz states are host Sn sites (Figure S2, Supporting Information). Dark-field
in the bandgap and trap two electrons with high-spin configura- scanning transmission electron microscopy (STEM) and corre-
tion.[17,18] As a result, the Mo dopant serves as a singly charged sponding energy dispersive X-ray spectroscopy (EDS) measure-
donor (Mo4+), fulfilling the above-mentioned criteria for a high- ments of the WTO film (Figure 1b, x = 1.4 × 10−2) confirmed
μ TCO. that W atoms were homogeneously distributed inside the WTO
In this study, we demonstrate that W is such an “exotic” thin films without any segregation or interdiffusion at the film/
dopant for SnO2, allowing high μ and thus NIR transparency. substrate interface.
The electrical transport properties of epitaxial thin films of The WTO epitaxial thin films showed excellent optical trans-
W-doped SnO2 (WTO) and hybrid density functional theory parency and electrical conductivity. Figure 2a shows optical
(DFT) calculations revealed that group-6 W works as a singly transmittance (T) and reflectance (R) spectra of WTO films
charged donor (W5+) in tetravalent cation-based SnO2. This with various values of x. Synchronized with the decrease in the
unexpected W5+ state originates from the splitting of the W sheet resistance induced by W doping (Figure 2b), the IR trans-
5d t2g-orbitals not only through crystal field based on the point mittance monotonically decreased due to enhanced free carrier
charge model but also through hybridization between the W reflection. Nevertheless, high T was maintained in the wide
5d-orbitals and the O 2p orbitals. wavelength region from ultraviolet to NIR (300−2000 nm) even
for the WTO film with the lowest sheet resistance (13.0 Ω sq−1
at x = 1.4 × 10−2), as reported for polycrystalline WTO films,[21]
2. Results and Discussion demonstrating the potential of WTO films as NIR transparent
conductors.
2.1. W-doped SnO2 as a NIR Transparent Conductor

It was reported that polycrystalline WTO films grown on an 2.2. Charge State of the W in WTO
anatase TiO2 seed layer showed high μ of >80 cm2 V−1 s−1,
leading to high transparency in the wide wavelength region of According to the above-mentioned criteria for a high μ TCO,
400–1950 nm.[21] In polycrystalline WTO films, however, com- we speculate that the W ions in the WTO films exist as singly
plex factors, such as grain boundaries hinder the quantitative charged species (W5+), for which ionized impurity scattering
analysis of electrical properties. Thus, we fabricated epitaxial is weaker than that of doubly charged species (W6+). Indeed,
thin films of WTO to clarify the mechanism behind its high μ. the carrier density (ne) of the WTO films was close to the ideal
Figure 1a shows ω-2θ X-ray diffraction (XRD) patterns for the values assuming 100% activation of W5+ (i.e., each W generated
epitaxial WTO thin films (W amount x ≤ 4.0 × 10−2), where only one electron) for x ≤ ≈0.01. In the WTO film with larger x, ne
the 002 diffraction peaks from SnO2 and TiO2 were observed. saturated at ≈2.1 × 1020 cm−3 (Figure 3a) probably due to the
The reciprocal space map around the 112 diffraction peak for formation of neutral W species (W4+) as discussed later. The
the WTO film indicated epitaxial growth of an almost fully mixed-valence state of W4+/5+ in the WTO film was confirmed
relaxed film on the substrate (inset of Figure 1a). Although the by W L3-edge X-ray absorption spectroscopy (Figure S3 and
lattice constant change with W doping was very small due to Table S1, Supporting Information). Detailed analysis of μ as a
the low dopant concentration (Figure S1, Supporting Informa- function of ne also indicates the presence of the singly charged

Figure 1. a) ω-2θ XRD patterns of WxSn1−xO2 (001) films epitaxially grown on TiO2 (001) substrates. Inset shows a reciprocal space map around the
112 diffraction peak. b,c) Dark field STEM images of the W0.014Sn0.986O2 film and d–g) EDS elemental maps corresponding to the image b).

