Course’s name: MEMS Design

Chapter 1-
OVERVIEW of MEMS

Lecturer : A/Prof. Pham Hong Phuc

Dept. Mechatronics
Hanoi University of Science and Technology (HUST)
(https://sme.hust.edu.vn/can-bo/pgs-ts-pham-hong-phuc.html)
phuc.phamhong@hust.edu.vn
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Contents

1. Concepts and definitions

2. Sensor system
3. Actuator system
4. Integrated system
5. Applications and Development
6. Future of MEMS

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References
1. Thesis, textbook:
Handbook of transducers, MEMS design, Introduction-
micro-fabrication…
2. Scientific journals:
From international publication (Springer, Elsevier, IOP,
IEEE, ASME …)

3. Others: Video, poster, catalogue, internet…

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Introduction of MEMS (Micro Electro Mechanical Systems)

ME EE

IT, Simulation
Physics MEMS

Chemistry Material
Science
Mathematics…

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 Concept of MEMS Devices
Processing ICs Sensors Actuators
RF circuits
Memory

In Out
Thermal Thermal
Electrical Electrical
Mechanical Mechanical
Optical Optical
Chemical Silicon chip Chemical
Biological… Biological…

Integrated devices, fundamentally expanding possibilities of ICs

Inputs and outputs are not only electrical signal but also thermal, mechanical,
chemical, biological information, etc.
Movable (or living) devices
1980s - 1990s: Answer the problem: “how to make” MEMS
2001 - present: “what to make”, specific products emerging from laboratories
Expected to come into practical use for human society in the near future 5
Introduction of MEMS

Ref. : James J. Allen, “MEMS Design”, © 2005 by Taylor & Francis Group
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 MEMS fabrication technology
Extension of IC (Integrated Circuit) Fabrication Technology

Bulk Surface SMILE

Micromachining Micromachining SR Micro Lithography &
Photolithography Photolithography Etching
Anisotropic etching Thin film deposition High Aspect Ratio Process
Deep-RIE Sacrificial layer etching LIGA process
Wafer bonding... Dry etching

MEMS R&D, Prototyping, Fabrication and Packaging Service 7

 Definition and Classification of Sensors
Sensors are MEMS devices, which convert mechanical signals (force, pressure,
acceleration, angular rate, velocity, displacement) or others (thermal, optical…)
 to the electrical signal (Piezoelectric, piezoresistive, capacitive…)

• Mechanical sensors
• Pressure sensor
• Force/moment sensors
• Inertial Sensors
– Accelerometer
– Gyroscope
• Thermal sensors
• Optical sensors
• Fluidics/flow sensors
• … 8
 Example 1: 3-DOF Silicon Force Sensors

Design and Simulation Packaging

F
Micro Tester
Fingertip sensor

Fingertip sensor

Power supply

AD converter

Testing Applications 9
Micro fabrication
 Example 2: 3-DOF Accelerometer

Fixed f rame Sensing beam

Inertial sensors

Seismic mass

Cover size: 4x4 (mm2)

Beam length: 1000 mm, beam width: 60 mm, beam thickness: 10 mm
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 Definition and Classification of Actuators

Actuators are MEMS devices, which convert electrical, thermal or

chemical signals…  to the mechanical signal (force, pressure, moment,
or displacement)

• Electrostatic actuators
• Thermal actuators
• Piezoelectric actuators
• Magnetic actuators
• Shape memory alloys actuators
• Polymer actuators …

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 Example 3: Electrostatic Actuators

• Electrostatic Comb Actuators:

Linear Comb Actuators

Rotational Comb Actuators
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Scratch Drive Actuator (SDA)

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Electrostatic Microgripper

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 Example 4: Hot-cold arms Actuators

The difference of thermal expansion coefficient between 2 or 3

arms will generate force and displacement… 15
 Example 5: V-shaped actuator

The thermal expansion of V-shaped beams (2) will generate a

thermal force and displacement of the shuttle (1) in Y-direction

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 Micro linear motor based on V-shaped actuator

4
V2

β V1
3
g1
α
2
1

g2 V1

V2

Micro linear motor using 6 V-shaped actuators for both moving directions:
4 actuators for driving; 2 centered actuators for holding.
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 Micro Gripper Using V-shaped actuator

Working principle

- Actuator: Working on the principle

of thermal expansion of V - beam.

- The claw can drive gripping arm

through two revolute joints
0
v

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 Exp. 6- Integrated systems: Micro pump
Consist of more than 2 single systems, which integrated on a
chip: (micro pump, micro robot system, micro gearing…)

Micropump with check-valve

In
PZT Si

Out
PDMS
inlet outlet

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 Integrated systems: Pump and Flow sensor

Thien Dinh Xuan, Van Thanh Dau, Susumu Sugiyama, Phuc Hong Pham, “Fluidic device
with pumping and sensing functions for precise flow control”, Sensors and Actuators B
(SCI), Vol. 150, Issue 2 (2010), pp 819-824. ISSN: 0925-4005
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 Exp. 7: Gripper and force sensor

Electrothermal micro-gripper integrated to 1-DOF piezoresistive sensor,

aiming to measure displacement of jaw 21
 Application and development of MEMS Devices
Production
Delivery
Transport
Factory
Agriculture

Environment, Aerospace
Bio

Sens. RF

Trans. CPU I/O

Information
Bio- Technology
Chemical Act. Mem Gen./
Stor.
o.
Analysis

Medical Treatment Robotics,

Diagnosis Internet Medical Engineering Flexible Automation 22
Sports
Future of MEMS

o Nano-scale
o Smarter and integrated devices
o Green MEMS: Microsystems or Micro technologies
for green and safety applications
 Green micro-technologies and micro-fabrication
 Ultra low energy MEMS technologies: production and
operation
 Energy harvesting and saving technologies: green and
environmental applications

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Thanks for listening !
Any question or comment ?

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