Itv SMC

Electro-Pneumatic Regulator/ Electronic Vacuum Regulator
ITV Series
IP65 RoHS
For the stepless control of air pressure in

proportion to electrical signals
Serial communication specification
Applicable Fieldbus protocols
compatible
Due to the built-in

98
communication board,
RS-232C specification no converter is required.
Compact and lightweight

(Integrated communication parts)
Weight: 350 g (ITV1000)
*1
Power consumption: 4 W
* 1
or less 50
*1 Values for the communication type (PROFIBUS DP) 50 For the ITV10m0-IL
Electro-Pneumatic Regulators *2 Set pressure: 0.6 MPa Supply pressure: 1.0 MPa Electronic Vacuum Regulators
ITV0000 Series p. 1174 ITV1000 Series p. 1182 ITV009m Series p. 1208
Grease-free specification
(Parts in contact
with fluid)
Max. flow rate Max. flow rate

6 L/min (ANR) 200 L/min (ANR)
*2 *2
ITV2000 Series p. 1182

ITV3000 Series p. 1182
ITV209m Series p. 1215
Max. flow rate Max. flow rate

1500 L/min (ANR) 4000 L/min (ANR)
*2 *2
1169
Electro-Pneumatic Regulator/Electronic Vacuum Regulator ITV Series
Compact Electro-Pneumatic Regulator ITV0000 Series p. 1174 IP65 equivalent
Compact Vacuum Regulator ITV009 m Series p. 1208
Compact Improved space
15 mm saving and weight

reduction when
Thanks to its simplified high-
Lightweight used in a manifold
density circuit board design,
an extremely compact
product has been made
possible.
100 g Stations can be easily
increased or decreased due
to the DIN rail mounting
design.
M 2 types of cable connectors ¡Linearity: ±1% F.S. or less

Straight type Right angle type ¡Hysteresis: 0.5% F.S. or less
¡Repeatability: ±0.5% F.S. or less
¡High-speed response time: 0.1 s (Without load)
* This is not a guaranteed value as it depends on the operating environment.
¡High stability
M Built-in One-touch Sensitivity: 0.2% F.S. or less
fittings ITV (Electro-pneumatic regulator)

Mist separator
M With error indication (0.3 µm or less) (0.01 µ or less)
LED
M 2 types of brackets Air filter IR (Precision regulator)
(5 µm or less)
Flat bracket L-bracket
Electro-Pneumatic Regulator ITV1000/2000/3000 Series p. 1182 IP65
Electronic Vacuum Regulator ITV209m Series p. 1215
Serial communication specification
Reduced wiring
Applicable Fieldbus protocols
ITV1000 ITV2000 ITV3000 ITV2090 RS-232C specification
¡Sensitivity: 0.2% F.S. or less ¡Application examples

¡Linearity: ±1% F.S. or less For multi-stage control to analog control For electrostatic coating control
¡Hysteresis: 0.5% F.S. or less Solenoid valves OUT.

Air filter
SUP.
Electro-pneumatic regulator
¡Cable connections in 2 directions Regulators
Straight type Right angle type Controller

Electro-pneumatic Control signal Coating
regulator OUT. material
Air filter
Mist Controller
SUP. separator
Coating nozzle
SUP. Controller
¡Grease-free specification
(ITV1000 series) Analog control
1170
IO-Link Compatible Devices:

Electro-Pneumatic Regulator ITV10m0/20m0/30m0-IL p. 1182
Electronic Vacuum Regulator ITV2090-IL p. 1215

IO-Link communication enables users to check
device information and monitor device status in IO-Link is an open communication inter-
face technology between the sensor/actu-
addition to performing pressure control. ator and the I/O terminal that is an interna-
tional standard: IEC 61131-9.
Configuration File (IODD File*1)

·Manufacturer ·Product part no. ·Set value
*1 IODD File:
IODD is an abbreviation of IO Device
Description. This file is necessary for setting
the device and connecting it to a master. Save
PC
PLC the IODD file on the PC to be used to set the
device prior to use.
Various fieldbusses
IO-Link Compatible Devices:

IO-Link communication
Electro-Pneumatic Regulator
ITV10m0/20m0/30m0-IL
Electronic Vacuum Regulator
IO-Link master
ITV2090-IL
The IO-Link master and device can be Application

connected with one cable. V For the manufacturing of various products
Only a single cable combining the communication The set pressure analog value can be
changed to control the indentation
wire and the power supply wire is required. pressure applied to each workpiece.
This allows for a variety of products to
be manufactured on the same line.
Uses 4-wire unshielded cables
Special communication cables are not necessary.
A conventional 4-wire unshielded cable can be used for the
input and output of sensors, switches, etc.
(Recommended specifications: Conductor resistance 3 Ω,
Wire-to-wire capacitance 3 nF or less, 20 m or less)
Implement diagnostic bits in the

process data.
The diagnostic bit in the cyclic process data makes it easy to find problems with the
equipment.
It is possible to find problems with the equipment in real time using the cyclic (periodic)
data and to monitor such problems in detail with the noncyclic (aperiodic) data.
Process Data
<PD_IN: 4 bytes>
Diagnosis items Byte 0 1
Bit 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16
· Output pressure is within the set pressure ±10% Value Output pressure value (16 bits)
· Notification of energizing time
· Residual pressure error Byte 2 3
· Target value over range Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0
· Pressure under range (LLL) Value Abnormal Warning Notification SSC1
· Pressure over range (HHH)
· Power supply voltage drop <PD_OUT: 2 bytes>
· Excessive power supply voltage
Byte 0 1
· Warning occurred
· Internal communication error Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0
Value Set pressure value (16 bits)
1171
Series Variations For the stepless control of air pressure in proportion to electrical signals
Series Model Set pressure range Input signal Port size Page
ITV0000 Series ITV001m 0.001 to 0.1 MPa Current type: 4 to 20 mADC

(Sink type)
Built-in One-touch
Current type: 0 to 20 mADC fittings
ITV003m 0.001 to 0.5 MPa (Sink type) Metric size: ø4 1174
Voltage type: 0 to 5 VDC Inch size: ø5/32
Voltage type: 0 to 10 VDC
ITV005m 0.001 to 0.9 MPa
ITV1000 Series ITV101m 0.005 to 0.1 MPa

Electro-Pneumatic Regulators
ITV103m 0.005 to 0.5 MPa 1/8, 1/4 1182

Current type: 4 to 20 mADC
(Sink type)
ITV105m 0.005 to 0.9 MPa
(Sink type)
ITV2000 Series ITV201m 0.005 to 0.1 MPa Voltage type: 0 to 5 VDC
Preset input
ITV203m 0.005 to 0.5 MPa (4 points/16 points) 1/4, 3/8 1182
10-bit digital input
CC-Link compatible
ITV205m 0.005 to 0.9 MPa
DeviceNet® compatible
PROFIBUS DP compatible
ITV3000 Series ITV301m 0.005 to 0.1 MPa IO-Link compatible
RS-232C communication
ITV303m 0.005 to 0.5 MPa 1/4, 3/8, 1/2 1182
ITV305m 0.005 to 0.9 MPa
ITV009m Series Current type: 4 to 20 mADC

(Sink type) Built-in One-touch
Current type: 0 to 20 mADC fittings
ITV009m 1208
Electronic Vacuum Regulators
−1 to −100 kPa (Sink type) Metric size: ø4

Voltage type: 0 to 5 VDC Inch size: ø5/32
ITV209m Series Current type: 4 to 20 mADC

(Sink type)
(Sink type)
Preset input
ITV209m −1.3 to −80 kPa (4 points/16 points) 1/4 1215
10-bit digital input
CC-Link compatible
DeviceNet® compatible
PROFIBUS DP compatible
IO-Link compatible
RS-232C communication
1172
CONTENTS
Electro-Pneumatic Regulators
M ITV0000 Series
How to Order p. 1174
Specifications p. 1175
Accessories (Option) p. 1175
Working Principle p. 1176
Linearity/Hysteresis, Repeatability, Pressure Characteristics, Flow Rate Characteristics p. 1177
Dimensions p. 1179
M ITV1000/2000/3000 Series
Standard Specifications p. 1183
Communication Specifications p. 1183
Modular Products and Accessory Combinations p. 1184
Accessories (Option)/Part Nos. p. 1184
Linearity, Hysteresis, Repeatability, Pressure Characteristics, Flow Rate Characteristics, Relief Characteristics p. 1186
Construction p. 1192
Dimensions p. 1194
Made to Order p. 1203
Electronic Vacuum Regulators

M ITV009m Series
Specifications p. 1209
Linearity/Hysteresis, Repeatability, Pressure Characteristics, Flow Rate Characteristics p. 1211
Dimensions p. 1212
M ITV2090/2091 Series
Standard Specifications p. 1216
Communication Specifications p. 1216
Linearity, Hysteresis, Repeatability, Pressure Characteristics, Flow Rate Characteristics p. 1217
Dimensions p. 1218

Specific Product Precautions p. 1222
1173
Compact Electro-Pneumatic Regulator
ITV0000 Series
RoHS
How to Order
For single unit and single unit for manifold
ITV00 1 0 0 N
Pressure range
Cable connector (Option)
1 0.1 MPa
Power supply voltage
3 0.5 MPa N Without cable connector
0 24 VDC ±10% S Straight type 3 m
5 0.9 MPa
1 12 to 15 VDC L Right angle type 2 m
Input signal
0 Current type 4 to 20 mADC (Sink type) Bracket/Option for single unit only
1 Current type 0 to 20 mADC (Sink type) Nil Without bracket
2 Voltage type 0 to 5 VDC Flat
3 Voltage type 0 to 10 VDC bracket
B
Built-in One-touch fittings type
For single unit
Symbol SUPz OUTx EXHc L-bracket
Metric size
Nil (Light gray)
ø4
C
Inch size
U (Orange)
ø5/32"
For manifold
Symbol SUPz OUTx EXHc
Metric size Base type
Nil (Light gray)
ø6 ø4 ø6
Nil For single unit
Inch size
U ø1/4" ø5/32" ø1/4" M For manifold
(Orange)
How to Order Manifold Assembly (Example)

Manifold
Indicate the part numbers of electro-pneumatic regulators to be mounted
IITV00 02 n below the manifold part number.
Example)
Due to the common supply/exhaust feature, note that different pressure
Option range combinations are not available.
Stations If a DIN rail longer than IITV00-03········1 set (Manifold part no.)
02 2 stations the specified stations is *ITV0030-3MS······2 sets (Electro-pneumatic regulator part no. (Stations 1, 2))
required, specify the *ITV0030-3ML······1 set (Electro-pneumatic regulator part no. (Station 3))
03 3 stations
applicable stations in Indicate part numbers in order starting from the first station on
···
···
two digits. the D side.

10 10 stations (Max. 10 stations)
Example) IITV00-05-07 Caution) Combination with having different pressure ranges is not
available due to common supply/exhaust features.
One-touch fitting size for supply/
The asterisk denotes the symbol for the assembly. Prefix it to the part
exhaust parts (End plate) numbers of the electro-pneumatic regulator.
Nil ø6 (Light gray)
D sid
U ø1/4" (Orange) e
1
2
3·
··
* A DIN rail with the length specified by the number of stations is
attached to the manifold. For dimensions of the DIN rail, refer to
the external dimensions.
DIN rail
ITV0030-3MS
ITV0030-3ML
1174
Compact Electro-Pneumatic Regulator ITV0000 Series
Specifications
Model ITV001m ITV003m ITV005m

Min. supply pressure Set pressure + 0.1 MPa
Max. supply pressure 0.2 MPa 1.0 MPa
Set pressure range 0.001 to 0.1 MPa 0.001 to 0.5 MPa 0.001 to 0.9 MPa
Voltage 24 VDC ±10%, 12 to 15 VDC
Power supply Current Power supply voltage 24 VDC type: 0.12 A or less
consumption Power supply voltage 12 to 15 VDC type: 0.18 A or less
Voltage type 0 to 5 VDC, 0 to 10 VDC
Input signal
Current type 4 to 20 mADC, 0 to 20 mADC (Sink type)
Voltage type Approx. 10 kW
Input impedance
Current type Approx. 250 W
1 to 5 VDC (Output impedance: Approx. 1 kW)
Output signal*2 Analog output
Output accuracy: ±6% F.S. or less
Linearity ±1% F.S. or less
Hysteresis 0.5% F.S. or less
Repeatability ±0.5% F.S. or less
Sensitivity 0.2% F.S. or less
Temperature characteristics ±0.12% F.S./°C or less
Operating temperature range 0 to 50°C (No condensation)
Enclosure Equivalent to IP65*3
Connection type Built-in One-touch fittings
Metric size z, x, c: ø4
For single unit
Inch size z, x, c: ø5/32"
Connection size
Symbol Metric size z, c: ø6, x: ø4
Manifold
Inch size z, c: ø1/4", x: ø5/32"
Weight*1 100 g or less (Without options)
*1 Indicates the weight of a single unit
3 For IITV00-n
2
Total weight (g) ≤ Stations (n) x 100 + 130 (Weight of end block A, B assembly) + Weight (g)
1 of DIN rail
*2 When measuring ITV analog output from 1 to 5 VDC, if the load impedance is less than 100
kW, the analog output monitor accuracy of ±6% F.S. or less may not be available.
The product with an accuracy of within ±6% is supplied upon your request.
Output pressure remains unaffected.
*3 When using under the conditions equivalent to IP65, connect the fitting or tube to the
breathing hole before use. (For details, refer to “Specific Product Precautions 1” on page
1222.)
* When there is a downstream flow consumption, pressure may become unstable depending on
piping conditions.
* When the input signal is at 0%, the exhaust solenoid valve is controlled to reduce the outlet
pressure to zero. For this reason, a noise may be generated. This noise is normal and does
not indicate a fault.
Accessories (Option)
Bracket Cable connector
Flat bracket assembly (including 2 mounting screws) Straight type

P39800022 M8-4DSX3MG4
L-bracket assembly (including 2 mounting screws) Right angle type

P39800023 P398000-501-2
Tightening torque when assembling is 0.3 N·m.
1175 A
ITV0000 Series
Working Principle
When the input signal rises, the air supply solenoid valve q turns ON. Due to this, part of the supply pressure passes through the
air supply solenoid valve q and changes to output pressure. This output pressure feeds back to the control circuit r via the
pressure sensor e. Here, pressure corrections continue until output pressure becomes proportional to the input signal, enabling
output pressure that is proportional to the input signal.
Working Principle Diagram
Power supply and error

LED indication
Power supply Output signal

r Control circuit
Input signal
P
e Pressure sensor
q Air supply solenoid valve w Exhaust solenoid valve
SUP
EXH OUT
Block Diagram
Supply pressure
q Air supply
solenoid valve
+ Output pressure
Input signal r Control
circuit
–
w Exhaust
solenoid valve
Discharged to atmosphere
e Pressure
sensor
1176
ITV001m Series
Linearity, Hysteresis Repeatability With 50% of signal input

1 1
0.8
Output deviation factor [% F.S.]

