More Precision.

capaNCDT
Capacitive sensors for displacement and position measurement

MICRO-EPSILON
www.micro-epsilon.com
Modifications reserved / Y9761309-A021070DGO
2 Cylindrical sensors with female connector

6f7
Ø8f7 Ø10f7 Ø10f7
3 6f7

12
12
12
11

15

21.00 -0.2
connector side connector side
connector side
connector side

connector side

Sensor Type CS005 CS02 CS05 CS08 CS1

Article number 6610083 6610051 6610053 6610080 6610054

Measuring range 0.05 mm 0.2 mm 0.5 mm 0.8 mm 1 mm

Linearity 1) ±0.2 % FSO ±0.2 % FSO ±0.05 FSO ±0.05 FSO ±0.05 FSO

Resolution 1) (static, 2Hz) 0.0375 nm 0.15 nm 0.375 nm 0.6 nm 0.75 nm

Resolution 1)
(dynamic, 8.5kHz) 1 nm 4 nm 10 nm 16 nm 20 nm

Temperature stability zero 4) 60 nm/°C 60 nm/°C 60 nm/°C 60 nm/°C 170 nm/°C

Temperature stability sensitivity -10 ppm/°C -10 ppm/°C -10 ppm/°C -10 ppm/°C -32 ppm/°C

Temperature range (operation) -50 … +200°C -50 … +200°C -50 … +200°C -50 … +200°C -50 … +200°C

Temperature range (storage) -50 … +200°C -50 … +200°C -50 … +200°C -50 … +200°C -50 … +200°C

Air humidity 2) 0 … 95% r.H. 0 … 95% r.H. 0 … 95% r.H. 0 … 95% r.H. 0 … 95% r.H.

Sensor dimensions Ø6 × 12 mm Ø6 × 12 mm Ø8 × 12 mm Ø10 × 15 mm Ø10 × 21 mm

Active measuring area Ø1.3 mm Ø2.3 mm Ø3.9 mm Ø4.9 mm Ø5.7

Guard ring width 0.8 mm 1 mm 1.4 mm 1.6 mm 1.5 mm

Minimum target diameter Ø3 mm Ø5 mm Ø7 mm Ø9 mm Ø9 mm

Weight (incl. cable and connector) 2g 2g 4g 7g 8g

Material (housing) NiFe 3) (magn.) NiFe (magn.) NiFe (magn.) NiFe (magn.) 1.4404 3) (non-magn.)

Connector type type C type C type C type C type B

Mounting radial clamp radial clamp radial clamp radial clamp radial clamp

DT 6019 -    
DT 6100 -    
Sensors suitable for controller DT 6300/6310     
DT 6350 -   - 
DT 6500     
FSO = Full Scale Output
1)
With controller DT6500
2)
Non condensing
3)
Titanium version available
4)
Sensor mounted in the mid of clamping area

Mounting cylindrical sensors

All sensors can be installed as either freestanding or flush mounted.
Fastening is carried out using a clamp or collet.

Mounting with grub screw (plastic) Mounting with collet Connector type C Connector type C/90
16
Ø5.4
Ø6

8
13.1

Ø6
16.9
Ø4

8.6 Ø5.4
13.7
17.5
3 Cylindrical sensors with female connector

Ø10f7 Ø20h7 Ø30h7

Ø40h7 Ø60h7

24-0.2
16.5
24-0.2
24-0.2

16.5
16.5
24.00 -0,2
20.00 -0.2
Ø20h7
Ø20h7
Ø20h7 connector side
connector side
connector side

connector side connector side

Sensor Type CS1HP CS2 CS3 CS5 CS10

Article number 6610074 6610052 6610055 6610056 6610057

Measuring range 1 mm 2 mm 3 mm 5 mm 10 mm

Linearity 1)
±0.05 % FSO ±0.05 % FSO ±0.05 % FSO ±0.05 % FSO ±0.05 % FSO

Resolution 1) (static, 2Hz) 0.75 nm 1.5 nm 2.25 nm 3.75 nm 7.5 nm

Resolution 1) (dynamic, 8.5kHz) 20 nm 40 nm 60 nm 100 nm 200 nm

Temperature stability zero 4) 60 nm/°C 170 nm/°C 170 nm/°C 170 nm/°C 170 nm/°C

Temperature stability sensitivity -10 ppm/°C -32 ppm/°C -32 ppm/°C -32 ppm/°C -32 ppm/°C

Temperature range (operation) -50 … +200°C -50 … +200°C -50 … +200°C -50 … +200°C -50 … +200°C

Temperature range (storage) -50 … +200°C -50 … +200°C -50 … +200°C -50 … +200°C -50 … +200°C

Air humidity 2) 0 … 95% r.H. 0 … 95% r.H. 0 … 95% r.H. 0 … 95% r.H. 0 … 95% r.H.

