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Yan2018 Enhancement of Growing 1D MoS2
Yan2018 Enhancement of Growing 1D MoS2
Small Methods 2018, 2, 1700349 1700349 (1 of 14) © 2018 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
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2. Performance Metrics of Photodetectors photoresponsivity and external quantum efficiency and achieve
spectral selectivity, Liu et al. fabricated highly sensitive multicolor
Several figures of merit are used to evaluate the performance of photodetectors by integrating graphene with gold nanoparticles as
photodetectors, including photoresponsivity, external and internal the plasmonic nanostructures.[43] To fabricate the device, as shown
quantum efficiencies, detectivity, and response time, for example. in Figure 1a, gold-nanoparticle-array structures were obtained by
sputtering a thin gold film on a Si/SiO2 substrate, followed by
(i) Photoresponsivity (R) is the ratio of the photocurrent to the
thermal annealing, and then they were transferred to back-gated
incident light power on the effective area. It is defined by
graphene transistors prefabricated on a Si/SiO2 substrate with
R = Iph/Pin, where Iph is the photocurrent and Pin is the
CVD-grown graphene. Damage to graphene during the sputtering
incident light power.
and thermal annealing process can be avoided by this strategy.
(ii) The external quantum efficiency (EQE) is equal to the
The maximum photoresponsivity of a graphene device with Au
number of electron–hole pairs collected to generate pho-
nanoparticles can reach 6.1 mA W−1 at 514 nm with an EQE of
tocurrent in unit time divided by the number of incident
≈1.5%, which is enhanced by up to 1500%. Multicolor photode-
photons in the same time: EQE = (Iph/q)/(Pin/Eph), where q
tectors can also be constructed by coupling graphene with plas-
is the electron charge and Eph is the incident photon energy.
monic nanostructures through controlling the nanoparticle size,
(iii) Internal quantum efficiency (IQE) is defined in a similar
shape, and periodicity. Figure 1b shows a graphene photodetector
way, except that the number of absorbed photons is consid-
coupled with a surface plasmon polariton (SPP) grating. With
ered instead of the number of incident photons as in EQE.
this type of structure, a 400% enhancement of responsivity and
It is given by IQE = (Iph/q)/(AabsPin/Eph), where Aabs is the
a 1000% increase on the photoactive length were demonstrated
ratio between the absorbed and incident light power at a
and interference between SPPs and the incident wave enables a
given wavelength.
tailored design of the photodetector’s spectral response.[44] The
(iv) Detectivity (D*) can be expressed as D* = R/(2qJd)1/2, where
performance enhancement can be mainly attributed to two
Jd is the dark current density when the dark current is dom-
aspects. On the one hand, the grating contact can achieve SPPs
inated by the shot noise. The unit is Jones, or cm Hz1/2 W−1.
originating from the coupling of light with the metal’s free elec-
(v) Operating speed commonly characterizes ability of a
trons and deliver the collected photons to the metal–graphene
photodetector to detect a signal at certain rate. In the time
region which will enhance the overall absorption. On the other
domain, the response time is used and defined as the time
hand, in contrast to normal unpatterned contacts which always
required for a transient output signal to reach 0.63 of its
play a passive role for light absorption, the design of grating con-
steady-state change, when the input light changes abruptly.
tacts enables the increase of the photoactive area by utilizing the
For most systems, the response speeds are separately speci-
normally passive contacts as a light-collecting region. In addi-
fied by rise time and fall time with the light pulse switched
tion, the mirror symmetry between the contacts can be broken by
on and off. The rise time and fall time are defined as the
utilizing different contact grating structures instead of applying a
time interval required by the photodetector output signal
source–drain bias, which would result in a large dark current.
