Professional Documents
Culture Documents
Open Standards For Automation of Testing of Photonic Integrated Circuits
Open Standards For Automation of Testing of Photonic Integrated Circuits
integrated circuits
Citation for published version (APA):
Latkowski, S., Pustakhod, D., Chatzimichailidis, M., Yao, W., & Leijtens, X. (2019). Open standards for
automation of testing of photonic integrated circuits. IEEE Journal of Selected Topics in Quantum Electronics,
25(5), Article 8732348. https://doi.org/10.1109/JSTQE.2019.2921401
DOI:
10.1109/JSTQE.2019.2921401
Document Version:
Publisher’s PDF, also known as Version of Record (includes final page, issue and volume numbers)
General rights
Copyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners
and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.
• Users may download and print one copy of any publication from the public portal for the purpose of private study or research.
• You may not further distribute the material or use it for any profit-making activity or commercial gain
• You may freely distribute the URL identifying the publication in the public portal.
If the publication is distributed under the terms of Article 25fa of the Dutch Copyright Act, indicated by the “Taverne” license above, please
follow below link for the End User Agreement:
www.tue.nl/taverne
(Invited Paper)
Fig. 2. (a) Manufacturing chain of photonic integrated circuit with (b) distribution of test processes from a design to product, after [32] and [34].
Fig. 4. Standardized PIC layout setting conventions for edge-coupled circuits, Fig. 5. Example implementation of a staggered layout of electrical DC pads
which include die orientation, naming and locations of input-output ports, fidu- in Nazca design. Placement in the south side of the die, in two rows, with pad
cials, and indication of restricted areas important for assembly and packaging. dimensions of 70 µm by 90 µm and a pitch of 150 µm for both horizontal and
vertical distribution.
TABLE I
EXAMPLES OF DATA TYPES
Fig. 7. Example of the openEPDA data file. The file contains the format iden-
tifier, a YAML-formatted section with the version, and a CSV-formatted section.
each polarization have to be measured to characterize coupler’s stage coordinates were calculated using the transformation ma-
performance: transmission 1–3, 1–4, 2–3, 2–4. Each combina- trix calculated on the calibration step. Realignment was done
tion of input and output for a given MMI coupler represents a by iteratively adjusting the position along 6 axes (3 orthogonal
single measurement, resulting in 120 and 80 measurements for axes per side) using the signal from the power meter as a feed-
the MMI couplers with shallow and deep inputs respectively. back. With edge coupling, the power transmission coefficient is
Besides DUTs, the chip contains straight waveguides, which described by theory of overlapping Gaussian beams [41] in first
are used to reference the chip coordinate system with the po- approximation, which means that an optimum fiber tip position
sitioning stage coordinate systems: 2 in the south part of the exists for all three axes. Finally, the measurement itself con-
chip, 2 × 5 in the middle, and 2 in the north part. The reference sisted of taking a power meter readout at the optimized coupling
waveguides in the south and north part contain an integrated position.
SOA for ease of alignment: when forward biased, they generate We have performed a transmission measurement of 30 MMI
an optical signal in the waveguide, which enables easier and in- couplers with shallow inputs. The measurement was done in
dependent alignment of the input and output waveguides. This three sessions (s = 1..3), each consisting of 120 single mea-
is significantly simpler as compared to the “passive” alignment, surements (n = 1..120), resulting in 360 power values Pn,s .
when no light is generated or detected on-chip, in which case All measurements were done on the same chip. The chip place-
both input and output fibers have to be coupled to the waveguide ment did not change between the sessions, however the reference
simultaneously. waveguide calibration was done independently for each session.