Sensor dimensions Ø10 × 20 mm Ø20 × 24 mm Ø30 × 24 mm Ø40 × 24 mm Ø60 × 24 mm

Active measuring area Ø5.7 mm Ø7.9 mm Ø9.8 mm Ø12.6 mm Ø17.8 mm

Guard ring width 1.5 mm 4.4 mm 8 mm 11.6 mm 19 mm

Minimum target diameter Ø9 mm Ø17 mm Ø27 mm Ø37 mm Ø57 mm

Weight (incl. cable and connector) 8g 50 g 70 g 95 g 180 g

Material (housing) NiFe (magn.) 1.4404 (non-magn.) 1.4404 (non-magn.) 1.4404 (non-magn.) 1.4404 3) (non-magn.)
3) 3) 3)

Connector type type B type B type B type B type B

Mounting radial clamp radial clamp radial clamp radial clamp radial clamp

DT 6019     
DT 6100     
Sensors suitable for controller DT 6300/6310     
DT 6350     
DT 6500     
FSO = Full Scale Output
1)
With controller DT6500
2)
Non condensing
3)
Titanium version available
4)
Sensor mounted in the mid of clamping area

Sensors
The sensors are designed as guard ring capacitors. They are connected
to the signal conditioning electronics with a triaxial cable. The sensor
cable is connected to the sensor using a high quality connector. All stan-
Connector type B Connector type B/90 dard sensors can be used within a maximum deviation of 0.3% without
25 recalibration. Individually matched special sensors are produced on re-
quest.
Ø9.5
Ø7

20.5

Measuring range expansion / reduction

30.5

27
37
The capaNCDT controller (except the series DT6019) can optionally be
configured so that the standard measuring ranges of the sensors are re-
Ø7 duced by half or expanded by the factor of 2. The reduction increases the
Ø10 accuracy while the measuring range expansion reduces the accuracy.
4 Flat sensors with integrated cable

4 4
0.1

R6
0.1

R6
4 4
0.1 0.1

R4

R4
3.5

3.5

11
6.5

6.5

11
5 4.5

5 4.5
4

4
1.75

1.75

2.25
5.5 7.5

2.25
5.5 7.5

Sensor Type CSH02FL-CRm1,4 CSH05FL-CRm1,4 CSH1FL-CRm1,4 CSH1,2FL-CRm1,4

Article number 6610075 6610085 6610072 6610077

Measuring range 0.2 mm 0.5 mm 1 mm 1.2 mm

Linearity 1) ±0.05 % FSO ±0.05 % FSO ±0.05 % FSO ±0.05 % FSO

Resolution 1) (static, 2Hz) 0.15 nm 0.38 nm 0.75 nm 0.9 nm

Resolution 1)
(dynamic. 8.5kHz) 4 nm 10 nm 20 nm 24 nm

Temperature stability zero 4) -37.6 / 2.4 nm/°C -37.6 / 2.4 nm/°C -37.6 / 2.4 nm/°C -37.6 / 2.4 nm/°C

Temperature stability sensitivity -12 ppm/°C -12 ppm/°C -12 ppm/°C -12 ppm/°C

Temperature range (operation) -50 … +200°C -50 … +200°C -50 … +200°C -50 … +200°C

Temperature range (storage) -50 … +200°C -50 … +200°C -50 … +200°C -50 … +200°C

Air humidity 2) 0 … 95% r.H. 0 … 95% r.H 0 … 95% r.H 0 … 95% r.H

Sensor dimensions 10.5 × 8 × 4 mm 10.5 × 8 × 4 mm 17 × 12 × 4 mm 17 × 12 × 4 mm

Active measuring area Ø2.6 mm Ø4.1 mm Ø5.7 mm Ø6.3 mm

Guard ring width Ø1.9 mm Ø1.2 mm Ø2.4 mm Ø2.1 mm

Minimum target diameter Ø7 mm Ø7 mm Ø11 mm Ø11 mm

Weight (incl. cable and connector) 28 g 28 g 30 g 30 g

Material (housing) 1.4104 (magn.) 1.4104 (magn.) 1.4104 (magn.) 1.4104 (magn.)

Integrated cable Ø2.1mm×1.4m radial Ø2.1mm×1.4m radial Ø2.1mm×1.4m radial Ø2.1mm×1.4m radial

Mounting 2x thread M2 2x thread M2 2x screw M2 DIN 84A 2x screw M2 DIN 84A

DT 6019 - - - -
DT 6100    
Sensors suitable for controller 5) DT 6300/6310    
DT 6350    
DT 6500    
FSO = Full Scale Output
1)
With controller DT6500
2)
Non condensing
3)
Without cable, bend protection and crimp
4)
Sensor mounted in the mid of clamping area
5)
CSH Sensors are matched to controller with standard cable length 1m

Mounting flat sensors

The flat sensors are attached using a threaded bore for M2 (for the sensors
CSH02FL and CSH05FL) or using a through-hole for M2 bolts. The sen-
sors can be bolted from above or below.

