TEXAS INSTRUMENTS ELECTRONICS MALAYSIA

SECTION 016150 – OUTGASSING CRITERIA FOR CLEANROOM PRODUCTS

PART 1 - GENERAL

1.1 SUMMARY

A. Section Includes:

1. This Section specifies the selection and/or testing of critical products within the
Clean Zone with regard to outgassing molecular contaminates.

2. Cost of testing shall be part of contractor scope.

3. The purpose of this Section is to control the level of airborne molecular contami-
nation (AMC) from materials outgassing into the Clean Zone environment.

a. Materials that come into contact with the air in the Clean Zone or with
the airstream from air-handling systems that serve the Clean Zone, shall
comply with the material outgassing design criteria specified in this Sec-
tion.
b. Evaluate critical materials proposed for Clean Zone construction to de-
termine if the outgassed molecules pose sufficient risk to reject its use in
the Clean Zone.
3.
4. Use this Section in conjunction with other applicable sections for the selection of
Clean Zone materials.

B. Related Requirements:

1. Use this Section in conjunction with the following other specifications and relat-
ed Contract Documents to establish the total Clean Zone material outgassing re-
quirements:

a. Section 011100 – Cleanroom Construction Protocol.

b. Section 015721 – Indoor Air Quality Controls: Procedures and testing;
LEED requirements.
c. Section 016000 – Product Requirements
d. Section 018113 – Sustainable Design Requirements - LEED v4 BD+C

1.2 DEFINITIONS

A. Terms and phrases specific to outgassing as defined in Semiconductor Equipment and

Materials International (SEMI) standard F21, Classification of Airborne Molecular Con-
taminant Levels in Clean Environments, are condensed below for reference:

1. AMC Controller: Provided by the Owner and vested with authority by the Own-
er to approve product use and application when product testing is required re-
garding compliance with AMC criteria. The AMC Controller has the authority to
accept or reject materials proposed for installation in the Clean Zone.
2. Acids: a corrosive material whose chemical reaction characteristic is that of an
electron acceptor; any solution with a chemical pH less than 7.

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3. Areal Density: the property of a material as it is installed indicating the mass per
unit surface area (gram per square cm).
4. Bases: a corrosive material whose chemical reaction characteristic is that of an
electron donor; any solution with a chemical pH greater than 7.
5. Boilers: a group of compounds with a range of boiling points. Low boilers are
compounds that are less retained on a gas chromatography column than n-decane.
Medium boilers are defined as compounds that elute from a gas chromatography
column between n-decane and n-eicosane. High boilers are defined as com-
pounds that elute from a gas chromatography column after n-eicosane. This
method of categorization is typically used to avoid identifying the individual
compounds.
6. Cleanroom A/E: Owner designated A/E firm vested with authority by the Owner
to approve initial product use and application with final approval by the AMC
Controller. The cleanroom A/E has the authority to accept or reject materials
proposed for installation in the Clean Zone.
7. Clean Zone: a defined general clean area in which the concentration of airborne
particle contamination is controlled to specified limits as defined in Sec-
tion 01355, Clean Zone General Requirements. The Clean Zone encompasses
cleanrooms of any cleanliness classification, mini-environments, and remote spe-
cial rooms for cleanroom support equipment, including spaces, materials, and
utilities within.
8. Condensables: a substance having a boiling point 150 degrees C above room
temperature at atmospheric pressure, capable of condensation on a clean surface.
9. Dopants: a chemical element that modifies the electrical properties of a semi-
conductive material.
10. Outgassing (Offgassing): The spontaneous evolution of a gas or vapor from a
material. This includes desorption of gases, evaporation of volatile materials,
and evolution of decomposition products.
11. ppmw: parts per million by weight, g per gram.
12. pptrM: parts per trillion (Molar).
13. Target Compound: a contaminant that is, by itself or in combination with other
compounds, detrimental to the manufacturing process.
14. TD-GC-MS: industry abbreviation for analytical test procedure using thermal
desorption-gas chromatography-mass spectrometry.

1.3 SYSTEM DESCRIPTION

A. Base the project design criteria for the amount of acceptable outgassing upon the speci-
fied molecular contamination level classification as defined in SEMI F21.

B. The Owner defines the baseline contamination level for the cleanroom at-rest. The re-
sultant AMC of the constructed cleanroom at-rest shall not exceed levels for specific
compounds in Table 1.