0.6
0.5
0.4
Return
0.2
0 0
–0.2
–0.4
Out –0.5
–0.6
–0.8
–1 –1
0 25 50 75 100 1 2 3 4 5
Input signal [% F.S.] Count
Pressure Characteristics Set pressure: 0.05 MPa Flow Rate Characteristics Supply pressure: 0.2 MPa
1 120
100
100 kPa
0.5
Set pressure [kPa]
80
80 kPa
Out
0 60 60 kPa
Return
40 40 kPa
–0.5
20 20 kPa
10 kPa
–1 0
0.15 0.16 0.17 0.18 0.19 0.20 0 0.5 1 1.5 2 2.5 3 3.5 4
Supply pressure [MPa] Flow rate [L/min (ANR)]
ITV003m Series

1 1
0.8
0.6
Return 0.5
0.4
0.2
0 0
Out
–0.2
–0.4
–0.5
–0.6
–0.8
–1 –1
0 25 50 75 100 1 2 3 4 5
1 600
500 kPa
500
0.5
400 kPa
Set pressure [kPa]
400
Out
300 kPa
0 300
Return
200 kPa
200
–0.5
100 kPa
100
50 kPa
–1 0
0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0 1 2 3 4 5 6 7
1177
ITV0000 Series
ITV005m Series

1 1
0.8

0.6
Return 0.5
0.4
0.2
0 0
Out
–0.2
–0.4
–0.5
–0.6
–0.8
–1 –1
0 25 50 75 100 1 2 3 4 5
1 1000
900 kPa
900
800 kPa
800
0.5 700 kPa
Set pressure [kPa]
700
600 kPa
Out 600
500 kPa
0 500
400 kPa
Return 400
300 kPa
300
–0.5 200 kPa
200
100 kPa
100
50 kPa
–1 0
0.4 0.6 0.8 1.0 1.2 0 1 2 3 4 5 6 7
1178
Dimensions
28
For single unit ø6
4x 74
64
PWR
6
ERR
xø
2
38
27
15
PWR
ERR 2x
Mo ø3.
4
xø un 5
M tin
L-bracket ou 3.5 Flat bracket
gh
nt ole
(Option) ing
ho (Option)
M8 x 1 le
Cable connection thread
15 6 50
82
73
∗1
Breathing hole 3.7 3.7
(M3 x 0.5) 1
OUT port SUPz
OUTx SUP port
13.7
13.7
3
5
(ø4, ø5/32") EXHc (ø4, ø5/32")

2
EXH port
5
3
6
(ø4, ø5/32")
3.5
7
L-bracket
(Option) Flat bracket
(Option)
19
Port Location
No. z x c
1
ITV00 3 m SUP OUT EXH
5
2 x M3 x 0.5 thread depth 3.5
Mounting thread
0
s8
*1 When using under the conditions diu
equivalent to IP65, connect the fit- g ra
tings or tube to the breathing hole
+50
3000 0 n din
be
before use. n.
15 35 (30.9) Mi Body
(For details, refer to “Specific Prod-
uct Precautions 1” on page 1222.)
ø4
8.7
9.9
Cable connector (4 cores)
7 14
Straight type (Option)

Right angle type (Option)
(21.8)
(24) Body
Mi
n.
be
nd
SMC
ing
(24)
SMC
M8
ra
ø10
diu
s8
0
ø4
2000 50
(45)
(15)
1179
ITV0000 Series
Dimensions
Single unit for manifold

50
PWR
ERR
M8 x 1
15
6
82
∗1
Breathing hole
(M3 x 0.5) 3.7
13.7
2
5
(2)
OUTx port
(4)
(ø4, ø5/32")
Bushing assembly
(2.7)
*1 When using under the conditions equivalent to IP65,

connect the fittings or tube to the breathing hole before
use. (For details, refer to “Specific Product Precautions
1” on page 1222.)
* For dimensions of the cable connector, refer to single unit on page 1179.
1180
Dimensions
Manifold
27.5
27.5
40
40
Mounting hole
11 11
L2
Port Location 25 L1
No. z x c
1 8
ITV00 3 m SUP OUT EXH
5.5
5
PWR
PWR
PWR
PWR
ERR
ERR
ERR
ERR
* Stations are counted starting from the D side.
25
35
50
5.25
8.5 14 15 8.5 12.5

(Pitch) (Pitch)
6 D side U side
1 2 ····stations
3 (8)
Dimension for the inch size is SUPz port
noted in parentheses. 1 1
(ø6, ø1/4") 89.5
EXHc port
80.5
3 3
(ø6, ø1/4")
47.5
32.5
21.2
2 2 2
12.5
3.7 ∗1
7.5
Breathing hole
(M3 x 0.5)
OUTx port
(ø4, ø5/32")
* For dimensions of the cable connector, refer to single unit on page 1179. *1 When using under the conditions equivalent to
IP65, connect the fittings or tubing to the
breathing hole before use.
[mm] (For details, refer to “Specific Product Precau-
tions 1” on page 1222.)
Manifold stations n 2 3 4 5 6 7 8 9 10
L1 60 75 90 105 120 135 150 165 180
L2 110.5 123 148 160.5 173 185.5 198 223 235.5
Weight of DIN rail [g] 20 22 27 29 31 34 36 41 43
1181
Electro-Pneumatic Regulator
ITV1000/2000/3000 Series ®
RoHS
How to Order
ITV 3 0 1 0 0 1 2 S
Model
1 1000 type
2 2000 type
3 3000 type
Pressure range Made to order

1 0.1 MPa Refer to page 1184 for details.
3 0.5 MPa
5 0.9 MPa
Pressure display unit
Nil MPa
Power supply voltage 2*1 kgf/cm2
0 24 VDC 3 bar
1 12 to 15 VDC 4*1 psi
5 kPa
* The communication models
(CC, DE, PR, RC, and IL), *1 This product is for overseas use only ac-
16 points preset input, and cording to the New Measurement Act. (The
10-bit digital input options SI unit type is provided for use in Japan.)
are only available for the 24 For the communication models CC, DE, PR,
VDC. and RC, only “Nil” is available as it does not
have a pressure display.
Input signal/
Cable connector type
Communication model Monitor output
S Straight type 3 m
Current type 4 to 20 mADC 1 Analog output 1 to 5 VDC
0 L Right angle type 3 m
(Sink type) 2 Switch output/NPN output
N Without cable connector
Current type 0 to 20 mADC 3 Switch output/PNP output
1 (Sink type)
* Even when a cable connector is
Analog output 4 to 20 mADC selected, a communication cable is
4
2 Voltage type 0 to 5 VDC (Sink type) not included for the communication
models CC, DE, and PR. Please
3 Voltage type 0 to 10 VDC Nil None order it separately. Refer to the table
40 4 points preset input below.
For 10-bit digital input, the right angle
16 points preset input type cannot be selected.
52 (Switch output/NPN output)
16 points preset input
53 (Switch output/PNP output) Bracket*1
Thread type Nil Without bracket
60 10-bit digital input Nil Rc B Flat bracket
CC CC-Link N NPT C L-bracket
DE DeviceNet® T NPTF *1 The bracket is included.
PR PROFIBUS DP F G
RC RS-232C communication Port size
IL IO-Link
1 1/8 (1000 type)
2 1/4 (1000, 2000, 3000 type)
3 3/8 (2000, 3000 type)
4 1/2 (3000 type)
For communication cables, use the parts listed below

The simple specials system can be used to (Refer to the M8/M12 connector in the Web Catalog for details.)
change the input and output ranges. or order a product certified for the respective protocol (with M12 connector) separately.
* The input and output values are limited to Application Communication cable part no. Note
the following ranges. PCA-1567720 (Socket type) A dedicated Bus adapter is included
· Input signal: Current type 0 to 20 mA CC-Link compatibility
PCA-1567717 (Plug type) with the product.
Voltage type 0 to 10 VDC DeviceNet® PCA-1557633 (Socket type) A T-branch connector is not included
· Output pressure: 0.005 to 0.9 MPa/5-900kPa compatibility PCA-1557646 (Plug type) with the product.
Please contact your local sales representa- PROFIBUS DP PCA-1557688 (Socket type) A T-branch connector is not included
tive for more details. compatibility PCA-1557691 (Plug type) with the product.
1182
Electro-Pneumatic Regulator ITV1000/2000/3000 Series
Standard Specifications
ITV101m*7 ITV103m*7 ITV105m*7
Model ITV201m ITV203m ITV205m
ITV301m ITV303m ITV305m
Max. supply pressure 0.2 MPa 1.0 MPa
Set pressure range*1 0.005 to 0.1 MPa 0.005 to 0.5 MPa 0.005 to 0.9 MPa
Power supply Current Power supply voltage 24 VDC type: 0.12 A or less*8
Current type*2 4 to 20 mADC, 0 to 20 mADC (Sink type)
*8 Voltage type 0 to 5 VDC, 0 to 10 VDC
Input signal
ITV1000 ITV2000 Preset input 4 points (Negative common), 16 points (No common polarity)
Digital input 10 bits (Parallel)
Current type 250 W or less*6
Voltage type Approx. 6.5 kW
Input
Power supply voltage 24 VDC type: Approx. 4.7 kW
impedance Preset input
Digital input Approx. 4.7 kW
*3 Analog 1 to 5 VDC (Output impedance: Approx. 1 kW)
Output signal 4 to 20 mADC (Sink type) (Output impedance: 250 W or less)
(Monitor output
Output accuracy ±6% F.S. or less
output) Switch NPN open collector output: Max. 30 V, 80 mA
output PNP open collector output: Max. 80 mA
ITV3000 Serial-communications Temperature characteristics ±0.12% F.S./°C or less
model Output pressure Accuracy ±2% F.S. ±1 digit or less
Symbol display*4 Min. unit MPa: 0.001, kgf/cm2: 0.01, bar: 0.01, psi: 0.1 *5, kPa: 1
Ambient and fluid temperatures 0 to 50°C (No condensation)
Enclosure IP65
ITV10mm Approx. 250 g (Without options)
3 Weight*8, *9 ITV20mm Approx. 350 g (Without options)
2 ITV30mm Approx. 645 g (Without options)
1 *1 Please refer to Fig. 1 for the relationship between set pressure and input. Because the max. set pressure differs
for each pressure display, refer to page 1227.
*2 2-wire type 4 to 20 mADC is not available. Power supply voltage (24 VDC or 12 to 15 VDC) is required.
Rated pressure *3 Select either analog output or switch output.
Further, when switch output is selected, select either NPN output or PNP output.
When measuring ITV analog output from 1 to 5 VDC, if the load impedance is less than 100 kW, the analog out-
Output pressure
put monitor accuracy of within ±6% (full span) may not be available. The product with the accuracy of within ±6%
is supplied upon your request. Output pressure remains unaffected.
[MPa]
*4 Adjustment of numerical values such as the zero/span adjustment or preset input type is set based on the min.
units for output pressure display (e.g. 0.001 to 0.500 MPa). Note that the unit cannot be changed.
*5 The min. unit for 0.9 MPa (130 psi) types is 1 psi.
*6 Value for the state with no over current circuit included. If an allowance is provided for an over current circuit, the in-
put impedance varies depending on the input current. This is 350 W or less for an input current of 20 mADC.
This range is outside *7 The ITV1000 series is a grease-free specification (parts in contact with fluid).
of the control (output). *8 Refer to the table below for communication specifications.
0.005 MPa
*9 Add 50 g for digital input type, 70 g for 16 points preset input type respectively.
0 * The above characteristics are confined to the static state. When air is consumed on the output side, the pressure
0 100
Input signal [% F.S.] may fluctuate.
* When using under IP65 conditions, connect the fitting or tube to the solenoid valve EXH before use. (For details,
Fig. 1 Input/output characteristics chart refer to “Specific Product Precautions 4” on page 1225.)
Communication Specifications (CC, DE, PR, RC, IL)

Model ITVm0m0-CC ITVm0m0-DE ITVm0m0-PR ITVm0m0-RC ITVm0m0-IL
Protocol CC-Link DeviceNet ® PROFIBUS DP RS-232C IO-Link (Class A)
Version*1 Ver. 1.10 Volume 1 (Edition 3.8), Volume 3 (Edition 1.5) DP-V0 — Ver. 1.1
9.6 k/19.2 k/45.45 k
Communication 156 k/625 k
125 k/250 k/500 kbps 93.75 k/187.5 k/500 k 9.6 kbps 230.4 kbps (COM3)
speed 2.5 M/5 M/10 Mbps
1.5 M/3 M/6 M/12 Mbps
Configuration file*2 — EDS GSD — IODD
I/O occupation area 4 words/4 words, 32 bits/32 bits
16 bits/16 bits 16 bits/16 bits — 4 bytes/2 bytes
(input/output data) (per station, remote device station)
Communication data resolution 12 bits (4096 resolution) 12 bits (4096 resolution) 12 bits (4096 resolution) 10 bits (1024 resolution) 12 bits (4096 resolution)
HOLD*3/CLEAR HOLD/CLEAR
Fail safe CLEAR HOLD HOLD/CLEAR
(Switch setting) (Switch setting)
Electric insulation*4 Insulation Insulation Insulation Non-insulation Non-insulation
Terminating resistor Built into the product (Switch setting) Not built into the product Built into the product (Switch setting) — —
Current consumption 0.16 A or less 0.14 A or less 0.16 A or less 0.12 A or less 0.12 A or less
ITV1000 330 320 350 320 320
Weight ITV2000 430 420 450 420 420
ITV3000 730 720 750 720 720
*1 Please note that versions are subject to change.
*2 Configuration files can be downloaded from the operation manual page on the SMC website: https://www.smcworld.com
*3 The output HOLD value when a CC-Link communications error occurs can be set based on the bit area data.
*4 The insulation between the electrical signal of the communication system and ITV power supply
1183
ITV1000/2000/3000 Series
Modular Products and Accessory Combinations
Applicable model
Applicable products and accessories
ITV20ll ITV30ll
rSpacer ITV20 q Air filter AF30-A AF40-A
w Mist separator AFM30-A AFM40-A
e L-bracket B310L-A B410L-A
r Spacer Y30-A Y40-A
≈189
t Spacer with L-bracket (e + r) Y30L-A Y40L-A

≈133
y Spacer with T-bracket — Y40T-A

* For ITV10ll, use a modular adapter (Refer to the Web Catalog for details).
eL-bracket
178 Accessories (Option)/Part Nos.

qAF30-A wAFM30-A [Bracket]
Applicable model Description Part no. Weight
ITV10ll P398010-600
Flat bracket assembly (including mounting screws)
ITV30 ITV20ll, 30ll P398020-600
90
ITV10ll P398010-601
L-bracket assembly (including mounting screws)
ITV20ll, 30ll P398020-601
[Cable connector]
≈243
Input signal/ Cable connector (Shipped together)

Weight
Communication model Cable specifications Power supply Communication (For signal)
≈172
Current type Straight type 3 m P398020-500-3

