Development of two-dimensional

piezoelectric laser scanner with large

steering angle and fast response
characteristics
Cite as: Rev. Sci. Instrum. 90, 065004 (2019); https://doi.org/10.1063/1.5091023
Submitted: 31 January 2019 . Accepted: 05 June 2019 . Published Online: 28 June 2019

Ho-Sang Kim, Dae-Hee Lee, Deog Jae Hur, and Dong-Chan Lee

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Development of two-dimensional piezoelectric

laser scanner with large steering angle and fast
response characteristics
Cite as: Rev. Sci. Instrum. 90, 065004 (2019); doi: 10.1063/1.5091023
Submitted: 31 January 2019 • Accepted: 5 June 2019 •
Published Online: 28 June 2019 • Corrected: 17 September 2019

Ho-Sang Kim,1,a) Dae-Hee Lee,1 Deog Jae Hur,1 and Dong-Chan Lee2

AFFILIATIONS
1
Center for Robot and Manufacturing Technology, Institute for Advanced Engineering, Yongin, Kyonggi-do 17180, South Korea
2
Neosystem, Co. Ltd., 305 Chungho BLD, 501, Baekjegobun-ro, Songpa-gu, Seoul 05545, South Korea

a)
Author to whom correspondence should be addressed: hoskim@iae.re.kr

ABSTRACT
We describe a two-dimensional piezoelectric laser scanner designed and tested to obtain a large steering angle of 1○ and fast response
characteristics of 200 Hz. To overcome the relatively small expansion capability of piezoelectric actuators, the displacement amplification
mechanisms with two levers in series are employed to magnify the end tip of the lever which is connected to a 0.5-in. glass mirror. For fast
response characteristics, the natural frequencies of the hinge mechanisms were calculated by using the finite element analysis technique.
In order to evaluate the performance of the proposed scanner, the hinge mechanism has been manufactured of titanium alloy and the natural
frequencies of the hinge mechanism have been measured by sine sweep test. Also, the actual machining test on the burning paper has been
done by using a high power laser, and it is shown that the proposed laser scanner is capable of steering the laser beam 1○ with a frequency of
200 Hz.
Published under license by AIP Publishing. https://doi.org/10.1063/1.5091023., s

I. INTRODUCTION
The advance of precision actuators and guide structures allows
for the development of optical instruments which have a beam
pointing technology with nanometer accuracy.1–5 It can be uti-
lized for interferometer and magnetic imaging applications.6,7 Also,
for the semiconductor equipment in which precise beam steer-
ing and fast moving time are important, an optical instrument
such as a laser scanning device is applied in the microlaser fab-
rication machine.8–10 For beam pointing and fast steering, typ-
ically, galvanoscanners and polygon mirrors have been used in
the industrial field. First, galvanoscanners can meet the tilting
angle and mirror size but cannot meet the speed and resolu-
tion because of the electric motor and mechanical bearing.11–14
Second, the polygon mirror can satisfy the requirement of the
tilting angle, but it is not adequate for the microlaser fabrica-
tion application requiring an accurate machining profile with high
resolution.9,15
A recent development in optical instrument is the use of a two-
dimensional laser scanner by incorporating the precision actuators,
for example, voice coil actuators and piezoelectric actuators. A voice
coil actuator is an electromagnetic actuator that generally consists
of coils of winding placed in a magnetic field, and force is pro-
duced when current flows through the coil. Although it can generate
a large steering angle, it has disadvantages such as low resonance
frequency and high power consumption characteristics.16–19 By con-
trast, piezoelectric laser scanners have several advantages, for exam-
ple, high speed and resolution and compact size. But they have a
small scanning range due to the small displacement of a piezoelectric
actuator—only tens of micrometers.20–24
In most optics applications in the industrial field, especially
microlaser fabrication, a steering angle of several degrees and a
repeating motion of hundreds of times per second are required.
Also, the overall size of the scanner should be as small as possible
because the speed of the microlaser fabrication machine increases.
But the steering angle of the piezoelectric laser scanner is limited
due to the small expansion capability of the piezoelectric actuators.
Also, it is difficult to obtain the fast response characteristics because
the lever mechanism can degrade the speed of the piezoelectric laser
scanner.25–27