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TABLE 1 – Baseline Contamination Level

COMPOUND UNITS
Ammonium 1 nanogram per liter of air
Boron 1 nanogram per liter of air
Bromide 1 nanogram per liter of air
Chloride 10 nanograms per liter of air
Fluoride 5 nanograms per liter of air
Nitrate (NO2) 10 nanograms per liter of air
Nitrate (NO3) 5 nanograms per liter of air
Phosphate (PO4) 1 nanogram per liter of air
Potassium 10 nanograms per liter of air
Sodium 10 nanograms per liter of air
Sulfate (SO4) 5 nanograms per liter of air
Total Hydrocarbons Less than 1 ppm
Total Metals Less than 1 ppm

C. Submit products for use in the Clean Zone which satisfy one of the following criteria in
the hierarchical order listed below:

1. Approval by the cleanroom A/E for Clean Zone products specified in the Con-
tract Documents.
2. Approval by the cleanroom A/E for alternate Clean Zone products.
3. Approval by the AMC Controller based on previous experience.
4. Laboratory tests by an approved and independent laboratory confirming the
product does not outgas within the detection limits of the equipment, the product
does not outgas process critical or target compounds, and the product does not
outgas process critical or target compounds at a sufficient rate to pose a manufac-
turing yield risk. Laboratory tests provide a relative comparison with laboratory
data of similar products.
5. Waiver by the AMC Controller based on exception(s), even when the product
exceeds the outgassing test criteria. Allowable exceptions include, but are not
limited to:
a. The quantity of the product used in the Clean Zone is not sufficient to
pose a contamination risk.
b. The product is sufficiently segregated or remote from the process affect-
ed by the target compound(s).
c. The product areal density is high.
d. The product is not directly in the Clean Zone airstream or is fully encap-
sulated.
e. The target compound has a low boiling point and/or is considered low
risk to outgas in cleanroom conditions.

D. Product submittals shall clearly indicate products or finishes with revised formulas. Re-
vised products and/or formulas shall be considered an alternate.

1.4 QUALITY ASSURANCE

A. Review this Section with the AMC Controller and incorporate requirements pertaining to
Clean Zone product selection and outgassing test criteria.

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B. Utilize a test laboratory having documented experience with TD-GC-MS conducted by

qualified technicians.

C. The AMC Controller shall review Clean Zone product specifications and material outgas-
sing test results.

D. Maintain a field file documenting products submitted for outgassing tests, incorporating
matched laboratory test results.

E. Maintain an updated field file listing product and manufacturer approved for use on this
project.

1.5 ACTION SUBMITTALS

A. Product Data: Submit manufacturer's technical product data for each item including in-
stallation instructions.

B. Test Samples:

1. Provide test samples to an independent laboratory for product outgassing testing.

If the manufacturer chooses to conduct separate tests, they shall be performed by
an approved laboratory and conform to the material outgassing test criteria speci-
fied in Part 3.
2. The AMC Controller determines the size, shape, weight, quantity, and state of the
sample based on its type and use. Prepare samples requiring joining, mixing,
curing, or priming using manufacturer's recommended methods and specifically
document each preparation step as it occurs.
3. Prepare samples in the same manner in which they would be applied or installed
in the Clean Zone. If specific cleaning procedures are required before the prod-
uct enters the Clean Zone, submit these samples in the cleaned state.
4. Where two or more materials have a potential for reacting in combination with
one another to outgas, an additional compatibility test is required. Prepare the
test sample simulating as close as possible the Clean Zone installation and at-
mosphere, and submit for tests within 1 week after sample preparation.
5. For compounds requiring mixing or air curing, include dates, field conditions at
time samples were taken (temperature, relative humidity of both the space and
the ambient), and operators' names in the field file.

C. Submit list of proposed product alternates and outgas test reports as specified.

D. Submit one sample of each product, sealed in plastic or shrink-wrap, for storage and fu-
ture testing by the AMC Controller. Suitable samples would include one reasonably
sized segment of floor, wall, ceiling components (minimum size 1 square foot); tube of
sealants; gaskets (12 inches in length); cleaning agents; can of paint and mastic; etc.

1.6 INFORMATIONAL SUBMITTALS

A. Submit record documents at Substantial Completion of Stage 2:

1. Field file of products submitted for outgassing tests.

2. Field file of products approved for use on the project.

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3. Field file of products rejected for use on the project.

4. Laboratory test results.
5. Product data shall include manufacturer, Material Safety and Data Sheet
(MSDS), and product model number.

B. Laboratory test results extracted from samples submitted directly to the AMC Controller
for independent testing shall become the property of the AMC Controller. Product manu-
facturers shall not use these results for promotional or financial advantage without written
release by the AMC Controller.

PART 2 - PRODUCTS

2.1 OUTGASSING CRITERIA FOR PRODUCT ACCEPTANCE

A. Acceptable Laboratories for Product Outgassing Testing:

1. ChemTrace Analytical Laboratory, Hayward, California.

2. Balazs Analytical Laboratory, Sunnyvale, California and Austin, Texas.
3. CH2M HILL Applied Sciences Laboratory, Corvallis, Oregon
4. Sirim accredited testing laboratories in Malaysia

B. Outgassing Test Criteria:

1. The AMC Controller will determine the outgassing test criteria and acceptance of
each Clean Zone product.
2. The outgassing test criteria will contain but is not limited to the following param-
eters:
a. Acceptable levels for the target compounds, expressed as ppmw, ppmM,
ppmV, and/or nanograms per square centimeter (cm).
b. Time and temperature parameters for the sample treatment prior to
TD-GC-MS analysis.
c. Specific target compounds to be identified in the analysis.
d. Details for sample amounts, composition, preparation, and procedures
for submittal to the testing laboratory.