to rise from 10% to 90% of its final value, or fall from 90%
Besides graphene, MoS2-based photodetector can also be
to 10% of its start value, respectively. In frequency domain,
enhanced by plasmonic nanostructures. Wang et al. reported
the speed features (3 dB) bandwidth of a photodetector,
the first hot-electron-injection-based near-infrared photode-
which is always defined by the frequency at which respon-
tection of bilayer MoS2 integrated with a plasmonic antenna
sivity is reduced to 0.707 of its maximum value.[34]
array,[45] as shown in Figure 1c. With excitation of near-infrared
light, the surface plasmon resonance in the designed nano-
structure will generate hot electrons with an energy larger than
3. Strategies for Enhancing the Performance the Schottky barrier between MoS2 and Au. Thus, hot electrons
of Photodetectors can be injected into MoS2 for generating a photocurrent. To
verify the presence of hot-electron injection, both the photo-
3.1. Surface-Plasmon-Enhanced Photodetection thermoelectrical effect and the photovoltaic effect were excluded
in the study. A photogain of 105 was obtained, benefiting from
Plasmonic nanostructures can act as a subwavelength scat- trap-induced photoamplification, and the photo responsivity
tering source and greatly enhance the strength of the optical- was 5.2 A W−1 at 1070 nm, which is larger than the value of
frequency electric field, benefiting from the incident light that silicon-based hot-electron photodetectors.[46,47] In Figure 1d, an
can be efficiently converted into plasmonic oscillations. Previ- avenue to improve the photoresponse of few-layer MoS2 photo
ously reported phototransistors based on 2D materials such as transistors is exhibited by coupling Au plasmonic nanostruc-
graphene and TMDC (MoS2, WS2, WSe2, for example) always tures with MoS2.[48] A twofold increase of the photocurrent was
exhibit low photoresponsivity mainly due to the limitation of obtained in the device, where a 4 nm thick film based on Au
the poor light-absorption properties for mono- to few-layer 2D nanoparticles was directly deposited onto few-layer MoS2
materials.[27,35–37] Recently, it has been possible to overcome phototransistor by the thermal evaporation. Moreover, a three-
this limitation and enhance the performance of photodetection fold enhancement of photocurrent was achieved in the few-
by the integration of plasmonic nanostructures and 2D-material layer phototransistor with periodic Au nanoarrays (160 nm
photodetectors.[38–40] wide, 180 nm length, 50 nm height, and 300 nm period) and
High-speed graphene-based photodetectors have been achieved, a 1 nm HfO2 passivation layer between the few-layer MoS2 and
but have shown low photoresponsivity.[41,42] To enhance the the periodic Au nanoarrays.
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Figure 1. a) Schematic illustration of the fabrication process to integrate plasmonic nanoparticles with graphene. Reproduced with permission.[43]
Copyright 2011, Nature Publishing Group. b) Surface plasmon polariton graphene photodetectors. Reproduced with permission.[44] Copyright 2016,
American Chemical Society. c) Hot-electron-based near-infrared photodetection using bilayer MoS2. Reproduced with permission.[45] Copyright 2015,
American Chemical Society. d) Surface-plasmon-enhanced photodetection in a few-layer MoS2 phototransistor with Au nanostructure arrays. Repro-
duced with permission.[48] Copyright 2015, Wiley-VCH.
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Figure 2. a) Schematic of a graphene–quantum-dot hybrid phototransistor, in which a graphene flake is deposited onto a Si/SiO2 substrate and
coated with PbS quantum dots. b) Energy-level diagram of the graphene/quantum-dot interface. A built-in field is formed at the interface, as shown
in the top panel. Electrons trapped in the PbS quantum dots lower the Fermi energy of the graphene, as shown in the bottom panel. Reproduced with
permission.[55] Copyright 2012, Nature Publishing Group. c) Schematic illustration of a photodetector based on the graphene/MoS2 heterostructure,
where the channel is formed in between the comb-shaped metal electrodes. d) Schematic illustration of the photoelectron transfer process on the
graphene/MoS2 bilayer. Reproduced with permission.[61] Copyright 2014, Nature Publishing Group. e) Schematic of a graphene/Bi2Te3 heterostucture
phototransistor device. f) Energy-band diagram of the graphene/Bi2Te3 heterojunction. Reproduced with permission.[62] Copyright 2015, American
Chemical Society. g) Schematic diagram of single-layer MoS2 photodetectors treated with rhodamine 6G (R6G) organic-dye molecules and the chemical
structure of the R6G dye. h) Schematic band diagram of the R6G-sensitized MoS2 photodetector under illumination. Reproduced with permission.[68]
Copyright 2014, American Chemical Society.
hybrid TMDC–QD phototransistor consisting of few-layer increased without sacrificing the detection spectral width
MoS2 and PbS quantum dots has also been reported, where a (Figure 2f). The photodetector has a high photoconductive gain
very high responsivity on the order of 105 – 106 A W−1 and NIR around 83 and a photoresponsivity of 35 A W−1 at 532 nm.
