Reliable measurements

for any material

ZW-7000/5000 Series Confocal Fiber Displacement Sensor

• Measure shiny objects with an inclination of ±25°

• ±0.5 μm or less linearity for various materials
• Sampling rate as fast as 20 μs
 Confocal Fiber Displacement Sensor

Beyond laser displacement sensors

A non-contact optical probe, better than a laser

White light
confocal principle

Measures while in motion

Detects spectral differences

(colors) using a white LED

* Conceptual illustration

White light
confocal
displacement * This graph
sensor represents a result of
measurement under
specific conditions.
Before final
Traditional Errors when measuring between different materials installation, test the
laser Error when measuring a slope sensor required for
displacement Error when measuring the application to
Error when measuring a rough surface validate the desired
sensor Impossible to measure a rough surface Impossible to measure measurements are
narrow gaps a curved surface obtained.

2 2 Profile obtained using different objects made of various materials and shapes while in motion
Measures from any mounting position
(vertical or horizontal, facing up/down or sideways)
Three new advantages to meet the
needs of innovative manufacturing
Accurate measurement P. 4
· Accurate measurements of inclined or curved surfaces
· Reliable measurements of different materials
· Stable measurements of smooth or rough surfaces

Side-by-side mounting P. 6
· Small size allows for multiple sensors to be mounted side-by-side
· Sensor’s light weight greatly reduces settling time when in motion
· No need to change the sensor head direction even if
the part being tested changes direction

Rapid set-up P. 8
· No need to change the sensor when changing material
· No laser safety measures required
· No need for EMC or thermal countermeasures;
sensor head has no electronic components
· DLL files provide quick integration into machine HMI

Lineup expansion
ZW-5000
SEMI/FPD industry
Minimum spot diameter
of 10 μm or less
Fulfills the demand of the SEMI/FPD
industry for more precise profile reproduction
in detecting the position of minute wafer street
width, the alignment of laminating thin liquid
crystal films.

ZW-7000 ZW-5000
Installation into a large machine
Longer fiber cables
10, 20 and 30 m cables now available.

Up to 30 m
3
 Confocal Fiber Displacement Sensor

Measure accurately

For all quality inspections,

from components to finished products

Strict quality control, demands for appearance inspection and

production speed are constantly increasing. To meet these demands,
stable quality inspection measurements during movement, without
compromising manufacturing speed, is required. Harnessing the
benefits of the white light confocal principle, the ZW-7000/5000 Series
can provide stable measurements for different materials (glass, metal,
plastic, etc.) and shapes (round, flat, uneven and more).

Profile measurement
Small laser spot for accurate measurement
When measuring a profile variation with a traditional laser displacement sensor, reflection from multiple surfaces could result in an imprecise edge
detection profile. The ZW-5000, with a minimum spot diameter of 9 μm, eliminates multiple surface reflections. The result is a sharp profile, which
leads to improved position detection.
ZW-5000
Traditional laser displacement sensor White light confocal displacement sensor
Laser beam Large spot diameter ZW-5000 Small spot diameter
Minimum
spot diameter

9 μm
Measurement

Measurement
value

value

4
 Traditional laser displacement sensor White light confocal displacement sensor ZW-7000 ZW-5000
Inclined or curved surfaces 100 100

Displacement (μm)

Displacement (μm)
80 Actual value 80 Actual value
Omron's, unique white light confocal 60 Measurement value 60 Measurement value Angle
40 40
displacement sensor provides higher resolution 20 20 characteristic
0 0
measurements of angled, curved and shiny
-20
-40
-60
-20
-40
-60
±25°
for shiny surfaces
surfaces than traditional laser displacement -80 -80
-100 -100
sensors. -25 -15 -5 5 15 25 -25 -15 -5 5 15 25 *1
P.13 Angle characteristic Angle (°) Angle (°)
(ZW-7010)

Traditional laser displacement sensor White light confocal displacement sensor

Different materials Mirror, installation for regular reflection Mirror ZW-7000 ZW-5000
SUS, installation for regular reflection SUS
With traditional laser displacement sensors, White ceramic, installation for diffuse reflection White ceramic
retuning is required when the sensor head direction 5
4
5
4
is changed to accommodate a different material. 3 3
±0.5
Error (μm)

Error (μm)
2 2
1 1 μm or less
Our white light confocal displacement sensor can 0 0
-1 -1
linearity for
measure different materials while moving, without -2 -2 different materials
-3 -3
needing to retune the sensor, change the sensor -4 -4 *1
-5 -5
head or adjust the installation direction. -0.5 -0.3 -0.1 0.1 0.3 0.5 -0.5 -0.3 -0.1 0.1 0.3 0.5
Height (mm) Height (mm)
(ZW-7010)

Traditional laser displacement sensor

Flatness of rough surfaces *2 Installation direction 90°
30 Installation direction 0°
Our white light confocal displacement sensors Actual value
Displacement (μm)

20
provide accurate flatness measurement by tracing 10
an object. Measurement is not affected by excessive 0
ZW-7000
-10
reflection, sensor head direction or the grain of the 0° 90° -20
material, which are difficult to track with a traditional -30
laser displacement sensor.
0 1000 2000 3000 4000 Deviation from
Travel distance (μm)
actual value
P.12 Stable measurements of rough surfaces
White light confocal displacement sensor
Micron
accuracy
30
Displacement (μm)

Installation direction 90°

20 Installation direction 0°
10 Actual value
0
-10
0° 90° -20
-30
0 1000 2000 3000 4000
Travel distance (μm)
(ZW-7020)

High-speed sampling for accurate shape measurements

Using traditional laser sensors, the measurement accuracy for a moving target can be achieved by increasing the averaging times.
ZW-7000 acquires a sharp profile by a single sampling as fast as 20 μs without averaging.

Traditional laser displacement sensor White light confocal displacement sensor ZW-7000
(Averaged) (Not averaged)

Object profile (Black line)

Minimum
sampling period
Height

Height

20 μs
Measurement value (Red line)
Travel distance Travel distance

*1. Typical value of the ZW-S7010 sensor head

*2. Objects with machining marks or grain patterns
Note. All measurement graphs represent typical examples. Measurement may be affected by the shape or material of an object. 5
Before final installation, preliminary testing must be done to validate expected performance.
 Confocal Fiber Displacement Sensor

Measure more product

Increase manufacturing speed

Robots and stages are used for assembly and inspection to increase productivity.
Manufacturers require measuring devices that are simple to integrate into small-sized
machines and easy to maneuver at high speeds.

