Mopute- 2 Fabrication oad ee Asgronce Contirti a Keres & Steps Called e249 the chip are defenal throwh a case Phol iattogral ly eee ore Caled re trim Arliton Wafers that Seve a eth a mechani Authort and an oalecdmeal Commen trovat- Called the Kubthrote. The Cercuabs on edaler ore dlafened b. a Sok % mmoske. Naske Py where. the Com usill be mManufackixed on the club. “the Ege toe Lronsstece and wrres it Sob che onark clementiong And vt Demnstod bythe segolution ox the mansefackisy . Fekete lll ree Sd drow Lod 40 exponential gaan 9 tke Somicenduthor Hndusterg. Cmog faleritation: Conmadion, the fabrication ef CMos Investor ong M-Well process: the Achenatic & CMos unvestay ds as Shown cbelowo- h li y Fizy Slne Cmres-checkions 6 the tOrfor after cach foocerceirng, Shep weve wr ‘forming, Pre n-well. Scanned with CamScannerhe process earns voll, He exroakin &, on mall Gn Ou hans fe Ailicon Weferas Shen i 4 4Cad- To hin n-well ton On Kubstrake, a Prokedtive Laver onrde (0) & green oe i ate sega S. » $4 ACE). the” afer vo Ortidihed wn oo dha Fuseracel 100-2000) Hhat Cautes St anh’ 0, 7 woock 46 Bem S10, on Wafer huaface . An Organic Phetsresist dot hen exbesad bo Light is Coaked ento the usefor Os un f 4Cc). The photo Yoav & He owell onask Wat A\lews Light Lo pox at tbrere tre oll heodd Are. the roth Vit como $5 Capote Ao ane Og tn $q4@. the oxide Shak Js ne Covered by phobereeat dt obched nydroftounic acid CH > og ua 4 Ale). The remax photo weet ce ‘pe 2s ain Gq ACG). The wool 4 formed war the wa achat eehehehs th mols Doel with © 2. There are tao ts odd debate 1 Joon msctl, tanh lantattion. ee velves Hany ofan. Que vain not Corti Aihpase wea the Subshale . Scanned with CamScanner-2- Im Lon mblantattion, process Aolant tone are Accelerate.) aun eledtic dreld and lasted ato fe Aubé &» the owede er branenti Alsbark alse Fem enkerong the Aubclrate whore evel dt vinkerdeds thie au Wastlated vin f98Q9) eo remaining, Oxide dt abched de Leave Pe oe uselle win the obbeba placer uA fy, 4th). AC) ae SSS Slo 4 |_____ pp ulstenfs | Protoregat- ass = Sida Ato) Lo is — M-hell mark tte) —Subecloate Scanned with CamScanner|_45 Sin A) a Set Si02, 403) 4 b- Sulesirote Fa (Hie Steps dn n-well formation. the tesonsador Gabe ane formed Joy Groh potyseticon over a thin ; oxide wes Chemical whion technique ot wi fg 26 a, The potydotican ds Jheowily doped to fem a Cenhuchor. the Wofer ts patterned wilh phetosotat and the f veclicon made $5 defre Loaniey Bey tC on eres oxide a2 rh fy 2b). The n+ cragions are onbroduced boom jymas Lovace ank drain region and well contact, A we teas a onde dt Breed ard foil, cat J m- jon rmatk te exrhese tre Oras oreGn ae) Al cca fe eee ats over the Mos hroncitor Abocks the ton Hot the Aousce and droam asa Aeboraled by a channal Scanned with CamScannerUnder tho gate: “tha ce cabled a Lol -aalig nod procescos UH R ley ithe protective oxide ca Aba df at win HY QCM the proces Le wepoaled usin p-clipfunion amare te form MMos Source, drain and p-tContoct: Qk an +4 oA). SELLE SERS a RO) icon fpatysitich OE Ss, B= : “Thergets otida 2Cb) Lina}2(e) The Gall 0 ozide 3s grown to dinate the confer from