Rev. Sci. Instrum. 90, 065004 (2019); doi: 10.1063/1.5091023 90, 065004-1
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In this paper, we present a two-dimensional laser scanner TABLE I. Design requirements for the high-speed microlaser fabrication machine.
based on four piezoelectric actuators, which can steer 1○ in two
directions with high speed characteristics of 200 Hz. To overcome Tilting angle of the scanner 1 (deg)
the small expansion capability of piezoelectric actuators, the dis- Operational speed of the scanner 200 (Hz)
placement mechanism with two levers in series was used to magnify Tilting resolution of the scanner 16 (μrad)
the end tip of the lever connected to a 0.5-in. mirror. Also, to obtain Laser beam 532 (nm)
the high-speed response characteristics of the piezoelectric scanner, Laser beam diameter 30 (mm)
the natural frequencies of the designed scanner are calculated by Scan area 20 × 20 (mm2 )
using the finite element analysis technique. To verify the perfor- Focal spot size 10 (μm)
mance of the proposed piezoelectric scanner for the microlaser pro-
cessing application, the prototype was built of titanium which has
a very high specific stiffness, and its open loop frequency response
the high-speed microlaser fabrication machine which can fabricate
characteristics have been investigated. The actual machining test of
small mechanical parts such as the optical ferrule or switch, as
the proposed laser scanner on the burning paper is performed to
shown in Fig. 1(a). This machine consists of three moving slides to
show that it is capable of steering the laser light 1○ with a frequency
move the work piece, a piezoelectric scanner to steer the beam in
of 200 Hz.
two directions, and a granite bed to prevent the deformation due
to the thermal gradient. Also, the optical setup of this machine is
shown in Fig. 1(b). The laser beam is reflected on the glass mir-
II. DISPLACEMENT AMPLIFICATION MECHANISM ror which is steered by a piezoelectric scanner, and it reaches the
FOR TWO-DIMENSIONAL PIEZOELECTRIC SCANNER focal plane through the telecentric F-θ lens, as shown in Fig. 1(b).
The design requirements of the two-dimensional piezoelectric The two-dimensional piezoelectric scanner should be able to gen-
scanner in our research are shown in Table I. These come from erate precise motion with a relatively small tilting angle, high

FIG. 1. Two-dimensional piezoelectric

scanner for the microlaser fabrica-
tion machine. (a) Microlaser fabrication
machine. (b) Optical setup. (c) Solid
model of the proposed two-dimensional
piezoelectric scanner.