Laser displacement
sensor

30 mm
76.25 mm Approx.
180 g

30 mm 30 mm

Increase throughput: Multiple sensor heads

Space restrictions prevent side-by-side installation

of many traditional laser displacement sensors.
Compact ZW-7000/5000 sensor heads can be installed
side-by-side to obtain multiple measurements
simultaneously, reducing measurement time.

Traditional laser displacement sensor White light confocal displacement sensor

Restrictions on installation limit Side-by-side installation reduces
improvement in cycle time measurement time

Measurement
cycle time reduced

by 60 % or more*
* Performance comparison with
previous Omron products

Reduce settling time

When power cylinders are used, the White light confocal displacement sensor
decreased weight of the sensor head
Degree of oscillation

reduces oscillation, resulting in faster

measurements.
Move

Traditional laser displacement sensor Time

Stop

6
 Save time and money:
no need to rotate the sensor
A traditional laser displacement sensor measures
the height of an object based on the position of
the spot on the receiver. The machine requires
an extra step to rotate the sensor according to
the object shape or movement direction. Our
white light confocal displacement sensor can
measure from the same installation position
while moving in any direction.
Traditional laser displacement sensor

Flexible fiber cable

The controller connects to the sensor head through
a 3 mm diameter flexible fiber cable. An extension fiber
cable can be used to extend the distance to up
to 7 m, and the cable can be installed in a cable carrier.
White light confocal displacement sensor

Measurement
R cycle time reduced

by up to 25 %*
* Calculated when an object with an irregular surface was measured in
both vertical and horizontal directions

P.13 Direction-free
Omron's bending test condition 3,000,000 bends to a 20 mm bending radius

Extension fiber cable lineup expansion

A new extension fiber cable, up to 30 m long, can be used to extend the fiber P.19 Type/standard price cable
distance up to 32 m, supporting flexible wiring within a large machine.

Standard fiber cable Extension fiber cable

0.3/2 m Up to 30 m

Connecting adapter
Sensor head Controller

7
 Confocal Fiber Displacement Sensor

Rapid set-up

Easy to integrate

The ZW-7000/5000 uses the white light confocal principle to significantly reduce set-up time.

Easy device selection

There is no need to select different sensor heads for different objects, which saves time when
purchasing and designing. This reduces set-up work and inventory costs.
Traditional laser displacement sensor White light confocal displacement sensor

te
tra
bs
Su
Same sensor head for as
s
different objects Gl
Sensor head for or ic
irr ra
m
coarse surfaces M
ce
Sensor head for e
mirror surfaces hit
Sensor head for W
fine surfaces S
* Common to NPN/PNP type controller SU

No thermal design or EMC measures required

Electronic or magnetic noise will not affect measurement values. Thermal fluctuations due to the sensor's operation
are also minimized.
Traditional laser displacement sensor White light confocal displacement sensor Traditional laser displacement sensor White light confocal displacement sensor

Electronic Fiber
parts cable Change in temperature Change in temperature
after 1.5 hours after 1.5 hours
No of operation of operation
electronic
parts
+2ʝ +0ʝ
Electromagnetic noise is emitted from
the sensor and cable No noise is emitted
Measurement values are affected by Measurement remains stable without
ambient noise being affected by ambient noise
Ambient Measurement

Ambient Measurement
value

value
noise

noise

Time Time
Measures must be taken against No measures against noise are required
noise generated by electronic parts

Reduced work for installation and tuning of sensor heads

The white light confocal principle allows stable measurements without fine tuning.
Traditional laser displacement sensor White light confocal displacement sensor

Easy
Fine angle
installation
adjustment
without fine
required
tuning

8
Multiple sensor set-up
Sysmac Studio allows you to program all connected
devices via EtherCAT. Copying program data to
integrate several sensors, or programming activity
between sensors, is quick and easy.

Sysmac Studio Sensor 1

Increased efficiency
by copying settings

Sensor 2

Efficient setting of measurement

conditions for many sensors

DLL Quick integration into machine HMI No laser safety measures required
DLL files easily display A white LED light source eliminates the need to implement
ZW-7000/5000 setting laser safety measures and additional training.
esults.
screens and measurement results.

When a laser displacement

sensor is used, a shield The use of
around the machine for safety eye protection
tectionn
is required
quired
is required and workers must
be trained for safe operation.
· Settings and measurement
surement conditions refe
reference
f rence
Provided · Acquiring measurement
rement values
DLL* · Acquiring light received waveforms
· Logging control

* If you register as a member after purchasing the product, you can

download DLL free of charge. Refer to the member registration sheet that
is enclosed with the product for details.

Further benefits of white light confocal

Traditional laser displacement sensor White light confocal displacement sensor
No Discrepancy in the Measurement Point
With traditional laser displacement sensors, the measurement position and Measurement position varies with the height No discrepancy in the measurement position

spot size vary with the height. This means there are times when the position
cannot be measured with high resolution due to warping and inclination.
With the white light confocal displacement sensor used in the ZW-7000/5000
Series, the measurement point remains the same at any position in the
measuring range so that precise measurements can always be made.

Measurement in narrow area and by the wall

Failure to measure due to The reflected light is not obstructed by the wall.
When the traditional laser displacement sensor measures the inside of a obstruction of the reflected light by the wall.
narrow tube or the height of a small depression, the wall often obstructs the
reflected light, and the orientation of the sensor and workpiece must be
adjusted many times. The ZW-7000/5000 Series using the white light
confocal displacement sensor can measure the points in narrow spaces or
small objects, without changing its installation orientation, because the
emitted light and reflected light are positioned along the same axis.

9
 Confocal Fiber Displacement Sensor

Technical explanation

New technologies

Key components have been improved to achieve high speed, precision

measurements and machine compatibility.

Photoconductivity Patent Pending

Precise Core Array Fiber

High-speed Specially designed fiber transmits LED light
Precision efficiently for precise measurement.
Compatibility

Small size

Compact Design
High-speed Solves installation issues caused
Precision by larger laser displacement
Compatibility sensor heads.

Low aberration

Advanced OCFL Module

High-speed
The OCFL*1 module’s multi-lens
Precision
structure reduces aberrations,
Compatibility
allowing for high-resolution
measurements without
compromising its compact design.
*1. OCFL : Omron Chromatic Focus Lens

25 times faster

High-Speed Processor
High-speed Increase processing speed for
Precision precision measurements, from LED
Compatibility emission through sensing and
processing, to data logging.

