EEE 513/ETE 444/ETE 544

Introduction to Nanotechnology
Section-1: W (6:30 - 9:40 pm) @ SAC 304

Catalogue Description
Introduction to Nanoscale Systems; Limits to Smallness; Top-down Approach to
Nanolithography; Physics-based Experimental Approaches to Nanofabrication and
Nanotechnology; Quantum Nature of the Nanoworld; Wave-particle Duality; Quantized Energies;
Particle in a Box; Fermi-Dirac Distribution Function; Density of States, Concept of
Dimensionality; Quantum Mechanical Tunnelling; Surface Probe Techniques; Single Electron
Transistor, Coulomb Blockade; Bottom-up Approach. Chemical Self-assembly, Carbon
Nanotubes; Bio-nano Electronics. Credits: 3

Course Faculty
Dr. Mohammad Rezaul Bari (RzB); Room: SAC 923
Office Hours: S-W: 11:20-12:20; S: 14:40-16: 10; M: 12:20-12:50; W: 12:50-18:20

Course Topics
1. Introduction to nanoscale systems
Nanotechnology – definition and examples
Background
Lessons from nature (biomimetics)
Application in different fields
Various issues
2. Limits to smallness
Particle nature of matter: photons, electrons, atoms, molecules
Biological examples of nanomotors and nanodevices
How small can we make it?
3. Introduction to micro/nanofabrication
Top-down and bottom-up approaches of fabrication
Basic micro/nanofabrication techniques: Crystal growth, oxidation,
photolithography, etching, diffusion, ion implantation, deposition
MEMS/NEMS fabrication techniques
Nanofabrication techniques: E-beam and nanoimprint, epitaxy and strain engineering,
physical and chemical self-assembly and template manufacturing
4. Quantum nature of the nanoworld
Wave-particle duality
Time-independent Schrodinger equation
Electron in infinite potential well and quantized energies
Tunnelling phenomenon
Quantum mechanical tunnelling
5. Surface probe techniques
Scanning probe microscopy (SPM)
Atomic force microscopy (AFM)
Scanning probe techniques
6. Carbon nanotubes
Structure of carbon nanotubes
Synthesis of carbon nanotubes
Growth mechanisms of carbon nanotubes
Properties of carbon nanotubes
Carbon nanotube-based nano-objects
Applications of carbon nanotubes
7. Single-electron transistor and Coulomb blockade
Operating principle
Fabrication
Applications
8. Bio-nanoelectronics
What is bio-nanoelectronics?
Bio-nanoelectronics toolkit
Bio-nanoelectronic sensors
Bio-nanoelectronic circuits
Outlook

Points Distribution
Attendance 5%
Presentation 10%
Quizzes 15%
Midterm 1 20%
Midterm 2 20%
Final 30%

Grading Policy
NSU grading policy [northsouth.edu/academic/grading-policy.html] will be followed in assigning
letter grades.

Recommended Reading
Book
Edward Wolf, Nanophysics and Nanotechnology: An Introduction to Modern Concepts in
Nanoscience, Wiley-VCH Verlag, 2004

Book Chapters
Bharat Bhushan (Ed.), “Introduction to Nanotechnology”, Springer Handbook of Nanotechnology,
Springer, 2007, pp. 1-10

Bharat Bhushan (Ed.), “Introduction to Micro/nanofabrication”, Springer Handbook of

Nanotechnology, Springer, 2nd Ed., 2007, pp. 197-237

Safa Kasap, “Elementary Quantum Physics”, Principles of Electronic Materials and Devices, McGaw
Hill, 3rd Ed., 2006, pp. 191-228

Bharat Bhushan (Ed.), “Introduction to Carbon nanotubes”, Springer Handbook of Nanotechnology,

Springer, 2nd Ed., 2007, pp. 43-111

H. C. Neitzert, “Innovative Electronic Devices Based on Nanostructures” in Nanotechnology and

Nanoelectronics: Materials, Devices, Measurement Techniques, W. R. Fahrner (Ed.), Springer-
Verlag, 2005, pp. 225-231

Journal Articles
“There’s plenty of room at the bottom”, transcript of talk given by Richard Feynman on December 29,
1959 at the annual meeting of the American Physical Society at Caltech. Reprinted in the Journal of
Microelectromechanical Systems, Vol. 1, No. 1, (1992) pp. 60- 66

“Infinitesimal machinery”, transcript of talk given by Richard Feynman on February 23, 1983 at the
Jet Propulsion Laboratory, Pasadena, CA. Reprinted in the Journal of Microelectromechanical
Systems, Vol. 2, No. 1, (1993) pp. 4- 14
Burn Lin, Optical lithography – present and future challenges, Comptes Rendus Physique, Vol. 7,
(2006) pp. 858-874

Chou et al. Sub-10 nm imprint lithography and applications, Journal of Vacuum Science &
Technology B, Vol 15, (1997) pp. 2897-2904

Binning, Rohrer, Gerber, and Weibel, Surface Studies by Scanning Tunneling Microscopy, Physical
Review Letters, Vol. 49, No. 1, (1982) pp. 57-61

Binnig and Quate, Atomic Force Microscope, Physical Review Letters, Vol. 56, No. 9, (1986) pp.
930-933

Stroscio and Eigler, Atomic and Molecular Manipulation with the Scanning Tunneling Microscope,
Science, New Series, Vol. 254, No. 5036 (1991), pp. 1319-1326

Kroto et al, C60: Buckminsterfullerene, Nature, Vol. 318, (1985) pp. 162-163

Iijima and Ichihashi, Single-shell carbon nanotubes of 1-nm diameter, Nature, Vol. 363, (1993) pp.
603-605

Bethune et al, Cobalt-catalysed growth of carbon nanotubes with single-atomic layer walls, Nature,
Vol. 363, (1993) pp. 605-607

Cheng et al, Sketched oxide single-electron transistor, Nature Technology, Vol. 6, (2011) pp. 343-347

Aleksandr Noy, Bionanoelectronics, Advanced Materials, Vol 23, (2011) pp. 807-820

Duan et al, Intracellular recordings of action potentials by an extracellular nanoscale field-effect

transistor, Nature Nanotechnology, Vol. 7, (2012) pp. 174-179

Good Luck!