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Thermodynamics of The Si-C-O System For The Production of Silicon Carbide and Metallic Silicon
Thermodynamics of The Si-C-O System For The Production of Silicon Carbide and Metallic Silicon
The predominance diagrams of the Si-C-O system for 1350 to 2200 ~ have been constructed thermo-
dynamically by taking into account the presence of liquid silicon monoxide. The high-temperature
behavior of various feeds, such as the SiO2-C and SiO2-SiC systems, have been calculated as functions
of mixing ratio and reaction temperature by using the method of equilibrium mass-balance. For an
efficient SiC-making, a charge having a C/Si ratio of 2.91 should be heated between 2035 and
2045 ~ where SiC crystals can be grown mainly via gas-phase reactions of SiO(g). Metallic silicon
cannot be produced unless a charge of the Si-C-O system is heated above 2037 ~ In Si-making,
liquid SiO plays an important role in that the yield can be improved substantially by enhancing the
condensation of SiO gas in the upper cooler part of the furnace. This work also lends thermodynamic
proof and support to the double-reactor model, in which a greater fixation of ascending SiO gas on
carbon as SiC is considered essential for obtaining a higher silicon yield in industrial furnaces. Some
fundamental strategies useful to the improvements of commercial Si- and SiC-making operations have
been described quantitatively.
the viewpoint of thermodynamic rigor, the coordinates of C be expressed in terms of the partial pressures of CO and 02
and CO potentials should be more appropriate. The condi- gases, as shown in Table II. In all the previous studies of the
tions of reducing (or oxidizing) and carburizing (or decar- Si-C-O system, the formation of SiO(1) was overlooked.
burizing) are qualitatively indicated in Figure 1. Such a nonequilibrium viewpoint is called metastable sys-
tem in this paper. In the metastable system, there are
three condensed phases: Si, SiC, and SIO2. This approach
is inconsistent with the elaborate study on SiO(1) by
IV. PREDOMINANCE DIAGRAMS
Kubaschewski and Alcock. s Correctly, the four condensed
OF THE TYPE CO-O2
phases of Si, SiC, and SiO2, and SiO(1) should be included
In constructing the predominance diagrams with the use in the system above 1000 ~ The system including the four
of CO and O2 potentials, all the equilibrium reactions must condensed phases is called stable in this work.
CARBON SATURATION
REDUCING 0
REDUCING
0
8
,-I
-4
-4
OXIDIZING OXIDIZING
] I I ! ] ! ~ I
-20 -15 -10 -4 -3 -2 -1 0
Log P02 Log PCO
Fig. 1 - Various conditions in the predominance diagrams.
The stability zones of various condensed phases in both maximum along the boundary Si-SiO2 as well as at the
stable (full lines) and metastable (dotted lines) systems are univariant point C where the three phases of Si, SiC, and
shown in Figure 2(a) together with the isobars of COz gas. SiO2 are assumed to coexist. Two univariant points are to be
The partial pressure of CO2 gas is always negligibly small noted in the stable system: the point A for the coexistence
insofar as the industrial production of SiC and Si is con- of Si, SiC, and SiO (1), and the point B for that of SiC, SIO2,
cerned. The metastable system is singled out and shown in and SiO(1).
Figure 2(b) to illustrate the isobars of SiO(g), which become It is important to note that both an increase and a de-
crease in oxygen or carbon activity away from the meta-
stable univariant point C result in a lower SiO pressure, as
' ,"-
indicated by the contours of SiO (g) isobars, Figure 2(b). In
other words, for a given value of SiO gas pressure at a
"z'--. Z - J temperature, there are an infinite number of the different
pairs of oxygen and carbon potentials. Some previous re-
0
searchers 7 were misled by the oversight of the fact that the
en
SiO partial pressure cannot be chosen as an independent
O)
O
.J
variable of the Si-C-O system.