* Conceptual illustration

10
 High-contrast display

White 11-Segment Display

High-speed The high-contrast, white, 11-segment display improves
Precision visibility and usability.
Compatibility

Exceptional brightness

Ultra-Power White LED

High-speed The new LED provides rapid responses
Precision and measurements of low-reflective
Compatibility objects. Additionally, extended LED
life reduces downtime.

* Conceptual illustration

Excellent resolution

Advanced Spectrograph
High-speed The Spectrograph 7000 converts color wavelength into
Precision distance, offering increased waveform resolution and enables
Compatibility precise measurements.

Upgraded memory
Mega Logging
High-speed Log, process and store up to 2,000,000 values.
Precision * Measurement values, emitted light amounts,
Compatibility
or received light amounts can be logged.

Enhanced sensitivity
High-Speed CMOS
High-speed The CMOS is optimized to measure
Precision any object precisely and reliably.
Compatibility

* Conceptual illustration

11
 Confocal Fiber Displacement Sensor

Technical explanation

Stable, accurate measurement while moving

The new white light confocal principle provides stable measurements, even in applications where robots and
stages move rapidly. Our unique design allows continuous measurement of diffused, curved, inclined, translucent
and mirrored surfaces, including narrow gaps, while the head or the object is in motion.

New white light confocal principle

The emitted white light is focused at different
points for each color (wavelength). This principle
measures height based on the color of the
returned light. This coaxial illumination provides
Pinhole White LED precise measurements of the returned light
wavelengths from the object through the same
optical path.

Received reflected light

Spectroscope
Receiver Pinhole Received light waveform

White
light

Stable measurements of rough surfaces

Only the light reflected from the measurement point enters Laser triangulation principle
the pinhole, even if excessive light is reflected from the object
during movement. In typical laser triangulation, multiple light reflections may be
received simultaneously.

Received light waveform

Pinhole

White e
lightt
Laser diode Light received
OCFL module Far Reflected from
The waveform is not distorted, light measurement
which means only Receiver Near point
the color of the measurement
point is received.
Lens
Multiple Lens
reflections on Height detected by sensor
rough surface
P.5 F
Flatness of rough surfaces

12
Angle characteristic
The light traveling through the optical path is not widely diffused at the Laser triangulation principle
workpiece. The wavelength (position) can be obtained by receiving
a portion of the light, even if the reflected light amount is reduced. This
ensures accurate height measurements.

Curved surface Curved surface

Measures by Received light waveform
receiving
a portion of
the light
No light received

Emitted light Reflected light Stably receives light

Because the emitter is fixed at an angle relative to the workpiece,

the ability to measure a steep angle of inclination is lost.
P.5 Sloped or curved surfaces

Inclined surface
Measures by Inclined surface
receiving
a portion of Received light waveform
the light

Emitted light Reflected light Unstable

Stably receives light

Even if the light can be received, the waveform may be distorted

due to lens aberration.

Rotation independent

Laser triangulation principle

The direction of movement does not affect workpiece measurement
results, even in narrow gaps.
Depending on the installation direction, the sensor cannot
measure the object because the reflected light is blocked.

P.7 No need to rotate a sensor

13
 Confocal Fiber Displacement Sensor

Applications

Synchronize motion and measurement

The ZW-7000/5000 series links motion and measurement to provide high-precision results.

Timing chart
Previous EtherCAT communications
Moving measurement linked to a stage EtherCATT cycle
Differences between XY
Linking encoder positions to sensor measurement values Acquires the immediately
Encoder preceding values coordinates (position) and Z
allows accurate shape measurement without being input (XY) coordinate (height) occur due
affected by conveyor acceleration/deceleration. to fluctuations of EtherCAT
Sensor
measurement (Z) cycles of 125 ns to several μs
Different timing between XY and Z
Linking glass
height and
XY coordinates New EtherCAT communication
Refreshed every cycle
EtherCAT cycle
cle
The XY coordinates (position)
Encoder and Z coordinate (height) can
input (XY) be acquired at the same time
Sensor by refreshing every cycle.
measurement (Z)
Same timing

Previous synchronous measurements

Multiple sensor synchronization Sync signal via
Refreshed once

EtherCAT
A
Synchronization signals
For thickness or flatness measurements, heights are must be input periodically
measured simultaneously. Sensor 1 due to accumulated timing
measurement
differences.
Sensor 2
measurement
Different timing
Thickness
measurements of
sheets for lithium Sensor 1 New synchronous measurements
batteries Refreshed every cycle
EtherCAT cycle
No differences occur because
Sensor 1
measurement timing is refreshed every cycle.

Sensor 2
Sensor 2 measurement
Same timing

Previous trigger measurement

Precise triggering
ON
When the external trigger Trigger
OFF
point occurs, the timing Different
measurement
task is consistent for precise Height Sensor
positions
positional measurement. measurements of measurement Positional repeatability is compromised.
small electronic parts

New trigger measurements

ON
Trigger
OFF
Always same
Sensor
measurement The same position can always be measured
at regular intervals after trigger inputs.

14
 System configurations
Synchronous measurements using EtherCAT

Sysmac Studio Function Blocks

Omron offers Function Blocks to make
programming for system link applications
Encoder NJ/NX easier*.
Encoder Machine Automation Controller

Synchronous measurements using triggers instead of EtherCAT are possible.

Function Block Examples

Thickness
Encoder Counter
Level Difference
Encoder
Peak/ Valley
Warp
Flatness
Average
Distortion

The Sysmac Library is a collection of

NJ/NX
Machine Automation Controller
software functional components that can
be used in programs for the NJ/NX
Machine Automation Controllers. The
Sysmac Library is available to download
from the Omron website omron247.com.
Install the Sysmac Library for use in
Sysmac Studio.

https://industrial.omron.us/en/products/sysmac-studio#registration__downloads

* This functionality is available on the firmware version 2.10

or later.
Trigger input sensor The latest firmware for the controller is available free
of charge. Refer to the registration sheet that is enclosed
with the product for details.

