Piezoresistive microphone

Piezoresistive microphone
A microphone in which change in the electrical resistance take place
because of sound waves of the semiconductor material is considered to
be a piezoresistive microphone.

A piezoresistive microphone is created a diaphragm by means of two pairs

of piezoresistors in a Wheatstone bridge configuration.

Because of the mechanical stress or strain, a change in resistivity of a

piezoresistive material takes place. For silicon membranes, a change in the
number of charge carriers takes place due to changes in its resistivity.

A piezoresistive silicon microphone by means of a 1 µm thick highly

boron-doped silicon membrane.

Though this microphone increases in sensitivity and decreases in power

consumption over commercially accessible piezoelectric MEMS (Micro
Electro Mechanical Systems) microphones, it has a higher noise floor of 92
dBSPL than normal.

The cross-sectional view of piezoresistive microphone

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