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Figure 3. a) Carrier density of WTO (001) epitaxial films on TiO2 (001) sub-
strates. The broken line and the dash-dotted line represent the expected
ne when all the doped W ions generate one electron per W (100% doping
efficiency for W5+) and two electrons per W (100% doping efficiency for
W6+), respectively. b) Comparison of μ for the WTO films at 300 K (circles)
with those theoretically predicted from the contribution of intrinsic scat-
tering, μcal (diamonds) for both W5+ and W6+. Hall mobilities limited by
ionized impurity scattering, μiis, are calculated with the Brooks–Herring–
Dingle (BHD) formula and plotted for comparison. Effective mass of the
carrier electrons (m*) evaluated by Drude fitting of the optical reflectance
spectra was used for calculating μiis. c) The calculated thermodynamic
transition levels under the Sn-rich/O-poor regime. The Fermi level ranges
Figure 2. a) Optical reflectance R and transmittance T spectra and from 0 eV (VBM) to 7 eV (3.4 eV above the CBM), with the conduction
b) sheet resistance of WTO (001) epitaxial films grown on m-Al2O3 sub- band region depicted by the orange gradient.
strates. c) Effective masses of electrons in the WTO (001) films deter-
mined by Drude fitting of the reflection spectra in the NIR region. Effective
masses for Sb:SnO2[49] are also plotted for comparison. clearly shows that 1) the dominant n-type defect in WTO is
WSn across the range of chemical potentials, and 2) WSn acts
W5+ state, as described below. Figure 3b compares the experi- as a one-electron donor (i.e., singly charged W5+) if the Fermi
mental μ values of the WTO films measured at room tempera- energy is lower than the (+1/0) transition level occurring around
ture with theoretical ones calculated as μcal = (μlat−1 + μiis−1)−1 0.29 eV above the CBM. Notably, the energy of the (+1/0) transi-
for both W5+ and W6+ states,[20] where μlat is the lattice mobility tion level agrees well with the Burstein–Moss shift (≈0.30 eV) of
associated with phonon scattering [24] and μiis is the Hall the WTO films with saturated ne of ≈2.1 × 1020 cm−3 (Figure S5,
mobility limited by ionized impurity scattering based on the Supporting Information), suggesting that an increase in
Brooks–Herring–Dingle (BHD) formula.[25] As seen from the the density of neutral impurity states limits the ne in heavily
figure, μ increased with increasing ne owing to the enhanced W-doped thin films.
screening of dislocations and/or grain boundaries and reached
136 cm2 V−1 s−1 for the WTO film with ne ≈ 2.1 × 1020 cm−3
(x = 1.4 × 10−2), which was ≈1.6 times higher than that of the 2.3. Impact of Ligand Field on the Electronic Structure of WTO
polycrystalline film (84 cm2 V−1 s−1).[21] Remarkably, this μ value
evidently exceeds μcal for W6+ and is comparable to that for W5+, To understand more closely the role of W as a dopant in SnO2,
indicating that W is doped as W5+, not W6+. This feature was unfolded supercell band structures and density of states for the
further corroborated by low-temperature electrical measure- WTO were calculated (Figure 4). Based on experimental evi-
ments, where phonon scattering can be ignored (μcal = μiis) dence, substitutional W (WSn) in the +1 (ionized) charge state
(Figure S4, Supporting Information). At 10 K, the μ values was considered. It was assumed that W possessed a high-spin
agreed well with μiis for W5+, which supports the conclusion state (with two electrons in the spin-up component), not a low-
that W exists as W5+. spin (with one electron in the spin-up and the other in the spin-
Formation of singly charged W5+ in the WTO films was down component) state because the high-spin state has ≈0.2 eV
rationalized by DFT calculations. Figure 3c displays the ther- lower formation energy than the low-spin state. In the spin-up
modynamic transition level diagram under O-poor conditions, bands (Figure 4a), a filled band of W 5d character forms a mid-
which describes the formation energies as a function of Fermi gap state around 1.63 eV above the valence band maximum
energy and thus provides intuitive information on defect con- (VBM), consistent with the experimental result that W was
centrations for the tungsten species WSn and Wi as well as incorporated as W5+. Note that no optical absorption related
the dominant intrinsic defects, VSn and VO.[26,27] This diagram to this mid-gap state was observed (Figure S6, Supporting

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Figure 4. a) Spin-up (left) and spin-down (right) components of the unfolded band structures and b) density of states (DOS) for WTO in its ionized
form (1+ charge state), in which the VBM is set to 0 eV. The DOS relating to W states is colored in b), and the corresponding bands in a) are numbered
as 1–3. c) Schematic diagram of W 5d t2g states in WTO considering hybridization with the O 2p orbitals. Valence and conduction bands are shaded in
blue and red, respectively. d) Partial charge densities of the W 5d states (bands 1–3 in a)) projected along (left) c-axis and (right) b-axis. Black arrows
in the left panels indicate contribution of O 2pπ orbitals hybridized with d⊥ states of W.