A simplified schematic of the measurement setup is shown The first session was used as a reference for comparison with
in Fig. 9. For InP-based technologies, edge coupling though the other two sessions. For each measurement n, we used the
cleaved chip facets is typically used. To reduce the fiber mode transmission from the first session Pnref = Pn,1 and calculated
size for better matching with the waveguide mode, a lensed po- the power difference for other two sessions:
larization maintaining fiber is used in the setup. In the experi- ΔPn,s = Pn,s − Pn ref
ments, a broadband light source connected to the input side of
the setup and a power meter measuring the output optical power where n is the measurement index, and s = 2, 3 is the session
were used. index. The histogram of the obtained values ΔPn,s (s = 2, 3)
Before the automated measurement can start, a mapping of is presented in Fig. 10. The plot shows the number of measure-
the stage and chip coordinates has to be done. This is performed ments for which a particular power difference from the refer-
by aligning both input and output fibers sequentially to one ref- ence power ΔPn,s was measured. The standard deviation of
erence waveguide in the south and one in the north part of the the power difference is σΔP = 0.012 dB (see inset of Fig. 10),
chip. Full automation of this mapping step is foreseen in the next which shows a very good repeatability of the positioning and
release of the test framework. After each alignment, stage coor- realignment procedures. Fig. 10 also shows a small number of
dinates (x, y, z) and chip coordinates (u, v) which are specified in outliers, with power difference reaching –31 to –34 dB. This
CDF are recorded and the transformation matrix is calculated. may happen when the initial alignment is offset from the op-
Following the calibration of the reference waveguides, an au- timum position by more than 5 μm. There are local maxima
tomated test sequence is started. Measurements for each DUT and accidentally automated realignment algorithms finds these
include positioning, realignment, and measurement itself. Dur- maxima instead of global maximum. This pattern is similar for
ing the positioning step, the fibers were coarsely moved to the every measurement, which explains the small spread of power
input and output waveguides of the DUT based on their chip values: –31 to –34 dB below the optimum coupling. Although
coordinates that are taken from the CDF. The corresponding the power difference is disruptive for DUT characterization, we
LATKOWSKI et al.: OPEN STANDARDS FOR AUTOMATION OF TESTING OF PHOTONIC INTEGRATED CIRCUITS 6100608
REFERENCES
[1] M. Smit et al., “An introduction to InP-based generic integration technol-
ogy,” Semicond. Sci. Technol., vol. 29, no. 8, Jun. 2014, Art. no. 083001.
[2] D. F. Welch et al., “Large-scale InP photonic integrated circuits: enabling
efficient scaling of optical transport networks,” IEEE J. Sel. Topics Quan-
Fig. 11. Transmitted power as a function of fiber tip offset along three axes. tum Electron., vol. 13, no. 1, pp. 22–31, Jan. /Feb. 2007.
(a) Measured values (dots) and fit (solid lines). (b) Fit near the maximum (solid) [3] L. M. Augustin et al., “InP-based generic foundry platform for photonic
and 0.02 dB margin (dashed), resulting in 0.13, 0.19, 0.76 µm full range for integrated circuits,” IEEE J. Sel. Topics Quantum Electron., vol. 24, no. 1,
vertical, lateral, and focal direction respectively. Jan./Feb. 2018, Art. no. 6100210.
[4] R. Nagarajan et al., “Terabit/s class InP photonic integrated circuits,” Semi-
cond. Sci. Technol., vol. 27, no. 9, 2012, Art. no. 094003.
[5] K. Lawniczuk et al., “InP-based photonic multiwavelength transmitter
clearly recognize these outliers and found a reliable way to avoid with DBR laser array,” IEEE Photon. Technol. Lett., vol. 25, no. 4, pp. 352–
354, Feb. 2013.
them in an updated alignment procedure. [6] S. Stopinski et al., “Application specific photonic integrated circuits for
To quantify the fiber tip positioning repeatability, we have telecommunications,” in Proc. 2013 Conf. Lasers Electro-Opt. Eur. Int.
measured the transmitted power dependency on the offset from Quantum Electron. Conf., 2013, p. 1.
[7] K. A. Williams, “Integrated semiconductor-optical-amplifier-based switch
the optimum coupling position. The plots are shown in Fig. 11. fabrics for high-capacity interconnects [Invited],” J. Opt. Netw., vol. 6,
Fig. 11a shows measured and fitted power for three axis: lat- no. 2, pp. 189–199, Feb. 2007.
eral, vertical, and focus corresponding to x, y, and z directions [8] W. Yao, M. K. Smit, and M. J. Wale, “Monolithic 300 Gb/s parallel trans-
mitter in InP-based generic photonic integration technology,” IEEE J. Sel.
in Fig. 9. As described in [41] the fitting was done to a Gaussian Topics Quantum Electron., vol. 24, no. 1, Jan./Feb. 2018, Art. no. 6100711.
function in the vertical and lateral directions, and to a Lorentzian [9] H. Liu, C. F. Lam, and C. Johnson, “Scaling optical interconnects in dat-
function in the focal direction. For the focal direction, two differ- acenter networks opportunities and challenges for WDM,” in Proc. 2010
18th IEEE Symp. High Perform. Interconnects, 2010, pp. 113–116.
ent widths of a Lorentzian function were used for offsets below [10] G. Roelkens et al., “Silicon-based photonic integration beyond the
and above 0 μm. Fig. 11b shows a zoom of the fitted curves and telecommunication wavelength range,” IEEE J. Sel. Topics Quantum Elec-
a dashed line showing the 0.02 dB margin from the maximum tron., vol. 20, no. 4, Jul./Aug. 2014, Art. no. 8201511.