emekal and patterned votth He Contac-mask to ares Contack Cute eshese metal Should be efor ited ee he a) on ws deposited over. entire cope aang soy bose te “The metal is fottianal woth eel kar ur Ny st te-le Form CMos dwvortere A ee ee athe he oxide prevents enekal Som kherting Loom exblscatly ub erecebt idhere Contac One ect okched. the Substmale must be kod to a Sew potential to anor Focvoand, ae Xe bn ‘e \ebtioean Hhe p-type Kubeshrate and tho mr NMOS Aovsce ar lain . Similarly Hoe neha. musk Joo bred to a he antrad . the Je done by adde Irae Substrate and well Contact or tabs, 4p Cennech Gav ard Vop bo tre Budestrate Ard n-Wwell vaabedtivel, the b iliten qlee % the tio cransistors ade tied Angethor to Socan the snput A- The ource a DMs & Connected to aametol Ground Lime and Aho Leurce % pmas it Connedial to a aratal Voylére Scanned with CamScanner7 Scanned with CamScanner Mask« ctsecks ny Chr Shows . Ae iawertew avveth, Gol- Cop View), i. re ~ \ MN = OG Q ; tray. Subshlé Rene ne t p “Jah - ‘ae I) n-vwtl NANNY Toe = p+ — - — eb Flardafices WER — - — FET - bttpo, —A 44 -B — a eB Ba WContack Hf. VA Melat Fg Wt Terweatenr Mask Sotoe Pega k 2 uted to Comey bapa “inParnalioe Mio “@b ie ee os ov Menochsome eneh Ht reflects Ake tpelagy Ph, the sad ier m Aliwon. Hoa Comened deg on , th oo om ot ke aiialke BO gel ra ioe T coll be votte the deed ey OT ‘frocees a Seg ak are Sot euk outa fee fe Jogos fot nat a will produce oe in ie draw became Be Shick de Scale. sp Arogram OreSlick chageam 87 Cmas Irwecher. A wo Scanned with CamScannerLawouk Derign wules: The objective eo. Sot o detion vuler ir 4 allow a tronsteclion & Cororait aleaign Concepts vn tick ct: Form unto acual terete ur Silicon: Pagsote dosn wulex led Cribor How Baad fosluaxae j Conbe and thers clos Ahoy Canbe facked or pastatigg process. Tnduatrial rules ane Abeca{ Od ur mitrond. there are Scalable os Aules vohach one Conteruative and Can be apblaed SK nei ing cote» Lambda cote pales are Scalable uke ruler bated on bean farounelan, Ar Ads Aralp Ofte mimimuun oleae brantahe Channel, Hand Chasnetenizas he remrtution » the process: the channel fensth te the! dikance botesea fe Aouree and hain & uber ond ux det by the sminimuun orth % Oo potystlicen wire. Example, in JBonm proces has A miavinnum ilicon width 3 O18pI And ser design ruler wth Azd.09 poms AL days onl Spacing are dimensioned in tewnt a gee amudtbible a As Masis hos developed ad § Scalable Jombda.- based Aotyn vulee thal Covers a Wile rege she ruler dlorcaibe the Minimum , Widleto Qved breaks vin a dine, animianum Atpeie to owotd hort doetwoan Linus ard animinuwn Cntase thak tiv dayor grraslap, Scanned with CamScannerPelig iles fe Sor layouts corth fase onckal, Lawprs in (D Metal ond AzPPusion hove mirimum. voidth ard 4 ID. rsh Metal ne “uth WD Contacts ane 2x20 ard anut be Aussoundled leg Son a lege a ork rahe (im) w 4a we Mekalito — Mekaltto Metal ee ace ute Mabel. (seed Sen uses a wrath ef 20. Palysalicen and Coke Shove a Abowing, 4%, 2D Yoon other botystite, ‘ tyke Scanned with CamScannerAo Hho the Sransstoc tos te be wither ta deliver Some cursert- louse At Mos t Considared