detection was achieved.[51] In addition, Hu et al. fabricated a This photoresponsivity is 1000 times higher than the devices
hybrid photodetector based on p-type WSe2 and PbS quantum based on pure monolayer graphene. It should be noted that the
dots, and demonstrated a responsivity of 2 × 105 A W−1 detection wavelength is further expanded to the near-infrared
and a specific detectivity up to 7 × 1013 Jones.[57] (980 nm) and telecommunication band (1550 nm) with
In order to combine the merits and complement the weak- comparable performance at a visible wavelength (532 nm). In
nesses of 2D materials, hybrid phototransistors based on addition, the performance of multilayer-MoS2-based phototran-
2D materials have been achieved with unprecedented sistors has been enhanced by covering with graphene quantum
performance.[58–60] Zhang et al. constructed a hybrid photo- dots (GQDs) to form an n–n heterostructure. The device exhib-
detector based on a graphene-on-MoS2 heterostructure, with ited a photoresponsivity of 1.6 × 104 A W−1 and a photogain of
CVD-monolayer MoS2 as a sensitizer to absorb light and 2.4 × 107 due to the effective charge transfer.[66]
CVD-monolayer graphene as the channel for carrier transport Organic molecules can also be used as photon-absorbing
(Figure 2c). Electron–hole pairs were produced in the MoS2 materials.[67] As shown in Figure 2g, a dye-sensitized MoS2
layer and electrons were injected into the graphene due to the photodetector has been reported, which consists of monolayer
perpendicular effective electric field determined by the built- MoS2 treated with rhodamine 6G (R6G) organic-dye molecules
in electric field, applied electrostatic field, and external electric with an optical bandgap of 2.38 eV. Due to the effective charge
field caused by charge impurities on the surface of graphene transfer of the photoexcited electrons from R6G molecules to the
and MoS2, as shown in Figure 2d. A high photoresponsivity of MoS2 layer (Figure 2h), the performance of the proposed photo
up to 107 A W−1 and a photogain of about 108 at a wavelength of detector was obviously enhanced with a maximum photorespon-
650 nm were obtained at room temperature.[61] Figure 2e shows sivity of 1.17 A W−1, a photodetectivity of 1.5 × 107 Jones, and
the growth of the graphene/Bi2Te3 heterostructure, where an EQE of 280% at 520 nm. More importantly, the photodetec-
the Bi2Te3 nanocrystals were epitaxially grown on monolayer tion response is extended to the near-infrared at 980 nm, which
graphene by physical vapor deposition.[62] The heterostructure is not the case for pristine MoS2 photodetectors, originating
presents effective broadband photodetection, which is mainly from the photoinduced electron transfer from the highest
attributed to small bandgap of Bi2Te3.[63–65] Benefiting from the occupied molecular orbital of the R6G to the bottom of the
effective photocarrier generation and transfer under the built- conduction band of the MoS2, as shown in Figure 2h.[68] Simi-
in electrical field at the interface between the graphene and larly, Pak et al. reported hybrid photodetectors based on MoS2
the Bi2Te3, the photocurrent of the device can be effectively treated with copper phthalocyanine (CuPc). The performance
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of the devices exhibits a dependence on the CuPc layer 3.3. Optical-Waveguide-Integrated Photodetectors
thickness, where devices with a relatively thinner CuPc layer
present a better photodetection performance.[69] In addition, The performance of photodetectors based on 2D materials is
photodetectors with an organic-perovskite/2D-material hetero- mainly studied with free-space illumination using a normal-
structure have also been extensively investigated recently.[70–72] incidence configuration, where the light beam is perpendicular
The first hybrid CH3NH3PbI3-nanowire/graphene photodetector to the channels. However, the interaction length between the 2D
was fabricated by Spina et al. Under light illumination, elec- material and the optical field is limited to the thickness of the
tron–hole pairs were generated in the CH3NH3PbI3 nanowire material, resulting in poor optical absorption, especially in the
and holes were injected into the graphene by the internal elec- cases of monolayers or bilayers. The optical absorption can be
tric field; a photoresponsivity of 2.6 × 106 A W−1 was achieved improved by integrating the 2D layered material with an optical
at a wavelength of 633 nm.[73] In addition, Ma et al. fabricated waveguide, which is compatible with complementary metal-
and characterized photodetectors consisting of CH3NH3PbI3- oxide semiconductor (CMOS) technology. In this configuration,
perovskite films and WS2 monolayers, for the first time. Owing the evanescent field is confined and guided by the waveguide
to efficient electron transfer from the perovskite to the WS2, and propagates along the 2D material sheet; meanwhile, light
the bilayer heterostructure exhibited a photoresponsivity of interacts with the 2D material during its traveling in the wave-
17 A W−1 and a detectivity of 2 × 1012 Jones at a wavelength of guide. The longer the interaction length between the 2D material
505 nm.[74] Furthermore, Wang et al. studied solution-processed and the optical-waveguide modes is, higher optical absorption
hybrid photodetectors based on chemically exfoliated 2D MoS2 up to 100% is achieved, which is only determined by the length
nanosheets and CH3NH3PbI3, where the photogenerated car- of the device rather than the 2D material’s thickness.[76–78]
riers were transferred from the perovskites into MoS2. A photo Taking the advantages of waveguides, the photoresponsivity can
responsivity of 3096 A W−1 and an EQE of 7.7 × 105% were be enhanced without sacrificing the high speed, distinguishing
obtained in a hybrid photodetector consisting of 1T MoS2 inte- them from charge-transfer-assisted photodetectors.
