Platit Technology for ta-C Coatings

Deposition
Jan Klusoň1, Martin Učík1, Mojmír Jílek1, Andreas Lümkemann2, Hamid Bolvardi2, Tibor Cselle2
1 Platit a.s., Šumperk, Czech Republic, 2 Platit AG, Selzach, Switzerland, email: j.kluson@platit.com

Introduction Thermal Stability

DLC (Diamond-Like Carbon) are in general materials based on amorphous carbon with a mixture of sp3 • Ex-situ nano-hardness
(diamond) and sp2 (graphite) bonds. Various forms of DLC are classified into several categories and measurements on samples annealed
among them the ta-C category (tetrahedrally-bonded hydrogen-free materials) with the highest sp3 in air for 1h
fraction has an outstanding place. ta-C materials can exhibit very high mechanical hardness, chemical • Platit DLC2 exhibits extended thermal
inertness, optical transparency or low friction behaviour. Therefore the field of industrial applications is stability in air despite the lower sp3
very broad including microelectronics, optics, manufacturing or biomedical fields. content

Platit DLC and ta-C coatings

PLATIT’s coating portfolio comprises three DLC coating types which are aimed and finetuned to address
specific market and application needs. DLC1 and DLC2 are hydrogen containing and DLC3 is the
hydrogen free coating generation with more than 50% of sp3 fraction, thus corresponding to ta-C. DLC1
and DLC2 are specifically aimed to address application challenges in components and sliding contacts.
DLC3 is fine-tuned mainly for tools and particular components.
Micro-Impact test
Evaluation of resistance to cohesive / adhesive failure
DLC3 by filtered arc / Pi211

[diamond] DLC3 by sputtering / Pi411

DLC2 by PECVD / PL711

t = 2.44±0.09 (4%)

Here we present three different Platit technologies for DLC and ta-C coatings implemented on three
different coating units:
3,0

ta-C by Filtered Cathodic Arc / Pi211 FCA Coating of microtools 2,5

2,0

1,5

1,0

0,5
Pi211, especially dedicated unit for DLC3 coatings, performs

Thickness [nm]
0,0

WC/Co micro-cutting tool of 0.11mm diameter

ta-C deposition by means of filtered cathodic arc. It comprises 0,0

0,5

coated with approx. 1µm thick DLC3 by Pi411 SCIL 1,0

the focusing magnetic field source PisCoat (Pi smooth 1,5

2,0

technology. Cross section on the right depicts 2,5

Coating) for particle filtering. The arc is burning in a well 3,0

homogeneous distribution of the coating thickness.

defined space and macroparticles are effectively filtered. ta-C
coatings made by Pi211 are characterized by their outstanding
properties, primarily very high microhardness above 70GPa
and sp3/sp2 ratio up to 90%.

Sputtered ta-C / Pi411 SCIL

Pi411 PLUS coating unit represents an extremely flexible coater. In the

DLC3 configuration, this device is equipped with the central cylindrical
sputtering cathode with graphite target. High strength magnetic field
and very efficient target cooling are the key features of the cathode. In
the fine-tuned coating process the high quality ta-C coatings are Cutting Test – Milling in AlMg3
synthesized with especial attention to the substrate heat management.
High built-up edge resistance for all tested coatings
Scil ta-C achieves microhradness values of 45-50GPa, surface
Slight formation of built-up edge after a short processing time for DLC2
roughness Sa below 25nm per 1µm of coating thickness and friction
by PL711, in the second halfMS
of the test for DLC3 by Pi411 and almost no
ARC
coefficient lower than 0.1.
evidence of built-up edge for Pi211 ta-C.

a-C:H:Si by PECVD and a-C/ta-C by sputtering / PL711 sputter unit DLC2 by PECVD /PL711 DLC3 by SCIL / Pi411 DLC3 by FCA / Pi211

The PLATIT’s PL711 coating machine has dedicated design for

coating components with DLC at high productivity and low
maintenance intervals. Along of PLATIT’s PA3D module (new
0m
designed lateral Helmholtz coils) carbon plasma is confined to
carousel. This innovative design significantly reduces the chamber helix milling
contamination and increase the deposition rate and productivity, i.e. vc = 50m/min
an ideal design specially for hydrogen containing DLC coatings. fz = 0.3mm
473 m ap = 4mm
ae = 1mm

Summary
DLC2 by PL711 DLC3 by Pi411 Acknowledgement and contact
• PECVD coating process • Platit sputtering SCIL technology
Author: Dr. J. Kluson, M. Ucik, M. Jilek, Dr. A. Lümkemann, Dr. T. Cselle
• coating of components with high productivity • coating of tools as the main application
Phone: +41 32 544 62 00
• nanohardness ~ 35GPa • nanohardness up to 50GPa Website: www.platit.com
LinkedIn: https://www.linkedin.com/company/platit-ag

PLATIT AG, Headquarters, Eichholzstrasse 9, CH-2545 Selzach