15
 Confocal Fiber Displacement Sensor

Applications

High-speed/high-accuracy

SEMI/FPD Smartphone
(component process)

ZW-5000
Abrasion profile Rolled glass curvature Casing warpage Case flatness

ZW-5000
Wafer height Chip gap width Cover glass flatness Camera module grooves
and profile

ZW-5000
Chip mounter Solder on substrate profile Battery sheet thickness Battery flatness
Z-axis adjust

ZW-5000 ZW-5000
Silicon profile Film lamination position LED potting shape Connector pin coplanarity

16
Smartphone Automotive parts Pharmaceuticals
(assembly process)

Assembled part heights Hole depth on metal Clutch profile Lens thickness

Case width Motor core thickness Motor eccentricity Liquid level within
small-diameter vessels

Level difference Surface deflection Transmission part flatness Glass surface curvature
between buttons and case of rotary parts

Logo height difference Profile of sealing materials ECU board assembly Relay operation inspection
inspection

17
 Confocal Fiber Displacement Sensor

ZW-7000/5000 Series
Reliable measurements for
any material and surface types
• Measuring shiny objects with an inclination of ±25°
• ±0.5 μm or less linearity for various materials
• Sampling rate as fast as 20 μs
• Small spot diameter of 10μm or less
Note: Angle characteristic, linearity, sampling period and
spot diameter given in the cover differ among models.
Please ask OMRON sales representative for details.

System Configuration
EtherCAT connections

Basic Configuration
Controller
ZW-7000T/
5000T Series Other
EtherCAT
Sensor Head Slaves
S70□0/
S50□0

EtherCAT Cable EtherCAT Cable EtherCAT Cable

Calibration ROM (RJ45/RJ45) (RJ45/RJ45) (Select the cable that matches
(included with Sensor Head) the Slave's connector.)

EtherCAT Cable
(RJ45/RJ45)

EtherCAT Master Setting Software

Ethernet *2
/USB
Sysmac Studio
Machine Automation Controller
Standard Edition
NJ/NX/NY series
SYSMAC-SE20□□

Analog, EtherNet/IP, Ethernet, RS-232C and Parallel connections

Basic Configuration
Controller
ZW-7000T/
5000T Series

Sensor Head
S70□0/
S50□0

Calibration ROM
(included with Sensor Head)

Analog, RS-232C and Parallel

Switching
Hubs
EtherNet/IPTM, Ethernet

Control PLC Setting Software

* Obtain a commercially available Ethernet cable satisfying

the following requirements:
• Category 5e or more, 30 m or less
• RJ45 connector (8-pin modular jack)
Sysmac Studio • For direct connection: Select cross cable.
Measurement Sensor Edition • For connection through an industrial switching hub:
SYSMAC-ME00□L Select straight cable.

18
Order Information
ZW-7000
Sensor Head
Appearance Measuring range Spot diameter Static resolution * Cable length Model
0 mm 9.5 mm
10 mm 2m ZW-S7010 2M
10.5 mm
50 μm dia. 0.25 μm
0.3 m ZW-S7010 0.3M
Measuring range 10±0.5 mm

0 mm 19 mm
20 mm 2m ZW-S7020 2M
21 mm
70 μm dia. 0.25 μm
0.3 m ZW-S7020 0.3M
Measuring range 20±1mm

0 mm 28 mm
30 mm 2m ZW-S7030 2M
32 mm
100 μm dia. 0.25 μm
0.3 m ZW-S7030 0.3M
Measuring range 30±2mm

* Values when the controller ZW-7000T is used.

Controller with EtherCAT
Appearance Power supply Output type Model

24VDC NPN/PNP ZW-7000T

Cable
Appearance Item Cable length Model
2m ZW-XF7002R
5m ZW-XF7005R
Extension Fiber Cable (from Sensor Head to
10 m ZW-XF7010R
Controller), (Fiber Adapter ZW-XFCM is included)
20 m ZW-XF7020R
30 m ZW-XF7030R

Fiber Adapter (used between Sensor Head pre-

± ZW-XFCM
wired cable and Extension Fiber Cable)

ZW-5000
Sensor Head
Appearance Measuring range Spot diameter Static resolution * Cable length Model
0mm 9.5mm
10mm 2m ZW-S5010 2M
10.5mm
9 μm dia. 0.25 μm
0.3 m ZW-S5010 0.3M
Measuring range 10±0.5 mm

0mm 19mm
20mm 2m ZW-S5020 2M
21mm
13 μm dia. 0.25 μm
0.3 m ZW-S5020 0.3M
Measuring range 20±1mm

0mm 28mm
30mm 2m ZW-S5030 2M
32mm
18 μm dia. 0.25 μm
0.3 m ZW-S5030 0.3M
Measuring range 30±2mm

* Values when the controller ZW-5000T is used.

Controller with EtherCAT
Appearance Power supply Output type Model

24VDC NPN/PNP ZW-5000 T

Cable
Appearance Item Cable length Model
2m ZW-XF5002R
5m ZW-XF5005R
Extension Fiber Cable (from Sensor Head to Controller), (Fiber
10 m ZW-XF5010R
Adapter ZW-XFC2 is included)
20 m ZW-XF5020R
30 m ZW-XF5030R

Fiber Adapter (used between Sensor Head pre-wired cable and

- ZW-XFC2
Extension Fiber Cable)

19
 ZW-7000/5000 Series

●Common cables
Appearance Item Cable length Model

Parallel caable for ZW-7000T/5000T

2m ZW-XCP2E
32-pole (included with Controller ZW-7000T/5000T)

