SAMIKSHA PATEL 210100130

Laser matter interaction in microfluidic devices and the parameters and

fabrication process of 3D micro-structures using femtosecond pulsed lasers.

1.1.Aim:
To study the interaction of femtosecond
LASER on Soda-lime glass sample

1.2.Objective:
To study the characteristics such as length,
width, roughness and aspect ratio and their
variation with the scanning speed of the
femto-second LASER.
The experimental setup
2.1.Experimental setup & specifications
The experimental setup consists of the following: The process parameters to be used in this
Galvoscanner: A galvoscanner is a device used experiment are as follows:
to steer a laser beam rapidly and precisely
across the specimen surface.
F-theta Lens: This lens helps in maintaining a
constant focusing position over the specimen,
ensuring a flat field of view.
Target (Specimen - Soda Lime Glass): The
soda lime glass specimen is the surface on
which the microfluidic channel will be
constructed.
Stepper Motor: The stepper motor controls the
movement of the xyz stage, allowing precise
positioning of the specimen.
Focusing Lens: This lens is used to focus the
laser beam onto the surface of the specimen.
Flip Mirror: The flip mirror is used to direct the
laser beam towards the galvoscanner or bypass
it, depending on the need.
XYZ Stage: The XYZ stage provides controlled
movement in three dimensions (x, y, and z) to
position the specimen accurately. Here, the power is taken to high 8W. The pulse
Micro Position Controller: This device controls repetition rate is 20 kHz and the scanning speed
the movement of the XYZ stage, enabling is varied- 20mm/s, 30mm/s and 50mm/s.
precise positioning and alignment of the
specimen.
2.2. Experimental Procedure
Beam Expander: The beam expander is used
to adjust the diameter of the laser beam, The procedure to carry out the experiment is as
ensuring it matches the requirements for follows:
micromachining.
Mirrors: Mirrors are used to redirect and guide Step-1: Cleaning the sample:
the laser beam through the optical path as
needed.
SAMIKSHA PATEL 210100130

A Soda-lime glass specimen of thickness 1.19

mm is taken and is cleaned with acetone (or
hand sanitizer) so as to remove any dust and
impurities.
Step-2: Setting up the software:
The Galvoscanner software- ScanWorld is used
in this experiment. We enter details such as
channel length= 10mm and width=0.5mm,
scanning speed= 20mm/s. Type of scanning is
set to be unidirectional (since serpentine causes
damage)
Step-3: Focussing the LASER:
Step-6: Characterisation:
A similar rough sample is taken and placed on
the XYZ stage. The system is switched on. When We use an optical microscope for the purpose of
the Galvoscanner starts working, we observe the characterisation. The sample is placed under the
specimen under work and keep adjusting its microscope and settings are done on the Zeta
position in the z-direction. We stop adjusting the software. The width, depth and roughness are
location at the instant when we observe the measured and noted.
brightest spot. We do this so as to set the focal
point on the specimen otherwise ablation will
not be efficient.
Step-4: Ablating the specimen:
When the LASER has been focussed, we replace
the rough sample with the actual specimen and
repeat Step-2. We set the Power to be 8W. We
repeat the process for scanning speeds of 20,30
and 50mm/s.

Optical microscope

The specimen after the experiment

Step-5: Removing the debris:

We now place the sample in an Ultrasonic
cleaner. Ethanol is poured into it until the sample
just submerges in it. We then set the
temperature as 40 degree celsius and the time The 3D analysis of channel using Zeta software
as 5 minutes. After 5 minutes, the sample is
taken out. (Observing width and depth of the channel)
SAMIKSHA PATEL 210100130

because the Soda Lime specimen contains

Silicon Dioxide which gets converted into white
coloured Si2O on interaction with LASER. To
remove such a layer, the processed sample
needs to be dipped in KOH or HF.

Brittle layer at high powers: It was observed that

when we carried out ablation at lower power
such as 2W, the white layer of Si2O was very
difficult to remove whereas at higher powers the
layer was brittle and could be removed with just
a bit of disturbance. This is because at lower
Observing roughness
temperatures, the layer gets absorbed onto the
surface of the specimen.

2.3.Results Depth of Ablation decreases with Increased

Scanning Speed: When the scanning speed is
increased, the laser spends less time at any
given point on the material's surface. This
means that the energy delivered to a specific
point during ablation decreases, leading to a
Graphs: shallower ablation depth. The laser has less
time to interact with the material and remove
material in a more confined manner.

Width of Microfluidic Channel decreases with

Increased Scanning Speed: Higher scanning
speeds mean that the laser is moving faster over
the material. As the laser moves quickly, the
energy is distributed over a wider area, leading
to a narrower ablation channel. The laser is
effectively "smearing" the energy over a larger
surface area, resulting in a narrower channel.

Roughness of Microfluidic Channel decreases

with Increased Scanning Speed: Faster
scanning speeds mean that the laser is not
dwelling on any specific point on the material for
an extended period. This can result in a
smoother ablation surface with less opportunity
for irregularities or roughness to develop. The
rapid movement of the laser helps to minimize
the formation of rough features.
Aspect ratio vs scanning speed
3.2.Conclusions:
3.1.Observations and discussion: In conclusion, the interaction of the
femtosecond laser with Soda-lime glass
specimens for microfluidic channel fabrication
White deposition after processing has been studied with a focus on parameters
(Densification): White deposits were observed such as scanning speed. The experimental
after the specimen was ablated with LASER. It is setup provided precise control over the laser
SAMIKSHA PATEL 210100130

beam using a galvo scanner and F-theta lens,

ensuring accurate micro-structuring. The
process involved cleaning the sample, setting up
the software, focusing the laser, ablating the
specimen at varying scanning speeds, and
characterizing the resulting microstructures.

The results revealed key observations, including

the formation of a white Si2O layer due to silicon
dioxide interaction with the laser, necessitating
post-processing treatment. Additionally, the
study highlighted the brittleness of the Si2O
layer at higher laser powers and its implications
for sample handling. Moreover, the inverse
relationship between ablation depth and
scanning speed was demonstrated,
emphasizing the importance of this parameter in
controlling microfluidic channel dimensions.
Higher scanning speeds resulted in narrower
channels and smoother surfaces, suggesting the
potential for enhanced precision and surface
quality in microfabrication.

Understanding the laser-matter interaction and

the influence of parameters like scanning speed
provides valuable insights for optimizing the
fabrication process of 3D microstructures using
femtosecond pulsed lasers. Further research
and exploration in this domain are essential to
unlock the full potential of laser-based
microfabrication for various applications in
microfluidics and beyond.