-2 Thermodynamically, under no circumstances can the
activity of carbon be greater than unity. Yet, as shown in
Figure 2(a), the impossibility of the univariant point B at
1600 ~ is not immediately evident unless the carbon iso-
~ j.-/(~) PSio=O,014/. j Si02 IS)
activity lines are also shown. This is a serious shortcoming
-4 ~ T of the coordinates of the type CO-O2. This fault can be
s,(,, ,I J # remedied by choosing the coordinates of the type C-CO,
-20 -18 -16 -14 -12 -10 where the unit carbon activity can be clearly marked and
Log P02 checked. Although the carbon potential, or log ac, is some-
(a) what more abstract than the partial pressure of a gas and
2 therefore more difficult to visualize, the choice of the type
1812"C ' , //r // /V~I- C-CO is more rigorous and convenient than that of the type
/" /'/ /" I
CO-O2.
(see Eq. [8]), or c o n v e r s e l y the C O partial pressure remains T h o s e conditions p r e v a i l i n g in industrial electric furnaceL
always a b o v e 0.25 atm w i t h o u t e x c e e d i n g 1.0 atm. H e n c e , are indicated by the hatched zone in F i g u r e 4. This is a range
of the conditions to be w a t c h e d closely at each temperature.
Pco(ind) + Ps,o(ind) = 1 atm [1]
B e t w e e n 1449 and 2200 ~ the stability zones o f Si and
0 < Ps~o(ind) < 0 . 7 5 [2] SiC are n e v e r adjacent to that o f SiO2. Accordingly, it is an
error, for e x a m p l e , to write the f o l l o w i n g c h e m i c a l reactionL
0 . 2 5 < Pco(ind) < 1 [3] as a reaction m e c h a n i s m at these temperatures:
D O, F E
~o.~ ' ' y // 1506"C // ..,
-1
1~,,,,/ ,,=o,,, ~, o o;
.3t / , , ~ . 6:~,, / /s~,=,/ ..7
- ./, / , / ,/ ,/ ,
-6 -5 -4 -3 -2 -1 -5 -4 -3 -2 -1 0
Log PCO LogPCO
(a) (c)
D F
1449 "C ' ' ' ~ ~ B
-1
.../ ..... .../,,,..,~____~g.~ / ..-
/ / ,/ / ,, , / /
/ / / ," /. ,/
2 ~,/ 0~/,/ / Si6(1) / s.~O~// -
-2
e=,,,f / .,," / r /',
,// / / p,~O~'O,OS
//
/ / /SiO,
, / . . . or
-3
a l.ll.~" "4I
-6
/,/"
-5
,/
-4 -3
, ,
-2
,
-1 -5
/,,<" -4
2" / / :
-3 -2 -1
/: 0
I
1
Log PcO LogPCC)
(b) (d)
Fig. 3 - - P r e d o m i n a n c e diagrams of the type C-CO. The full lines delineate the stable system which includes SiO(1), while the dotted lines the meta-
stable system where SiO is always gaseous. The value of ps,o written in the stability zone of SiO(1) indicates the SiO vapor pressure over pure liquk
SiO at the temperature. The SiO isobars are the same for both stable and metastable systems. The reaction numbers indicated in (b) correspond to those ir
Table III.
Table IV. Partial Pressure of SiO over the Condensed Phase of Si, SiC, and SiO2
Over Condensed
No. Phase of Reaction AG ~ cal <a) SiO Partial Pressure, arm. <b)
41 Si Si(s) + 0.502(g) = SiO(g) - 24900 - 19.72 T log pslo = log K41 + 0.5X
41 Si Si(1) + 0.502(g) = SiO(g) - 36980 - 12.55 T log ps,o = log K41 + 0.5X
42 SiC SiC(s) + O2(g) = SiO(g) + CO(g) - 35020 + 41.90 T log ps~o = log K42 + X - Y
43 SiO2 SiO(g) + 0.502(g) = SiO2(s) -191600 + 61.67 T log ps,o = - log K43 - 0.5X
43 SiO2 SiO(g) + 0.502(g) = SiO2(1) -189310 + 60.52 T log ps,o = - log K43 - 0.5X
44 Si Si(s) + CO(g) = SiO(g) + C(s) 2440 + 0.78 T log ps,o = log K44 + Y - Z
44 Si Si(1) + CO(g) = SiO(g) + C(s) - 9640 + 7.95 T log pslo = log K44 + Y - Z
45 SiC SiC(s) + CO(g) = SiO(g) + 2C(s) 19660 - 0.90 T log ps,o = log K45 + Y - 2Z
46 SiO/ SiO2(s) + C(s) = SiO(g) + CO(g) 164260 - 82.17 T log ps~o = log K46- - Y + Z
46 SiO2 SiO2(1) + C(s) = SiO(g) + CO(g) 161970 - 81.02 T log pslo = log K46- - Y + Z
(a) 1 cal = 4.19 J; T = temperature in Kelvin.