grated with perovskites, but the metallic nature of the 1T phase Photodetectors based on silicon-waveguide-integrated gra-
leads to an impractical on/off ratio. In contrast, a semicon- phene have been reported, with high responsivity, high speed,
ducting 2H-phase hybrid photodetector exhibited a responsivity and broad spectral bandwidth. Pospischil et al. fabricated a silicon-
of 142 A W−1 and an EQE of 3.5 × 104% with an on/off ratio waveguide-integrated graphene photodetector with one entire
about 300.[75] electrode on the waveguide, as shown in Figure 3a. With a 53 µm
Figure 3. a) Colored scanning electron microscopy (SEM) image of a waveguide-integrated graphene photodetector. The inset shows a cross-section of
the device. The graphene sheet coats both the top surface and the sidewall of the waveguide. A thin SiO2 layer prevents electrical contact between the
graphene and the silicon waveguide. b) Wavelength dependence of the photodetector. A flat response is obtained across all optical telecommunication
windows. Reproduced with permission.[76] Copyright 2013, Nature Publishing Group. c) Schematic of the hBN/SLG/hBN photodetector on a buried
silicon waveguide. d) The high response of the graphene photodetector. The red dashed line shows the fitting to the experimental results with an RC
low-pass filter model. The extracted 3 dB cutoff frequency is at 42 GHz. Reproduced with permission.[82] Copyright 2015, American Chemical Society.
e) 3D illustration of the BP photodetector integrated in a silicon photonic waveguide, featuring a few-layer graphene top-gate. f) The response of the
BP photodetector is measured when the BP is gated to low and high doping. At low doping, the response is broadband with a cutoff frequency of
3 GHz. The inset shows the receiver eye diagram at a data rate of 3 Gbit s−1 measured with the BP photodetector. Scale bar: 100 ps. Reproduced with
permission.[86] Copyright 2015, Nature Publishing Group.
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long waveguide, a maximum photoresponsivity of 0.05 A W−1 addition, the devices exhibited a high response bandwidth
was obtained at a wavelength of 1550 nm and the 3 dB band- exceeding 3 GHz and could operate at a data rate above 3 Gbit s−1
width is about 18 GHz.[76] In addition, the wavelength depend- with very low dark current; the clear open eye is shown in
ence of the photoresponse was measured from 1310 to 1650 nm Figure 3f.[86] The performance of graphene- and BP-based opto-
and the responsivity was flat across all optical telecommunica- electronic devices in the telecommunication band indicates
tion bands (Figure 3b). Later, Youngblood et al. demonstrated that 2D materials have a large potential for integrated opto
a device consisting of two layers of CVD graphene separated electronic applications and the realization of a complete optical
by a 100 nm thick Al2O3 dielectric layer, where the bottom layer communication link.
