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Voltage Induced Acoustic Resonance in Metal Organic Chemical Vapor Deposition Srtio3 Thin Film
Voltage Induced Acoustic Resonance in Metal Organic Chemical Vapor Deposition Srtio3 Thin Film
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Article in Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures · November 2012
DOI: 10.1116/1.4757129
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061202-1 J. Vac. Sci. Technol. B 30(6), Nov/Dec 2012 2166-2746/2012/30(6)/061202/5/$30.00 C 2012 American Vacuum Society
V 061202-1
061202-2 Sbrockey et al.: Voltage induced acoustic resonance in MOCVD SrTiO3 thin film 061202-2
FIG. 4. AFM amplitude image of a representative SrTiO3 film deposited on platinum coated silicon by MOCVD.