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02.Metal-Semiconductor Junction
02.Metal-Semiconductor Junction
02.Metal-Semiconductor Junction
Metal-Semiconductor Junction
March-10, 2021
Contents:
1. Ideal metal-semiconductor junction in TE
2. Ideal metal-semiconductor junction outside equilibrium
Key questions
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= +
1
= ( − )
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� Electrostatics in TE:
In semiconductor:
· close to the M-S interface: − ℎ
· farther away: −
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Do
:
· Volume charge density:
· Electric field:
ℰ ≃ ( − ) in SCR: 0 ≤ <
ℰ ≃0 in QNR: <
2∅
=
Maximum field:
Key dependencies:
· ↑ → ↓ → |ℰ | ↑
· ↑ → ↑ → |ℰ | ↑
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Depletion approximation valid if 0 ≪ , or ∅ ≫ 3
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Also:
∅ → ∅ − > ∅
Then:
> = 0
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2 ∅ −
= = ( = 0) 1 −
∅
= ℰ ( = 0) 1−
∅
� Depletion capacitance
Examine change in SCR charge
:
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= ()
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Key conclusions
• Junction of dissimilar materials Þ dipole charge at interface
Þ built-in potential (∅ ).
• Relative band alignment between metal and semiconductor
characterized by ℎ ℎℎ , .
• Simple theory for does not apply Þ must use
experimentally determined values.
• In M-S junction, charge dipole occurs at interface; typically a
depletion region is created on semiconductor side.
• Built-in potential of M-S junction:
∅ = −
Key conclusions
• Application of voltage to M-S junction impacts ∅ directly Þ
, ℰ()
• Modulation of depletion region width with respect to voltage
gives rise to
.
• Order of magnitude of key parameters in Si at 300 K:
- Schottky barrier height: ~ 0.4 − 0.8 (depends on
metal and doping type).