RS-232C Cable for personal computer 2m ZW-XRS2

RS-232C Cable for PLC/programmable terminal 2m ZW-XPT2

●Recommended EtherCAT Communications Cables

Use Straight STP (shielded twisted-pair) cable of category 5 or higher with double shielding (braiding and aluminum foil
tape) for EtherCAT.
●Cable with Connectors
Item Appearance Recommended manufacturer Cable length(m) *1 Model
Standard type 0.3 XS6W-6LSZH8SS30CM-Y
Cable with Connectors on Both Ends 0.5 XS6W-6LSZH8SS50CM-Y
(RJ45/RJ45) 1 XS6W-6LSZH8SS100CM-Y
Wire Gauge and Number of Pairs: OMRON
AWG26, 4-pair Cable 2 XS6W-6LSZH8SS200CM-Y
Cable Sheath material: LSZH *2 3 XS6W-6LSZH8SS300CM-Y
Cable color: Yellow *3 5 XS6W-6LSZH8SS500CM-Y
0.3 XS5W-T421-AMD-K
Rugged type 0.5 XS5W-T421-BMD-K
Cable with Connectors on Both Ends 1 XS5W-T421-CMD-K
(RJ45/RJ45) OMRON
Wire Gauge and Number of Pairs: 2 XS5W-T421-DMD-K
AWG22, 2-pair Cable 5 XS5W-T421-GMD-K
10 XS5W-T421-JMD-K
0.3 XS5W-T421-AMC-K
Rugged type 0.5 XS5W-T421-BMC-K
Cable with Connectors on Both Ends 1 XS5W-T421-CMC-K
(M12 Straight/RJ45) OMRON
Wire Gauge and Number of Pairs: 2 XS5W-T421-DMC-K
AWG22, 2-pair Cable 5 XS5W-T421-GMC-K
10 XS5W-T421-JMC-K
0.3 XS5W-T422-AMC-K
Rugged type 0.5 XS5W-T422-BMC-K
Cable with Connectors on Both Ends 1 XS5W-T422-CMC-K
(M12 Right-angle/RJ45) OMRON
Wire Gauge and Number of Pairs: 2 XS5W-T422-DMC-K
AWG22, 2-pair Cable 5 XS5W-T422-GMC-K
10 XS5W-T422-JMC-K
Note: For details, refer to Cat.No.G019.
 Standard type cables length 0.2, 0.3, 0.5, 1, 1.5, 2, 3, 5, 7.5, 10, 15 and 20m are available.
Rugged type cables length 0.3, 0.5, 1, 2, 3, 5, 10 and 15m are available.
 The lineup features Low Smoke Zero Halogen cables for in-cabinet use and PUR cables for out-of-cabinet use.
 Cables colors are available in blue, yellow, or Green

●Cables / Connectors
Wire Gauge and Number of Pairs: AWG24, 4-pair Cable
Item Appearance Recommended manufacturer Model
⎯ Hitachi Metals, Ltd. NETSTAR-C5E SAB 0.5 × 4P *
Cables ⎯ Kuramo Electric Co. KETH-SB *
⎯ SWCC Showa Cable Systems Co. FAE-5004 *
RJ45 Connectors ⎯ Panduit Corporation MPS588-C *
We recommend to use above cable and connector together.
Wire Gauge and Number of Pairs: AWG22, 2-pair Cable
Item Appearance Recommended manufacturer Model
⎯ Kuramo Electric Co. KETH-PSB-OMR *
Cables
⎯ JMACS Japan Co.,Ltd. PNET/B *

RJ45 Assembly Connector OMRON XS6G-T421-1 *

Note: Connect both ends of cable shielded wires to the connector hoods.
We recommend to use above cable and connector together.

20
 ZW-7000/5000 Series

●Industrial switching hubs for Ethernet

Appearance Number of ports Failure detection Current consumption Model

3 None 0.22A W4S1-03B

None W4S1-05B
5 0.22A
Supported W4S1-05C
Note: Industrial switching hubs are cannot be used for EtherCAT.

●EtherCAT junction slaves

Appearance Number of ports Power supply voltage Current consumption Model

3 0.08A GX-JC03
20.4 to 28.8 VDC
(24 VDC -15 to 20%)
6 0.17A GX-JC06

Note: 1. Please do not connect EtherCAT junction slave with OMRON position control unit, Model CJ1W-NC□81/□82.
2. EtherCAT junction slaves cannot be used for EtherNet/IPTM and Ethernet.
●Automation Software Sysmac Studio
Please purchase a DVD and required number of licenses the first time you purchase the Sysmac Studio. DVDs and
licenses are available individually.
Each model of licenses does not include DVD.

Item Specifications Model Standards

Number of licenses Media
The Sysmac Studio is the software that provides an integrated environment for setting, ⎯
programming, debugging and maintenance of machine automation controllers including the DVD SYSMAC-SE200D ⎯
(Media only)
NJ/NX-series CPU Units, NY-series Industrial PC, EtherCat Slave, and the HMI.
Sysmac Studio
Sysmac Studio runs on the following OS.
Standard Edition
Windows 7 (32-bit/64-bit version)/Windows 8 (32-bit/64-bit version)/Windows 8.1 (32-bit/64-
Ver.1□□ *2 ⎯
bit version)/Windows 10(32-bit/64-bit version) 1 license*1 SYSMAC-SE201L ⎯
This software provides functions of the Measurement Sensor Edition. Refer to Sysmac
Catalog (P072) for details such as supported models and functions.
Sysmac Studio Measurement Sensor Edition is a limited license that provides selected
Sysmac Studio 1 license ⎯ SYSMAC-ME001L ⎯
functions required for ZW-series
Measurement
Displacement Sensor settings.
Sensor Edition
Because this product is a license only, you need the Sysmac Standard Edition DVD media 3 license ⎯ SYSMAC-ME003L ⎯
Ver.1.□□
to install it.
 Multiple licenses are available for the Sysmac Studio (3, 10, 30, or 50 licenses).
 ZW-series is supported by Sysmac Studio version 1.18 or higher.
●Fiber Cleaner
Applicable Model
Item Recommended manufacturer Model Contacts
ZW-7000 ZW-5000
Fiber Connector Cleaner *1 OMRON ZW-XCL Yes Yes OMRON
NEOCLEAN-M NTT Advanced ATC-NE-M1 Yes No
*2
OPTIPOP R1 Technology Corporation ATC-RE-01 No Yes (Sensor Head only)
 Place orders in units of boxes (contacting 10 units).
 Contacts
Japan: NTT Advanced Technology Corporation TEL: 0422-47-7888
China: GUANGZHOU LI CHENG OPTOELECTRONIC CO.,LTD. TEL: 020-8165 0508
Hong Kong: ComStar Communications Ltd. TEL: +852 2536 9737
Taiwan: Global Science Instruments Co., Ltd. TEL: +886-2-8913-2737 Ext. 33
India: Aishwarya Telecom Ltd. TEL: +91 40 2753 1324
Singapore: Masstron Pte Ltd TEL: (65) 6763 0309
Malaysia: Masstron Communication Solutions Sdn Bhd TEL: (603) 8061 0309
Thailand: Masstron (Thailand) Co.,Ltd TEL: (66-2) 319-9375/6
Vietnam: Masstron Pte Ltd (Singapore) TEL: (65) 6763 0309
Germany: AMS Technologies AG TEL: +49 (0)89 895 77 0
France: AMS Technologies S.A.R.L. TEL: +33 (0)1 64 86 46 00
Italy: AMS Technologies S.r.l. TEL: +39 0331 596 693
Spain: AMS Technologies S.L. TEL: +34 93 380 84 20
Netherlands: AMS Technologies AG (Germany) TEL: +49 (0)89 895 77 0
USA: AFL Telecommunications TEL: +1 (800) 235-3423