was integrated on a planarized silicon waveguide acting as the
channel to absorb optical and collect photogenerated carriers,
while the top layer acted as a transparent gate electrode. Not 3.4. Graphene Sandwiched Photodetectors
only can the device be operated as a photodetector, but also as an
optical modulator, which can be tuned by gating the graphene. VdW heterostructures assembled by stacking different 2D
The photoresponsivity at 1550 nm reaches 0.057 A W−1 and the materials can combine and exploit the properties in one device
3 dB bandwidth is 3 GHz.[79] Benefiting from the ultrahigh mobility and create multifunctional optoelectronic systems with supe-
of graphene, higher response speeds of photodetectors based on rior performance. An effective method to achieve such versa-
a silicon waveguide integrated with graphene have been dem- tile devices is therefore to sandwich a 2D material layer or the
onstrated. Gan et al. reported response rates exceeding 20 GHz heterojunction between two graphene sheets, acting as charge-
and demonstrated a clear open-eye diagram at 12 Gbit s−1.[80] extraction contacts. Due to the lack of dangling bonds on the
Moreover, Schall et al. fabricated photodetectors based on CVD- surfaces of vdW materials, vertical heterostructures can be
grown graphene on silicon waveguides and showed a 3 dB fabricated with high-quality heterointerfaces without the con-
bandwidth of 41 GHz and a data rate of up to 50 Gbit s−1.[81] To sideration of lattice mismatch and Fermi-level pinning that
achieve a photodetector with both high speed and high photore- often occurs at the metal and semiconductor interface.[12,87–90]
sponse, a 2D heterostructure consisting of single-layer graphene In contrast to lateral heterostructures,[91–95] benefiting from
encapsulated by hexagonal boron nitride (hBN) was proposed and the near-perfect optical transparency and the unique electronic
integrated on a silicon waveguide, as shown in Figure 3c. The properties of graphene, such vertical vdW heterostructures can
graphene channel spans 40 µm of the waveguide and the distance realize a large, scalable active area and a short, atomically thin
between the waveguide and drain electrode is only 200 nm to charge-extraction channel, potentially achieving both efficient
guarantee a p–n junction that formed near the optical mode. A and fast photodetection. It is interesting to mention that this
maximum responsivity of 0.36 A W−1 at a wavelength of 1550 nm method can meet the challenge of developing photodetectors
and a 3 dB cutoff frequency of 42 GHz (Figure 3d) were achieved, simultaneously possessing a large active area, a high internal
where the detector response can be further improved by using bi efficiency, and a fast response time. This method can afford
or trilayer graphene instead of single-layer graphene (SLG).[82] A new routes to miniaturized optoelectronics beyond the cur-
similar, high photoresponse of 0.37 A W−1 at 1550 nm was also rently used 2D semiconductor materials and technologies.
obtained in a metal/graphene/Si Schottky photodetector due to Several studies on photodetectors based on graphene sand-
avalanche multiplication, and in a graphene-integrated silicon-slot wiched 2D semiconductors (such as InSe and TMDCs) have
waveguide-integrated graphene photodetector with 0.273 A W−1 been reported. Mudd et al. fabricated a graphene/InSe/gra-
in the telecommunication band.[83,84] Besides silicon waveguides, phene vertical heterostructure photodetector with a thick InSe
photodetectors based on silicon nitride (Si3N4)-waveguide-inte- flake (>20 nm) and an active area of 16 µm2. A stable and repro-
grated graphene were also studied by Wang et al. In this kind ducible photoresponsivity up to 105 A W−1 at 633 nm, with a
of photodetector, they demonstrated a maximum responsivity of corresponding EQE of about 105, and a response speed at milli-
0.126 A W−1 with dynamic response of 1 kHz in the telecommu- second time scales were obtained.[96] Figure 4a shows a vertical
nication band.[85] Due to the large transparent window of Si3N4 heterostructure device based on a graphene/MoS2/graphene
with a bandgap of ≈5 eV, the graphene-on-Si3N4 photodetector stack with a 50 nm thick MoS2 flake. The underlying Si/SiO2
can exhibit broadband-absorption and wide-bandwidth operation, substrate functions as a back gate to modulate the charge-trans-
compared with graphene-on-silicon devices. port process. With the finite density of states in graphene and a
Unlike gapless graphene resulting in a high dark current weak electrostatic screening effect, the Fermi level of MoS2 can
in the photoconductive mode, BP has narrow direct bandgap be tuned by an external field applied through the back gate elec-
and can operate under bias with a very low dark current and a trode. Thus, the bottom graphene–MoS2 Schottky barrier height
low noise level. In consideration of the layer-tunable bandgap and the photocurrent in the vertical stack can be effectively
covering the visible to mid-infrared spectral range and its excel- modulated. A maximum EQE of ≈27% (Figure 4b) and a rapid
lent electrical properties, BP was proposed for integration with temporal response beyond the experimental time resolution of
