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Supermini Introduction
Supermini Introduction
Supermini Introduction
Yoshiyuki Kataoka
SBU WDX Group
Rigaku Industrial Corporation
Content
• 1. Features of Supermini
• 2. Comparison of WDX and EDX
• 3. Applications
WD Benchtop X-ray Spectrometer
Supermini
1. Features of Supermini
Features of Supermini
• High power WDX benchtop x-ray spectrometer
Shorten analysis time and improve sensitivity with 200W x-ray tube
• Applicable to ore analysis
Possible to analyze complicated sample matrix using WD method
• Easy Installation with benchtop type
Cooling water and liquid nitrogen not required
• Coped with WEEE/RoHS & ELV directives
Possible to analyze trace heavy elements
• Efficient analysis
12 position auto sample changer
Wide applications from environmental analysis
to production control analysis
1. Features of Supermini
Rb-Ka
Supermini 50kV-4mA(200W)
Primini 40kV-1.25mA(50W)
0.0
19 21 23 25 27 29
2-theta[deg]
1. Features of Supermini
Intensity Comparison between
Supermini and Primini
Effect of 50kV
10.0
Intensity ratio(Supermini/Primini)
Sn
8.0
6.0 Mo
F P Cu Pb
4.0
2.0
K lines L linies
0.0
5 15 25 35 45 55 65 75 85
A tom ic num ber
Intensity increased by 4 to 6 times
Same precision can be obtained with ¼ of measuring
time compared to Primini
1. Features of Supermini
Cd-Ka
Detector
Cd-Ka
Sample
Pd-Kb1
Pd-Kb Compton
Intensity
Intensity
Crystal
X-ray tube
EZ Scan
I P1 I P1
P3
P2 P2
P3
B
B1 B2 B3
2-theta(E/keV) E/keV
Ba-LB1
Intensity
P rim ini
Supermini
ED X
Ti-KB1
Ba-LB3
Ba-LB2
Ba-LG1
Ba-LG2
S-Kb1
Supermini
S-Ka
EDX
X-ray intensity
Pd-L a
Cl-Ka
2.0 2.2 2.4 2.6 2.8
keV Sample:S 5%,Cl 300ppm
•Difficult to analyze trace Cl due to the tailing of S peak in EDX by worse resolution
•Peak of Cl line of 300ppm sample can be clearly seen in WDX.
•WDX gives sufficient precision for 0.x% of Cl.
2. Comparison of WDX and EDX
Supermini
Na-Ka
EDX
Intensity
F-K a
F: 5.73 mass%
Na:2.40 mass%
Applications
• 1. Cement
• 2. Environmental analysis
(WEEE/RoHS &ELV directives etc)
• 3. SQX analysis examples
3.1 Applications – Analysis of Cement
Analysis of Cement
• Powder method
• Fusion method
3.1 Applications – Analysis of Cement
Analysis of Cement
(Fusion bead method)
Samples:NIST1180a,1181,1186,1187,1188,636
Dilution ratio: Sample:Li2B4O7 = 1:3
Intensity (a.u.)
Intensity (a.u.)
1.2
1.4
1.0
1.0
Uncorrected Corrected
3.1 Applications – Analysis of Cement
Analysis of Cement
(Fusion bead method)
F2O3 SO3 MgO
2.0
3.0
Intensity (a.u.)
Intensity (a.u.)
Intensity (a.u.)
2.0
2.0
1.0
1.0
1.0
Analysis of Cement
(Fusion bead method)
K2O TiO2 Na2O
2.0
2.0
0.25
Intensity (a.u.)
Intensity (a.u.)
Intensity (a.u.)
1.0 1.0 0.20
Accuracy:0.089mass% 0.15
Accuracy:0.011mass% Accuracy:0.022mass%
0.0 0.0
0.0 0.5 1.0 1.5 0.0 0.2 0.4 0.0 0.1 0.2
Analysis of Cement
(Fusion bead method)
SrO P2O5 Mn3O4
2.0
2.0
Intensity (a.u.)
Intensity (a.u.)
2.0
Intensity (a.u.)
1.0
1.0
1.0
Accuracy:0.0020mass% Accuracy:0.0048mass%
Accuracy:0.011mass%
0.0 0.0 0.0
0.00 0.05 0.10 0.15 0.0 0.1 0.2 0.3 0.0 0.1 0.2 0.3 0.4
Intensity (a.u.)
Intensity (a.u.)
2.0
Intensity (a.u.)