Screw connection from above Screw connection from Connector for integrated cables
on the underside below on the sensor top side
cable length 1.4 m sensor
Ø9.5
Ø7

Ø2.2

27
37
5 Cylindrical sensors with integrated cable

Ø8g6 clamp Ø8g6 clamp Ø12g6 clamp Ø12g6 clamp

area area area area

10
10

10

10
14
14

14

14
Ø7.5 Ø7.5

33
33

33

33
Ø11.5 Ø11.5

Sensor Type CSH02-CAm1,4 CSH05-CAm1,4 CSH1-CAm1,4 CSH1,2-CAm1,4

Article number 6610086 6610087 6610088 6610089

Measuring range 0.2 mm 0.5 mm 1 mm 1.2 mm

Linearity 1) ±0.05 % FSO ±0.05 % FSO ±0.05 % FSO ±0.05 % FSO

Resolution 1) (static, 2Hz) 0.15 nm 0.38 nm 0.75 nm 0.9 nm

Resolution 1)
(dynamic. 8.5kHz) 4 nm 10 nm 20 nm 24 nm

Temperature stability zero 4) -19 nm/°C -19 nm/°C -19 nm/°C -19 nm/°C

Temperature stability sensitivity -12 ppm/°C -12 ppm/°C -12 ppm/°C -12 ppm/°C

Temperature range (operation) -50 … +200°C -50 … +200°C -50 … +200°C -50 … +200°C

Temperature range (storage) -50 … +200°C -50 … +200°C -50 … +200°C -50 … +200°C

Air humidity 2) 0 … 95% r.H. 0 … 95% r.H. 0 … 95% r.H. 0 … 95% r.H.

Sensor dimensions Ø8 × 14 mm Ø8 × 14 mm Ø12 × 14 mm Ø12 × 14 mm

Active measuring area Ø2.6 mm Ø4.1 mm Ø5.7 mm Ø6.3 mm

Guard ring width 1.9 mm 1.2 mm 2.4 mm 2.1 mm

Minimum target diameter Ø7 mm Ø7 mm Ø11 mm Ø11 mm

Weight (incl. cable and connector) 30 g 30 g 33 g 33 g

Material (housing) 1.4104 (magn.) 1.4104 (magn.) 1.4104 (magn.) 1.4104 (magn.)

Integrated cable Ø2.1mm×1.4m axial Ø2.1mm×1.4m axial Ø2.1mm×1.4m axial Ø2.1mm×1.4m axial

Mounting radial clamp radial clamp radial clamp radial clamp

DT 6019 - - - -
DT 6100    
Sensors suitable for controller 5) DT 6300/6310    
DT 6350    
DT 6500    
FSO = Full Scale Output
1)
With controller DT6500
2)
Non condensing
3)
Without cable, bend protection and crimp
4)
Sensor mounted 2mm behind front surface
5)
CSH Sensors are matched to controller with standard cable length 1m

Mounting cylindrical sensors

All sensors can be installed as both freestanding and flush units. Important!
Fastening is carried out by using a clamp or collet. All Micro-Epsilon sensors are short circuit
proof. Unlike other systems the pre-ampli-
fier will not get damaged, if the front face
Mounting with grub screw (plastic) Mounting with collet
of the sensor gets shorted by touching
the conductive target
6 Cable

Sensor cable
Sensor and pre-amplifier electronics are connected using a special, double-
shielded sensor cable. Cable lengths of 2m, 3m or 4m are optionally available
but require special tuning of the pre-amplifier.

Connector type C: cable for sensors

CS005 / CS02 / CS05 / CS08
cable length 2x straight connectors 1x straight / 1x 90° connector
standard 1m CC1C CC1C/90
2m CC2C CC2C/90
3m CC3C CC3C/90
4m CC4C CC4C/90

Sensor cable CCxC Sensor cable CCxC/90

Standard length 1m (optional 2m/3m/4m)) Standard length 1m (optional 2m/3m/4m)

Ø5.4
Ø6

Ø4
Ø9.5
Ø9.5

Ø7
Ø7

8
13.1
16.9
Ø3.2
Ø3.2

27 8.6 27
37 13.7 37

17.5 Ø5.4
Ø6
16

Connector type B: cable for sensors

CS1 / CS1HP / CS2 / CS3 / CS5 / CS10
cable length 2x straight connectors 1x straight / 1x 90° connector

standard 1m CC1B CC1B/90

2m CC2B CC2B/90
3m CC3B CC3B/90
4m CC4B CC4B/90

Sensor cable CCxB Sensor cable CCxB/90

Standard length 1m (optional 2m/3m/4m) Standard length 1m (optional 2m/3m/4m)

25
Ø9.5
Ø9.5
Ø9.5

Ø7
Ø7

Ø7

20.5
Ø3.2
Ø3.2

27 27
30.5

27
37 37
37

Ø7
Ø10

Vacuum feed through WSH Vacuum feed through UHV

34
2 25
M10x0.75
WS12

M9x0.5
Ø8.8

Ø14

ø9.4
9

max. 17 ø13.50h6 WS11

1.75

Max. leak rate 1x10e-7 mbar · l s-1 Max. leak rate 1x10e-9 mbar · l s-1
Compatible with connector type B Compatible with connector type B