Voltage type
IO-Link Right angle type 3 m P398020-501-3
180
each
234
16 points preset input Straight type 3 m P398020-500-3 P398020-502-3
RS-232C
communication Right angle type 3 m P398020-501-3 P398020-503-3
qAF40-A wAFM40-A
10-bit digital input Straight type 3 m INI-398-0-59 310
Straight type 3 m P398020-500-3 Please order

CC-Link
Made to Order PROFIBUS DP
separately.
180
(Refer to pages 1203 to 1207 for details.) Refer to page
DeviceNet® Right angle type 3 m P398020-501-3 1182.
Symbol Specifications
X102 Reverse type
High-pressure type [Bus adapter]
X224 (SUP 1.2 MPa, OUT 1.0 MPa) Applicable model Description Part no. Weight
Set pressure range: 1 to 100 kPa CC-Link Bus adapter (Included with the product) EX9-ACY00-MJ 35
X25 (Excludes the ITV3000 series)
Analog output, Current type
X256 (Source type) Dimensions
X88
High-speed response time type Flat bracket L-bracket
(Excludes the ITV3000 series) 100 10
For manifold mounting
7
X26 (Excludes the ITV3000 series)

15
25
4x
X410 Linearity: ±0.5% F.S. or less R3
52
40
.5 2.3
X420 With alarm output (8.5) 33
* Manifolds are compatible with 2 to 8 stations. 50
Please contact SMC for 9 stations or more.
* Products without symbols are also compatible. 4 x ø7 84 50
Please contact SMC separately.
* Compliant with CE/UKCA marking
60 20
70
Model Bracket tightening torque

12
ITV1000 0.76 ±0.05 N·m

1.6
ITV2000/3000 1.5 ±0.05 N·m
A 1184
Working Principle
When the input signal rises, the air supply solenoid valve q turns ON, and the exhaust solenoid valve w turns OFF. Therefore,
supply pressure passes through the air supply solenoid valve q and is applied to the pilot chamber e. The pressure in the pilot
chamber e increases and operates on the upper surface of the diaphragm r.
As a result, the air supply valve t linked to the diaphragm r opens, and a portion of the supply pressure becomes output
pressure.
This output pressure feeds back to the control circuit i via the pressure sensor u. Here, a correct operation functions until the
output pressure is proportional to the input signal, making it possible to always obtain output pressure proportional to the input
signal.
Pressure
display
Power supply i Control Output signal

Input signal circuit
Pressure u Pressure sensor
display
q Air supply w Exhaust
Power supply i Control Output signal solenoid solenoid valve
Input signal circuit valve
u Pressure sensor EXH
q Air supply w Exhaust

solenoid solenoid valve
valve
EXH r Diaphragm
e Pilot chamber
y Exhaust valve
r Diaphragm
e Pilot chamber t Supply valve
EXH
t Supply valve
SUP OUT SUP OUT
EXH
y Exhaust
valve
ITV1000 ITV2000/3000
Block Diagram
Supply pressure
q Air supply solenoid valve

Input signal Output pressure
i Control circuit r Diaphragm Pilot valve
w Exhaust solenoid valve
u Pressure sensor
1185
ITV1000/2000/3000 Series
ITV101m Series
Linearity Hysteresis Repeatability

1.0 1.0
0.10

Out
0.09
0.5 0.5
Set pressure [MPa]
0.08
0.07
0.06 Return
0.0 0.0
0.05
0.04
0.03
–0.5 –0.5
0.02
0.01
0.00 –1.0 –1.0
0 25 50 75 100 0 25 50 75 100 0 2 4 6 8 10
Input signal [% F.S.] Input signal [% F.S.] Repetition
Pressure Flow Rate Relief

Characteristics Set pressure: 0.05 MPa Characteristics Supply pressure: 0.2 MPa Characteristics Back pressure: 0.2 MPa
1.0 0.15 0.25
0.20
0.5
Set pressure [MPa]
Set pressure [MPa]

0.10
Set point 0.15
0.0
0.10
0.05
–0.5
0.05
–1.0 0.00
0.0 0.1 0.2 0.3 0 20 40 60 80 100 0 20 40 60 80
Supply pressure [MPa] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)]
ITV201m Series

1.0 1.0
0.10
0.09
0.5 0.5
Set pressure [MPa]
0.08
0.07 Out
0.06
0.0 0.0
0.05
0.04 Return
0.03
–0.5 –0.5
0.02
0.01
0.00 –1.0 –1.0
0 25 50 75 100 0 25 50 75 100 0 2 4 6 8 10

1.0 0.15 0.25
0.20
0.5
Set pressure [MPa]
Set pressure [MPa]
0.10
Set point
0.15
0.0
0.10
0.05
–0.5
0.05
–1.0 0.00
0.0 0.1 0.2 0.3 0 200 400 600 0 200 400 600 800
1186
ITV301m Series

1.0 1.0
0.10

0.09
0.5 0.5
Set pressure [MPa]
0.08
0.07
Out
0.06
0.0 0.0
0.05
0.04 Return
0.03 –0.5 –0.5
0.02
0.01
0.00 –1.0 –1.0
0 25 50 75 100 0 25 50 75 100 0 2 4 6 8 10

1.0 0.15 0.25
0.20
0.5
Set pressure [MPa]
Set pressure [MPa]

0.10
Set point
0.15
0.0
0.10
0.05
–0.5
0.05
–1.0 0.00 0.00

0.0 0.1 0.2 0.3 0 500 1000 1500 2000 0 500 1000 1500 2000
1187
ITV1000/2000/3000 Series
ITV103m Series

0.6 1.0 1.0

0.5 Out
0.5 0.5
Set pressure [MPa]
0.4
Return
0.3 0.0 0.0
0.2
–0.5 –0.5
0.1
0.0 –1.0 –1.0

0 25 50 75 100 0 25 50 75 100 0 2 4 6 8 10

1.0 0.6 0.8
0.7
0.5
0.5 0.6
Set pressure [MPa]
Set pressure [MPa]

Set point 0.4
0.5
0.0 0.3 0.4
0.3
0.2
–0.5 0.2
0.1
0.1
–1.0 0.0 0.0
0.2 0.4 0.6 0.8 0 50 100 150 200 250 0 50 100 150 200
ITV203m Series

0.6 1.0 1.0
0.5
0.5 0.5
Set pressure [MPa]
0.4
Out
0.3 0.0 0.0

Return
0.2
–0.5 –0.5
0.1
0.0 –1.0 –1.0

0 25 50 75 100 0 25 50 75 100 0 2 4 6 8 10

1.0 0.6 0.8
0.7
0.5
0.5 0.6
Set pressure [MPa]
Set pressure [MPa]
Set point 0.4

0.5
0.0 0.3 0.4
0.3
0.2
–0.5 0.2
0.1
0.1
–1.0 0.0 0.0

0.2 0.4 0.6 0.8 0 500 1000 1500 2000 0 500 1000 1500 2000
1188
ITV303m Series

0.6 1.0 1.0

0.5
0.5 0.5
Set pressure [MPa]
0.4
Out
0.3 0.0 0.0
Return
0.2
–0.5 –0.5
0.1
0.0 –1.0 –1.0

0 25 50 75 100 0 25 50 75 100 0 2 4 6 8 10

1.0 0.6 0.8
0.7
0.5
0.5 0.6
Set pressure [MPa]
Set pressure [MPa]

Set point 0.4
0.5
0.0 0.3 0.4
0.3
0.2
–0.5 0.2
0.1
0.1
–1.0 0.0 0.0

0.2 0.4 0.6 0.8 0 1000 2000 3000 4000 5000 6000 0 1000 2000 3000 4000 5000
1189
ITV1000/2000/3000 Series
ITV105m Series

1.0 1.0 1.0

0.9
0.8
Out
0.5 0.5
Set pressure [MPa]
0.7
0.6
0.5 0.0 0.0
0.4
Return
0.3
–0.5 –0.5
0.2
0.1
0.0 –1.0 –1.0
0 25 50 75 100 0 25 50 75 100 0 2 4 6 8 10

1.0 1.0 1.0
0.9 0.9
0.8 0.8
0.5
Set pressure [MPa]
Set pressure [MPa]

0.7 0.7
Set point
0.6 0.6
0.0 0.5 0.5
0.4 0.4
0.3 0.3
–0.5
0.2 0.2
0.1 0.1
–1.0 0.0 0.0
0.4 0.6 0.8 1 1.2 0 50 100 150 200 250 300 350 0 50 100 150 200 250 300
ITV205m Series

1.0 1.0 0.5
0.9
0.8 Out
0.5 0.25
Set pressure [MPa]
0.7
0.6
0.5 0.0 0
0.4 Return
0.3
0.2
–0.5 –0.25
0.1
0.0 –1.0 –0.5
0 25 50 75 100 0 25 50 75 100 0 2 4 6 8 10

1.0 1.0 1.0
0.9 0.9
0.8 0.8
0.5
Set pressure [MPa]
Set pressure [MPa]
0.7 0.7
Set point
0.6 0.6
0.0 0.5 0.5
0.4 0.4
0.3 0.3
–0.5
0.2 0.2
0.1 0.1
–1.0 0.0 0.0
0.4 0.6 0.8 1.0 1.2 0 500 1000 1500 2000 2500 0 500 1000 1500 2000 2500
1190
ITV305m Series

1.0 1.0 1.0
0.9

0.8

0.5 0.5
0.7 Out
Set pressure [MPa]
0.6
0.5 0.0 0.0
0.4 Return
0.3
–0.5 –0.5
0.2
0.1
0.0 –1.0 –1.0
0 25 50 75 100 0 25 50 75 100 0 2 4 6 8 10

1.0 1.0 1.0
0.9 0.9
0.8 0.8
0.5
Set pressure [MPa]

Set pressure [MPa]
0.7 0.7
Set point
0.6 0.6
0.0 0.5 0.5
0.4 0.4
0.3 0.3
–0.5
0.2 0.2
0.1 0.1
–1.0 0.0 0.0
0.4 0.6 0.8 1.0 1.2 0 1000 2000 3000 4000 5000 6000 7000 0 1000 2000 3000 4000 5000 6000
1191
ITV1000/2000/3000 Series
Construction
ITV1000
Main Component Parts
No. Description Material
X 1 Body Aluminum alloy
o !3
2 Cover Aluminum alloy
X 3 Valve guide Resin
y Aluminum alloy
t X 4 Diaphragm assembly HNBR
Steel
!5 u 5 Seal NBR
Resin
6 Bowl assembly
Silicone rubber
w
i 7 Sub-plate Resin
8 Seal NBR
!6 9 Control circuit assembly —
r X 10 Bumper NBR
Stainless steel
X 11 Valve
!0 HNBR
!1 X 12 Guide retainer Aluminum alloy
SUP OUT
13 Solenoid valve —
e X 14 O-ring HNBR
!4
15 Cross recessed round head screw Steel
q
X 16 Flat washer Stainless steel
!2 * Parts in contact with fluid are indicated with a mark X.
ITV2000
Main Component Parts
!9 No. Description Material
@0 X 2 Intermediate body Aluminum alloy
!6
X 4 Valve guide Aluminum alloy
@3 !7 X 5 Valve (Supply valve) HNBR/Brass

X 6 Valve (Exhaust valve) HNBR/Brass
!5 X 7 Valve spring Stainless steel
!8 X 8 Valve spring Stainless steel
e Stainless steel
o X 9 Diaphragm assembly
Aluminum alloy
!1 HNBR
Steel
!3 w X 10 Seal NBR
X 11 Bias spring Stainless steel
!0 @1 12 O-ring NBR
X
X 13 Cotter Stainless steel
q
X 14 Wear ring Resin
u 15 Seal NBR
y
Resin
SUP OUT 16 Bowl assembly
!2 Silicone rubber
t 17 Sub-plate Resin
18 Seal NBR
@2 !4 19 Control circuit assembly —
20 Solenoid valve —
r X 21 O-ring NBR
i
22 O-ring NBR
23 Cross recessed round head screw Steel
* Parts in contact with fluid are indicated with a mark X.
1192
Construction
ITV3000
!9 Main Component Parts
!8 No. Description Material
!5 !4 X 3 Valve guide Aluminum alloy
X 4 Bias spring Stainless steel
!6 X 5 Intermediate body Aluminum alloy
@3 HNBR
Stainless steel
X 6 Diaphragm assembly
Aluminum alloy
!7 q
Steel
X 7 Valve (Supply valve) HNBR/Brass
!1 X 8 Valve (Exhaust valve) HNBR/Brass
y X 9 Valve spring Stainless steel
r X 10 Seal NBR
11 Seal NBR
@2 X 12 Rod guide Brass
t X 13 O-ring retainer Aluminum alloy
14 Seal NBR
!0 !2 Resin
15 Bowl assembly
Silicone rubber
16 Sub-plate Resin
i 17 Seal
!3 NBR
18 Control circuit assembly —
SUP OUT 19 Solenoid valve —
20 O-ring NBR
@4
u X 21 O-ring NBR
X 22 O-ring NBR
@0 23 Cross recessed round head screw Steel
w X 24 Wear ring Resin
* Parts in contact with fluid are indicated with a mark X.
@1
e
1193
ITV1000/2000/3000 Series
Dimensions
ITV10mm
* Do not attempt to rotate, as the cable connector does not turn.
Flat bracket
Right angle type (4 cores) Straight type (4 cores)
Cable connector 3 m Cable connector 3 m
100
84
50
(33)
52
40
ø7
Setting part
x
4
M12 x 1 12.5
Cable connection thread (Plug type)
11
Digital pressure display
M3 x 0.5
Solenoid valve
EXH
Solenoid
71
valve
1/8 (Rc, NPT, NPTF, G)
EXH
EXH port
11 8.5
SUP OUT EXH (3)

11
1.6
12
13.5
Flat bracket assembly 2 x 1/8, 1/4 (Rc, NPT, NPTF, G)
40 SUP port, OUT port
P398010-600
(Option)
4 x M4 x 0.7 thread depth 6 mm
L-bracket
L-bracket assembly
P398010-601
(Option)
15
25
2.3
22
10 45
(8.5) 33
50
1194
Dimensions (16 points preset input, 10-bit digital input, CC-Link, DeviceNet®)
16 points preset input 10-bit digital input
M12 x 1
M12 x 1
Signal cable connection
Power cable connection thread RP13A-12RB-13PA (71) made by
thread (Plug type) HIROSE ELECTRIC CO., LTD.
(Plug type)
20 8.5 (ø14.3)
(ø14.3)
11
9
Digital pressure Digital pressure
display display
M3 x 0.5 M3 x 0.5
Solenoid Solenoid
valve EXH
98
Solenoid
98
valve EXH Solenoid

valve valve
8.5
8.5
EXH EXH
SUP OUT EXH (3) SUP OUT EXH (3)
11
11
13.5 13.5
12
12
CC-Link: ITV10m0-CC DeviceNet®: ITV10m0-DE