2.0
1.0
1.0
1.0
Accuracy:0.12mass%
Accuracy:0.27mass% Accuracy:0.33mass%
0.0 0.0 0 0.0
0 50 10 20 30 0 20 40 60 80
Standard
100 value (mass%) Standard value (mass%) Standard value (mass%)
1.0 1.0
Accuracy:0.024mass% Accuracy:0.11mass%
0.0 0.0
0 10 20 30 0.0 2.0 4.0 6.0
Standard value (mass%) Standard value (mass%)
3.2 Applications – Analysis of Cement
Intensity (a.u.)
1.0
1.0
Accuracy:0.062mass% Accuracy:0.03mass%
0.0 0.0
0.0 2.0 4.0 6.0 0.0 0.5 1.0 1.5
Standard value (mass%) Standard value (mass%)
3.2 Applications – Analysis of Cement
Environmental Analysis
• Hazardous element analysis coping
with WEEE/RoHS & ELV directives
– Analyzable elements for each type of samples
– Qualitative analysis of polymers
– Quantitative analysis of polymers( calibration and precision)
– Pb analysis in bismuth bronze
In XRF, total Cr for Cr6+ and Br for PBB and PBDE are measured.
3.2 Applications – Environmental Analysis
Au plated samples
In EDX
Analyzing elements
• Tail of Au-L5 interferes Pb-Lb1 so
Spectrometer Cd Pb Hg Cr that Pb can not analyzed.
WDX • Tail of Au-La interferes to Hg-La.
P-ED X X
General ED X X X
Note: P-ED – polarized beam ED
3.2 Applications – Environmental Analysis
Pb Spectrum in Polymers
Contained Flame Retardant with Br
Pb-Lb1
1.0
Br-Kb1
Br-Ka
[a.u.]
Pb-LA
Br -10mass%
X-ray Intensity
Pb-Lb1 peak is
separated in
Supermini.
Pb -1000ppm
- 400ppm
- 200ppm
- 100ppm
0.0
25 27 29 31 33
2q (deg)
3.2 Applications – Environmental Analysis
Cr Spectrum in Polymers
Contained Flame Retardant with Br
Cr-Ka Br -10mass%
X-ray Intensity(a.u.)
Cr 250ppm
Cr 100ppm
67 68 69 70 71 72
2θ[deg]
In EDX, giant peak of high content element at higher
energy side, background of lower energy side increase
drastically and causes deterioration of detection limit.
3.2 Applications – Environmental Analysis
Intensity (a.u.)
Intensity (a.u.)
1.0 1.0
Pb Pb Br Br
Intensity (a.u.)
Intensity (a.u.)
By Sumika chemical Analysis
Service Ltd.
6 standards
正確度 Accuracy
1.4ppm 1.4ppm 正確度 Accuracy
1.6ppm 1.6ppm
0.0 0.0
0 500 1000 0 500 1000
ppm ppm
3.2 Applications – Environmental Analysis
Sample Element Cr Cd Hg Pb Br
Std value 94 51 94 87 400
Polyethylene Analyzed 92.2 51.8 98.9 86.3 396.5
S.D. 0.8 3.3 1.2 1.3 0.5
Std value 100 51 100 110 600
PVC Analyzed 100.8 51.2 102.8 109.5 600.2
S.D. 3.8 3.6 2.7 2.0 3.2
Supermini
0.5
EDX
0.4
-Ni-Kb1
-Zn-Ka
0.5
Intensity( arb. Unit)
-Se-Ka
-Bi-La
0.3
0.2
Accuracy:40ppm
-Pb-La
-Zn-K b1
0.0
LLD :13ppm
-Bi-LL
0.1
-Bi-LN
(Time 300sec)
0
8.0 9.0 10.0 11.0 12.0
0 0.1 0.2 0.3 0.4 0.5
keV Pb standrad value mass%
Intensity ratio
Intensity ratio
Intensity ratio
Accuracy:3.5 ppm Accuracy:5.0 ppm Accuracy:2.1 ppm
0 400 800 0 400 800 0 40 80
Standard value (ppm) Standard value (ppm) Standard value (ppm)
Pb Se Cr
Intensity ratio
Intensity ratio
Intensity ratio
SQX Analysis
- What is SQX(Scan Quant X)? -
• SQX Program (Semi-quantitative analysis)
– Use intensities of identified element in qual. analysis
– Obtain analyzed result by FP method
– Applicable to both bulk and film
• Overlapping correction using theoretical intensity
– Automatic overlapping correction for both bulk and film
• Combination with fixed angle meas. method
– Fixed angle meas. of specified elements after qual. scan
– Less statistical error
– Peak and BG positions are determined from qual. scan data
3.3 Applications – SQX Analysis
Pb-Lb1
As-Ka,Pb-La
As-Ka and Pb-La lines