then Wi - pmos elf a Wo. 8% =8 i 2 a Aye bd tw CMOS unvekic Schemabic este Wie. for eae teonsobec ds fa TT: 2 le t ~Y 5 [2 el ET Micron Detayn Rules: Chor Gxrwt proceed L | Dercatptien oer eecanbti well Width Os Spocr tv well ak differed potential Ory Shacing be well ak Lame potential | 0:7 ls whe Cimn>, i Wid Ole ACNE Spas to active Od Source [Anan A toy Well OS well Contact Susreurd by veil | Ose Spacing fo achive & Sppowte Leype ons bord 0.065- Poly IStcieg 0 poly over Frotd oxide _ | O10 Is cong to over active oo ate extension beyond acbve in Ackve 2ttention Lapork Pi 0:10 Spacing ©, poly bo meet 6.07 Lt Scanned with CamScannerton by 2d there a Gontite Ww Potyei licen ov ds (h derived mete a Apocing % I cuter oohera WM N-Wwell Susseuds bmos Gramsiobors boy 6A and Qveil mmMas brnenbore by 6a. - Fransicter dimentaons ae pecifred by them ~ berdth | Longa (w/e) cractio. the mmas “trantcator é cohere polysilicon Cromestdiffuston. the (W/Ld ratio & Coleulated a2 Shevdm wie Hee 7 _ A. L 2X 2. NY. [on she minimum coidth Conlackad TT Lpamaabor th Caled a. Unit Pmas bronnaters ane wider than mos transistors ' ecause retee oneve ane. Llooly Ahan dlectione Scanned with CamScannerArea estionation em et carapond Aiick: Saogiom Loyoube asaa ic Aatesrired rem usreea - “Trantatos ane Wdabs that Fe Under the vere Roki Lorack sin deofeasd ou ono. Apoce fs place a wae od the i eek a nak uke. yp woes Deut. Dib & Speci % Ith fo Sha nat wire, Une rock puich: 4 8\ as shown aim fepieo: This bel, alco Yeayes Tom Fer a thartiobor Si be bleed Iekween the wires. Thus, Lie Iuaight-art cout a cell cam be estimated Ay Counting: Bee number omokal thaws ond cmabbzplying by Bh. Me ovll ets Afocorg [28 beiosin MoS Aid bMos bransistork, thee oa by addon broek Oy torre ax iw fig (©) That, Qn ottia trock mutt be allocated bebiseon Mbps ancl Mos Lrontiskers rregaaddons Oy ehother Urine %¢ actially isan un tak trock. Scanned with CamScanner| ESavr0 rele] Lauer | descarbtion a Seek sree yom Auledraa sll cada gale] 0:15 active our a Oveslap a Lulckate sell conoet our L Spocing bo Aeleck 0:20 Gog Width Cexact Og Oo aN 0:0] os ackve) Shen poty or e oto yong to got " 007 Malate [wd 0:04 Spacing 45 well metal 0.04 Overlap @ Contact or VIA 0.0} pen toariokel Poe fiers Wider than [0.320 Oo Vial as (entack) oo Lpacianay to Via oo Some layer a1 | mata -| tordth a dall olo | Shauna to Game Olo tee So age a chan em motal Pec linea toider Han |9.30 : "0:20 “Vie 7-8 ae N50 . cae oto ale $ = es to dome Aayor wale obo Over.) Nea we Olo sjcing onetal Lor bineg wider Mhan} Orso Scanned with CamScannerne oP sient mule Ge a Sipe of: Alle Comneonls uted. Por Stondord colle, This Style Consialz, & Four, héwtapntal Alsijic ; amekol Ground od: 2 batten _ & the col, n-diffason, ‘bedcffucion, and anoked. ‘power ak the Lob. the ‘power and urd Lins orn also Caled Eutply waik- 4 slicer Liner wun Varttoal Bs Reem Kantecbor Gales. Metal ire Loithin the Coll Conneck dike -transintoct Acad ing F5 Schemalic. ( CmMos worl i> CMo$ B—Smbul NAND Gale Power ord extend 2) 09 each Ancle if Q Gots user Correnkcl the Contents usill be eporated by 4d, bodefnig dotign Aaslen& Y . A LGN? (QD Y= ArB+tc) Dd. ! | euler path: Nipp . Cemenen bath = 88 CD pe br sho analded o2 uted po $end fps ondaning.