ESD 정의 QRT

World Best Reliability & Failure Analysis Company
Electrostatic Discharge 개요
큐알티반도체
Reliability Engineering Team

• Electrostatic Discharge
• ESD model and Test mode
• LATCH-UP
• LATCH-UP Test 방법
• JEDEC & AEC Q-100 ESD Latch-up 비교

What is ESD ?
• Electrostatic discharge (ESD)
• 대전된 물체의 전위가 다른 물체와 접촉하여 짧은 순간에

전하의 이동이 발생하는 것.
• 접지 체와의 접촉으로 인하여 대전 물체가 가진 에너지가

순간적으로 방출되는 현상.

ESD Model
• Human Body Model (HBM)
• Machine Model (MM)
• Charged Device Model (CDM)

ESD Model

HBM Model
• Test standard : JESD22-A114F / AEC-Q100
charged person(사람)이 device와 접촉하면서 발생하는

정전기에 대한 저항성 평가. C=100pF, R=1.5kΩ
R
HV DUT
Supply
C

MM Model
• Test standard : JESD22-A115A / AEC-Q100
charged equipment(장비)가 device와 접촉하면서 발생하는

정전기에 대한 저항성 평가. C=200pF, R=0Ω
R
HV DUT
Supply
C

ESD Testing Mode
• VDD (Power) Mode : VDD Pin을 GND 化하고 Others Pin Zapping.
VDD VDD
V 0V
0V
-V
VSS VSS

• VSS Mode : VSS Pin을 GND 化하고 Others Pin Zapping.
VDD VDD
0V V
0V
-V
VSS VSS

• Non-power Pin (IO) Mode : Power & VSS Pin을 제외한

Non-power (IO) pin을 GND 化하고
Test 하고자 하는 1개의 I/O pin을 Zapping.
VDD VDD
V 0V
0V -V
VSS VSS

CDM Model
• Test standard : JESD22-C101F / AEC-Q100
• charged device가 metallic GND와 접촉하면서 짧은 시간 안에

device에서 GND로 discharge 하면서 발생하는 정전기에 대한
저항성 평가.

Field Induced (JESD22-C101F / AEC-Q100)

-Field charged plate의 전위를 높여 제품을 Charge 시키는 방법.
Field Induced Method

1Ω
Upper Ground plane

Discharge Probe
Insulating Fixture
containing Field
Charging electrode
EHT
☞ 금속 전극이 Device Package의 표면에 접촉하는 방법을 이용한 것으로 금속전극에

전압을 인가하고, 측정단자는 접지시켜 방전 경로를 형성시켜서 Device의 한계량을
평가하는 방법.

Direct charged (AEC-Q100)

-Pin (VSS 또는 Power)을 통하여 Charge 시킨 후 Others pin으로 Discharge.
Direct Charge Method
1Ω
Upper Ground plane
EHT charge Probe Discharge Probe
☞ Device Pin을 통해 단자를 접촉시켜 전압을 인가한 후 접지된 측정단자로 방전 경로를

형성시켜 Device의 한계를 평가하는 방법.

LATCH-UP ?
• CMOS 구조에서 외부의 전압 변동이나, 전기적 잡음 등으로

기생 bipolar Tr이 Turn on되어 소자의 동작을 방해 또는 파괴시키는 현상.
Vin
Vdd
Vout ＋
①
Vss
P+ N+ N+ P+ P+ N+
Rpw ②
⑤ R-n sub
Tr2 Tr4 Tr1 Tr3
③
P -Well
⑥
④
N -Well

I-Test
Test standard : JESD 78B / AEC-Q100

- Current Injection mode
Trigger Source Vsupply

+ - + -
Positive + 100 mA
Trigger Test Conditions
Test terminal Negative - 100 mA
VDD
The output terminal
Connected to the input
Is opened
Terminal the power supply
If absolute Inom≤25 mA, then absoulute Inom+10 mA is used
Or the GND Terminal
GND or
If absolute Inom＞25 mA, then ＞ 1.4 x absoulete Inom is used
Isupply Measurement

Vsupply over voltage test
Test standard : JESD 78B / AEC-Q100

- Voltage Injection mode
Vsupply(1.5 X max. Vsupply)

+ -
Trigger Test Conditions Positive 1.5 X max Vsupply
Connected to the input VDD The output terminal

Terminal the power supply Is opened
Or the GND Terminal If absolute Inom≤25 mA, then absoulute Inom+10 mA is used
or
GND
If absolute Inom＞25 mA, then ＞ 1.4 x absoulete Inom is used
Isupply Measurement

JEDEC & AEC Q-100 ESD Latch-up 비교

HUMAN BODY MODEL

Standard JEDEC AEC-Q-100
EOS/ESD Assoc STM5.