(b) 1 atm = 101.3 kPa; X = log Po2; Y = log Pco; Z = log ac; p = partial pressure in atm; K = exp(-AG~ T).
Table V. Partial Pressures of SiO and CO at the Univariant Points A, B, C, E, and F ~*) of the Si-C-O System
i
a. o,1 PsiolC) ~ /r ~
b.p.
SiO(=)
On the other hand, below 2045 ~
we have
Psio > Pco or
as shown in Figure 5,
(A}
Rewriting Eqs. [9] to [11], and using the Si-making condi-
tions of the inequalities [14] and [15], we find
O O
ns,= nc- 1 > 0 or nc > 1 [16]
0
m.p. nr = 2 - nc > 0 or 2 > n~ [17]
SiO2
0 0
nco= nc>0 or nc>0 [18]
nv= 2- n co > n ~ or 1 >nco [19]
C. SiC-Making at C-Saturation
In view of avoiding the contamination of SiC products b"
0 ~ graphite, it is important to know the maximum allowec
1600 1800 2000 2200
Reaction temperature, ~ content of C in the feed.
Suppose that a cold feed of (1.0SiO2 + n~C) is heatec
Fig. 6--Various products under the stable systemresulting from the high- to a high temperature where the products include exces
temperature reaction of a room-temperaturemixture consisting of 1 mole
of silica and a varying number of moles of carbon. The Gas refers to carbon as well as SiC, or ac = 1. The reaction may be ex
SiO(g) + CO(g). pressed as
SiO2+G,as
0,5
~ ~ ~ t .L-.--.
1600 1800 2000 2200 ~00 05 10 15 20 2,5 3,0 0
Reaction temperature, "C n =n(SiO~+n.C)cold
Fig. 7--Various products under the metastable system (= absence of Fig 8 - - Number of moles of SiO:, SiO([, g), SiC, CO, and C at 1800 ~
liquid SiO) resulting from the high-temperature reaction of a room- resulting from a cold feed consisting of (1.05iO2 + nC), in the stable
temperaturemixtureconsistingof 1 mote of silica and a varyingnumberof system under 1 arm (= 101.3 kPa). The right-hand side scale is for CO
moles of carbon. gas only.
/
systematic thermodynamic analysis such as this study was
still unavailable. The present thermodynamic analysis has
given a theoretical basis to these technical developments.
.'~ -I, I /1,89 Si02+n.C More importantly, however, the present work has clarified
and unified all the thermochemical phenomena of the Si-C-
O system, and has laid down the general and basic strategy
for future process improvements. An emphasis has been
20 i 1,48
placed in this study on the enhancement of the physical
condensation of ascending SiO gas on the charge in the
upper and cooler part of the shaft furnace. Such an enhanced
condensation is essential to the increase in Si-making effi-
ciency, and it can be done by increasing the layer thickness
lO ! /1,1o of upper charge or making a shaft furnace taller as well as
by cooling the upper part of the furnace.
0 I ~Jl,OO i I I
2000 2100 2200 2300
Temperature, ~ ACKNOWLEDGMENTS
Fig. 1 0 - - T h e theoretical maximum yields of Si-making from various feed
systems. The numbers along a curve indicate the number of moles, n, of The authors are grateful to Mr. R. Morissette, Plant
a variable constituent in the feed system. Note the high Si-making yields General Manager, and Mr. R. Leblanc, Quality Control
with the feed systems containing SiO(1), implying that the condensation of Manager, of Norton Company, Quebec Plant, for invaluable
SiO(1) is a key factor influencing the production efficiency in industrial
Si-making furnaces. This graph also lends thermodynamic support to the
suggestions and inspiring discussions. The authors also ex-
double-reactor model of Sandberg et al. 1o press their gratitude to Mr. J. Gobeil, Division Head, Met-
allurgical Research Laboratory, CRM, for encouragement.