a silicon photonic circuit for telecom-wavelengths detection. 50 µs were observed.[97] To achieve a photodetector with an ultra-
Youngblood et al. fabricated a photodetector consisting of a BP fast response speed comparable to that of graphene, Massicotte
FET on a silicon photonic waveguide with few-layer graphene et al. fabricated a photodetector based on a high-quality gra-
as the top gate, as shown in Figure 3e. Photodetectors based phene/WSe2/graphene vdW heterostructure encapsulated in
on BP with different thickness were investigated and photo hBN and investigated the time-resolved photocurrent proper-
responsivities of up to 0.135 and 0.657 A W−1 in 11.5 and 100 nm, ties of devices with different thickness of WSe2 (monolayer
respectively, were achieved at a wavelength of 1550 nm. In and multilayers from 2.2 to 40 nm), as shown in Figure 4c. A
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Figure 4. a) Schematic illustration of a side view of the device, with the semiconducting multilayer MoS2 sandwiched between the GrT and GrB elec-
trodes. The red and blue colors indicate electrons and holes, respectively. b) EQE of the vertical heterostructure device as a function of back-gate voltage
under 80 µW, 514 nm laser excitation. Inset: EQE of the device as a function of excitation laser power at VBG = −60 V. Reproduced with permission.[97]
Copyright 2013, Nature Publishing Group. c) Schematic representation of photoexcited charge-carrier dynamics in a hBN/G/WSe2/G/hBN hetero-
structure. Graphene and hBN layers are colored black and green, respectively, and W and Se atoms are blue and orange. d) Photocurrent as a function
of time delay between two pulses (illustrated above the plot) with P = 300 µW, at VB = 1.2 V (blue dots). The photocurrent is normalized by the value
of the photocurrent saturating at long Δt. The solid black line is a fit to the data, yielding a time constant τ = 5.5 ± 0.1 ps. Inset: Schematic of the
photoresponse time in a G/WSe2/G heterostructure, here represented by a band diagram with a bias voltage VB applied between the graphene layers.
c,d) Reproduced with permission.[98] Copyright 2015, Nature Publishing Group.
fast photoresponse time of 5.5 ps was demonstrated in the gra- the photogenerated carriers with lower interlayer recombina-
phene/2.2 nm WSe2/graphene vertical heterostructure using tion losses.[100] It is important to note that the graphene layers
time-resolved photocurrent measurements (Figure 4d), and the in all the above vertical heterostructures are positioned by a
IQE of the device was above 70%.[98] Later, a very similar ver- dry transfer process. However, it is wastage of graphene mate-
tical stack based on a graphene/MoTe2/graphene heterostruc- rial to construct a single functional microdevice by transfer-
ture was studied by Zhang et al. The photodetector exhibited printing macroscale graphene. In addition, it is difficult to meet
a broadband photoresponse from the visible to the NIR wave- site- and shape-specific requirements during device fabrica-
length range with a superior performance, including a high tion. Therefore, it is highly desirable to find a cheap and effi-
photoresponsivity of 0.11 A W−1, a high EQE of 12.9%, and a cient method to site-specific transfer of individual, high-quality
fast response time of 24 µs at a wavelength of 1064 nm.[99] graphene microscale sheets to arbitrary substrates. Bie et al.
2D layered materials with different bandgaps and work func- developed a new method based on CVD-grown graphene, as
tions allow tunable bandgap engineering of vdW heterostruc- shown in Figure 5, in which a typical poly(methyl methacrylate)
tures. Sandwiching a vdW heterojunction between graphene PMMA/graphene microstamp suspended on a copper mesh
layers enables the collection of the photoexcited carriers, and was obtained and can be transferred and printed using a glass
is a potential method to achieve multifunctional optoelectronic fiber controlled by a micromanipulator under a microscope.[101]
devices with excellent performance. Lee et al. reported the char- Recently, our group fabricated PMMA/graphene microstamps
acterization of the optoelectronic properties of the graphene/ (10 µm wide and 40 µm length) using a very similar method;
MoS2/WSe2/graphene vertical heterostructure consisting of the difference is that we transferred CVD-grown graphene onto
monolayer MoS2 and WSe2. The observed photoresponsivity a Si/SiO2 substrate before the electron-beam lithography pro-
of 10 mA W−1 at Vds = 0 V is obviously larger than the value cess. We have fabricated graphene sandwiched p-GaSe/n-InSe
of the lateral MoS2/WSe2 heterojunction, indicating that the vertical heterostructures as shown in the Figure 6a.[102] A good
graphene layers effectively increase the collection rate of p–n diode was formed within the atomically thin GaSe/InSe
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Figure 5. Transfer-print processes for graphene microsheets. Parts (1) to (4) illustrate how to produce arrays of suspended and patterned PMMA/
graphene microstamps. Parts (5) and (6) show the deployment of the prepared graphene sheets to construct a device. Reproduced with permission.[101]
Copyright 2011, Wiley-VCH.