C. Test results shall be submitted to the Texas instrument project team.

PART 3 - EXECUTION

3.1 TEST PROCEDURE

A. Analyze products for outgassing by dynamic head-space method as described in the tech-
nical paper Organic Outgassing from Cleanroom Materials HEPA/ULPA Filter Compo-
nents - Standardized Test Proposal, presented at the Institute of Environmental Sciences
and Technologies (IEST) Annual Technical Meeting of May 1997. Laboratories shall
employ the procedures described therein. For any variations in test conditions, submit
system description to the AMC Controller for approval.

B. Outgassing tests performed according to IDEMA Standard Document No. M11-99 are al-
so acceptable.

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C. Perform semiquantitative analysis of the amounts of each outgassed compound by using

the response factor for n-decane (C10H22). Where possible, identify the hydrocarbons.
Otherwise, divide results into boiling point ranges as follows:

1. Low Boilers: C6H14 to C10H22.

2. Medium Boilers: C11H22 to C20H42.
3. High Boilers: greater than C20H42.
4. The above categories are defined based on use of a nonpolar poly (dimethysilox-
ane) GC column.

D. Use the latest edition of National Institute for Standards and Technology (NIST), or
Wiley 275,000 Compounds Mass Spectra Library for identification of each outgassed
compound. If there is not a match, interpret mass spectra manually to give the best esti-
mate of the most probable compound or class of compounds.

E. Analyze an empty standard blank container and a hydrocarbon standard mixture per EPA
Method 524.2 containing 500 ng each of a series of n-alkanes from n-hexane to
n-octacosane (C28C58). Use this standard to calibrate instruments, to assess the sensitiv-
ity of the GC-MS, and to determine the boiling point range of compounds that can be de-
tected by the instrument.

F. Present the chromatograms produced by the individual samples as part of the test data.
Identify the major outgassed compounds on the chromatogram.

G. Measure and document the areal density (grams per square cm) of the product as part of
the test data.

H. Express outgassing test results as ppmw and nanogram per square cm.

3.2 COMMISSIONING

A. Summarize test results on a data sheet, Outgassing Test Data Sheet example below, Doc-
ument product, environmental conditions, size of sample, receipt date of sample, test date
of sample, and testing results including tests and instruments utilized.

OUTGASSING TEST DATA SHEET

Product Manufacturer
Sample Product Name
Sample Identification
Date Manufactured
Date Tested
Sample Weight (grams)
Sample Surface Area (cm2)
Sample Cure Conditions

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Instructions:
1) Outgas testing performed according to procedures described in Section 01357, Outgassing Criteria for Clean Zone
Products. Outgas reports shall include both a table of the identified compounds from the chromatogram, the retention
time, and the concentration ratio (g/g). The mass spectrum should be identified using a computer-aided search of a
mass spectra library with best efforts made to identify unknowns. Quantitation shall be based on a response factor of
an external n-decane standard. Reported detection limits should be on the order of 0.1 g/g.
2) Fill in the chart above.
3) Indicate cure conditions (sample thickness and cure time) for product requiring curing (i.e.: paints, adhesives, coat-
ings, etc.)
4) If compounds are above the acceptable levels shown, the product may be rejected.

COMPOUND OUTGAS TEST ACCEPTABLE ACCEPTED

ION CONCENTRATION LEVEL
(g/g) (g/g)
ACIDS (total) 10
Acetic
Chloride 1
Bromide 1
Nitrate 1
Nitrite 1
Sulfate 1
Other acids
BASES
Amines [e.g. ethanolamine] 10
Butylated hydroxytoluene
Thiethyldiamine (Trisamine)
Other Bases [NMP, Ammonia] 10
CONDENSABLES
Dioctyl phthalates
Phthalates [Any compound end- 100
ing in phthalate, e.g. dibutyl
phthalate]
Silicones and Siloxanes [ e.g. 100
poly dimethyl silicone, hexame-
thyl disiloxane, cyclic siloxanes]

Triethylphosphate
Other Targeted Condensables 100
[Plasticizers, BHT, TXIB]
High Boilers [sum of all com- 100
pounds with retention times above
25 minutes]
DOPANTS
Boron compounds [e.g. Boric ac- 1
id, trimethyl borate]
Calcium

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Phosphates [e.g. triethyl phos- 1

phate, phosphate esters]
Potassium 1
Sodium 1
Total Metals [Antimony, Magne- 1
sium, Nickel]
TOTAL OUTGASSED All 1,000
COMPOUNDS

END OF SECTION 016150

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