Information), because the optical transition from the W 5d form antibonding states. According to this diagram, the split-
mid-gap state to the Sn 5s-based conduction band minimum is ting of W 5d states in WTO can be rationalized as follows. The
forbidden as previously reported for Mo-doped In2O3.[18] Other lowest energy W-related band (band 1 in Figure 4a) corresponds
clear W-related features can be seen in the localized bands of to d||, and the higher energy bands (bands 2 and 3) to d⊥. The
W 5d character starting around 1.39 eV above the CBM in both partial charge densities of these bands (Figure 4d) verified this
the spin-up and spin-down components, which release one assignment, where the nonbonding feature of the d|| state (band
electron into the CBM. Furthermore, these W-related bands 1) and the antibonding hybridization between the d⊥ and the O
showed negligible contribution at the CBM (Figure 4b). This 2pπ orbitals (bands 2 and 3) are visualized.
implies that the CBM effective mass is not perturbed through These results indicated that not only the crystal field based
doping, resulting in very high mobility, as seen in other transi- on the point charge model but also hybridization with neigh-
tion metal-doped high-μ TCOs such as Ta-doped SnO2[19] and boring oxygen orbitals, which depends on the host crystal
Zr- or Mo-doped In2O3.[17,18] A slightly smaller electron effec- structure, should be considered to develop an exotic transition
tive mass for the WTO films than that of p-block element metal dopant for a high-μ TCO: For example, it is predicted that
(Sb)-doped SnO2 was indeed confirmed by Drude fitting of the WSn would not be a high-μ dopant for Sn-based TCOs with the
optical reflectance spectra (Figure 2c). perovskite structure,[29] such as BaSnO3[30,31] and SrSnO3,[32,33]
The band structures of WTO mentioned above clearly indi- because W 5d t2g states show no further splitting due to their
cated that the high μ stems from the splitting of W 5d states. nonbonding nature in the perovskite lattice. As a result, doubly
In the case of Mo-doped In2O3, the splitting of Mo 4d t2g states charged W6+ becomes the most stable state, which exhibits
is caused by the crystal field of J–T-like distorted MoO6 octa- stronger ionized impurity scattering.
hedra as mentioned above.[17,18] However, the splitting of the W
5d states in WTO cannot be explained by the same scenario,
because similar splitting of the W 5d states occurs even in an 3. Conclusion
undistorted octahedral coordination (Figure S7, Supporting
Information). The mechanism behind the splitting of W 5d We have demonstrated that WTO is a high-μ TCO showing
states can be understood by considering hybridization between excellent transparency in a wide wavelength range from ultra-
the W 5d-orbitals and the O 2p orbitals in addition to the octa- violet (300 nm) to NIR (2000 nm). Comprehensive analysis of
hedral crystal field. As illustrated in a molecular orbital diagram electrical transport properties and DFT calculations revealed
(Figure 4c), the d states of a transition metal in the rutile struc- that a singly charged W5+ state with minimized ionized impu-
ture near the Fermi level generally consist of two states origi- rity scattering is stabilized by the splitting of W 5d t2g states
nating from the t2g orbitals in the octahedral crystal field:[28] in WTO. This splitting stems not only from the octahedral
One d|| orbital directed along the c axis is almost nonbonding, crystal field but also from hybridization with the O 2p orbitals
while two d⊥ orbitals are hybridized with O 2pπ orbitals and surrounding the dopants, whose contribution has not been

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considered in a transition metal-doped TCO so far. Hybridi- Vienna ab initio Simulation Package (VASP).[36–39] The hybrid functional
zation between the metal d orbital and O 2p orbitals is a well- PBE0 formalized by Adamo and Barone[40] was used in order to provide
established concept to understand the electronic structure of an accurate description of the bandgap and electronic properties
relative to experiment as shown previously for SnO2 and other tin-based
a transition metal oxide, and thus would provide a new guide oxides.[19,26,27,41–44] To describe the interaction between the core and
for designing a novel high-μ dopant to obtain a TCO with NIR valence electrons, the projector augmented wave (PAW) method[45] was
transparency. employed. Tungsten defects were simulated in a 2 × 2 × 3 (72 atoms)
supercell expansion of a geometrically optimized unit cell of SnO2.[27]
Each defect supercell was subjected to structural relaxation to a force
convergence criterion of 0.01 eV Å−1 using a plane-wave energy cut-off
4. Experimental Section of 400 eV and a Γ-centered 2 × 2 × 2 k-point grid. The tungsten related
Sample Preparation and Characterization—Thin Film Deposition: limiting phases, W and WO3 were also relaxed to the same accuracy and
(001)-oriented WTO films with thicknesses of 130–150 nm were grown with Γ-centered k-point meshes of 18 × 18 × 18 and 4 × 4 × 3, respectively.