| -@nPk-—--guaaeen Son YA ‘Ves hk. Y= AB+epd f Np ; ha p d b- a S if a) 8 \ AES ZI pat be B Yh y . a | Bl ie rp Guo = = a B Di Te Scanned with CamScanner5 Ye ee +DE Sag hy, cee Fad Dre fp bp ' iE re Scanned with CamScannershe weduclion OF the igo, be Phe Dirmangivar op Maspets, da iia ¥efersad ty OL Acalimg. Due to Kali ; Opadtticonal Cnasockenjeicc & the MOSFET ae oxbedted to change, Alio Some 4) ral Limibativas Sodired the amount o, ay hoch ie achievable. Were ore ses taper ey Loalins WD Full-Aealion” Coombant Reld Acaliing’ 2 Conttank»/ ote Seating. - b Commidles. the Beal 5 Sra pet Sr 7 RN). MOSFET Scaling and Aull qeownby fede: Full Sealing: Tm Pris at a ae ; « onagrtle Uirkernd oledoxe frold in the Mosper asa hold Content. To achieve Hix, QU poledial: mut be Aeobed Prepartionsly, soy. the Aame Aeabing actos Scanned with CamScanner“this cu because, Ee , dts Acaled bys, Siken NV’ sruslls be Acaled oy & 46 Keop € Constonir Thus Borling alto Affedtz Hosetatd Velbege Vr Koo , tthe Porttven eqpucion Aes te et Jeabseon tke 2 donates ond ic frelds didlalz Hak the o dentirermuds be droreseeel doy a docks 9 8 im Bdov te areimlain Ha Prold Condictions- woh da sitet AU daarentions ove fotetials r regan SM deabing a Shaan Be taht? Soni, | Reve Aealeng | Affi Selina ) Chon ae “i e Z sa Wi | We Ws : void Wy iy = tot 3) os dot Gy pase %y an ils 8) poser « Voo/¢ Paste BD ubat Vio Vo = ip Volkan ge 1) dofony Ne Nite SNa Aursitios No Nor = S:Nop Scanned with CamScannerEfFeck ieee fall dealing on Cyasent Voth Charsckowick MoseeT ! The a oxide cikance bev unik area , Ofer Cl. = Sox, Gor = 8, = o = Cox . tn bon ie Sette vrohio w ‘s, the Mos will zeman On a Wand L are Kealed fe I Ke (se tranetanduckancelpd) csill * kd! = paces = store Hs - =Skn. : leh = Sky 1 od _ “Tp (tony = ke ea Hag = Sko [a 2 [ es - Vig | Mes - - » gh [ade Ty" Tous Ginilosly Do eeat) = Ke (Vae-We) aS, ge Tyccaty=t Ka (VgeMr0) \ Tyesk) = Lotsa Ss Scanned with CamScannerPecdas irre’ aicon © the MosFeT Com be Pound au P= tp Vos \ hoon Pp! = ro Vps = ah ' i Vps = dab Ys Pa ge te Aigwfcant eer eduction Con be achieved uslach ae ene 8, the alcackve Leakiren of Publ % mgs Ds the device Owen ie veduced bya ue 975 : " ss vp a pe PENH pe Unit area Somaine the oxide Capocitance, = WLC, voill et by a foekor S. Tet baat vilbdtonk aeleun Lronsed belauies i a HR s the and da chas peng firme “4 a Avqnife Ti Fenalla, Lia pacpertional Teduckion @ all derereen ait will Lead fe reduction 4 Vosious obi be. \ stance and wresdbancd o4 oats rel Cobia bil aresall erfpmant -GaboVverent,Shartily | Bafoeeaing Taper eating. | Orde cabacibante Co Cot =S Don, dase t : = . 