[11] S. Latkowski et al., “Monolithically integrated widely tunable laser source
of each curve. From the fit for a given margin of 0.02 dB, a operating at 2 µm,” Optica, vol. 3, no. 12, pp. 1412–1417, Dec. 2016.
maximum total range of the fiber tip position near the optimum [12] A. J. Seeds, “Microwave photonics,” IEEE Trans. Microw. Theory Tech.,
can be calculated: 0.13 μm, 0.19 μm, and 0.76 μm for vertical, vol. 50, no. 3, pp. 877–887, Mar. 2002.
[13] G. Carpintero et al., “Microwave photonic integrated circuits for
lateral, and focal directions respectively. millimeter-wave wireless communications,” J. Light. Technol., vol. 32,
no. 20, pp. 3495–3501, Oct. 2014.
[14] J. Capmany, I. Gasulla, and D. Pérez, “Microwave photonics: The pro-
VI. CONCLUSION grammable processor,” Nat. Photon., vol. 10, no. 1, pp. 6–8, Jan. 2016.
[15] C. Abellan et al., “Quantum entropy source on an InP photonic integrated
A standardized approach to PIC layout that enables develop- circuit for random number generation,” Optica, vol. 3, no. 9, pp. 989–994,
ments of generic and automated processes for test, assembly, Sep. 2016.
and packaging has been proposed. The generic assembly and [16] K. Ugajin et al., “Real-time fast physical random number generator with a
photonic integrated circuit,” Opt. Express, vol. 25, no. 6, pp. 6511–6523,
packaging services are very well suited for prototyping and low Mar. 2017.
volume manufacturing [35], [42], [43]. Layout standardization [17] M. G. Thompson, A. Politi, J. C. F. Matthews, and J. L. O’Brien, “Inte-
allows for increased automation of the technology processes at grated waveguide circuits for optical quantum computing,” IET Circuits
Devices Syst., vol. 5, no. 2, pp. 94–102, Mar. 2011.
front-end and back-end. It enables and eases scaling to volume [18] A. Crespi et al., “Integrated photonic quantum gates for polarization
production. However, at a certain volume threshold at individ- qubits,” Nat. Commun., vol. 2, Nov. 2011, Art. no. 566.
ual businesses, one will likely require customization in order to [19] P. J. Shadbolt et al., “Generating, manipulating and measuring entangle-
ment and mixture with a reconfigurable photonic circuit,” Nat. Photon.,
optimize the overall efficiency and cost. Furthermore, the stan- vol. 6, no. 1, pp. 45–49, Jan. 2012.
dardized layouts allow for testing automation at different points [20] W. Bogaerts and L. Chrostowski, “Silicon photonics circuit design: meth-
of the manufacturing chain, at die, bar and wafer levels. In or- ods, tools and challenges,” Laser Photon. Rev., vol. 12, no. 4, Apr. 2018,
Art. no. 1700237.
der to handle the test process and data generated, we introduced [21] “SMART Photonics.” Accessed: May 2, 2018. [Online]. Available:
the openEPDA modular test framework and standardized data http://www.smartphotonics.nl/.
formats, which are available for everyone to implement and can [22] “Fraunhofer Heinrich Hertz Institute.” Accessed: May 2, 2018.
[Online]. Available: https://www.hhi.fraunhofer.de/en/departments/pc/
enable easy exchange of measurement specifications and data research-groups/foundry-services-for-inp-based-photonic-integrated-
exchange between various partners. Both standardization and circuits.html
6100608 IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, VOL. 25, NO. 5, SEPTEMBER/OCTOBER 2019
[23] “LioniX International MPW,” LioniX International, Accessed: May 2, Dzmitry Pustakhod (M’12) received the M.Sc. de-
2018. [Online]. Available: https://www.lionix-international.com/mpw- gree in physics from the Belarusian State University
service/ in 2006, Minsk, Belarus, and the Ph.D. degree in
[24] “JePPIX MPW runs,” JePPIX. Accessed: May 2, 2018. [Online]. Avail- electrical engineering from the Eindhoven University
able: http://www.jeppix.eu/multiprojectwafers-1/ of Technology (TU/e), Eindhoven, The Netherlands
[25] “ePIXfab-European Silicon Photonics Alliance – European Silicon in 2018. He is currently a Researcher with the Pho-
Photonics Alliance.” Accessed: Dec. 7, 2018. [Online]. Available: tonic Integration Group at the Eindhoven University
http://epixfab.eu/ of Technology (TU/e) working on the development
[26] “Nazca,” Nazca Design. Accessed: Apr. 30, 2018. [Online]. Available: of testing infrastructure for characterization of pho-
https://nazca-design.org/ tonic integrated circuits (PICs). His research interests
[27] “Luceda,” Luceda. Accessed: Oct. 10, 2018. [Online]. Available: https:// include development of test circuits and methods for
www.lucedaphotonics.com/en photonic integration technology, as well as PIC measurement, and design au-
[28] “VPIphotonics – Application Area: Photonic Circuits.” Accessed: Dec. tomation and standardization.