heterojunction with a type-II band alignment. This large-area the transfer media is unavoidable, and the samples more
(≈50 µm2) vertical heterostructure exhibited a strong self-driven or less will be damaged during the transfer process. At the
photoresponse ranging from the UV to NIR due to the built- same time, the transfer method is also very time consuming
in potential and the distinctive bandgap energies of the GaSe with low production efficiency. To overcome these disadvan-
and InSe sheets (Figure 6a). A fast response time down to tages, as well as to meet the challenges of further application
2 µs (Figure 6b), significantly faster than that reported recently of 2D heterostructures, such as large-scale, controllability,
for vdW diode-like photodetectors[91,93,96,103] and Si-based het- repeatability, and high quality, direct CVD growth without an
erojunction photodetectors.[104,105] In addition, we investigated obvious transport process is proposed to fabricate 2D hetero-
graphene/WSe2/GaSe/graphene vertical heterostructures with junctions. Direct CVD growth is a down-top strategy to form
a Si/SiO2 substrate functioning as a back gate (Figure 6c). Gate- a sharp interface of the component 2D layer materials via a
tunable rectification inversion was observed due to the bipolar spontaneous preferential growth process. This strategy can
property of WSe2, as shown in Figure 6d. Excellent perfor- improve the performance and develop novel characteristics
mance was also observed with a photoresponsivity of 6.2 A W−1, of 2D heterojunctions by providing a more intense coupling
an EQE of 1490%, and a fast response time of 30 µs.[106] between the heterogeneous layers and avoiding the introduc-
tion of contaminants in the contiguous interface of the com-
ponents. Up to now, both vertical heterojunctions[107–112] and
3.5. Photodetectors Based on Direct-CVD-Grown in-plane lateral heterojunctions[113–118] have been achieved
2D Heterostructures by direct CVD growth. Very recently, Zhang et al. designed a
modified step-by-step thermal CVD process, which has suc-
In the early investigation stage of 2D heterostructure photo- cessfully realized the ready preparation of a wide range of 2D
detectors, the transfer method for fabricating 2D heterostruc- heterostructures such as WS2/WSe2 and WS2/MoSe2, multi-
ture was generally utilized due to the simplicity, flexibility, heterostructures such as WS2/WSe2/MoS2 and WS2/MoSe2/
and convenience. However, issues still exist in this method: WSe2, and superlattices such as WS2/WSe2/WS2/WSe2/
on the one hand, the twist angle between the components of WS2.[119] As a natural bottom-to-top method, the direct CVD
the obtained vertical heterojunctions is random and difficult growth strategy is a potential pathway toward large-area, con-
to control; on the other hand, contaminants are introduced trollable, mass-production, and industrialized realization of
from the environment and contact between the samples and 2D heterostructures.
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Figure 6. a) Room-temperature photoresponsivity and external quantum efficiency as a function of illumination wavelength at different Vds (Vds = 0 V
and Vds = −2 V) and illumination intensity P = 1 mW cm−2. The inset shows a schematic diagram of the graphene/p-GaSe/n-InSe/graphene vertical
heterostructure. b) Temporal dependence of the photocurrent and times τr and τd at Vds = −2 V at room temperature. The red solid lines are fits to the
data. a,b) Reproduced with permission.[102] Copyright 2017, IOP Publishing. c) Schematic illustration of the graphene sandwich WSe2/GaSe hetero-
junction device. d) The Ids–Vds curves of the sandwiched WSe2/GaSe heterojunction device under different back gate voltages Vg. c,d) Reproduced with
permission.[106] Copyright 2017, The Royal Society of Chemistry.
Photodetectors based on direct-CVD-grown heterojunctions monolayer GaSe domains, as shown in Figure 7c. Under
have been demonstrated.[120] By direct vapor-phase growth, Li white-light illumination, the device exhibited a stable photo
et al. fabricated epitaxial vertical SnS2/MoS2 heterostructures response with an ON/OFF ratio up to 215 and a reproduc-
with a sharp interface and type-II band alignment with an ible photoresponsivity of ≈30 mA W−1.[125] Besides direct CVD
extremely large band offset. In the heterostructure, the bottom growth vertical heterojunctions, in-plane heterojunctions have
MoS2 layer was triangular, while the top SnS2 layer showed hexa also been investigated by Duan et al., as shown in Figure 7d.
gonal shapes, as shown in Figure 7a. With laser illumination at They fabricated a photodetector based on a WS2/WSe2 lateral
638 nm, a maximum photoresponsivity of 1.36 A W−1 and an heterojunction and demonstrated obvious p–n diode properties.