Rev. Sci. Instrum. 90, 065004 (2019); doi: 10.1063/1.5091023 90, 065004-2
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resolution, and high speed. There can be other options satisfying
these design requirements—galvanoscanners and polygon mirrors.
First, galvanoscanners can meet the tilting angle and mirror size
but cannot meet the speed and resolution because of the electric
motor and mechanical bearing. Second, the polygon mirror can sat-
isfy the requirement of tilting angle, but it is not adequate for the
microlaser fabrication application requiring an accurate machin-
ing profile with high resolution. Therefore, we chose the preci-
sion laser scanner based on the piezoelectric actuators because they
can steer the mirror at a relatively small angle (1○ ) and generate
accurate motion with high resolution (16 μrad) and high speed
(200 Hz).
The details of a two-dimensional piezoelectric scanner assem-
bly in this investigation are shown in Fig. 1(c). It is composed of
a main body, a mirror mount, a cover, a 1st lever, a 2nd lever,
a support structure, several elastic hinges, and four piezoelectric
actuators. A 0.5-in. glass mirror is mounted on the mirror mount,
which is moved by the 2nd lever. Four piezoelectric actuators are
of stacked type, 20 mm in length and 5 × 5 mm2 in cross sec-
tion, which are preloaded by the support structure. The piezoelec-
tric actuator bolted to the main body pushes the 1st lever back
and forth, following the command signal provided through a high
FIG. 2. Displacement amplification mechanism.
Rev. Sci. Instrum. 90, 065004 (2019); doi: 10.1063/1.5091023
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voltage amplifier. The motion of the piezoelectric actuator is trans-
mitted through the 1st and the 2nd lever, and the displacement of the
end point of the 2nd lever is magnified according to the magnifica-
tion ratio which results in rapid motion of the 0.5-in. mirror in two
directions.
In terms of geometric parameters, we manufactured the main
body of our piezoelectric scanner assembly in the size of 52 (horizon-
tal) × 21 (vertical) × 44 (thickness) (mm). To realize the arm length
of the lever mechanism for the tilting angle and sufficient stiffness,
we determined the horizontal and vertical sizes of the lever hinges.
Also, 4 piezoelectric actuators were selected considering the driving
forces according to the mass of the mirror and requirement of speed.
The thickness of the levers was designed to prevent the deflection
of each lever. Also, the length of the mirror mount was determined
considering the maximum stress in the neck of the mount should
not exceed the yield stress of titanium, and the tilting angle is gen-
erated above the design requirement (1○ ) through the finite element
analysis result.
Figure 2 shows the schematic of the displacement mechanism.
When the piezoelectric actuator pushes the 1st lever upward, its
expansion can be amplified at the end point of the 1st lever. Also,
another expansion can happen at the 2nd lever and amplify the
motion of the 2nd lever. The rotation of the 2nd lever makes the
mirror mount deflect in two directions, θx and θy . In this research,
two amplification ratios, 2.675 and 5.435, were used for the 1st and
the 2nd lever, respectively. Although the maximum expansion of the
piezoelectric actuator is 15 μm, the actual expansion of the piezoelec-
tric actuator becomes smaller after it is integrated into the structures.
Also, the deflection of the hinge can occur. Therefore, we assumed
the expansion of the piezoelectric actuator is limited to 20–30%
of the maximum expansion and the tilting angle can be estimated
as 1.8○ –2.7○ .
To verify the capability of the designed scanner, the displace-
ment of the mirror mount was estimated by using the finite element
analysis technique when the force of the piezoelectric actuator is
150 N, as shown in Fig. 3(a). As a result of computation, the tilt-
ing angle of the mirror mount reaches 1.07○ . Also, Fig. 3(b) shows
that the maximum von Mises stress level at the mirror mount part is
calculated as 238 MPa, and this is below the allowed yield stress level
of the titanium alloy. Also, for the high-speed response characteris-
tics, the natural resonance frequency was estimated to be 891 Hz,
as depicted in Fig. 3(c). This value is 4–5 times larger than the
200 Hz required for the successful operation of the piezoelectric
scanner.
III. PERFORMANCE TESTING OF TWO-DIMENSIONAL
PIEZOELECTRIC SCANNER
A proposed two-dimensional piezoelectric scanner with a
52 × 41 × 50 (mm) hinge mechanism was fabricated, as shown
in Fig. 4(a). To manufacture a very thin hinge with a thickness of
0.3 mm inside the mechanical structure of the piezoelectric scan-
ner, the precision wire EDM (Electrical Discharge Machining) tech-
nique was applied to the titanium alloy (Grade 5). Also, the shape
of the 2nd lever was modified to reduce its mass. Figure 4(b)
shows the two-dimensional piezoelectric scanner assembly with the
cover and support structure. In order to test the operational per-
formance, a 0.5-in. glass mirror is bolted to the mirror mount
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FIG. 3. Finite element analysis result of the proposed two-dimensional piezoelectric scanner. (a) Static deformation. (b) von Mises stress distribution. (c) First resonant
frequency (891 Hz).

and a laser beam is inputted to the mirror. Then, we can detect angle θ, the reflected laser beam moves at twice the steering angle,
the reflected beam reaching the measurement surface to which 2θ, in the measurement surface. Therefore, PSDM can detect the dis-
a high-resolution noncontact Position Sensing Detector Mount tance d that the reflected beam moves in the measurement surface.
(PSDM) is fixed [Fig. 5(a)]. When the scanner is rotating at steering Also, the steering angle can be calculated by dividing the distance d

FIG. 4. Manufactured two-dimensional

piezoelectric scanner. (a) Displacement
amplification mechanism. (b) Photo-
graph.

Rev. Sci. Instrum. 90, 065004 (2019); doi: 10.1063/1.5091023 90, 065004-4
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FIG. 5. Motion measurement of the piezoelectric scanner. (a) Schematic. (b) Measurement result.

FIG. 6. Schematics of performance testing of the proposed

two-dimensional piezoelectric scanner.

FIG. 7. Bode plot of the piezoelectric scanner from 0 to 500 Hz. (a) Magnitude. (b) Phase.