on TiO2 (001) and Al2O3 (10–10) (m-plane) by pulsed laser deposition Defect Formalism: For a defect in charge state “q” the formation
(PLD) using a KrF excimer laser. Sintered pellets of WTO with nominal energy ΔHf (D,q) can be described as follows
W/(Sn+W) ratio of 6 × 10−4 –5 × 10−2 were used as PLD targets. The
repetition rate and laser fluence were fixed at 2 Hz and 1–2 J cm−2, ∆H f (D,q) = (E D,q − E H ) ± ∑ni(E i + µ i ) + q(E Fermi + ε H
VBM + vpot ) + E corr [q] (1)

respectively. The typical growth rate was 0.18–0.21 Å per shot. The base
i 
pressure of the growth chamber was maintained at 1 × 10−8 Torr. The where ED,q and EH refer to the total energy of the defect (in charge
oxygen partial pressure and substrate temperature during film growth state “q”) and undoped (host) supercells, respectively. The chemical
were set at 1 × 10−2 Torr and 500 °C, respectively. potentials and elemental energies are considered as well, where n
Structure and Chemical Composition: The crystal structures of the films is the number of species “i” added to or taken away from an external
were evaluated by XRD measurements using a four-circle diffractometer reservoir, Ei is energy of species i, and μi is the associated chemical
(Bruker AXS, D8 DISCOVER). The W composition of the WTO films, x in potential. EFermi is related to the VBM of the host (εHVBM) and νpot is a
WxSn1−xO2, was evaluated by using energy dispersive X-ray spectroscopy term aligning the electrostatic potential of the defective supercell to that
coupled with scanning electron microscopy (SEM-EDX) (JEOL, JSM- of the host. The last term in Equation (1), Ecorr[q], is a postprocessing
7100F with JED-2300). The electron accelerating voltage was set at correction pertaining to the finite size of the supercell and consists of
5.0 kV to reduce the background signal from the substrate. The results two parts: an image charge correction and a band filling correction. The
of SEM-EDX measurements were calibrated by a calibration curve image charge correction is applied due to the long-range nature of the
prepared based on the x values of a series of WTO films determined by Coulombic interaction of a defect with its periodic images. The scheme
Rutherford backscattering spectrometry (RBS). The RBS measurements implemented herein is that formalized by Lany and Zunger[46] and
were performed with a 35Cl7+ beam accelerated to 38.4 MeV generated by adapted for noncubic systems by Hine and Murphy.[47] Due to unrealistic
a 5 MV tandem accelerator (Micro Analysis Laboratory, The University band-filling present in finite-sized supercells, a correction by Lany and
of Tokyo [MALT]).[34] The incident angle of the 35Cl7+ beam was set as Zunger[46] is applied to recover the “dilute-limit.”