5 Power distifadion| — P Pl pyo™ Pocsew Aansiles Plavea. P /bceea = Placrea. Conant Voltage Salng? a full Aealing an addidion do device dienantion A wetegee (aiveladv Atty Y Y voitl be : Packoe &. haste Auitable on yi carer For example o. fubheral anak ane Cereus! coegpirt om Ve 2 Levels ‘ati, \ and oat te (abe rte these Seatare, Conthast Votkage Sealing 8 prefixed Over Ful Acshing Tn Consent hae tS all device dimantrons ase Scaled pou “I a Vetkages Aumain tet doping densities onus be Atrreosed by @ awe 6 ull ord. bo frenve tne Chasgt field welattonsSuantip ‘ Before Beala Dimergiove W, L box, oy Vottaqes Voo, VE Doping erat Na, Ny the . ain Aevice chavackemticc are Lifeson from hl: Aelang The qe ovde Capaethance bow wally Grpes Cy wnoreatod i’ fect #S, wach erage Ba fronconduchante % alto sereated by S- Tycpuraor) > Ke [20g Wo —Voe. = Ska. 2CVgp-Vios ~Vo] Tychiey= S. Ip Chie) 7 Ty cat) > bf (Nek -W)> Sloe -~ re diaim Current dansale (Onsrent pe unit area) G8 watheased a SS ede Cause ee he a fen file a tromsvator: Since Pre Arouin Cussent ta Intron Scanned with CamScara factor of ¢ votile Be dian to Leusce oy “pemaime unchanged, the power dcesbection et WACreoL es by a foatee ap Ss. ple TylVpe = (Sap) Nps = SP. Powsew density (Punt fre) will Seake by 8? Quon Bere dealing | Mar Seoliig Con! =SCox ,! =SIp P Pl=3 Pp pie S>( prea) hes gp wnoreake in Cussont and dan ectien oe Laer “Loess toe uch Os potion, Hot Ceasar 6a , Orde breakdewn rls Tn wong “pci (oes, Beealing, fa cosssed euk on Oo MosFet dimensions The, Cussant epyations have ts tou evabiied Gor Aral granting ada,Scanned with CamScannerMos pet Cabacitonces’ The Current —Vo - Charactersstice. (Lp eqpatkions) Can be applied for unvestigaking De resboree ‘ MoS Crveutte Under Vasicur Oberabing Conditions. Bub 45 otamine he trraniienk (AC) sresborue MaspeTe ard digital Corouit Contoting Oy MasFets at & teqpiral te a ime the amount ee. ingot Cabacibences areoccated coil ta Mos tronsastor - the on-chib ier Pound wn ‘Mos iia ene Junctions Tre Layout cometiios ancl a Mast 4 these One oe ‘alt «The Ghaative oe ‘moka iereaibae) between, Vario dovices A an umabehant Combonart en tole! berra-sitic thance in Aegital Fig 4@) Shaws i Orbs Lechional Vaud and Fa 406) Above tthe Sob, View @Gnask View % o ae ee (on agi e Magk wrdicaled sr salt es tk ie uindicated boy. Li The eckerk 4 bot a. glows and the got —daain Overlap ore Lp thus the Channel ee ~Fnce, chet he MosFET ean aero on Dena Bae Scanned with CamScannerSubstrate (p-8i? Fat, Both the Source and drain diffusion region have a cote OW - The diffusion region Length ve danctid by Y. thw Bain mrtg done Teqron axe ussourded by a pt dafed =ezr00 alto called He wodplant the pushoce 9, fio dlitiond Pr ci c& da prevent the formation 4 any. rwoarted Cporrarat iC) Channcl bolo een bi ronyhbousirg mY Ai fftion Tonk, 4-2 be entire’ that the. usface bebawon ta Auch netprone Cannot be unveted.. “the b+ channel —£top urplan ack ty clediea kate noi housing dowrcae Jouilk on He Lome steal. Foy OD Shout, the Aumpod @pivalet Capacitance: bibeon Awvtice Lominals \ Scanned with CamScanner8 Gs T Sb Fa ws weproseatation @ the parotclic Mosret Cabactlantes . The barastlic device acifantes Can’ be. Chateifad ual grace Goetps Womde-related thancee Onide— aelobed c apacibances : } hs Shown wn Aauclide (Req 15>, The gate electrode overlape Aoots the Learco TAiOn and’ the diaim region ak fhe eds. the tm Capacitanas that ate aba rotutke fais Abuckizal aasargemort Are Cotbed) GpCeverlag) an