21
 ZW-7000/5000 Series
Specifications
●Sensor Head
Specifications
Item
ZW-S7010 ZW-S7020 ZW-S7030 ZW-S5010 ZW-S5020 ZW-S5030
Sensor controller ZW-7000T ZW-5000T
Measurement center
10 mm 20 mm 30 mm 10 mm 20 mm 30 mm
distance
Measuring range ±0.5 mm *1 ±1 mm*1 ±2 mm*1 ±0.5 mm ±1 mm ±2 mm
Static resolution *2 0.25 μm
Linearity *3 ±0.45 μm ±0.9 μm ±2.0 μm ±0.45 μm ±0.9 μm ±2.0 μm
Spot diameter (Total
50 μm dia. 70 μm dia. 100 μm dia. 9 μm dia. 13 μm dia. 18 μm dia.
measurent range) *4
Measurement cycle *5 20 μs to 400 μs 80 μs to 1600 μs
Operating ambient
Illumination on object surface max.30000: (incandescent light)
illumination
Operation: 0 to 50°C, Storage: -15 to 60°C
Ambient temperature range
(No freezing and condensation)
Ambient humidity range Operation/storage: 35 or 85%RH (No condensation)
Degree of protection IP40 (IEC60529)
Vibration resistance
10 to 150 Hz (half amplitude 0.35 mm), 80 mins in each of X/Y/Z directions
(destructive)
Shock resistance
150 m/s2, 6 direction, 3 times each (up/down, left/right, forward/backward)
(destructive)
Temperature characteristic
0.6 μm/°C 1.1 μm/°C 1.8 μm/°C 0.6 μm/°C 1.1 μm/°C 1.8 μm/°C
*6
LED Safety Risk Group 3 (IEC62471)
Chassis: aluminum die cast
Material Fiber cable sheath: PVC
Calibration ROM: PC
Fiber cable length 0.3 m, 2 m (flex-resistant cable)
Fiber cable minimum bend
20 mm
radius
Insulation resistance
Between case and all terminals: 20 MΩ (by 250 VDC)
(Calibration ROM)
Dielectric strength
Between case and all terminals: 1000 VAC, 50/60 Hz, 1 min
(Calibration ROM)
Fiber cable length 0.3m Approx. 170g
Weight
Fiber cable length 2m Approx. 180g
Calibration ROM fixing screws (M2) Calibration ROM fixing screws (M2)
Fiber protection cap Fiber protection cap
Accessories Strap × 2 Strap × 1
Instruction Manual Instruction Manual
Precautions Precautions
 The measurement range is higher 28 μs than measurement cycle.
 Capacity value when OMRON standard mirror surface target is measured at the measurement center distance as the average of 16,384 times
The value when the controller ZW-7000T/5000T is connected
 Material setting for the OMRON standard mirror surface target: Error from an ideal straight line when measuring on mirror surface.
 Capacity value defined by 1/e2 (13.5%) of the peak optical intensity of the measurement wavelength.
 When an extension fiber cable of 5 m or longer is connected, the setting rage of the measurement cycle (exposure time) changes.
 Capacity value of temperature characteristic at the measurement center distance when fastened with an aluminum jig between the Sensor Head and the target
and the Sensor Head and the Sensor Controller are set in the same temperature environment.

22
 ZW-7000/5000 Series

●Controller
Specifications
Item
ZW-7000T ZW-5000T
Input/output type NPN/PNP dual type
Number of connected sensor heads 1
Sensor head compatibility ZW-S70□□ ZW-S50□□
Light source for measurement White LED
LED Safety Risk Group 3 (IEC62471)
Segment Main display 11-segment white display, 6 digits
Display Sub-display 11-segment green display, 6 digits
HIGH (orange), PASS (green), LOW (orange), STABILITY (green), ZERO (green),
Status indicators
ENABLE (green), THRESHOLD-H (orange), THRESHOLD-L (orange), RUN (green)
LED display
ECAT RUN (green), L/A IN (Link/Activity IN) (green), L/A OUT (Link/Activity OUT) (green),
EtherCAT indicator
ECAT ERR (red)
Ethernet 100BASE-TX/10BASE-T, Non-procedure (TCP/UDP), EtherNet/IP
EtherCAT EtherCAT exclusive protocol 100BASE-TX
RS-232C Max. 115,200 bps
Analog output Analog voltage output (OUT V) -10 V to +10 V, output impedance: 100 Ω
terminal block Analog current output (OUT A) 4 mA to 20 mA, max. load resistance: 300 Ω
Judgment output
(HIGH/PASS/LOW)
Busy output (BUSY)
Alarm output (ALARM)
Transistor output system
Enable output (ENABLE) Output voltage: 21.6 to 30 VDC
Sync flag output (SYNFLG) Load current: 50 mA or less
Trigger busy output (TRIGBUSY) Residual voltage when turning ON: 2 V or less
Logging state output (LOGSTAT) Leakage voltage when turning OFF: 0.1 mA or less
Logging error output (LOGERR)
Stability output (STABILITY)
Task state output (TASKSTAT)
External I/F
LIGHT OFF input (LIGHT OFF)
32-pole Zero reset input (ZERO) DC input system
expansion Timing input (TIMING) Input voltage: 24 VDC ± 10% (21.6 to 26.4 VDC)
connector Reset input (RESET) Input current: 7 mA Type. (24 VDC)
Sync input (SYNC) ON voltage/ON current: 19 V/3 mA or less
Trigger input (TRIG) ON voltage/ON current: 5 V/1 mA or less
Logging input (LOGGING)
Transistor output system
Currently selected Output voltage: 21.6 to 30 VDC
bank output Load current: 50 mA or less
(BANK_OUT 1 to 3) Residual voltage when turning ON: 2 V or less
Leakage voltage when turning OFF: 0.1 mA or less
Bank
DC input system
Input voltage: 24 VDC ± 10% (21.6 to 26.4 VDC)
Bank Selection input
Input current: 7 mA Type. (24 VDC)
(BANK_SEL 1 to 3)
ON voltage/ON current: 19 V/3 mA or more
OFF voltage/OFF current: 5 V/1 mA or less
Exposure time Automatic/Fixed
Measuring cycle *1 20 μs to 400 μs 80 μs to 1600 μs
Material setting Standard/Mirror/Rough surfaces
Measurement item Height/Thickness of transparent object/Calculation
Filtering Median/Average/Differentiation/High pass/Low pass/Band pass
Main Output Scaling/Different holds/Zero reset/Logging for a measured value
functions Measured value/Threshold value/Analog output voltage or current value/
Display Judgment result/Resolution/Light power/Internal logging condition
/Peak amount of received light
Number of configurable banks Max. 8 banks
Task process Multi-task (up to 4 tasks per bank)
Save/Initialization/Display measured information/Communication settings/
System
Sensor head calibration/Key-lock/Zero reset memory/Timing input
Power supply voltage 21.6 to 26.4 VDC (including ripple)
Current consumption 800 mA max.
Rating
Insulation resistance Across all lead wires and FG terminal: 20 MΩ (by 250 VDC)
Dielectric strength Between all lead wires and FG terminal: 500 VAC, 50/60 Hz, 1 minute
Degree of protection IP20 (IEC60529)
Vibration resistance (destructive) 10 to 55 Hz (half amplitude 0.35 mm), 50 mins in each of X/Y/Z directions
Environmental
Shock resistance (destructive) 150 m/s2, 6 direction, 3 times each (up/down, left/right, forward/backward)
resistance
Ambient temperature range Operation: 0 to 40°C, Storage: -15 to +60°C (No freezing and condensation)
Ambient humidity range Operation/storage: 35 to 85%RH (No condensation)
D-type grounding (grounding resistance of 100 Ω or less)
Grounding
Note: For conventional Class D grounding
Material Chassis: PC
Weight Approx. 900g (main unit only), Approx. 150 g (Parallel cable)
Parallel cable (ZW-XCP2E) Parallel cable (ZW-XCP2E)
10 Fiber cleaners (ZW-XCL) 10 Fiber cleaners (ZW-XCL)
Accessories
Instruction Manual Fiber adapter cap, Strap × 1
Member registration sheet Instruction Manual, Member registration sheet
Note: The Export Trade Control Order compatible Controller (ZW-7000T/5000T) is available.
When using this Controller, the minimum resolution is 0.25 μm regardless of the connected Sensor Head and setting conditions.
 When an extension fiber cable of 5 m or longer is connected, the setting rage of the measurement cycle (exposure time) changes.

