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6.5 Watt, 35 GHZ Balanced Power Amplifier MMIC Using 6-Inch GaAs pHEMT Commercial Technology
6.5 Watt, 35 GHZ Balanced Power Amplifier MMIC Using 6-Inch GaAs pHEMT Commercial Technology
Abstract— A 6.5 watt power amplifier MMIC has been developed function of bias and RF drive. The thermal resistance was
for the 35 GHz band. The amplifier exhibits high performance at found to vary by 15% between test pHEMTs with the same
low processing cost through the use of a commercially available gate width and transistor area [16]. This technique was used to
6-inch, 0.15-µm pHEMT process with 100 µm thick substrate. select an optimal transistor layout and to predict the amplifier’s
The balanced four stage amplifier MMIC has 23 dB of gain, 6.5 reliability, which is approximately one million hours MTTF
watts saturated output power (38.1 dBm) with high absorption CW (continuous wave) operation at 55 °C backplate (Fig.1).
load for driving into a mismatch, and power added efficiency of
24%. In terms of output power, this is to the authors’ knowledge
1E+08
the best reported for fully matched GaAs pHEMT MMICs on
100-µm substrates at millimetre-wave frequencies. Mean Time to Failure (Hours) 1E+07
I. INTRODUCTION 1E+05
There is ongoing demand for high power amplifier MMICs
at Ku-, Ka- and Q-bands with reduced cost [1]-[6]. The power 1E+04
amplifier MMIC reported in this paper was designed to meet
this challenge in the 35 GHz (i.e. Ka) band. A standard 1E+03
30 40 50 60 70 80 90 100 110 120 130
commercially available 6-inch GaAs pHEMT technology with
Backplate Temperature (C)
100 µm substrate was used in preference to thinner substrates.
This not only reduces cost; but it also provides higher wafer
Figure 1. Estimated CW Mean-Time-to-Failure (MTTF) for the balanced
robustness, easier die handling compared to thinner chips and power amplifier as a function of MMIC backplate temperature.
higher overall yield. Reasonable die area and broad bandwidth
were achieved with conventional technology by utilising novel The design of the output stage transistor is a trade-off
matching network topologies incorporating lumped elements, between available RF power, thermal behaviour, physical size
designed with extensive use of electromagnetic simulations. and specified output match. The load-pull and thermal imaging
analysis is required for optimisation of the output stage and
II. MMIC DESIGN combining manifold. For the input and interstage designs the
The MMIC was fabricated in the WIN Semiconductor load-pull data was augmented by a non-linear device model [9]
(Taiwan) standard 0.15 µm power pHEMT process on 6-inch and extraction methodology [10] to ensure optimal trade off
wafers with 100 µm thickness [7]. Rigorous design and layout between power match for each stage and source impedance for
methods were used in the optimisation of stability, gain, power the following stage. Careful and extensive EM simulations
transfer and lifetime. Layout parameters such as gate width, ensure phase and amplitude balance between the amplifier’s
gate-to-gate spacing and the number of gate fingers between inner and outer devices. RF ports and bias feeds were designed
source vias influence the RF power available from a transistor, for ESD robustness.
its RF stability, channel temperature (hence reliability and The output of each half of the four-stage, amplifier of the
lifetime) and the size (cost) of the resulting amplifier. Load- balanced MMIC (Fig. 2) consists of eight 600-µm transistors
pull measurements of test pHEMTs with on-wafer pre- and with optimised device geometry. These half-amplifiers are
post-device matching quantify the effect of these layout combined in a novel asymmetric Lange coupler whose design
parameters on the available RF device power which varies accommodates the high level of RF current present by varying
from 600 to 800 mW/mm while keeping gate currents within a the metal width (and spacing to maintain Lange performance)
conservative range for reliable operation [8]. in each finger section to accommodate the maximum RF power
Infra-red thermal imaging was used to measure the peak level in that finger as determined by equating the RF rms
channel temperature of the different transistor layouts as a current to the DC value [11]; both for operation into a normal
load and into an open circuit where 38 dBm of reflected power
(a)
Figure 2. Photograph of the 6.5 watt amplifier MMIC (area is 28.35 mm2 –
layout is larger than needed to allow for easier dicing on engineering retiucle).
24 (b)
20
S21
16 Figure 4. Measured output power (Pout) with fast drain pulsing for the half-
S11, S22 and S21 (dB)
12 amplifier biased at Vd = 6 V and Vgs = -0.5 V (a) and Vgs = -0.7 V (b).
Vds Input power = 13 dBm in both cases.
8
4
0 “Slow” gate pulsing has also been explored. For this case
-4 the drain and the RF input are applied continuously and the
S22
-8 gate is pulsed on for 65 ms from an off stage of -2 V with a
-12 duty cycle of 50% (7.7 Hz repetition rate). The output power is
-16 measured as the average over the pulse. Fig. 5 compares the
-20 S11
two pulsing methods for the half-amplifier, showing a
-24
difference of about 0.5 dB in output power and 2 percentage
30 32 34 36 38 40
points in power added efficiency (PAE) due to heating.
Frequency (GHz)
24 32
20
28
16
0 12
18 20 22 24 26 28 30 32 34 36 Vgs
8
Output Power (dBm) PAE
4
Figure 5. Measured gain (red), output power and power added efficiency 0
(PAE, blue) with fast drain (solid lines) and slow gate (dashed) pulsing into a
24 26 28 30 32 34 36 38
50 ohm load for the half-amplifier biased at Vd = 5 V and Vgs = -0.7V.
Output Power (dBm)
40
38
Max PAE (%) and Pout (dBm)
36
34 Pout
32
30
28
26
24
22
20
18 PAE
16 (a)
14
12
33 34 35 36 37
Frequency (GHz)
Figure 6. Measured fast pulsed output power (Pout, red) and power added
efficiency (PAE, blue) into the optimal load for power (solid lines) and
50+j0 (dashed) vs frequency for the full amplifier biased at Vd = 6 V and
Vgs = -0.7V with an input power of 16 dBm.