GLoveslap) Wabectivi : : lanes beth Bke Lounce and the drain dilPutron chone Me code W, the x are Aome J, Gverlap Capactbences GegCovedtot.) = Cox Wily. Cap(velep) = Coz Wi Lp Whore, Ch = Eon : tox These ova Cobacctancer ane. Volbage ralh..aeer Scanned with CamScannerNes the channel regen Ju Connected bo the Lousce the daz and the Lubchale, the Hie Copacilantes rotean Ske gate oud House saqione de, Fes Cg and Cab spectively. The get te cheek Cabacthamte. do a adially 4 Qottate Chanel capacitance Laan betiseen Yee gate and st aaa the gate bs clean Cabacthawnoe ze gated channch Cabacthance eet an OT ea the ine feine 9, Hae tance Can be Oblarned by cbcaaw the Cendrtions I the Chanel ‘Yeqen chusseng Cuk-cff, Lemear and Kaliradisn medes. In cuk-ofp anade ou in fa BCad, tke. Eusface. it nd anveded. thus, Wize ts op cada carol ha dita ae Aurfera 2 Pre Lource ound 40 lean = aA =0- the Gata. ko - Alans or aran a ol pout be ee Cons rq 3(a>* Cuk-o regen Scanned with CamScannerIn Linear mode wl ion dhe waveedtod channel exterd, @ctets The Masre4, Debvean the Lourceand the daar Os in $y 3(4). ther Conducting unVeLuton on the Posface, efteskualy shields the dubdrate fom He oe a Proll thus, Gry 20. the dibided ~ ~ Channel Capactbemce @ Vu On ing & Ce a a eee > | hy 3b): Lira Mode : Tn Aatiredion Tmmeda @, Operation the irvectionlay, on the Aver nek extond to tre chain bout x fondred of Os un Fa 3C): the gol fo rain Cahoctteunce, Cork =0- As dovace tu Marked to chanel Ui Abielding Shock foroot Yoo opt bo-kubchole Scanned with CamScannerCobocttan Ce Cukmoft | Loneour Vo, E(t) |aeWl | o atin a (total) [Cou ly JLGWL+Co’y | Cor Wlp Cae Ceoteh) |GoxWlo |ooM+ Coby |Z Gillectly the Vasuation othe diubibuted baraslc ove Capac:tonas Os funckions a the -ty— Aeuace Vetage, Ves 2 os Showa vi fry 3A. Tq Got = Cad + Grcevertab) Cos (total) = Ger Ces(ovelap >) oe hae, eva o% adh thane Notage dependent ° p cos Sos O& qvumtanum Nalue % 0:66 CoxWe Cobasitoen Cnkmatiin mode ond ox anortmun Valine oh Cope ww - maar modes win Cab-eff and Dimaar = 2g. WL: 0.6 (Cgo + Gs + Gd saben 3 Lrg Coghb=CoeN + (cap + hes Mb. | | Calo + Gad) Coleg] men A | { Ve Vy Vps Ves ‘canned with CamScannerA (Akh) unctien lor will be ageumed fee an tin iw os et ca hedal tha acibance O rwverke bead abmbt: on jurcteo, Comtden the debleiion we thicknox< LY - ae the mlgpa ond pipe dab oe ee Tne any each want ruerre Apias Mages Gv \, the: dol nagion Hickrets car be found as 14 aa aq NR | Whore Hhe built in Junction potential Jie Given bay 4, = dnl “so ) she debletien on 2 Kbrred in His ara Gn be et a a Aw * Gets) Na iE) Nano) (Lene . A cathe Junction area. the ginction Ghocitance ayveccabed coith the depletion wegen & defimed a& Ce = | aay | 1” | ay | ‘= Na Np , 4 ‘ eu [b.