23
 ZW-7000/5000 Series

●EtherCAT Communications Specifications

Item Specification
Communications standard IEC61158 Type12
Physical layer 100BASE-TX(IEEE802.3)
RJ45 × 2
Connectors ECAT IN: EtherCAT input
ECAT OUT: EtherCAT output
Communications media Category 5 or higher (cable with double, aluminum tape and braided shielding) is recommended.
Communications distance Distance between nodes: 100 m max.
Process data Variable PDO mapping
Mailbox (CoE) Emergency messages, SDO requests, SDO responses, and SDO information
Distributed clock Synchronization in DC mode.
LED display L/A IN (Link/Activity IN) × 1, AL/A OUT (Link/Activity OUT) × 1, AECAT RUN × 1, AECAT ERR × 1

●Automation Software Sysmac Studio

Item Operating environment *3
Windows 7 (32-bit/64-bit version)/Windows 8 (32-bit/64-bit version)/Windows 8.1 (32-bit/64-bit version)/
Operating system (OS) *1
Windows 10(32-bit/64-bit version)
Windows computers with Intel® Celeron® processor 540 (1.8 GHz) or faster CPU.
CPU
Intel® Core™ i5 M520 processor (2.4 GHz) or equivalent or faster recommended.
2 GB min.
Main memory
4 GB min. recommended
Hard disk Minimum 4.6 GB of Hard disk space is required to install. *2
XGA 1024 × 768, 16 million colors.
Display
WXGA 1280 × 800 min. recommended
Disk drive DVD-ROM drive
Communications ports USB port corresponded to USB 2.0, or Ethernet port *4
Supported languages Japanese, English, German, French, Italian, Spanish, simplified Chinese, traditional Chinese, Korean
 Note about Sysmac Studio compatible operating systems: The required system and hard disk capacity differs according to the system environment.
 Separate logging memory is required to use the file logging function.
 Describes System Requirements and notes of Sysmac Studio Measurement Sensor Edition.
For detail of System Requirements and notes of Sysmac Studio Measurement Sensor Edition, refer to Sysmac Studio Version 1 Operation Manual.
 For information on how to connect a personal computer with the controller or other hardware and information on required cables, refer to manuals for each
hardware.

●Version Information
ZW-7000/5000 Series and Sysmac Studio
Use the latest version of Sysmac Studio Standard Edition/Measurement Sensor Edition.
ZW Series Version of Controller Corresponding version of Sysmac Studio Standard Edition/Measurement Sensor Edition
ZW-7000□ Ver.2.03 Supported by version 1.15 or higher.
ZW-5000□ Ver.2.10 Supported by version 1.18 or higher.

24
 ZW-7000/5000 Series
External Dimensions (Unit: mm)

Sensor Head
ZW-S7010 □M/S7020 □M/S7030 □M

2.75±0.1
(STANDARD SURFACE) 4-M3

(STANDARD SURFACE)

24.5±0.1
46.7±0.1 26.8±0.1

MOUNTING SCREW HOLES

4-3.5 dia. (MOUNTING HOLES)

2.75
STANDARD SURFACE

Type W.D. M

(7.7)
ZW-S7010 10 0.5 STANDARD SURFACE

24.5
46.7 26.8
ZW-S7020 20 1
ZW-S7030 30 2


M (*1) M (*1)
Length L FIBER CABLE
CENTER LIGHTENING & RECEIVING AXIS (3.0 dia.) FIBER CONNECTOR
0.3 m (300) Measurement

(12.6)
end
2m (2000)
Measurement
30

center
15

Measurement
end (40) 25
15 40
30 76.25 L (*2)
W.D. (*1) STANDARD SURFACE

ZW-S5010 □M/S5020 □M/S5030 □M

2.75±0.1

(STANDARD SURFACE) 4-M3

24.5±0.1

(STANDARD SURFACE)

46.7±0.1 26.8±0.1

MOUNTING SCREW HOLES

4-3.5 dia. (MOUNTING HOLES)

2.75

STANDARD SURFACE


Type W.D. M
STANDARD SURFACE
24.5

ZW-S5010 10 0.5 46.7 26.8

ZW-S5020 20 1
ZW-S5030 30 2

 LABEL CAUTION
M (*1) M (*1)
Length L LIGHTENING & RECEIVING AXIS
FIBER CABLE
(10dia.)