EQE of 264% were obtained, which is larger than the reported Optoelectrical measurements showed a rapid temporal response
values of CVD-grown MoS2 and SnS2 samples.[121] Xue et al. beyond 100 µs and an EQE value of ≈9.9%. In addition, a clear
developed two-step CVD growth of large-scale, periodic-array photovoltaic effect was obtained, with an open-circuit voltage of
MoS2/WS2 vertical heterojunctions, and photodetectors device ≈0.47 V and a short-circuit current of ≈1.2 nA.[126]
arrays were further fabricated (Figure 7b). A photoresponsivity of
2.3 A W−1 was achieved for this MoS2/WS2 vertical heterojunc-
tion photodetector, which could also operate as a self-driven 4. Conclusion and Perspective
device. Moreover, flexible MoS2/WS2 vertical heterojunction
device arrays were also fabricated with reasonable photodetection In summary, effective photodetection over a wide range of the
performance.[122] Unlike MX2/MX2 heterostructures with sim- electromagnetic spectrum, from the UV to the IR and even
ilar lattice structures and constants, the MX/MX2 heterostructure THz, has been achieved in 2D-material photodetectors. In
with misfit lattices is also very attractive, where unusual physical order to optimize the performance of 2D-material photodetec-
properties may arise from the unique structural modulations tors, various methods have been systematically investigated
between the different component layers.[123,124] Li et al. achieved by many research groups. Among them, plasmon enhance-
a GaSe/MoSe2 heterojunction through a two-step growth pro- ment can effectively increase the photoresponsivity and EQE
cess and fabricated a photodetector by patterning a source– of a 2D-material photodetector. We can also achieve spectral
drain contact on a monolayer MoSe2 flake partially covered by selectivity by utilizing the designed plasmonic nanostructures.
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Figure 7. a) Atomic force microscopy (AFM) image of the heterostructure and the corresponding height profile along the black line (top left) and an
optical image of a typical heterostructure device (top right). Photoresponsivity as function of light power (wavelength, 638 nm) with Vsd of 4 V (bottom).
Reproduced with permission.[121] Copyright 2016, Wiley-VCH. b) MoS2/WS2 vertical heterojunction device arrays on a SiO2/Si substrate (top left);
schematic of a MoS2/WS2 vertical heterojunction phototransistor (top right); time-dependent photocurrent of the MoS2/WS2 vertical heterostructure
with different incident power on the SiO2/Si substrate (bottom left); and dependence of photocurrent and photoresponsivity on incident light power
(at 405 nm): The green and black dots correspond to original data (bottom right). Reproduced with permission.[122] Copyright 2016, American Chemical
Society. c) SEM image of a device made on monolayer MoSe2 partially covered by monolayer GaSe domains; the inset shows the corresponding optical
microscopy image (top). Ids–Vbg curve (with Vds fixed at 5 V) of the vdW heterostructure as a whole, measured using electrodes 1 and 2 (without illumi-
nation). The inset shows the time-resolved photoresponse of the vdW heterostructure at Vbg = 0 V and Vds = 5 V using a white-light source. Reproduced
with permission.[125] Copyright 2016, American Association for the Advancement of Science. d) Schematic of lateral epitaxial growth of WS2/WSe2 and
MoS2/MoSe2 heterostructures (top). Gate-tunable output of a lateral WSe2/WS2 heterojunction p–n diode. Inset: Optical image of a heterojunction
p–n diode device, the orange dashed line outlines the triangular heterostructure domain and the white dashed rectangle outlines the 50 nm Al2O3
deposited on WSe2 to insulate the WS2 contact electrodes (bottom left). Experimental output characteristics of the lateral WSe2/WS2 heterojunction
p–n diode in the dark (black line) and under illumination (red line; wavelength, 514 nm). Inset: Temporal photocurrent response under periodic on/off
laser illumination through a mechanical chopper (bottom right). Reproduced with permission.[126] Copyright 2014, Nature Publishing Group.
An ultrahigh photoconductive gain and photoresponsivity can benefiting from the bandgap engineering of vdW heterostruc-
be realized in the charge-transfer-assisted method, but with tures and the atomically thin charge extraction channel of the
the sacrifice of the response speed due to the long carrier life- vertical heterostructure. In addition, the direct-CVD-growth
time. In contrast, the optical-waveguide-integration method strategy can improve the performance of photodetectors by
can achieve a high phtoresponsivity with an ultrafast response providing a more intense coupling between the heteroge-
speed. For the graphene sandwiched structures, a broadband neous layers and avoiding contaminants in the contiguous
photoresponse with a fast response speed can be obtained interface. Specially, this method can obtain an in-plane
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