-V Tha Suprersion Con be woortten wn & make feral fern, Je acceut fer the qunchon qpoding Cv) = A: ce ra (ee - . a coienk , M= L for abmpt Jurcti Shorey m & qtr Co {fi rec ie lay al jo “the orp fr gente Cabacitance por Unik aren Cfo & defmed ag Go “J SGSY . Os ani ee plat bows fe bn furcton- a s Ocal Voltages ye MosFEeT will Change ve fe Operation, accwate. exbimaction othe qunction Colpacitences under ' els 18 dchiculk + Therefore Sos making, analy Aunt cl Caleulale & ait 4 ee totic & indobondonk o fhe bias Vi @ equivalent Aasge Alara Cobacitance Coun be defined agum 3 Wy a dh = my, sa |-m gh © Ue) J for abwubt gure Coy Sucka | J Fe) the aloove eqpation Can be Acwaiiin Ot Cony = A Cio Kary lan kaye lB (oe shane, spi fcr (01. the ay, werent MosFet Aeuwce and nasi Rffsaon y ae ard a p prchannd stop ng donsity NS Ohaegpentt the Zhu uoall Fan doing cae bance Cjosw » as well as Auidensall, Votleoe eapivalence facctad Koa Sw), wall be different from-fhese. > Wo bette durction, Manning thot Ha Aidunlll ding Aone J ov Von day, Na(sw), the Zoo—bias cele ft a ive - /esiy =siey_ (hess Np Nacsws Np_ MeN a “fost AGW) + Np Posiae fase & He dus fatal 9 te cle functions. Since oll Gedleo alle Abbrows ame dlabih 4, the Ze deco Ardausal toned pow unit anglt, wr opven up ee | Cisw = Choswi’ , Keasw) = Fyfe (Ifa - Karw ) The Ceqtsu) = P Cis * KegCsw) oere pa Ridensall 4 coal: Peobla S : 4 ~ he = Dec il ang pc a4 rm wort \ . | Bo n - V Viovas « The. oti — wegen i@ Np=loltent3 and the - one * the Py “te “ tons Na = lol wits frnckon a aoe K Lopm.-20- Sot”: Calolake zero bine junction acitance por unt oree Cio Jar Phe Aleatine «the “bulk an pobebal 2+ ppd as , = a An( Nase ) = oe eee O8aV - | esy [Nan Cjo= | Es (RAN) a ar ake : Hetetsswitlonatn (Phot) rr o ole+10! 0 8E8V = 31 x10°F /em™ e Aigral acitant akumning Hovesse bias Vy “4 {rem yt Vb=a5V 4 “t key 8 (ee Vs) a7 ‘| z _2xlou8 (Joaieo - Jose ) = OSE, ae The Owrehage function Checitance u Coq > h Co Koy Loox|6 tory 31X10 fen xO% Cea 6956 | (2 Consider Hye n-channel enhancement M Jada the foc foils cae goed pate Subchrals doporg Nas 2x (05tn7 3 Seurce|dsain Aching Np = jolTanro Srdaioall (pt) Anfong NialSa) = Hex igh Gor? Gott oxide fhacknoes , tog = hSnm. Dunckioo cht, Lj = |o pn Qebchivds —Qulchak ta Jbcawed at OV: Mowriing Mat Sie Onain V in changing fem osvi SV. Nd the wea dratr Lulchole: (purchon Capecttarce Cdl ane VY te 3 Sidaweblr 9 drain thrirdo Abzuchrie “Pun | br Jundloone Lath prchanal Chet umblonk, wahte better ara caso pay ona anil unchiens - b,- ‘0 Jn NAR? £00024 n/ 2x0S107 = 09837 - ar Nr Al Xie? b : er Jo( NaCdMP) = Oat Jn [ peste } pgisv os v Nr QtxKIo° Seis « Capacitana pen unik owen: 5 G Na Co-,| SM (Tn) & * xe SSK i FEaxl: Bai [ 2A0S x1049 _— ——oO 0837 = (eA WO? Pfown?a Cjosw = [Se (Month Nats)" noe bon NaCsw)rN Posw = | e7x8arxioltlen xt Oxialtc 4x10 9 a OD Rept 0 9s = 6.0\ x108 Flam > Zoro ies Aidooall junchion Capacitance pect ba Chow 2 Ghosw *%4 x sone, P bo? xIxiBxib tm = 60 roa Ty dake deasr V) p Nester sto Accoual ; Caeate Koay S, rae koe “21B_[ TRE - Lae) = ani, 083145 — sane) = 05] go) AS) = -2)0. yous 2885. (fae - Pres) og =s -(05) the Hotal onron he jelly Calldatad os She Aun dhe ettom ara ard He Aideroll arcaAs [0x5 pr +S x1par"= SS pn The Sok ah ant |pr On “portanclan vis by the ‘ond ihe Bul Q Lon ene The Cominall Qnpaveled (average) hain ha Ache jute tance ute (Cab) = As Gor Kea PCat) = oye % 10 Cer x |. bl (0° Flow xO: S | + ASK tem K6+01XI0'” Flom KOS3 = \te4 XID lo Cab = \\-4 LF F Yo P lorioes = 25) 25x10 = 25x54