IN M12 x 1
Communication cable
OUT M12 x 1
connection thread
Communication cable connection (Plug type)
thread (Socket type)
20 (60)
M12 x 1 M12 x 1
M12 x 1
Power cable connection Communication cable connection
thread (Plug type) Power cable connection thread
thread (Plug type) (Plug type)
(53)
11
BUS 20 8.5
11
adapter
8.5
M3 x 0.5 M3 x 0.5
Solenoid Solenoid
108
98
valve EXH Solenoid valve EXH Solenoid

valve valve
8.5
8.5
EXH EXH

11
11
13.5 13.5
12
12
* Dimensions not shown are the same as on page 1194. * Dimensions not shown are the same as on page 1194.
1195
ITV1000/2000/3000 Series
Dimensions (PROFIBUS DP, RS-232C, IO-Link)

PROFIBUS DP: ITV10m0-PR RS-232C: ITV10m0-RC
M12 x 1
M12 x 1 M12 x 1
Communication cable connection M12 x 1
Power cable connection thread Communication cable connection
thread (Socket type) Power cable connection thread
(Plug type) thread (Plug type)
10.5 11.5 9.5 (Plug type)
11
20 8.5
11
16.3
M3 x 0.5 M3 x 0.5
Solenoid Solenoid
108
98
valve EXH Solenoid valve EXH Solenoid
valve valve
8.5
8.5
EXH EXH
11
13.5
11
13.5
12
12
IO-Link: ITV10m0-IL

EXH port
M12 x 1
Cable connection 8.5
11
Digital pressure display thread (Plug)
M3 x 0.5
Solenoid 2.5
valve EXH
98
Solenoid
valve
8.5
EXH
SUP OUT EXH

11
11
13.5
2 x 1/8, 1/4 (Rc, NPT, NPTF, G)
SUP port, OUT port
With power cable connector Straight type (4 cores) Right angle type (4 cores)
52 Cable connector 3 m Cable connector 3 m
53
CC
* ITV10m0- DE common dimensions
(33)
PR
RC
* Order communication cable * Do not attempt to rotate, as the cable

(other than 16 points, RS-232C) connector does not turn.
separately. (Refer to page 1182.)
1196
Dimensions
ITV20mm
Flat bracket
100
84
50
(33)
52
40
ø7
x
4
12.5
M12 x 1
11
M5 x 0.8
Solenoid valve
EXH Solenoid
93
valve
EXH 1/4 (Rc, NPT, NPTF, G)
EXH port
13.5
SUP OUT EXH (3)

19
19
1.6
12
10 2 x 1/4, 3/8 (Rc, NPT, NPTF, G)

36 Flat bracket assembly SUP port, OUT port
P398020-600
(Option)
L-bracket
L-bracket assembly
P398020-601
(Option)
15
25
2.3
45
10
(8.5) 33
50
1197
ITV1000/2000/3000 Series
M12 x 1 M12 x 1
Signal cable connection Power cable connection thread RP13A-12RB-13PA (71) made by
thread (Plug type) (Plug type) HIROSE ELECTRIC CO., LTD.
20 8.5 (ø14.3) (ø14.3)
11
9
display display
M5 x 0.8 M5 x 0.8
Solenoid Solenoid
valve EXH valve EXH
120
120
Solenoid Solenoid
13.5
13.5
valve valve
EXH EXH
19
19
10 10
12
12
CC-Link: ITV20m0-CC IN M12 x 1 DeviceNet®: ITV20m0-DE

M12 x 1 Communication cable connection
Power cable connection thread thread (Plug type)
(Plug type) (60) M12 x 1 M12 x 1
20
OUT M12 x 1 Communication cable connection Power cable connection thread
Communication cable thread (Plug type) (Plug type)
connection thread
(53)
(Socket type)
11
BUS 20 8.5
11
adapter
8.5
M5 x 0.8 M5 x 0.8
Solenoid Solenoid
valve EXH
130
valve EXH Solenoid

120
Solenoid
13.5
valve valve
13.5
EXH EXH

19
19
10 10
12
12
1198

PROFIBUS DP: ITV20m0-PR RS-232C: ITV20m0-RC
M12 x 1
M12 x 1 M12 x 1 M12 x 1
Communication cable connection
Power cable connection thread Communication cable connection Power cable connection thread
thread (Socket type)
(Plug type) 9.5 thread (Plug type) (Plug type)
10.5 11.5
11 8.5
20
11
16.3
M5 x 0.8 M5 x 0.8
Solenoid Solenoid
130
valve EXH valve EXH

Solenoid
120
Solenoid
13.5
valve valve
13.5
EXH EXH
19
19
10 10
12
12
IO-Link: ITV20m0-IL

M12 x 1 EXH port
Digital pressure display thread (Plug)
11
M5 x 0.8
Solenoid 2.5
valve EXH
Solenoid
120
valve
13.5
EXH
SUP OUT EXH

19
19
10
2 x 1/4, 3/8 (Rc, NPT, NPF, G)
SUP port, OUT port
With power cable connector

Straight type (4 cores) Right angle type (4 cores)
52
* ITV20m0- CC
DE common dimensions
(33)
PR
RC

1199
ITV1000/2000/3000 Series
Dimensions
ITV30mm
Flat bracket
52
40 le
ø7 ho Cable connector 3 m Cable connector 3 m
4 x nting
u
Mo
(33)
66
50
100
84
M12 x 1 12.5
11
M5 x 0.8
Solenoid
valve EXH
Solenoid
valve EXH
114
44

EXH port
EXH (3)
SUP OUT
25
22
12
1.6
Flat bracket assembly 2 x 1/4, 3/8, 1/2 (Rc, NPT, NPTF, G)

15.5 P398020-600 36 SUP port, OUT port
(Option)
L-bracket
L-bracket assembly
P398020-601
(Option)
15
25
2.3
45
10
(8.5) 33
50
1200
M12 x 1 M12 x 1
Signal cable connection Power cable connection thread RP13A-12RB-13PA (71) made by
thread (Plug type) (Plug type) HIROSE ELECTRIC CO., LTD.
20 8.5 (ø14.3) (ø14.3)
11
9
display display
M5 x 0.8 M5 x 0.8
Solenoid Solenoid
valve Solenoid Solenoid
valve valve valve
EXH EXH
141
141
EXH EXH
44
44
EXH (3) EXH (3)
SUP OUT SUP OUT
22
22
15.5 15.5
12
12
CC-Link: ITV30m-CC IN M12 x 1
DeviceNet®: ITV30m-DE
M12 x 1
Communication cable connection
Power cable connection thread thread (Plug type)
(Plug type) M12 x 1 M12 x 1
20 (60)
OUT M12 x 1 Communication cable connection Power cable connection thread
Communication cable thread (Plug type) (Plug type)
connection thread
(53)
BUS
11
(Socket type) 20 8.5
11
adapter
8.5
M5 x 0.8
M5 x 0.8
Solenoid
Solenoid valve
valve EXH
EXH
151
151
141
Solenoid Solenoid
valve
44
valve
44
EXH (3) EXH EXH (3)

EXH
SUP OUT SUP OUT
22
22
15.5 15.5
12
12
12
1201
ITV1000/2000/3000 Series

PROFIBUS DP: ITV30m-PR RS-232C: ITV30m-RC
M12 x 1 M12 x 1 M12 x 1 M12 x 1
Communication cable connection thread (Socket type) Power cable connection thread (Plug type) Communication cable connection Power cable connection thread
10.5 11.5 9.5 thread (Plug type) (Plug type)
11 20 8.5
11
16.3
M5 x 0.8
M5 x 0.8
Solenoid
Solenoid
valve
valve
EXH
EXH
151
151
141
Solenoid Solenoid
valve valve
44
44
EXH EXH (3) EXH EXH (3)

SUP OUT SUP OUT
22
22
15.5 15.5
12
12
12
IO-Link: ITV30m0-IL
M12 x 1 EXH port
Cable connection
Digital pressure display 8.5
thread (Plug)
11
M5 x 0.8
Solenoid 2.5
valve EXH
141
Solenoid
valve
44
EXH
SUP OUT EXH
25
22
15.5 2 x 1/4, 3/8, 1/2 (Rc, NPT, NPTF, G)

SUP port, OUT port
With power cable connector

Straight type (4 cores) Right angle type (4 cores)
52
CC
* ITV30m0- DE common dimensions
(33)
PR
RC

1202
®
RoHS
ITV1000/2000/3000 Series
Made to Order
Please contact SMC for detailed dimensions, specifications, and lead times.
1 Reverse Type 2 High-Pressure Type (SUP 1.2 MPa, OUT 1.0 MPa)
In accordance with the input signal, the inverse proportional pressure is output.
ITV10 5 X224
ITV10 X102
ITV20 5 X224
ITV20 X102
ITV30 5 X224
ITV30 X102 * For the preset input type, the digital input type, and communication models,
contact SMC for availability.
Rated
pressure
Output pressure
[MPa]
This range is
outside of the
control (output).
0.005 MPa
0
0 100
Input signal [% F.S.]
Input/output characteristics chart
* The m in the part numbers indicate the model nos. of the standard products.
* Excludes the preset input type and the digital input type
* For communication models, contact SMC for availability.
3 Set Pressure Range: 1 to 100 kPa 4 Analog Output, Current Type (Source Type)
Monitor output is analog output from 4 to 20 mADC (source type).
ITV10 1 X25
ITV10 0 4 X256
ITV20 1 X25
* For the preset input type, the digital input type, and communication models, ITV20 0 4 X256
contact SMC for availability.
ITV30 0 4 X256
Monitor output wiring diagram

Brown
Blue
White
Monitor output current
Black
5 With Gauge Port

It is possible to check the outlet pressure when the product is in a de-energized state.
ITV10 X400
ITV20 X400
ITV30 X400
Model G port (Rc, NPT, NPTF, G)

ITV1000 type 1/8
ITV2000 type 1/8
ITV3000 type 1/4
SUP OUT
10 G port
1203
ITV1000/2000/3000 Series
5 High-Speed Response Time Type

Pressure response with no load is approx. 0.1 s.
* This is not a guaranteed value as it depends on the operating environment.
* When the input signal is at 0%, the exhaust solenoid valve is controlled to reduce the outlet pressure to zero. For this reason, a noise may be generated.
This noise is normal and does not indicate a fault.
* When operating for the first time, be sure that the power supply voltage and supply pressure are appropriate in relation to the operating environment and
conditions.
* For this product, by conducting the procedure described below (steps A to D), the parameters compatible with the power supply voltage and supply
pressure in use can be obtained.
If the desired output pressure values cannot be reached due to fluctuations in the operating conditions, etc., perform this operation.
A) Change the power supply voltage in use by ±0.4 VDC or more.
B) After inputting the supply pressure used on the inlet side of the ITV, adjust the input signal as described below.
(0%  100%  0%) (Change it gradually, waiting 10 s or more between each adjustment.)
** Please contact SMC if difficulty inputting signals occurs.
C) Change the power supply voltage according to the operating conditions/requirements, and repeat step B.
D) Input the power supply voltage and a 0% signal, and retain for 6 minutes or more. (Supply pressure is not required.)
When re-obtaining the parameters, we recommend operating with the air sealed in the piping in order to reliably reach the set pressure. In addition, if
step A above cannot be carried out, it is possible to conduct an “Initialize” operation as described in the operation manual in order to reset the
parameters of the product to those set at the time of shipment. When conducting an “Initialize” operation, the min. set pressure (F_1) and the max. set
pressure (F_2) will be reset.
* There is no gain or sensitivity adjustment function.
ITV 2 0 1 0 01 2 S X88
Model
1 1000 type
Nil MPa
2 2000 type
2*1 kgf/cm2
3 bar
Pressure range 4*1 psi
5 kPa
1 0.1 MPa
*1 This product is for overseas use only according
3 0.5 MPa to the New Measurement Act. (The SI unit type
5 0.9 MPa is provided for use in Japan.)
Cable connector type

Power supply voltage S Straight type 3 m
0 24 VDC L Right angle type 3 m
1 12 to 15 VDC N Without cable connector
Input signal
0 Current type 4 to 20 mADC (Sink type) Bracket*1
1 Current type 0 to 20 mADC (Sink type)
Nil Without bracket
2 Voltage type 0 to 5 VDC
B Flat bracket
C L-bracket
*1 The bracket is included.
Monitor output
1 Analog output 1 to 5 VDC Port size
2 Switch output/NPN output
1 1/8 (1000 type)
3 Switch output/PNP output
2 1/4 (1000, 2000 type)
Analog output 4 to 20 mADC 3 3/8 (2000 type)
4
(Sink type)
Thread type
Nil Rc
N NPT
T NPTF
F G
1204
Made to Order ITV1000/2000/3000 Series
6 Manifold Specifications (Excludes the ITV3000 series)

2 through 8-station manifold
How to Order Manifolds How to Order Manifold Assemblies

IITV20 02 5 Example Blanking plate assembly
Stations Electro-pneumatic regulator P398020-13
2 2 stations ITV1030-311S-X26 Electro-pneumatic regulator
…
ITV2050-212S-X26
8 8 stations
ITV1000, 2000 OUT port size

02 1/4 Rc, NPT, G1/2
03 3/8 2 x SUP port
Connection thread type

Nil Rc
N NPT
F G
1
How to Order for Manifold Mounting
2
ITV 1 0 1 X26 Manifold base (3 stations)
3
ITV 2 0 2 X26 IITV20-02-3
Rc, NPT, G1/4
····S
tatio
ns ∗1
OUT port
* The m in the part numbers indicate the model nos. of the standard products.
* For communication models, contact SMC for availability.
* The thread type is Rc only.
* For the ITV1000 series, the port size is 1/8 only. * Refer to the table below for possible mixed combination.
* For the ITV2000 series, the port size is 1/4 only. Model ITV101n ITV103n ITV105n ITV201n ITV203n ITV205n
* The bracket accessory cannot be selected.
ITV101n V — — V — —
* Not applicable to the ITV3000 series
ITV103n — V V — V V
ITV105n — V V — V V
ITV201n V — — V — —
IITV20-02-3 …………………1 set (3-station manifold base part no.) ITV203n — V V — V V
*ITV1030-311S-X26 ………1 set (Electro-pneumatic regulator part no.)*2 ITV205n — V V — V V
*P398020-13 ……………… 1 set (Blanking plate assembly part no.) *1 Electro-pneumatic regulators are counted starting from station 1 on the left
*ITV2050-212S-X26 ………1 set (Electro-pneumatic regulator part no.)*2 side with the OUT ports in the front.
*2 The port size for mounted electro-pneumatic regulators is Rc1/8 (ITV1000),
The asterisk denotes the symbol for the assembly. Prefix it to the Rc1/4 (ITV2000) only.
part numbers of the electro-pneumatic regulator, etc. * When there is a large number of stations, use piping with the largest possible
inside diameter for the supply side, such as steel piping.
* The use of the straight type cable connector is recommended. To mount right
angle type, be certain to check that no possible interference occurs.
* When mounting a blanking plate and the regulator with a different pressure set,
please inform SMC of the order of a manifold station beside a purchase order.
1205
ITV1000/2000/3000 Series
7 Linearity: ±0.5% F.S. or Less

Application examples: Polishing equipment and peripheral equipment for wafers, LCD glasses, color filters, etc.
ITV 3 0 1 0 0 1 2 S X410
Model Linearity:
1 1000 type
Pressure range ±0.5% F.S. or less
2 2000 type
1 0.1 MPa Pressure display unit
3 3000 type
3 0.5 MPa
Nil MPa
5 0.9 MPa
2*1 kgf/cm2
Bracket*1
3 bar
Power supply voltage Nil Without bracket
4*1 psi
0 24 VDC B Flat bracket
5 kPa
1 12 to 15 VDC C L-bracket
*1 This product is for overseas use only ac-
*1 The bracket is included. cording to the New Measurement Act. (The
Input signal SI unit type is provided for use in Japan.)
Current type 4 to 20 mADC Port size
0 1 1/8 (1000 type) Cable connector type
(Sink type)
2 1/4 (1000, 2000, 3000 type) S Straight type 3 m
Current type 0 to 20 mADC
1 3 3/8 (2000, 3000 type) L Right angle type 3 m
(Sink type)
2 Voltage type 0 to 5 VDC 4 1/2 (3000 type) N Without cable connector
Monitor output Rated

1 Analog output 1 to 5 VDC pressure
2 Switch output/NPN output -X410 Standard model
Output pressure [MPa]
3 Switch output/PNP output ±0.5% F.S. ±1% F.S.

