[Eoveronmentah SEM Cesem) | Serpe ctemer is in
J %8e0us environment
Wy vacuum —~ To move penircts mm 4 strmght um over A longe distance
To prevent beam induced chemvcol —reeuctron
For ciawu emisson & fbr Some detecloss <& lanscy
To provide clton smbece
(ow presse /fow vacuum <— The Pressure
inside garple. chamber vs
Merde Semple dambenr
Umted. Cfo averd collision o® primumy & & ges)
TE 993 pwasme rot etticenk + retethicrent dp awd ad
Specral driqn 42 seperate Specimen chanoew with mun Weh-vacuum chamber
—~
With pressure - limit’ Aperinre
deizon gun & mar pathway of
Small ovPle a prevent
laleaye of Go electron beam to objeukve lens
eater en aes
two or more PLA @ ome included
Genclety remove any gas leakage
Ge Adteyendra
Mieghem ® PAM
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Ubon -high vacuum Zom—relo protect tia, :
Same from aiteck by gk trlecudy.
Ta PLAS» Ai Perentrnd
* Minima seattern, of opmatms tn Ph ~
PLAY papi x
E> punep
Mam afterence between SEM & ELEM
ot) precence of AFherenkvally Pumped Zonex
@) Ability PF SE delefors f operate in a gaa
Ataditionah detectors Come qucivy in A gaseous environment
SE detetor @— alia on ges sonmizeckion.
SEs ejected accelerate word Hu moderate elactare Felf
of deeuor. Gilision between 34 ond goa meecules Liberate
more Pree ceckrons that ampiify tea signal Cavalanche ef fect
Positive ons CProm olson) peubrodize Fae Chengin effet
Annular anode. Primary beam
Backscattered
electron
°
Positive ion
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A
Secondary
election
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Gas motecule