overlap each other
As-Kb1
Intensity
Unit:mass%
Intensity
Std
SQX result
value
Si 0.42 0.43
Mn 1.73 1.75
P 0.031 0.037
70
Ni 11.38 11.40
40 50 60
P-Ka Mo-Ll
2-theta angle (deg) Cr 16.56 16.60
Mo 2.13 2.18
Mo-Ll overlaps to P-Ka
Cu 0.2 0.16
Intensity
Co 0.18 0.14
86 88 90 92
2-theta angle (deg)
3.3 Applications – SQX Analysis
Si- KA
Na- KA
Na2O 3.41 3.73
Cl- KA
S - KA
Mg- KA
Al- KA
0.8 MgO 0.69 0.77
P - KA
Al2O3 14.22 15.42
K - KA
X線強度 (kcps)
0.6
Intensity
0.4
Fe- KA- 2nd
Al- SKA3
K2O 4.01 4.16
0.2
CaO 2.13 2.34
0.0 TiO2 0.25 0.23
44 46 49 52 64 67 74 77 88 91 108 110 142 145 37 40 46 48 73 76
Ca- KA K - KA Cl- KA S - KA P - KA Si- KA Al- KA Mg- KA Na- KA F - KA (deg) Fe2O3 2.05 1.92
x1.0
5.0 Minor Std value Analy. value
Pd- KB1- Compton
Pd- KA- Compton
Cr 18.6 24
X線強度 (kcps)
Rb- KB1 Y - KA
3.0 Zn 38.8 35
Fe- KB1
Ba- KA
Sr- KA
Rb- KA
Zr- KB1
Rb 180 183
Intensity
Y - KB1
KA
2.0
Sr 185 188
Pb- LB1
Nb-
Pb- LA
Y 31.6 36
Ga- KA
Mn- KA
Zn- KA
Ba- LB1
Ba- LB2
Ti- KB1
Ti- KA
1.0
Ba- LA
Cr- KA
Zr 121 106
0.0
10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 85 90
Nb 12 7
Heavy 2θ 角度(deg) Ba 458 486
Pb 27 31
- Syenite- SQX
Result
Std value
Co 0.0011 0.00086
Zn 0.0272 0.0248
Ga 0.0027 0.0029
Rb 0.0226 0.0217
Sample : SY-2 sample:Li2B4O7= 1:2 Sr 0.0300 0.0271
Zr 0.0216 0.028
Fused bead sample
Ba 0.0417 0.046
Ce 0.0220 0.0175
Specification of Supermini
Specifications of
Supermini
(Comparison with Primini)
Specification of Supermini
Software Options
Type of options Description
SQX analysis Consists of SQX software, sensitivity library registration, drift
correction library samples
Matching library *1 It automatically searches a similar standard in SQX analysis and
calculates analyzed composition using the selected standard so that
accurate analyzed result can be obtained using this option.
Material judgment *1 It searches matched standards to SQX analysis result from the
standard libraries such as ASTM and output matched standards.
Quant theoretical overlapping Overlapping correction can be done without measuring interfering
correction line in quant. FP method. This method is especially effective for thin
film FP method.
Fusion bead correction When analyzing powder samples using fusion bead method in
empirical calibration method, ignition loss and dilution correction
can be done.
Quant scattering FP method*2 In the analysis of heavy elements in mineral ores such as copper
concentrates, this option generates theoretical alphas for Compton
ratio method using FP method, accurate analysis can be done.
Hazardous element analyzed This option generates report of hazardous elements for
result reporting software *1 *2 WEEE/RoHS/ELV directives using SQX analysis result. It includes
library registration of hazardous element (Cd) and template
applications.
*1: selectable when SQX option is selected
*2: Options only for Supermini
Applications of Supermini,Primini and ZSX Primus series
Applications of Supermini,
Primini and ZSX Primus Series
Applications of Supermini,Primini and ZSX Primus series
Applications
Primini Supermini ZSXPrimus Series
5
4.5 Primini
4 Supermini
Ratio of LLD to Supermini
ZSX PrimusII
3.5
3 LLD in Supermini
2.5 improves by two
2 times compared to
1.5 Primini.
F Al Ti Cu Mo Sn
1
0.5 LLD ZSX PrimusII
0 improves five times
5 15 25 35 45 55 more.
Element
Applications of Supermini,Primini and ZSX Primus series