Rev. Sci. Instrum. 90, 065004 (2019); doi: 10.1063/1.5091023 90, 065004-5
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by the distance L between the measurement surface and the center
of the mirror of the piezoelectric scanner. Typically, the displace-
ment signal ranges from −5 mm to +5 mm with a resolution of
about 0.05 μm, and the bandwidth of the PSDM is set at 300 Hz.
As shown in Fig. 5(b), the first pair of piezoelectric actuators was
moved upward from 0 to +5 V, the point at which the reflected
laser beam moves in the x direction inside the measurement surface.
Also, it can move in the y direction at a constant x-coordinate
when the other pair of actuators moves downward from 0 to
+5 V. Thus, the rectangle shaped trajectory can be displayed in
the oscilloscope, showing the maximum steering angles which the
two-dimensional piezoelectric scanner can produce. The measure-
ment of the steering angle showed that the piezoelectric scanner
can steer the laser by 2.12○ and 1.22○ in θx and θy directions,
Rev. Sci. Instrum. 90, 065004 (2019); doi: 10.1063/1.5091023
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respectively. The difference is due to different expansions of the
piezoelectric actuators in each pair. In most cases, piezoelectric
actuators can produce different levels of expansions because of the
nonlinear hysteresis when we used the actuator without the inter-
nal feedback sensor, for example, strain gauge which can mea-
sure the displacement of the end point. Also, the mirror mount
in our research can move freely in the z-direction because there is
no mechanical constraint. This can result in difficulty in rotating
the scanner precisely because the rotation center of the mirror is
changing.
For the measurement of dynamic characteristics of the two-
dimensional piezoelectric scanner, a test bed was built using a
laser, a dynamic signal analyzer, a voltage amplifier, and a PSDM,
as shown in Fig. 6. The voltage amplifier provides the voltage
FIG. 8. Resolution test result of the piezoelectric scanner.
(a) θx direction. (b) θy direction.
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FIG. 9. Tracking result of the piezoelectric scanner in the θy direction. (a) Block diagram for feedback control. (b) Tracking result (amplitude 0.43○ and frequency 10 Hz).
ranging from 0 to 100 V for a piezoelectric scanner by getting the
input signal with the swept sine method from the dynamic sig-
nal analyzer, and it can supply a maximum peak output current of
60 mA for fast expansion of the piezoelectric actuator that behaves
like a capacitive load. The output signal from the PSDM can mea-
sure the steering angle of the scanner, and therefore, the dynamic
characteristics of the piezoelectric scanner can be found by ana-
lyzing these steering angles and input signals with the swept sine
signal.
Figure 7 shows the frequency response plot when the 0.5-in.
mirror was adopted at the top of the two-dimensional scanner.
Rev. Sci. Instrum. 90, 065004 (2019); doi: 10.1063/1.5091023
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When the two actuators excite the hinge structures with frequencies
ranging up to 500 Hz (in the θx or θy direction), the plot provides
an insight into the resonance features of the piezoelectric scanner,
including the prominent peaks at frequencies of 349 Hz and 377 Hz.
This characteristic is due to the structural properties of 1st and 2nd
levers and the mass of the mirror. Also, this result is in good agree-
ment with the one by finite element analysis as in Fig. 3(c) if we
consider the weight of the glass mirror at the top of the piezoelectric
scanner.
Figure 8 shows the test result when the step movements of
0.879 μm and 1.357 μm in x and y direction in the measurement
FIG. 10. Hardware configuration for the
machining test on the burning paper.
(a) Schematic. (b) Photograph of the
machining test bed. (c) Photograph of
the scanner and F-θ lens.
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surface of the PSDM were made. It was conducted to evalu-

ate the resolution of the two-dimensional scanner and shows
that the piezoelectric scanner can be moved 8.79 and 13.57 μrad
in θx and θy directions considering the focal distance of the
F-θ lens.
For practical use, we performed the feedback control exper-
iment in which the piezoelectric scanner can steer the laser light
by using the corrected beam feedback, as shown in Fig. 9(a). The
beam position of the PSDM is compared with the command input—
sinusoidal wave 10 Hz—from the function generator. Also, the con-
trol input can be calculated by multiplying the proportional and
integral gains with the beam position error, which is the differ-
ence between the actual beam position and the command input. In
addition, we added the feedforward input to the power amplifier
in order to improve the tracking performance. Figure 9(b) shows
the tracking result of the piezoelectric scanner in the θy direction
for the command input which is a sinusoidal wave with an ampli-
tude of 0.43○ and a frequency of 10 Hz. As shown in Fig. 9(b), the
actual beam position can follow the command input well, but the
amplitude error of 31% in the peak-to-valley level remains. This is
because there is a hysteresis characteristic of the piezoelectric actu-
ator and there is no mechanical constraint in the z-direction to fix
the mirror mount so that the center of the mirror of our piezoelec-
tric scanner may move in the vertical direction during the steering
motion.