Analog output 4 to 20 mADC
4
(Sink type)
Thread type
Nil Rc
N NPT
T NPTF
0
F G
Input signal [% F.S.] 100
The graph shown above is a typical example. (This graph shows that the output
pressure curve is in a negative range when compared to the ideal line.)
Specifications
Fluid Air
Max. supply pressure 1.0 MPa (Pressure range 0.1 MPa type: 0.2 MPa)
(Supply side) 1.5 MPa (Pressure range 0.1 MPa type: 0.3 MPa)
Proof pressure
(Output side) 1 MPa (Pressure range 0.1 MPa type: 0.2 MPa)
Set pressure range 1: 0.005 to 0.1 MPa, 3: 0.005 to 0.5 MPa, 5: 0.005 to 0.9 MPa
Power supply voltage 0: 24 VDC ±10%, 1: 12 to 15 VDC
0.12 A or less (24 VDC ±10% type)
Current consumption
0.18 A or less (12 to 15 VDC type)
Input signal 0: 4 to 20 mA, 1: 0 to 20 mA, 2: 0 to 5 VDC, 3: 0 to 10 VDC
Input impedance Voltage type: Approx. 6.5 kΩ, Current type: 250 Ω or less
Output signal Analog output: 1 to 5 VDC/4 to 20 mADC, Switch output (NPN/PNP)
Linearity ±0.5% F.S. or less
Accuracy ±2% F.S. ±1 digit or less
Output pressure display
Min. unit MPa: 0.001, kgf/cm2: 0.01, bar: 0.01, psi: 0.1, kPa: 1
Enclosure IP65
Weight ITV10: Approx. 250 g, ITV20: Approx. 350 g, ITV30: Approx. 645 g (Without brackets)
The above characteristics (specifications) are confined to the static state. When air is consumed on the output side, the pressure may fluctuate.
1206
Made to Order ITV1000/2000/3000 Series
8 With Alarm Output

Alarm is output if the set pressure is not reached or maintained for 5 seconds or more.
Application examples: Pressure management for thrust control, etc.
ITV 3 0 1 0 0 2 2 S X420
Model
With alarm output
1 1000 type Pressure range
2 2000 type 1 0.1 MPa
Cable connector type Nil MPa
3 3000 type 3 0.5 MPa
S Straight type 3 m 2*1 kgf/cm2
5 0.9 MPa
L Right angle type 3 m 3 bar
Power supply voltage N Without cable connector 4*1 psi
0 24 VDC Bracket*1 5 kPa
1 12 to 15 VDC Nil Without bracket *1 This product is for over-
seas use only accord-
Input signal B Flat bracket ing to the New Meas-
C L-bracket urement Act. (The SI
Current type 4 to 20 mADC Monitor output
0 *1 The bracket is included. unit type is provided for
(Sink type) 2 Alarm output/NPN output use in Japan.)
Current type 0 to 20 mADC 3 Alarm output/PNP output Port size
1
(Sink type) 1 1/8 (1000 type)
2 Voltage type 0 to 5 VDC 2 1/4 (1000, 2000, 3000 type)
Thread type
3 Voltage type 0 to 10 VDC 3 3/8 (2000, 3000 type)
Nil Rc
4 1/2 (3000 type)
N NPT
T NPTF
F G
Rated
pressure +10%
Output pressure [MPa]
Alarm detection range: Detects Set pressure

output pressure outside the
±10% F.S. range. For example, −10%
in the case of ITV2050 (0.9
MPa), a 50% input (0.45 MPa) 5s
creates a detectable range of ON
0.36 to 0.54 MPa. Alarm output
OFF
0 Input signal [% F.S.] 100
Fig. 1 Alarm output range Fig. 2 Relationship between output
pressure and alarm output
Specifications
Fluid Air
Max. supply pressure 1.0 MPa (Pressure range 0.1 MPa type: 0.2 MPa)
(Supply side) 1.5 MPa (Pressure range 0.1 MPa type: 0.3 MPa)
Proof pressure
(Output side) 1 MPa (Pressure range 0.1 MPa type: 0.2 MPa)
Set pressure range 1: 0.005 to 0.1 MPa, 3: 0.005 to 0.5 MPa, 5: 0.005 to 0.9 MPa
Power supply voltage 0: 24 VDC ±10%, 1: 12 to 15 VDC
0.12 A or less (24 VDC ±10% type)
Current consumption
0.18 A or less (12 to 15 VDC type)
Input signal 0: 4 to 20 mA, 1: 0 to 20 mA, 2: 0 to 5 VDC, 3: 0 to 10 VDC
Input impedance Voltage type: Approx. 6.5 kΩ, Current type: 250 Ω or less
Output signal Alarm output (NPN/PNP)
Linearity ±1.0% F.S. or less
Accuracy ±2% F.S. ±1 digit or less
Output pressure display
Min. unit MPa: 0.001, kgf/cm2: 0.01, bar: 0.01, psi: 0.1, kPa: 1
Enclosure IP65
Weight ITV10ll: Approx. 250 g, ITV20ll: Approx. 350 g, ITV30ll: Approx. 645 g (Without brackets)
The above characteristics (specifications) are confined to the static state. When air is consumed on the output side, the pressure may fluctuate.
1207
Compact Vacuum Regulator
ITV009 m Series
RoHS
How to Order
For single unit and single unit for manifold
ITV00 9 0 3 N
Pressure range
9 –100 kPa
Cable connector (Option)
Power supply voltage N Without cable connector
S Straight type 3 m
0 24 VDC ±10%
L Right angle type 2 m
1 12 to 15 VDC
Input signal
0 Current type 4 to 20 mADC (Sink type) Bracket/Option for single unit only
1 Current type 0 to 20 mADC (Sink type) Nil Without bracket
2 Voltage type 0 to 5 VDC Flat
3 Voltage type 0 to 10 VDC bracket
B
Built-in One-touch fittings type
For single unit
Symbol VACz OUTx ATMc L-bracket
Metric size
Nil (Light gray)
ø4
Inch size C
U (Orange)
ø5/32"
For manifold
Symbol VACz OUTx ATMc
Metric size
Nil ø6 ø4 ø6
(Light gray) Base type
Inch size Nil For single unit
U ø1/4" ø5/32" ø1/4"
(Orange) M For manifold
Manifold How to Order Manifold Assembly (Example)
IITV00 02 n Indicate the part numbers of vacuum regulators to be mounted below the
manifold part number.
Example)
Due to the common supply/exhaust feature, note that different pressure
range combinations are not available.
Stations Option
IITV00-03········1 set (Manifold part no.)
If a DIN rail longer than
02 2 stations *ITV0090-3MS······2 sets (Vacuum regulator part no. (Stations 1, 2))
the specified stations is
03 3 stations required, specify the *ITV0090-3ML······1 set (Vacuum regulator part no. (Station 3))
Indicate part numbers in order starting from the first station on
···
···
applicable stations in
10 10 stations two digits. the D side.
(Max. 10 stations) Caution) Combination with having different pressure ranges is not
Example) IITV00-05-07 available due to common supply/exhaust features.
One-touch fitting size for supply/
exhaust parts (End plate) The asterisk denotes the symbol for the assembly.
Prefix it to the part numbers of the vacuum regulator.
Nil ø6 (Light gray)
D sid
U ø1/4" (Orange) e
1
2
3·
··
* A DIN rail with the length specified by the number of stations is at-
tached to the manifold. For dimensions of the DIN rail, refer to the
external dimensions.
DIN rail
ITV0090-3MS
ITV0090-3ML
1208
Compact Vacuum Regulator ITV009m Series
Specifications
Model ITV009l
Min. supply pressure Set pressure – 1 kPa
Max. supply pressure –101 kPa
Set pressure range –1 to –100 kPa
Power supply Current Power supply voltage 24 VDC type: 0.12 A or less
Input signal
Current type 4 to 20 mADC, 0 to 20 mADC (Sink type)
Voltage type Approx. 10 kW
Input impedance
Current type Approx. 250 W
Analog 1 to 5 VDC (Output impedance: Approx. 1 kW)
Output signal*2
output Output accuracy: ±6% F.S. or less
Operating temperature range 0 to 50°C (No condensation)
Enclosure IP65 equivalent*3
Connection type Built-in One-touch fittings
For single Metric size z, x, c: ø4
unit Inch size z, x, c: ø5/32"
Connection size
Symbol Metric size z, c: ø6, x: ø4
Manifold
Inch size z, c: ø1/4", x: ø5/32"
Weight*1 100 g or less (Without options)
*1 Indicates the weight of a single unit
3
2 For IITV00-n
Total weight (g) ≤ Stations (n) x 100 + 130 (Weight of end block A, B assembly) + Weight (g)
1 of DIN rail
*2 When measuring ITV analog output from 1 to 5 VDC, if the load impedance is less than 100
kW, the analog output monitor accuracy of ±6% F.S. or less may not be available.
The product with an accuracy of within ±6% is supplied upon your request.
Output pressure remains unaffected.
*3 When using under the conditions equivalent to IP65, connect the fitting or tube to the
breathing hole before use. (For details, refer to “Specific Product Precautions 1” on page
1222.)
* When there is a downstream flow consumption, pressure may become unstable depending on
piping conditions.
* When the power is turned on, a noise may be generated. This noise is normal and does not
indicate a fault.
Bracket Cable connector
Flat bracket assembly (including 2 mounting screws) Straight type
P39800022 M8-4DSX3MG4
L-bracket assembly (including 2 mounting screws) Right angle type

P39800023 P398000-501-2
Tightening torque when assembling is 0.3 N·m.
1209 A
ITV009m Series
Working Principle
When the input signal rises, the vacuum pressure solenoid valve q turns ON. Due to this, part of the vacuum pressure (VAC.)
passes through the vacuum pressure solenoid valve q and changes to a vacuum pressure. This vacuum pressure feeds back to
the control circuit r via the pressure sensor e. Here, the vacuum pressure solenoid valve and the atmospheric pressure
solenoid valve work alternately to make continuous pressure corrections until vacuum pressure becomes proportional to the input
signal, thus, supplying vacuum pressure that is consistently proportional to the input signal.
Power supply and error

LED indication
Power supply Output signal

r Control circuit
Input signal
P
e Pressure sensor
q Vacuum pressure solenoid valve w Atmospheric pressure solenoid valve
VAC.
(Vacuum pump, etc.)
ATM OUT
(Atmospheric pressure)
Block Diagram
VAC.
q Vacuum pressure
solenoid valve
Input signal + Output pressure
r Control circuit
–
w Atmospheric pressure
solenoid valve
ATM
e Pressure sensor
1210
ITV009m Series

1 1

0.5 0.5
Return
0 0
Out
–0.5 –0.5
–1 –1
0 25 50 75 100 1 2 3 4 5
Pressure Characteristics Set pressure: –10 kPa Flow Rate Characteristics

1 0 –10 kPa
–20 kPa
–20
0.5 –40 kPa
Set pressure [kPa]
–40
Out
–60 kPa
0 –60
Return
–80 kPa
–80
–0.5 –100 kPa
–100
–1
–120 –100 –80 –60 –40 –20 0 0.5 1 1.5 2 2.5 3 3.5 4
Supply pressure [kPa] Flow rate [L/min (ANR)]
1211
ITV009m Series
Dimensions
28
For single unit ø6
4x 74
64
PWR
6
ERR
xø
2
38
27
15
PWR
ERR 2x
Mo ø3.5
4 un
xø tin
M gh
L-bracket ou 3.5 Flat bracket ole
nt
(Option) ing
ho (Option)
M8 x 1 le
15 6 50
82
73
Breathing hole∗1 3.7 3.7

(M3 x 0.5) 1
OUT port VACz
VAC port
13.7
OUTx
13.7
3
5
(ø4, ø5/32") ATMc (ø4, ø5/32")

2
5
ATM port
3
6
(ø4, ø5/32")
7
3.5
L-bracket
Flat bracket
(Option)
(Option)
19
Port Location
No. z x c
ITV009m VAC OUT ATM

Mounting thread
0
s8
*1 When using under the conditions diu
g ra
equivalent to IP65, connect the fit-
3000
+50
n din
tings or tube to the breathing hole 0
be
before use. n.
15 35 (30.9) Mi Body
ø4
8.7
9.9
7 14
Straight type (Option)

Right angle type (Option)
(21.8)
(24) Body
Mi
n.
be
nd
SMC
(24)
ing
SMC
ø10
M8
ra
diu
s8
0
ø4
2000 ±50
(45)
(15)
1212
Dimensions
Single unit for manifold

50
PWR
ERR
M8 x 1
15
6
82
Breathing hole∗1
(M3 x 0.5) 3.7
13.7
2
5
(2)
OUTx port
(4)
(ø4, ø5/32")
Bushing assembly
(2.7)
*1 When using under the conditions

equivalent to IP65, connect the fit-
tings or tube to the breathing hole
before use.
* For dimensions of the cable connector, refer to single unit on page 1212.
1213
ITV009m Series
Dimensions
Manifold
27.5
27.5
40
40
Mounting hole
11 11
L2
25 L1
Port Location 8
No. z x c
5.5
ITV009m VAC OUT ATM
PWR
PWR
PWR
PWR
ERR
ERR
ERR
ERR
* Stations are counted starting
from the D side.
25
35
50
5.25
8.5 14 15 8.5 12.5