규격 JEDEC22-A114-F
EIA/JESD22-F114
Sample size 3 3
No of Zaps 1 positive &1 negative 1 or 3 positive & 1 or 3 negative
Pulse Interval ≥ 0.1s ≥ 0.5 s
Pin group

HUMAN BODY MODEL _ Classification
JEDEC AEC-Q-100
Component Class. Maximum Voltage
CLASS 0 ≤ 250V
CLASS 1A 250 to ＜ 500V
CLASS 1B 500 to ＜ 1000V
CLASS 1C 1000 to ＜ 2000V
CLASS 2 2000 to ＜4000V
CLASS 3A 4000 to ＜ 8000V
CLASS 3B ＞ 8000V

MACHINE MODEL

EOS/ESD Assoc STM5.
참고 규격 JEDEC22-A114-A
EIA/JESD22-F114
Sample size 3 3
No of Zaps 1 positive &1 negative 3 positive & 3 negative
Pulse Interval ≥ 0.5 s ≥ 1.0 s
Pin group

MACHINE MODEL _ Classification
JEDEC AEC-Q-100
CLASS A ＜ 200V
CLASS B 200 to ＜ 400V
CLASS C ≥ 400V

CHARGED DEVICE MODEL
Standard JEDEC AEC Q-100
EOS/ESD Assoc STM5.

참고규격 JEDEC22-A114-E
EIA/JESD22-D114
Sample size 3 3
No of Zaps 3 positive &3 negative 3 positive & 3 negative
Field-Induced Field-Induced Charge or Direct Charge

Charged
(Charge Cover : FR4) (Charge Cover : 130 Microns thick )
Test Pins All pins All pins

CARGED DEVICE MODEL _ Classification
JEDEC AEC-Q-100
CLASS Ⅰ ＜ 200V
CLASS Ⅱ 200 to ＜ 500V
CLASS Ⅲ 500 to 1000V
CLASS Ⅳ ≥ 1000V

LATCH-UP TEST
참고규격 JEDEC 78B JEDEC 78B
Sample size 6 6
Test Temperature
Class Ⅰ or Class Ⅱ Class Ⅱ
Class
I-Test and Vsupply over voltage Test E-Test or I-Test
Test Matrix

ESD is important
• Distribution of failure modes in silicon ICs

ESD 정의 QRT

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World Best Reliability & Failure Analysis Company

Reliability Engineering Team

• ESD model and Test mode

• JEDEC & AEC Q-100 ESD Latch-up 비교

Reliability Engineering Team

• Electrostatic discharge (ESD)

• 대전된 물체의 전위가 다른 물체와 접촉하여 짧은 순간에

• 접지 체와의 접촉으로 인하여 대전 물체가 가진 에너지가

Reliability Engineering Team

• Human Body Model (HBM)

• Machine Model (MM)

• Charged Device Model (CDM)

Reliability Engineering Team

Reliability Engineering Team

• Test standard : JESD22-A114F / AEC-Q100

charged person(사람)이 device와 접촉하면서 발생하는

Reliability Engineering Team

• Test standard : JESD22-A115A / AEC-Q100

charged equipment(장비)가 device와 접촉하면서 발생하는

Reliability Engineering Team

ESD Testing Mode

Reliability Engineering Team

• VSS Mode : VSS Pin을 GND 化하고 Others Pin Zapping.

Reliability Engineering Team

• Non-power Pin (IO) Mode : Power & VSS Pin을 제외한

Reliability Engineering Team

• Test standard : JESD22-C101F / AEC-Q100

• charged device가 metallic GND와 접촉하면서 짧은 시간 안에

Reliability Engineering Team

Field Induced (JESD22-C101F / AEC-Q100)

Field Induced Method

Upper Ground plane

☞ 금속 전극이 Device Package의 표면에 접촉하는 방법을 이용한 것으로 금속전극에

Reliability Engineering Team

Direct charged (AEC-Q100)

Direct Charge Method

Upper Ground plane

EHT charge Probe Discharge Probe

☞ Device Pin을 통해 단자를 접촉시켜 전압을 인가한 후 접지된 측정단자로 방전 경로를

Reliability Engineering Team

• CMOS 구조에서 외부의 전압 변동이나, 전기적 잡음 등으로

Reliability Engineering Team

 Test standard : JESD 78B / AEC-Q100

Trigger Source Vsupply

Reliability Engineering Team

Vsupply over voltage test

 Test standard : JESD 78B / AEC-Q100

Vsupply(1.5 X max. Vsupply)

Trigger Test Conditions Positive 1.5 X max Vsupply

Connected to the input VDD The output terminal

Reliability Engineering Team

JEDEC & AEC Q-100 ESD Latch-up 비교

Reliability Engineering Team

HUMAN BODY MODEL

EOS/ESD Assoc STM5.

No of Zaps 1 positive &1 negative 1 or 3 positive & 1 or 3 negative

Pulse Interval ≥ 0.1s ≥ 0.5 s

Reliability Engineering Team

HUMAN BODY MODEL _ Classification

Component Class. Maximum Voltage

CLASS 1A 250 to ＜ 500V

CLASS 1B 500 to ＜ 1000V

CLASS 1C 1000 to ＜ 2000V

Test standard : JESD 78B / AEC-Q100

Test standard : JESD 78B / AEC-Q100