75° from the surface normal and backscattered particles were collected The formation of defects in SnO2 can be defined within two limits
at 150° from the beam incident direction. A W Lα X-ray fluorescence arising from the formation enthalpy of SnO2 (∆Hf [SnO2] = −5.27 eV,
(8.4 keV) hologram of the WTO (001) epitaxial film (x = 1.4 × 10−2) was exp. = −5.98 eV[48]) which are the Sn-rich/O-poor and Sn-poor/O-rich
measured at the BL13XU beamline of SPring-8 of the Japan Synchrotron bounds. The Sn-rich/O-poor boundary is restricted by the formation
Radiation Research Institute. Details of the experimental setup have of Sn(s) such that the chemical potentials of Sn and O are ∆μSn ≤ 0 eV
been reported elsewhere.[22] The ranges of the exit and azimuthal angles, and ∆<O ≥ 2.64 eV, respectively. The Sn-poor/O-rich limit is limited
θ and ϕ, were θ = 0–75° and ϕ = 0–360°, and the angles were varied by the formation of O2(g), and thus the chemical potentials are now
in steps of 1° and 0.25°, respectively. The energy of the incident X-rays ∆μSn ≤ −5.27 eV and ∆μO ≥ 0 eV for Sn and O, respectively. Considering
was set to 12.2–15.7 keV with energy steps of 0.5 keV. The atomic image the growth condition of the WTO film, the Sn-rich/O-poor condition was
around W atoms was reconstructed from these holograms by using the focused on in this study. Further limits were placed on the dopant (W)
Barton algorithm.[35] W L3-edge X-ray absorption spectra of the WTO chemical potentials due to the formation of WO3 (∆Hf [WO3] = −8.39 eV
epitaxial films (x = 5.5 × 10−3 and 1.4 × 10−2) were measured at the same exp = −8.73 eV[48]). Within the Sn-rich/O-poor and Sn-poor/O-rich limits,
beamline in fluorescence mode. The cross-sectional microstructure the chemical potential limits of tungsten in SnO2 are ∆µW ≤ −0.48 eV
and elemental maps of the films were observed by using a scanning and ∆µW ≥ −8.39 eV, respectively. The thermodynamic transition levels
transmission electron microscope (JEOL JEM-ARM200F, 200 kV) with an were calculated using the following equation
EDX detector (Thermo Fisher Scientific, NSS). The specimen for STEM
observation was prepared by using a focused ion beam system (Hitachi q ∆H f (D,q) − ∆H f (D,q′)
εD = (2)
High-Tech, XVision 200TB). q′ q′ − q 
Optical and Electrical Transport Properties: The optical transmittance
T and reflectance R of the films were measured by using a UV/visible/
near-infrared spectrophotometer (STEM) (JASCO, V-670) and an FT-IR
spectrometer (JASCO, FT/IR-4100). Electrical transport properties Supporting Information
of the films were measured using the six-probe method with the
Supporting Information is available from the Wiley Online Library or
standard Hall bar geometry (1 × 2.4 mm2). A laboratory-constructed
from the author.
system equipped with a 2 T electromagnet (at room temperature) and
a commercially available system (Quantum Design, physical property
measurement system (PPMS Model 6000), at low temperature) were
used for the measurements. Ag or In electrodes were used for ohmic Acknowledgements
contacts. Current–voltage characteristics and Hall voltage-magnetic field
characteristics were measured repeatedly (at least twice) to confirm the This work was partially supported by JSPS Grants-in-Aid for
reliability and reproducibility of the measurements. Transformative Research Areas (A) ”Hyper-Ordered Structures Science”:
Computational Methodology—Theoretical and Modeling Methods: Grant Nos. 20H05878 and 20H05881, the Engineering and Physical
Computational calculations were carried out using DFT within the Sciences Research Council (EPSRC) (Grant No. EP/ N01572X/1),

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and Nanotechnology Platform project by the Ministry of Education, [10] K. Ellmer, J. Phys. D: Appl. Phys. 2001, 34, 3097.
Culture, Sports, Science and Technology of Japan (Grant Nos. [11] S. C. Dixon, D. O. Scanlon, C. J. Carmalt, I. P. Parkin, J. Mater.
JPMXP09A20UT0246 and JPMX09A20NM0084). The authors are grateful Chem. C 2016, 4, 6946.
to the UK Materials and Molecular Modelling Hub for computational [12] Y. Meng, X. Yang, H. Chen, J. Shen, Y. Jiang, Z. Zhang, Z. Hua, Thin
resources, which was partially funded by EPSRC (EP/P020194/ 1), and Solid Films 2001, 394, 218.
to UCL for provision of the Legion, Myriad, and Grace supercomputers. [13] A. E. Delahoy, S. Y. Guo, J. Vac. Sci. Technol., A 2005, 23, 1215.
Via the membership in the UK’s HEC Materials Chemistry Consortium, [14] M. F. A. M. van Hest, M. S. Dabney, J. D. Perkins, D. S. Ginley,
which is funded by EPSRC (EP/L000202, EP/R029431), this work M. P. Taylor, Appl. Phys. Lett. 2005, 87, 032111.
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