(Pitch) (Pitch)
6 D side U side
1 2 ····stations
3 (8)
Dimension for the inch size is VACz port
noted in parentheses. 1 1
(ø6, ø1/4") 89.5
ATMc port
80.5
3 3
(ø6, ø1/4")
47.5
32.5
21.2
2 2 2
12.5
Breathing hole∗1
7.5
3.7
(M3 x 0.5)
OUTx port
(ø4, ø5/32")
* For dimensions of the cable connector, refer to single unit on page 1212. *1 When using under the conditions
equivalent to IP65, connect the
fittings or tubing to the breathing
[mm] hole before use.
Manifold stations n 2 3 4 5 6 7 8 9 10 uct Precautions 1” on page 1222.)
L1 60 75 90 105 120 135 150 165 180
L2 110.5 123 148 160.5 173 185.5 198 223 235.5
Weight of DIN rail [g] 20 22 27 29 31 34 36 41 43
1214
Electronic Vacuum Regulator
ITV2090/2091 Series ®
RoHS
How to Order
ITV 209 0 0 1 2 S 5
Pressure range
9 –1.3 to –80 kPa
5 kPa
* For the communication models CC,
DE, PR, and RC, only “Nil” is
Power supply voltage available as it does not have a
0 24 VDC pressure display.
1 12 to 15 VDC
* The communication models (CC, DE, PR, RC, Cable connector type
and IL), 16 points preset input, and 10-bit digital
input options are only available for the 24 VDC. S Straight type 3 m
L Right angle type 3 m
N Without cable connector
* Even when a cable connector is selected,
a communication cable is not included for
Input signal/ the communication models CC, DE, and
Communication model Monitor output PR. Please order it separately. Refer to
the table below.
Current type 4 to 20 mADC 1 Analog output 1 to 5 VDC For 10-bit digital input, the right angle type
0 (Sink type) 2 Switch output/NPN output cannot be selected.
Current type 0 to 20 mADC 3 Switch output/PNP output
1 (Sink type) Analog output 4 to 20 mADC Bracket*1
4
2 Voltage type 0 to 5 VDC (Sink type)
Nil Without bracket
3 Voltage type 0 to 10 VDC Nil None B Flat bracket
40 4 points preset input C L-bracket
16 points preset input *1 The bracket is included.
52 (Switch output/NPN output)
53 (Switch output/PNP output) Port size
60 10-bit digital input 2 1/4
CC CC-Link
DE DeviceNet ®
PR PROFIBUS DP Thread type
RC RS-232C communication Nil Rc
IL IO-Link N NPT
T NPTF
F G
For communication cables, use the parts listed below

(Refer to the M8/M12 connector in the Web Catalog for details.)
or order the product certified for the respective protocol (with M12 connector) separately.
Application Communication cable part no. Note
PCA-1567720 (Socket type) A dedicated Bus adapter is included
CC-Link compatibility
PCA-1567717 (Plug type) with the product.
DeviceNet ® PCA-1557633 (Socket type) A T-branch connector is not included
compatibility PCA-1557646 (Plug type) with the product.
PROFIBUS DP PCA-1557688 (Socket type) A T-branch connector is not included
compatibility PCA-1557691 (Plug type) with the product.
1215
ITV209m Series
Standard Specifications
Model ITV2090 ITV2091
For the stepless control of Min. supply vacuum pressure*1 Set pressure – 13.3 kPa
vacuum pressure in propor- Max. supply vacuum pressure –101 kPa
tion to electrical signals Set pressure range –1.3 to –80 kPa
Voltage 24 VDC ±10% 12 to 15 VDC
Power supply Current Power supply voltage 24 VDC type: 0.12 A or less*6
Current type*2 4 to 20 mADC, 0 to 20 mADC (Sink type)
Input signal*6
Preset input 4 points (Negative common), 16 points (No common polarity)
Digital input 10 bits (Parallel)
Current type 250 W or less*3
Voltage type Approx. 6.5 kW
Input
impedance Power supply voltage 24 VDC type: Approx. 4.7 kW
Preset input
Digital input Approx. 4.7 kW
1 to 5 VDC (Output impedance: Approx. 1 kW)
*4 Analog output 4 to 20 mADC (Sink type) (Output impedance: 250 W or less)
Output signal
Output accuracy ±6% F.S. or less
(Monitor output)
NPN open collector output: Max. 30 V, 80 mA
Switch output
PNP open collector output: Max. 80 mA
Symbol Repeatability ±0.5% F.S. or less
3 Output pressure Accuracy ±2% F.S. ±1 digit or less
2 display Unit kPa*5 Min. display: 1
1 Ambient and fluid temperatures 0 to 50°C (No condensation)
Enclosure IP65
Weight*6, *7 390 g
*1 The min. supply vacuum pressure should be 13.3 kPa less than the max. vacuum pressure setting value.
*2 4 to 20 mADC is not possible with the 2-wire type. Power supply voltage (24 VDC or 12 to 15 VDC) is required.
Piping/Wiring Diagram *3 Value for the state with no over current circuit included. If an allowance is provided for an over cur-
rent circuit, the input impedance varies depending on the input power supply. This is 350 W or less
Power supply and input signal (VDC, mADC) for an input current of 20 mADC.
When measuring ITV analog output from 1 to 5 VDC, if the load impedance is less than 100 kW, the
analog output monitor accuracy of within ±6% (full span) may not be available. The product with the
VAC accuracy of within ±6% is supplied upon your request. Output pressure remains unaffected.
OUT
ITV2090 Tank *4 Either analog output or switch output must be selected. Furthermore, when switch output is select-
Vacuum pump, Set pressure ed, either NPN output or PNP output must also be selected. Use caution that the preset input type
Ejector (Vacuum) is not equipped with an output signal function.
*5 Please contact SMC regarding indication with other units of pressure.
*6 Refer to the table below for communication specifications.
*7 Add 50 g for digital input type, 70 g for 16 points preset input type respectively.
* The product characteristics are confined to the static state.
Pressure may fluctuate when air is consumed at the output side.
Communication Specifications (CC, DE, PR, RC, IL)

Model ITVm0m0-CCmm ITVm0m0-DEmm ITVm0m0-PRmm ITVm0m0-RCmm ITVm0m0-ILmm
Protocol CC-Link DeviceNet ® PROFIBUS DP RS-232C IO-Link (Class A)
Version*1 Ver. 1.10 Volume 1 (Edition 3.8), Volume 3 (Edition 1.5) DP-V0 — Ver. 1.1
9.6 k/19.2 k/45.45 k
Communication 156 k/625 k
125 k/250 k/500 kbps 93.75 k/187.5 k/500 k 9.6 kbps 230.4 kbps (COM3)
speed 2.5 M/5 M/10 Mbps
1.5 M/3 M/6 M/12 Mbps
Configuration file*2 — EDS GSD — IODD
I/O occupation area 4 words/4 words, 32 bits/32 bits
16 bits/16 bits 16 bits/16 bits — 4 bytes/2 bytes
(input/output data) (per station, remote device station)
Communication data resolution 12 bits (4096 resolution) 12 bits (4096 resolution) 12 bits (4096 resolution) 10 bits (1024 resolution) 12 bits (4096 resolution)
HOLD*3/CLEAR HOLD/CLEAR
Fail safe CLEAR HOLD HOLD/CLEAR
(Switch setting) (Switch setting)
Electric insulation*4 Insulation Insulation Insulation Non-insulation Non-insulation
Terminating resistor Built into the product (Switch setting) Not built into the product Built into the product (Switch setting) — —
Current consumption 0.16 A or less 0.14 A or less 0.16 A or less 0.12 A or less 0.12 A or less
Weight ITV2090 470 460 490 460 460
*1 Please note that versions are subject to change.
*2 Configuration files can be downloaded from the operation manual page on the SMC website: https://www.smcworld.com
*3 The output HOLD value when a CC-Link communications error occurs can be set based on the bit area data.
*4 The insulation between the electrical signal of the communication system and ITV power supply
A 1216
Electronic Vacuum Regulator ITV209m Series
Working Principle
Working Principle
Pressure
display When the input signal increases, the vacuum pressure solenoid
valve q turns ON, and the atmospheric pressure solenoid valve
Power supply i Control Output signal w turns OFF. Because of this, VAC. and the pilot chamber e are
Input signal circuit connected, the pressure in the pilot chamber e becomes
u Pressure sensor negative and acts on the top of the diaphragm r.
q Vacuum pressure As a result, the vacuum pressure valve t which is linked to the
w Atmospheric pressure diaphragm r opens, VAC. and OUT. are connected, and the set
solenoid valve
solenoid valve
pressure becomes negative.
Atmospheric This negative pressure feeds back to the control circuit i via the
pressure pressure sensor u. Then, a correct operation works until a
vacuum pressure proportional to the input signal is reached, and
a vacuum pressure is obtained which is always proportional to
r Diaphragm the input signal.
e Pilot chamber
Block Diagram
t Vacuum pressure VAC.
VAC. valve
(Vacuum pump, etc.)
q
Input Vacuum Set
pressure
ATM signal + t pressure
OUT. solenoid valve r
Pilot valve
Control
(Atmospheric pressure) (Set pressure) – circuit w Diaphragm
Atmospheric
pressure
y Atmospheric pressure solenoid valve
valve ATM ATM
u Pressure sensor
ITV209m Series

0 1 1.0
–20
Output pressure [kPa]
0.5 0.5
Return
–40 0 0
Out
–60
–0.5 –0.5
–80
–1 –1.0
0 25 50 75 100 0 25 50 75 100 0 2 4 6 8 10
Input signal [% F.S.] Input signal [% F.S.] Count
Pressure Flow Rate Supply vacuum pressure:

Characteristics Set pressure: –20 kPa Characteristics –100 kPa Flow rate characteristics
measurement conditions
1.0 0
• Exhaust flow rate of the vacuum pump
–10 used for measurement: 500 L/min (ANR)
• Inlet vacuum pressure: –100 kPa
Set point
–20 (When outlet flow rate is 0 L/min (ANR))
0.5
–30 • Max. flow rate: 132 L/min (ANR)
Set pressure [kPa]
(With inlet vacuum pressure at –39 kPa)

–40
0
–50
–60
–0.5 –70
–80
–1.0 –90
–100 –80 –60 –40 –20 50 100 150
VAC. side pressure (Supply pressure) [kPa] Flow rate [L/min(ANR)]
1217
ITV209m Series
Dimensions
ITV209m
* Do not attempt to rotate the cable connector, as it does not turn.
Flat bracket
100
84
50 7 g
x ø ntin
(33)
4
ou
M le
ho
52
40
M12 x 1 12.5
(Plug type)
11
M5 x 0.8
Breathing hole
99
34

VAC. port
ATM. OUT VAC.

(Vacuum
19
19
pressure)
1.6
12
13.5
Flat bracket assembly 2 x 1/4 (Rc, NPT, NPTF, G)
36 ATM. port, OUT port
P398020-600
(Option)
L-bracket
L-bracket assembly
P398020-601
(Option)
15
25
2.3
45
10
(8.5) 33
50
1218
Electronic Vacuum Regulator ITV209m Series
Dimensions (16 points preset input, 10-bit digital input, CC-Link, DeviceNet ®)
M12 x 1 M12 x 1 RP13A-12RB-13PA (71) made by
Signal cable connection thread (Plug type) Power cable connection thread (Plug type) HIROSE ELECTRIC CO., LTD.
20 8.5
(ø14.3) (ø14.3)
11
9
display display
M5 x 0.8 M5 x 0.8
Breathing hole Breathing hole
Breathing Breathing
126
126
hole hole
34
34
ATM. OUT VAC. ATM. OUT VAC.
19
19
13.5 13.5
12
12
CC-Link: ITV2090-CC IN M12 x 1 DeviceNet ®: ITV2090-DE
Communication cable connection thread (Plug type)
OUT M12 x 1
20 Communication cable connection thread (Socket type) (60)
M12 x 1 M12 x 1 M12 x 1
Power cable connection thread Communication cable connection thread Power cable connection thread
(Plug type)
(53)
(Plug type) (Plug type)

11
20 8.5
BUS
11
adapter
8.5
M5 x 0.8 M5 x 0.8
136
126
34
34

19
19
13.5 13.5
12
12
1219
ITV209m Series

PROFIBUS DP: ITV2090-PR RS-232C: ITV2090-RC
M12 x 1 M12 x 1 M12 x 1 M12 x 1
Communication cable connection thread (Socket type) Power cable connection thread (Plug type) Communication cable connection thread (Plug type) Power cable connection thread (Plug type)
10.5 11.5 9.5
11
20 8.5
11
16.3
M5 x 0.8 M5 x 0.8
136
126
34
34
19
19
13.5 13.5
12
12
IO-Link: ITV2090-IL
VAC. port
M12 x 1
11
thread (Plug)
2.5
M5 x 0.8
Breathing hole
126
34
ATM. OUT VAC.

19
19
13.5
2 x 1/4 (Rc, NPT, NPTF, G)
ATM. port, OUT port
With power cable connector Straight type (4 cores) Right angle type (4 cores)
53
CC
* ITV2090- DE common dimensions
(33)
PR
RC
* Order communication cable (other than 16 points, * Do not attempt to rotate the cable
RS-232C) separately. (Refer to page 1215.) connector, as it does not turn.
1220
ITV1000/2000/3000/209 m Series
Accessories (Option)/Part Nos.
[Bracket]
Description Part no. Weight
Flat bracket assembly (including mounting screws) P398020-600
90
L-bracket assembly (including mounting screws) P398020-601
[Cable connector]
Current type Straight type 3 m P398020-500-3
Voltage type
IO-Link Right angle type 3 m P398020-501-3
180
Straight type 3 m P398020-500-3
Power cable (4 cores)
Right angle type 3 m P398020-501-3
Straight type 3 m P398020-502-3
Signal cable (5 cores)
10-bit digital input Cable connector (13 cores) Straight type 3 m INI-398-0-59 310
CC-Link Straight type 3 m P398020-500-3
PROFIBUS DP Power cable (4 cores)
DeviceNet ® Right angle type 3 m P398020-501-3
Straight type 3 m P398020-500-3 180
Power cable (4 cores)
RS-232C
Communication cable Straight type 3 m P398020-502-3
(5 cores) Right angle type 3 m P398020-503-3
* For the 10-bit digital type, there is no right angle type cable connector.
* Even when “with cable connector” is selected, the communication cable is not included in the communication
model (CC, DE, and PR). Please order it separately.
[Cable connector specifications]

P398020-500-3, P398020-501-3 P398020-502-3, P398020-503-3 INI-398-0-59
Nominal cross section 4 x AWG21 Nominal cross section 5 x AWG21 Nominal cross section 16 x AWG24
Conductor Conductor Conductor
Outside diameter Approx. 0.9 mm Outside diameter Approx. 0.9 mm Outside diameter Approx. 0.75 mm
Insulator Outside diameter Approx. 1.7 mm Insulator Outside diameter Approx. 1.7 mm Insulator Outside diameter Approx. 1.21 mm
Sheath Material PVC Sheath Material PVC Sheath Material PVC
Finished outside diameter ø6 mm Finished outside diameter ø6 mm Finished outside diameter ø8 mm
Min. bending radius 60 mm Min. bending radius 60 mm Min. bending radius 60 mm
[Bus adapter]
CC-Link Bus adapter (Included with the product) EX9-ACY00-MJ 35
Dimensions
Flat bracket L-bracket
100 10
7
15
25
4x
R3
52
40
.5 2.3
(8.5) 33
50
4 x ø7 84 50
60 20
70
Model Bracket tightening torque