CENTER (3.0 dia.) FIBER CONNECTOR

0.3 m (300) Measurement
(50)
end
2m (2000) (62)
Measurement
center
30

Measurement
(40)
15

end (40)
76.25 L (*2)
15
30 W.D. (*1)
STANDARD SURFACE

25
 ZW-7000/5000 Series

Controller
ZW-7000T

140

SCREW HOLE FOR CONNECTING

ROM M2 DEPTH 2.0 MAX.
124

34.9
40.8
SCREW FOR CONNECTING FRAME
GROUND TERMINAL M4 LENGTH6
SCREW HOLE FOR CONNECTING
FRAME GROUND TERMINAL M4
6

DEPTH 7.0 MAX.

85 139.5

SLIDER FOR MOUNTING DIN-RAIL

4-4.5 dia.
40

70±0.1
70

MOUNTING SCREW HOLES

4-M4 DEPTH6.0MAX.

15 55 55±0.1

MOUNTING SCREW HOLES

ZW-5000T
140

SCREW HOLE FOR CONNECTING ROM

M2x0.4 DEPTH 2.0MAX.
124

34.9
40.8

SCREW FOR CONNECTING FRAME

GROUND TERMINL M4x0.7 LENGTH6.0

SCREW HOLE FOR CONNECTING FRAME

GROUND TERMINL M4x0.7 DEPTH 7.0MAX.
6

85 139.5

SLIDER FOR MOUNTING DIN-RAIL

40

4-4.5 dia.
70±0.1
70

MOUNTING SCREW HOLES

4-M4x0.7 DEPTH6.0MAX.
15 55 55±0.1

MOUNTING SCREW HOLES

26
 ZW-7000/5000 Series

Extension Fiber Cable

ZW-XF7002R/XF7005R/XF7010R/XF7020R/XF7030R
FIBER CABLE (3.0 dia.)

SERIAL NUMBER LABEL NAME PLATE

FIBER CONNECTOR FIBER CONNECTOR

(SENSOR HEAD SIDE) (CONTROLLER SIDE)

2-0.7 dia. 2-0.7 dia.

(12.6)
4.6

4.6
(12.6)
12-0.125 dia. (25) (40) (30) (40) (25) 12-0.125 dia.
(25.4) (60)
L*

(7.7)
(7.7)
(ACCESSORIES)
FIBER ADAPTER：ZW-XFCM
The following table lists cable lengths
per models.
9.8 Type Specification L
ZW-XF7002R 2m 2000+40/0
18.9
14.9

ZW-XF7005R 5m 5000+100/0
4
20 ZW-XF7010R 10 m 10000+200/0
ZW-XF7020R 20 m 20000+400/0
ZW-XF7030R 30 m 30000+600/0

ZW-XF5002R/XF5005R/XF5010R/XF5020R/XF5030R

NAME PLATE

FIBER CABLE (3.0 dia.)

SERIAL NUMBER LABEL

FIBER CONNECTOR FIBER CONNECTOR

（10 dia.）

（10 dia.）
（30）
（57） （20） （60） （57）
L*

(ACCESSORIES)
FIBER ADAPTER：ZW-XFC2

The following table lists cable lengths

per models.
11.9 dia. 1.35 Type Specification L
15 ＋0.2
−0.5
ZW-XF5002R 2m 2000+200/0
ZW-XF5005R 5m 5000+200/0
ZW-XF5010R 10 m 10000+200/0
ZW-XF5020R 20 m 20000+500/0
ZW-XF5030R 30 m 30000+500/0

Related Manuals
Man.No. Model number Manual
Z362 ZW-7000□/5000□ Displacement Sensor ZW-7000/5000 User’s Manual
Z363 ZW-7000□/5000□ Displacement Sensor ZW-7000/5000 User’s Manual for Communications Settings
W504 SYSMAC-SE2 Sysmac Studio Version 1 Operation Manual

27
OMRON AUTOMATION AMERICAS HEADQUARTERS • Chicago, IL USA • 847.843.7900 • 800.556.6766 • www.omron247.com

OMRON CANADA, INC. • HEAD OFFICE OMRON ARGENTINA • SALES OFFICE

Toronto, ON, Canada • 416.286.6465 • 866.986.6766 • www.omron247.com Cono Sur • 54.11.4783.5300

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Apodaca, N.L. • 52.81.11.56.99.20 • 01.800.226.6766 • mela@omron.com 54.11.4783.5300

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São Paulo, SP, Brasil • 55.11.2101.6300 • www.omron.com.br

OMRON EUROPE B.V. • Wegalaan 67-69, NL-2132 JD, Hoofddorp, The Netherlands. • +31 (0) 23 568 13 00 • www.industrial.omron.eu

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• Machine Automation Controllers (MAC) • Programmable Controllers (PLC)
• Operator interfaces (HMI) • Distributed I/O • Software
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• Servo & AC Drives • Motion Controllers & Encoders
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• Laser Scanners • Safety Mats • Edges and Bumpers • Programmable Safety
Controllers • Light Curtains • Safety Relays • Safety Interlock Switches

• The angle characteristic and linearity,
described in the front cover, are the typical
values of the ZW-S7010 Sensor Head.
• EtherCAT® is registered trademark and
patented technology, licensed by Beckhoff
Automation GmbH, Germany.
• EtherNet/IP™ is a trademark of ODVA.
• Sysmac is a trademark or registered trademark
of OMRON Corporation in Japan and other
countries for OMRON factory automation
products.
• Windows is a registered trademark of Microsoft • Microsoft product screen shot(s) are reprinted
Corporation in the USA and other countries. with permission from Microsoft Corporation.
• Other company names and product names
mentioned in this document are the
trademarks or registered trademarks of their
respective companies.

Q250-E1-02 Note: Specifications are subject to change. © 2017 Omron. All Rights Reserved. Printed in U.S.A.

Printed on recycled paper.