IV. MACHINING EXPERIMENT ON BURNING PAPER

AND DISCUSSIONS
Practical machining experiments of the piezoelectric scanner
were performed on the optical table of the laboratory in which the
temperature can be controlled within 20○ ± 0.5○ and the humidity
within 50%. Figures 10(a) and 10(b) illustrate the hardware con-
figuration and photograph of the test bed used for the machining
experiment on the burning paper. The test bed consists of three main
parts: a green laser to generate the laser beam to the piezoelectric
scanner, a piezoelectric scanner to move the 0.5-in. mirror in two
directions, and an optical displacement sensor, PSDM, to measure
the positions of the reflected laser beam in two directions. As shown
in Fig. 10(c), the F-θ lens was used to focus the steered laser on the
flat sensing area of the PSDM. Sinusoidal waves with frequencies of
100 and 200 Hz, as shown in Figs. 11(a) and 11(b), were machined
on a burning paper in square shape under the conditions of 1 kHz
laser repetition rate and 1 W power. The machined surface on the
burning paper yields a distorted sinusoidal shape with an amplitude
of 3.5 mm in peak-to-valley, which results from the hysteresis char-
acteristics of the piezoelectric actuator and optical distortion of the
F-θ lens used in the test bed. Also, it shows that the two-dimensional
piezoelectric scanner can produce sinusoidal motions with ampli-
tudes above 1○ in θx and θy directions because the focal length of
the F-θ lens is 100 mm. Although there exists distortion of the sinu-
soidal shapes on the whole, Figs. 11(a) and 11(b) show the 100 Hz
and 200 Hz wave input cases, and it is seen that the laser pulses
at 1 kHz are machined on the burning paper at the time interval
of 0.01 ms. Also, open loop operation of the scanner was applied
because the position of the focal spot cannot be measured. If we can
measure the position in the future, the distortion can be reduced
dramatically.
FIG. 11. Machining result on the burning paper by the proposed two-dimensional
piezoelectric laser scanner. (a) 100 Hz. (b) 200 Hz.
V. CONCLUSIONS
The two-dimensional piezoelectric scanner was developed to
steer the laser beam 1○ with fast response characteristics of 200 Hz.
For testing the piezoelectric scanner, a test bench was built and its
performance was evaluated. To magnify the displacement of the end
point of the 2nd lever connected to the 0.5-in. mirror, displacement
amplification mechanisms with two levers in series were employed.
Also, to secure the fast response characteristics, the natural frequen-
cies of the hinge mechanism were calculated by using the finite ele-
ment analysis technique. To verify the performance of the proposed
piezoelectric scanner, the open loop frequency response function
was evaluated. In addition, we performed the closed loop control
experiment by applying the proportional-integral feedback control
technique and proved the feasibility of the piezoelectric scanner for
precise control of the beam scanning position. Finally, the machin-
ing result on a burning paper with a high power laser shows that the
piezoelectric scanner can machine the surface of the burning paper
in a sinusoidal shape with an amplitude of 3.5 mm and a frequency
of maximum 200 Hz. The summary of performances of the piezo-
electric scanner in this research is shown in Table II. As a further
research, adding a mechanical constraint in the z-direction to fix the
mirror mount and a more effective feedback control algorithm for

Rev. Sci. Instrum. 90, 065004 (2019); doi: 10.1063/1.5091023 90, 065004-8
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7
TABLE II. Summary of the performances of the piezoelectric scanner in this paper. G. K. Perkins, M. Kustov, E. Lovell, L. F. Pettifer, and L. F. Cohen, Rev. Sci.
Instrum. 89, 065111 (2018).
8
Tilting angle 1.22 (deg) (21 mrad) J. Kim, H. Youn, and B. Kang, Int. J. Precis. Eng. Manuf. 18(8), 1103–1109
(2017).
Axes 2 (θx , θy ) 9
U. Loeschner, J. Schille, A. Streek, T. Knebel, L. Hartwig, R. Hillmann, and
Resolution 13.57 (μrad)
C. Endisch, J. Laser Appl. 27, S29303 (2015).
Mirror size 14 (mm) 10
S. Ueda, Y. Kuroki, and M. Hirata, Electr. Eng. Japan 198(1), 54–64 (2017).
Operating frequency 200 (Hz) 11
B. G. Chae, Y. Ichikawa, G. C. Jeong, Y. S. Seo, and B. C. Kim, Eng. Geol. 72,
Resonant frequency 349 (Hz) 181–199 (2004).
12
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13
overcoming the hysteresis characteristics will improve the scanning M. Takahashi, K. Kawasaki, H. Ohba, T. Ikenaga, H. Ota, T. Orikasa, N. Adachi,
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K. Seki and M. Iwasaki, IEJ J. Ind. Appl. 3(1), 10–17 (2014).
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16
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