12
ITV1000 0.76 ±0.05 N·m

1.6
ITV2000/3000 1.5 ±0.05 N·m

1221
ITV Series
Specific Product Precautions 1
Be sure to read this before handling the products.
Refer to the “Handling Precautions for SMC Products” and the “Operation Manual” on
the SMC website: https://www.smcworld.com
ITV0000/009m Series Precautions

Air Supply Handling
Warning Caution
1. Please consult with SMC when using the product in 1. Do not use a lubricator on the supply side of this prod-
applications other than compressed air. uct, as doing so may result in a malfunction. When lu-
2. Do not use compressed air that contains chemicals, brication of terminal equipment is necessary, connect
synthetic oils that include organic solvents, salt, corrosive a lubricator on the output side of this equipment.
gases, etc., as doing so may result in a malfunction.
2. If electric power is shut off while pressure is being ap-
Caution plied, pressure will be retained on the output side.
However, this output pressure is held only temporarily and is
1. Install an air filter near this product on the supply side.
Select an air filter with a filtration size of 5 μm or smaller. not guaranteed. If exhausting of this pressure is desired, shut
off the power after reducing the set pressure, and discharge
2. Compressed air that contains a large amount of drainage can re-
sult in the malfunction of this product and other pneumatic equip- the air using a residual pressure exhaust valve, etc.
ment. Therefore, take appropriate measures to ensure air quality, 3. If supply pressure to this product is interrupted while the
such as by providing an aftercooler, air dryer, or water separator. power is still on, the internal solenoid valve will continue
3. If excessive carbon dust is generated by the compressor, it may to operate and a humming noise may be generated.
adhere to the inside of this product and cause it to malfunction. Since the life of the product may be shortened, shut off the
Refer to the “SMC Air Preparation System” for further power supply also when supply pressure is shut off.
details on compressed air quality. 4. This product is adjusted for each specification at the time of
shipment from the factory. Avoid careless disassembly or re-
Wiring
moval of parts, as failure to do so may result in a malfunction.
Caution 5. The optional cable connector is a 4-wire type. When the monitor
output (analog output) is not being used, keep it from touching
Connect the cable to the connector on the body with
the wiring arranged as shown below. Proceed care- the other wires as doing so may result in a malfunction.
fully, as incorrect wiring can result in damage. 6. Please note that the right angle cable does not rotate
Further, use DC power with sufficient capacity and a low ripple. and is limited to only one entry direction.
Body
Brown
7. Take the following steps to avoid malfunction due to noise.
Blue 1) Remove power supply noise during operation by installing a
White line filter, etc., in the AC power line.
Black
∗1 2) For avoiding the influence of noise or static electricity, install
this product and its wiring as far as possible from strong
Terminal no. 1 2 3 4 *1 A right angle type cable is also
available. The entry direction for electric fields such as those of motors, power lines, etc.
Lead wire color Brown White Blue Black the right angle type connector is 3) Be sure to implement protective measures against load
Wiring Power Signal COM Monitor downward (SUP port side).
Never turn the connector as it is surge for induction loads (solenoid valves, relays, etc.).
2: (White) 4: (Black) not designed to turn. Using force
to turn the connector will dam- 8. The product characteristics are confined to the static state.
1: (Brown) 3: (Blue)
age the connector coupling. When air is consumed on the output side, and especially
used in the system with large leakage, pressure cannot ap-
proach the set pressure and the service life is drastically
Wiring diagrams shortened with a humming noise of the solenoid valve.
Current signal type Voltage signal type 9. For details on the handling of this product, refer to the opera-
Brown Brown
Blue
tion manual which is included with the product.
Blue
Vs
White
Vs
White 10. In locations where the body is exposed to water,
Black Black dust, etc., there is a possibility that moisture or dust
A Vin
could enter the body through the breathing hole.
Vs: Power supply 24 VDC ±10% Vs : Power supply 24 VDC ±10% Mount a fitting and tube (M-3AU-3 fitting
12 to 15 VDC 12 to 15 VDC and TIU01m-mm tube recommended) onto
A : Input signals 4 to 20 mADC Vin: Input signals 0 to 5 VDC
the breathing hole and run the tube to a lo- Breathing
0 to 20 mADC 0 to 10 VDC hole
cation not exposed to moisture, dust, etc. M3 x 0.5
Monitor output wiring diagram
2
Brown
Analog output, voltage type
Blue
White
Monitor output voltage
Black
B 1222
ITV Series
ITV0000/009m Series Precautions

Handling Return of Product
Caution Warning
12. If this product will be used in a sealed environment, such If the product to be returned is contaminated or is possi-
as inside an inspection box, a ventilation fan should be bly contaminated with substances that are harmful to hu-
installed to ensure adequate ventilation as this product mans, for safety reasons, please contact SMC beforehand
can generate heat in some operating conditions. and then employ a specialist cleaning company to decon-
When the power is turned on, a noise may be gener- taminate the product. After the decontamination pre-
ated as a means of checking the operating condition of scribed above has been carried out, submit a Product Re-
the solenoid valve. This noise is normal and does not turn Request Sheet or the Detoxification/Decontamination
indicate a fault. Certificate to SMC and await SMC’s approval and further
13. Each product needs to be powered by one power sup- instructions before attempting to return the item.
ply unit. Please refer to the International Chemical Safety Cards
The wiring of this product has the same common between the (ICSC) for a list of harmful substances.
GND for power and the signals; there is a possibility that a If you have any further questions, please don’t hesitate to
wrong current occurs and prevents a proper operation if one contact your SMC sales representative.
power supply unit controls multiple electro-pneumatic regulators.
14. This product does not have a shut-off valve function. If
air pressure is supplied without electric power being
applied, output pressure may increase to the pressure
equivalent of the supply pressure. Operate the system
to shut off the supply pressure when not operating the
product.
15. For this product, by conducting the procedure described
below (steps A to D), the parameters compatible with
the power supply voltage and supply pressure in use
can be obtained.
If the desired output pressure values cannot be reached
due to fluctuations in the operating conditions, etc.,
perform this operation.
A) Change the power supply voltage in use by ±0.4 VDC or more.
B) After inputting the supply pressure used on the inlet side of the
ITV, adjust the input signal as described below.
(0% R 100% R 0%) (Change it gradually, waiting 10 s or more
between each adjustment.)
* Please contact SMC if difficulty inputting signals occurs.
C) Change the power supply voltage according to the operating
conditions/requirements, and repeat step B.
D) Input the power supply voltage and a 0% signal, and retain for 6
minutes or more. (Supply pressure is not required.)
While conducting the procedure stated above, noise
may be generated by the solenoid valve. However, this
does not affect the obtainment of the parameters. In
addition, be sure to conduct the procedure with the air
sealed in the piping.
1223 A
ITV Series
ITV1000/2000/3000/209m Series Precautions

Piping Operating Environment
Warning Warning
1. When screwing piping into a component, tighten 1. Do not use in atmospheres containing corrosive
within the recommended tightening torque range gases, chemicals, sea water, or where there is di-
while holding the female thread side. rect contact with any of these.
If the tightening torque is insufficient, looseness or sealing fail- 2. Please contact SMC regarding use at power sta-
ure may occur. On the other hand, excess tightening torque can tions or in instrumentation applications.
result in damage to the threads. Furthermore, tightening without
holding the female thread side can result in damage due to the
excess force that is applied directly to the piping bracket. Caution
Recommended tightening torque range: N·m 1. When used in locations where the body of the prod-
Connection thread 1/8 1/4 3/8 1/2 uct is exposed to water, water vapor, dust, etc.,
Torque 3 to 5 8 to 12 15 to 20 20 to 25 there is a possibility that moisture or dust could en-
ter the body through the EXH (solenoid) ports,
thereby causing problems.
2. To prevent this, simply install tubing to each port,
using the fittings, and extend the tubing so that the
other end is in a location where no water splash,
etc., occurs. Make sure not to bend or block the I.D.
of the tubing as this will have a detrimental effect
on the pressure control.
3. Do not use in places subject to heavy vibration and/
or impact.
2. Avoid excessive torsional moment and bending mo-
4. The product should not be exposed to prolonged
ment other than those caused by the equipment’s
sunlight. Use a protective cover if this is unavoidable.
own weight, as failure to do so may result in damage.
Support external piping 5. Remove any sources of excessive heat.
separately. 6. In locations where there is contact with water, oil,
weld spatter, etc., take suitable protective measures.
Air Supply
Warning
1. Please contact SMC when using the product in an
application using a fluid other than compressed air.
3. Piping materials which lack flexibility, such as steel 2. Do not use compressed air that contains chemicals,
tube piping, are prone to being affected by excess synthetic oils that include organic solvents, salt,
moment loads and vibrations from the piping side. corrosive gases, etc., as doing so may result in a
Use flexible tubing in between to avoid such effects. malfunction.
Caution Caution
1. Preparation before piping 1. Install an air filter near this product on the supply side.
Before piping is connected, it should be thoroughly blown out Select an air filter with a filtration size of 5 μm or smaller.
with air (flushing) or washed to remove chips, cutting oil, and
other debris from inside the pipe. 2. Compressed air that contains a large amount of
If chips, sealing material, or other debris enter into this prod- drainage can cause the malfunction of this product
uct, the solenoid valve may buzz or the outlet pressure may and other pneumatic equipment. Therefore, take ap-
not be output properly. propriate measures to ensure air quality, such as pro-
2. Winding of sealant tape viding an aftercooler, air dryer, or water separator.
When screwing piping or fit- Winding 3. If excessive carbon dust is generated by the com-
tings into ports, ensure that direction
pressor, it may adhere to the inside of this product
chips from the pipe threads or
sealing material do not enter Ex and cause it to malfunction.
thr pos Sealant tape
the piping. Also, if sealant tape ea e a
d r pp
idg ro Refer to the “SMC Air Preparation System” for fur-
is used, leave 1.5 to 2 thread es x. 2
ridges exposed at the end of
ther details on compressed air quality.
the threads.
A 1224
ITV Series

Handling Handling
Caution Caution
1. Do not use a lubricator on the supply side of this prod- 13. For details on the handling of this product, refer to the
uct, as doing so may result in a malfunction. When lu- operation manual which is included with the product.
brication of terminal equipment is necessary, connect 14. This product does not have a shut-off valve function. If air
a lubricator on the output side of this equipment. pressure is supplied without electric power being applied,
2. If electric power is shut off while pressure is being output pressure may increase to the pressure equivalent
applied, pressure will be retained on the output side. of the supply pressure. Operate the system to shut off the
However, this output pressure is held only tempo- supply pressure when not operating the product.
rarily and is not guaranteed. If exhausting of this 15. The solenoid valves built into this product are consum-
pressure is desired, shut off the power after reduc- ables. Perform periodic maintenance in environments
ing the set pressure, and discharge the air using a where the solenoid valves are operated at a high frequency.
residual pressure exhaust valve, etc. The parts can be replaced with a solenoid valve assembly.
3. If the power to this product is cut off due to a power Please contact SMC for the part number.
failure, etc., when it is in a controlled state, output
16. In locations where the body is exposed to water, dust, etc.,
pressure will be retained temporarily. Handle care-
there is a possibility that moisture or dust could enter the
fully when operating with output pressure released
body through the solenoid valve EXH port. Mount a fitting
to the atmosphere, as air will continue to flow out.
and tube onto the solenoid valve EXH port and run the tube
4. If supply pressure to this product is interrupted while the to a location not exposed to moisture, dust, etc.
power is still on, the internal solenoid valve will continue
to operate and a humming noise may be generated. Design and Selection
Since the life of the product may be shortened, shut off
the power supply also when supply pressure is shut off. Caution
5. The setting side pressure cannot be completely released 1. Use the following UL approved products for DC power supply combinations.
from this product in the range below 0.005 MPa (or –1.3 kPa (1) Limited voltage current circuit in accordance with UL 508
for vacuum models). In cases where the pressure needs to A circuit in which power is supplied by the secondary coil of a
be reduced completely to 0 MPa, install a 3-port valve, etc., transformer that meets the following conditions
on the setting side to discharge the residual pressure. • Max. voltage (with no load): 30 Vrms (42.4 V peak) or less
6. This product is adjusted for each specification at the time of • Max. current:
(1) 8 A or less (including when short circuited)
shipment from the factory. Avoid careless disassembly or re- (2) limited by circuit protector (such as fuse) with the follow-
moval of parts, as failure to do so may result in a malfunction. ing ratings
No load voltage (V peak) Max. current rating [A]
7. The optional cable connector is a 4-wire type. When 0 to 20 [V] 5.0
the monitor output (analog output or switch output) 100
is not being used, keep it from touching the other Over 20 and 30 or less [V]
Peak voltage
wires as doing so may result in a malfunction.
(2) A circuit (class 2 circuit) with max. 30 Vrms (42.4 V peak) or less,
8. When connecting the cable to this product, turn the lock and a power supply consisting of a class 2 power supply unit con-
ring of the cable. If a portion other than the lock ring of firming to UL1310, or a class 2 transformer confirming to UL1585
the cable is turned, it may damage the connector on the 2. Operate these products only within the specified voltage.
body. Turn the lock ring by hand without using a tool.
Using voltages beyond the specified levels could result in faults or malfunctions.
9. The right angle cable does not rotate and is limited
3. Use 0 V as the baseline for the power supplied to
to only one entry direction. If the right angle cable is
the unit for output, control, and input.
rotated forcibly, the cable may be broken or dam-
+24 V +24 V
aged, or may damage the connector on the body.
Output power Output power
10. Take the following steps to avoid malfunction due to noise.
1) Remove power supply noise during operation by installing a 0V 0V
line filter, etc., in the AC power line. Control/input power Control/input power
2) For avoiding the influence of noise or static electricity, install +24 V –24 V
electric fields such as those of motors, power lines, etc. 4. Each product needs to be powered by one power supply unit.
3) Be sure to implement protective measures against load The wiring of this product has the same common between the GND for power and
surge for induction loads (solenoid valves, relays, etc.). the signals; there is a possibility that a wrong current occurs and prevents a proper
11. Due to the large volume of the output side, a loud ex- operation if one power supply unit controls multiple electro-pneumatic regulators.
haust noise will be produced when being used for the 5. Please contact SMC for the usage when the down-
purpose of a relief function. Therefore, install a silenc- stream side is released to atmosphere.
er (SMC AN20 or AN40 series) on the exhaust port This product is a pressure controller. The downstream side being released
(EXH port). The port sizes are Rc1/8, Rc1/4, and Rc1/2. to atmosphere makes the inlet valve full open, allowing a large amount of
12. Specifications on pages 1183 and 1216 are in case atmosphere flow into the body. Please contact SMC for the appropriate us-
of static environment. Pressure may fluctuate when age when you use the product under such condition since the product may
air is consumed at the output side. not meet the specification or the life of the product may be shortened.
1225 A
ITV Series