10, 2018. [Online]. Available: http://vpiphotonics.com/Applications/
PhotonicCircuits/
[29] “Synopsys Optical Solutions Group | CODE V | LightTools | Lucid-
Shape | RSoft Products.” Accessed: Dec. 10. 2018. [Online]. Available:
https://www.synopsys.com/optical-solutions/about.html
[30] A. Rahim, T. Spuesens, R. Baets, and W. Bogaerts, “Open-access silicon
photonics: current status and emerging initiatives,” Proc. IEEE, vol. 106,
Michail Chatzimichailidis received the M.Sc.
no. 12, pp. 2313–2330, Dec. 2018.
degree in electrical and computer engineering, with
[31] B. Waschneck, L. W. F. Brian, K. C. W. Benny, C. Rippler, and G. Schmid,
specialization in electronics, from the Aristotle Uni-
“Unified frontend and backend industrie 4.0 roadmap for semiconductor
versity of Thessaloniki, Thessaloniki, Greece, in
manufacturing,” vol. 12, 2017, Art. no. 20.
[32] S. Latkowski, W. Yao, D. Pustakhod, X. J. M. Leijtens, and K. A. Williams, 2013. The same year he joined the Greek army for
nine months, where he received training as Self-
“Test methods and processes in manufacturing chain of photonic integrated
Propelled Howitzer Gunner and served in a mobile ar-
circuits,” in Proc. 20th Int. Conf. Transp. Opt. Netw., 2018, pp. 1–4.
tillery unit in northern Greece. He worked for ASML
[33] E. R. H. Fuchs, E. J. Bruce, R. J. Ram, and R. E. Kirchain, “Process-
based cost modeling of photonics manufacture: The cost competitiveness as Test Engineer qualifying subsystems for state-of-
the-art lithography systems. In 2015, he joined Pro-
of monolithic integration of a 1550-nm DFB laser and an electroabsorptive
drive Technologies where he worked on analog /
modulator on an InP platform,” J. Light. Technol., vol. 24, no. 8, pp. 3175–
digital design in projects for various customers. In 2017, he joined TU/e as PIC
3186, Aug. 2006.
[34] “JePPIX roadmap 2018,” JePPIX. Accessed: Aug. 31, 2018. [Online]. measurement engineer in the Photonic Integration Technology Center (PITC),
where his work focuses on measurement automation for PICs.
Available: http://www.jeppix.eu/vision/
[35] “PIXAPP, ” Photonic Packaging Pilot Line. Accessed: Apr. 30, 2018. [On-
line]. Available: http://pixapp.eu/
[36] “openEPDA Overview — openEPDA documentation.” Accessed: Dec.
12, 2018. [Online]. Available: http://www.openepda.org/
[37] “Python.org, ” Python.org. Accessed: Dec. 7, 2018. [Online]. Available:
https://www.python.org/
[38] “YAML Ain’t Markup Language (YAMLTM) Version 1.2.” Accessed: Weiming Yao received the B.Sc. degree in electri-
Dec. 5, 2018. [Online]. Available: http://yaml.org/spec/1.2/spec.html cal engineering with honors from Technische Univer-
[39] RFC 4180, “Common format and MIME type for comma-separated sitat Berlin, Germany, in 2010, and graduated with
values (CSV) files.” Accessed: Dec. 5, 2018. [Online]. Available: two M.Sc. degrees in photonic networks engineer-
https://tools.ietf.org/html/rfc4180 ing, with honors, as part of an Erasmus Mundus Pro-
[40] L. B. Soldano and E. C. M. Pennings, “Optical multi-mode interference gram from Aston University, Birmingham, U.K., and
devices based on self-imaging: Principles and applications,” J. Light. Tech- Scuola Superiore Sant’Anna, Pisa, Italy, in 2012. He
nol., vol. 13, no. 4, pp. 615–627, Apr. 1995. received the Ph.D. degree from the Eindhoven Univer-
[41] P. F. Goldsmith, “Gaussian beam coupling,” Proc. Quasioptical Systems: sity of Technology (TU/e), Eindhoven, The Nether-
Gaussian Beam Quasioptical Propogation Applications. Piscataway, NJ, lands, with honors in 2017.Since 2012, he is with the
USA IEEE, 1998, ch. 4. Photonic Integration Group at the Eindhoven Univer-
[42] “Technobis.” Accessed: Dec. 11, 2018. [Online]. Available: http://www. sity of Technology (TU/e) where his work focuses on the design and character-
technobis.com/index.php/business-units/technobis-ipps/ ization of high bandwidth integrated multichannel transmitter PICs.
[43] “Cordon Electronics.” Accessed: Dec. 11, 2018. [Online]. Available:
http://www.cordongroup.it/index.php/microtech/technologies/