Wiring
Caution
Connect the cable to the connector on the body with IN/OUT communication connector Signal connector
the wiring arranged as shown below. Proceed Pin no. CC-Link DeviceNet ® PROFIBUS DP RS-232C 16 points preset
carefully, as incorrect wiring can result in damage. 1 SLD [–] DRAIN [–] No connection No connection Input signal 1 [Brown]
Further, use DC power with sufficient capacity and a 2 DB [White] V+ [Red] RxD/TxD-N [Green] TxD [White] Input signal 2 [White]
low ripple. 3 DG [Yellow] V– [Black] No connection RxD [Blue] Input signal 3 [Blue]
Brown
4 DA [Blue] CAN_H [White] RxD/TxD-P [Red] GND [Black] Input signal 4 [Black]
3: (Blue) 1: (Brown)
Blue
White
5 No connection CAN_L [Blue] No connection No connection Common [Gray]
4: (Black) 2: (White)
Black
∗1
Power supply connector
Pin no. CC-Link DeviceNet ® PROFIBUS DP RS-232C 16 points preset
Body 1 [Brown] Vcc Vcc Vcc Vcc Vcc
2 [White] FG Cannot connect FG No connection No connection
Current Signal Type 3 [Blue] GND GND GND GND GND
Voltage Signal Type Preset Input Type 4 [Black] No connection Cannot connect No connection FG Monitor output
1 Brown Power supply 1 Brown Power supply
*1 The cable is also available in a right angle type. (Communication cable: straight type only)
2 White Input signal 2 White Input signal 1
A right angle type connector is attached facing left (toward the SUP port). On
3 Blue GND (COMMON) 3 Blue GND (COMMON) communication models, the connector faces backward (toward the EXH port). Do not
4 Black Monitor output 4 Black Input signal 2 attempt to rotate, as the connector does not turn.
* The indicated wire colors are when a cable connector made by SMC is used.
IO-Link * Perform the wiring so that no electric potential difference occurs between GND of
the power supply and GND of the communication section. If any electric potential
1 Brown Power supply
difference occurs, this may cause the internal parts to burn out.
2 White No connection
3 Blue GND Knock-down connectors * Order separately.
Part no. Application
4 Black IO-Link communication data CC-Link DeviceNet ® PROFIBUS DP

compatibility compatibility compatibility
Terminal Terminal
Plug Socket Plug Socket plug Plug Socket plug
IN PCA- PCA- PCA- PCA- PCA- PCA- PCA- PCA-
1 4
2 1 4 1075526 1075527 1075528 1075529 1557675 1075530 1075531 1557727
3 Wiring diagrams
3 2
Communication connector Current signal type Voltage signal type
3 Power supply connector Brown
Brown
OUT
2 4 Blue
5 1 Blue
Vs Vs
CC-Link White White
5 3 1
4 Black Black
4 3 A Vin
2
1 2
Vs : Power supply 24 VDC Vs : Power supply 24 VDC
Communication connector
12 to 15 VDC 12 to 15 VDC
Power supply connector A : Input signal 4 to 20 mADC Vin: Input signal 0 to 5 VDC
PROFIBUS DP 0 to 20 mADC 0 to 10 VDC
5 4 1 4 points preset input type 16 points preset input type
2 3 4 3 Brown S1 Brown
1 2
Blue S2 White
Communication connector Power supply connector

Vs S1 White Vs S3 Blue
Signal connector COMMUNICATION Power
S2 S4
Black Black
DeviceNet , RS-232C, 16 points preset
®
Gray
Vs : Power supply 24 VDC
12 to 15 VDC
Vs : Power supply 24 VDC (No polarity)
(Negative common)
One of the preset pressures P1 through P4 is selected by the ON/OFF combination of S1 and S2.
S1 OFF ON OFF ON OFF ON OFF ON
S2 OFF OFF ON ON OFF OFF ON ON
S3 OFF OFF OFF OFF ON ··· ON ON ON
S4 OFF OFF OFF OFF OFF ON ON ON
Preset pressure P01 P02 P03 P04 P05 P14 P15 P16
* For safety reasons, it is recommended that one of the preset pressures be set to 0 MPa.
* Preset pressures are set based on the min. unit for output display.
MPa kgf/cm2 bar psi kPa
0.001 0.01 0.01 0.1 1
M Trademark
DeviceNet® is a registered trademark of ODVA, Inc. · Note that this is 1 psi for 130 psi types.
A 1226
ITV Series

Wiring CE/UKCA Marking
10-bit digital input type • ITV0000 Series
Wire color Signal name Ferrite core Recommended
Model
Pink-Black 2 Power supply (24 VDC) necessity power supply cable
Green-Black 2 Power supply (GND)
M8-4DSX3MG4 (Straight type)
Blue Signal common (No polarity) ITV0000-ll Unnecessary
P398000-501-2 (Right angle type)
Blue-Black 2 MSB 10 bit
Gray-Black 1 9 bit * Recommended power supply cable length is 3 m. (P398000-501-2 is 2 m.)
Orange-Black 1 8 bit If any other length is desired, please contact SMC.
Green-Black 1 7 bit
• ITV1000/2000/3000 Series
Pink-Black 1 6 bit
Ferrite core Recommended
Blue-Black 1 5 bit Model
necessity power supply cable
Gray 4 bit
P398020-500-3 (Straight type)
Orange 3 bit ITVll-ll —
Green 2 bit
Pink LSB 1 bit P398020-500-3 (Straight type)
Power
ITVll-52l P398020-501-3 (Right angle type)
* The wire color is shown for when an option cable is
used. ITVll-53l P398020-502-3 (Straight type)
Signal
Monitor output wiring diagrams ITVll-60l — INI-398-0-59 (Straight type)
Analog output: Voltage type Analog output: Current type P398020-500-3 (Straight type)
*1, *2 Power
(Sink type) P398020-501-3 (Right angle type)
Brown Brown ITVll-CCl
PCA-1567720 (Socket type)
Communication
Blue Blue PCA-1567717 (Plug type)
White Monitor output current White P398020-500-3 (Straight type)
Monitor output voltage *1, *3 Unnecessary Power
Black Black ITVll-DEl
Communication
PCA-1557646 (Plug type)
Switch output: NPN type Switch output: PNP type
Brown P398020-500-3 (Straight type)
Brown
*1, *3 Power
Blue Blue ITVll-PRl
∗1 Communication
Load White ∗1 White PCA-1557691 (Plug type)
Load
Black Black P398020-500-3 (Straight type)
Power
ITVll-RCl
*1 When 80 mADC or more is applied, detecting device for overcurrent P398020-502-3 (Straight type)
Communication
starts activating and then emits an error signal. (Error number “5”) P398020-503-3 (Right angle type)
P398020-500-3 (Straight type)
ITVmm-ILm —
Set Pressure Range
*1 Even when the "with cable connector" type is selected, the communication
The set pressure range, by unit of standard measured connector is not included. Refer to the Web Catalog [M8/M12 Connector]
pressure, is shown in the table below. for the details of the communication cable.
*2 For CC-Link compatible products, a dedicated Bus adapter is included with the product.
*3 For DeviceNet ® compatible products, and PROFIBUS DP compatible
Set pressure range, by unit of standard measured pressure
products, a T-branch connector is not included with the product.
Set pressure range * Recommended power supply cable length is 3 m. If any other length is
Unit
ITVn01n ITVn03n ITVn05n ITV209n desired, please contact SMC.
MPa 0.005 to 0.1 0.005 to 0.5 0.005 to 0.9 —
kgf/cm2 0.05 to 1 0.05 to 5 0.05 to 9 — Return of Product
bar 0.05 to 1 0.05 to 5 0.05 to 9 —
psi 0.7 to 15 0.7 to 70 0.7 to 130 — Warning
kPa 5 to 100 5 to 500 5 to 900 –1.3 to –80
If the product to be returned is contaminated or is possibly contaminated
with substances that are harmful to humans, for safety reasons, please
contact SMC beforehand and then employ a specialist cleaning company
to decontaminate the product. After the decontamination prescribed
above has been carried out, submit a Product Return Request Sheet or
the Detoxification/Decontamination Certificate to SMC and await SMC’s
approval and further instructions before attempting to return the item.
Please refer to the International Chemical Safety Cards (ICSC) for a list of
harmful substances.
If you have any further questions, please don’t hesitate to contact your
SMC sales representative.
1227 A
ITV Series
ITV009m/209m Series Precautions

Handling Handling
Caution Caution
1. Connect the vacuum pump to the port, which is labeled “VAC.” 12. The optional cable connector is a 4-wire type. When
2. Pressure adjustment changes from “atmospheric the monitor output (analog output, switch output) is
pressure to vacuum pressure” when the input sig- not being used, keep it from touching the other
nal is increased, and from “vacuum pressure to at- wires, as doing so may result in a malfunction.
mospheric pressure” when the input signal is de- 13. Use caution that the right angle cable does not ro-
creased. tate and is limited to only one entry direction.
3. When adjusting the vacuum pressure, be careful not to 14. Take the following steps to avoid malfunction due
block the atmospheric pressure inlet port labeled “ATM.” to noise.
4. Since this product is designed exclusively for use 1) Remove power supply noise during operation by installing a
with negative pressure, be careful not to apply posi- line filter, etc., in the AC power line.
tive pressure in error. 2) For avoiding the influence of noise or static electricity, install
5. In cases where the vacuum pump being used has a electric fields such as those of motors, power lines, etc.
relatively small capacity, or the piping has a small 3) Be sure to implement protective measures against load
inside diameter, etc., large variations in the set surge for induction loads (solenoid valves, relays, etc.).
pressure (the range of pressure variation when
changing from no flow to flow state) may appear. In 15. Refer to the operation manual included with the
this situation, the vacuum pump or the piping product for details on its handling.
should be changed. In cases where it is not practi-
cal to change the vacuum pump, install a capacity
tank (volume depending on the operating condi- Return of Product
tions) on the VAC side.
6. The vacuum pressure response time after a change Warning
in the input signal is influenced by the internal vol-
If the product to be returned is contaminated or is pos-
ume on the setting side (including piping). Since the
sibly contaminated with substances that are harmful to
capacity of the vacuum pump also influences the
humans, for safety reasons, please contact SMC be-
response time, give careful consideration to these
forehand and then employ a specialist cleaning com-
points before operation.
pany to decontaminate the product. After the decon-
7. If the electric power is shut off when in a control tamination prescribed above has been carried out,
state, the pressure on the setting side will go into a submit a Product Return Request Sheet or the
holding condition. However, this setting side pres- Detoxification/Decontamination Certificate to SMC and
sure will be held only temporarily and is not guaran- await SMC’s approval and further instructions before
teed. In addition, when atmospheric pressure is de- attempting to return the item.
sired, shut off the power after reducing the set pres- Please refer to the International Chemical Safety Cards
sure, and then introduce atmospheric pressure by (ICSC) for a list of harmful substances.
using a vacuum release valve, etc. If you have any further questions, please don’t hesitate
8. If the power for this product is cut off by a power to contact your SMC sales representative.
failure, etc., when it is in a controlled state, the set-
ting side pressure will be held temporarily. Further,
if operated without sealing the setting side so that
atmospheric air is sucked in, handle with care as air
will continue to be sucked in.
9. If the VAC side pressure to this product is interrupt-
ed while the power is still on, the internal solenoid
valve will continue to operate and may cause a
humming noise. Since this may shorten the life of
the product, be sure to shut off the power when the
VAC side pressure is shut off.
10. The setting side pressure cannot be completely re-
leased from this product in the range below –1.3 kPa.
In cases where the pressure needs to be reduced
completely to 0 kPa, install a 3-port valve, etc., on the
setting side to discharge the residual pressure.
11. This product is adjusted for each specification at the
factory before shipment. Avoid careless disassem-
bly or removal of parts, as this can result in failure.
A 1228

Itv SMC

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Electro-Pneumatic Regulator/ Electronic Vacuum Regulator

For the stepless control of air pressure in

Due to the built-in

Compact and lightweight

ITV0000 Series p. 1174 ITV1000 Series p. 1182 ITV009m Series p. 1208

Max. flow rate Max. flow rate

ITV2000 Series p. 1182

Max. flow rate Max. flow rate

Compact Electro-Pneumatic Regulator ITV0000 Series p. 1174 IP65 equivalent

Compact Vacuum Regulator ITV009 m Series p. 1208

Compact Improved space

15 mm saving and weight

M 2 types of cable connectors ¡Linearity: ±1% F.S. or less

fittings ITV (Electro-pneumatic regulator)

Electro-Pneumatic Regulator ITV1000/2000/3000 Series p. 1182 IP65

Electronic Vacuum Regulator ITV209m Series p. 1215

Serial communication specification

ITV1000 ITV2000 ITV3000 ITV2090 RS-232C specification

¡Sensitivity: 0.2% F.S. or less ¡Application examples

¡Hysteresis: 0.5% F.S. or less Solenoid valves OUT.

Straight type Right angle type Controller

IO-Link Compatible Devices:

Electronic Vacuum Regulator ITV2090-IL p. 1215

Configuration File (IODD File*1)

IO-Link Compatible Devices:

The IO-Link master and device can be Application

Implement diagnostic bits in the

ITV0000 Series ITV001m 0.001 to 0.1 MPa Current type: 4 to 20 mADC

ITV1000 Series ITV101m 0.005 to 0.1 MPa

ITV103m 0.005 to 0.5 MPa 1/8, 1/4 1182

ITV303m 0.005 to 0.5 MPa 1/4, 3/8, 1/2 1182

ITV305m 0.005 to 0.9 MPa

ITV009m Series Current type: 4 to 20 mADC

−1 to −100 kPa (Sink type) Metric size: ø4

ITV209m Series Current type: 4 to 20 mADC

Electronic Vacuum Regulators

Accessories (Option) p. 1221

How to Order Manifold Assembly (Example)

two digits. the D side.

Model ITV001m ITV003m ITV005m

Flat bracket assembly (including 2 mounting screws) Straight type

L-bracket assembly (including 2 mounting screws) Right angle type

Tightening torque when assembling is 0.3 N·m.

Working Principle Diagram

Power supply and error

Power supply Output signal

q Air supply solenoid valve w Exhaust solenoid valve

Linearity, Hysteresis Repeatability With 50% of signal input

Output deviation factor [% F.S.]

Linearity, Hysteresis Repeatability With 50% of signal input

Output deviation factor [% F.S.]

Linearity, Hysteresis Repeatability With 50% of signal input

Output deviation factor [% F.S.]

(ø4, ø5/32") EXHc (ø4, ø5/32")

Cable connector (4 cores)

Single unit for manifold

*1 When using under the conditions equivalent to IP65,

8.5 14 15 8.5 12.5

Pressure range Made to order

For communication cables, use the parts listed below

Communication Specifications (CC, DE, PR, RC, IL)

Modular Products and Accessory Combinations