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    StepToolCalibrationReport L-CHR 3900 2023-12!14!173815

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    Yassine jbili
    The document summarizes the results of a calibration test of a CT300 measurement platform. It was tested at ST Microelectronics in Bouskoura, Morocco on October 6, 2023. The system performed 25 scans on 3 dimensions and achieved an average error of under 0.15 μm for each, well within the tolerance of 1.5 μm. Each scan measurement is listed along with the error from the certified height. The system passed the certification test.

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    StepToolCalibrationReport L-CHR 3900 2023-12!14!173815

    Uploaded by

    Yassine jbili
    3 views2 pages
    The document summarizes the results of a calibration test of a CT300 measurement platform. It was tested at ST Microelectronics in Bouskoura, Morocco on October 6, 2023. The system performed 25 scans on 3 dimensions and achieved an average error of under 0.15 μm for each, well within the tolerance of 1.5 μm. Each scan measurement is listed along with the error from the certified height. The system passed the certification test.

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    The document summarizes the results of a calibration test of a CT300 measurement platform. It was tested at ST Microelectronics in Bouskoura, Morocco on October 6, 2023. The system performed 25 scans on 3 dimensions and achieved an average error of under 0.15 μm for each, well within the tolerance of 1.5 μm. Each scan measurement is listed along with the error from the certified height. The system passed the certification test.

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    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
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    3 views2 pages

    StepToolCalibrationReport L-CHR 3900 2023-12!14!173815

    Uploaded by

    Yassine jbili
    The document summarizes the results of a calibration test of a CT300 measurement platform. It was tested at ST Microelectronics in Bouskoura, Morocco on October 6, 2023. The system performed 25 scans on 3 dimensions and achieved an average error of under 0.15 μm for each, well within the tolerance of 1.5 μm. Each scan measurement is listed along with the error from the certified height. The system passed the certification test.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
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    of 2

    System: CT300 Platform with Stage Set (318x318 mm), Spii CMba, Magnetic Linear Actuator,

    Autom. z-axis 48VDC


    System S/N: 2612239
    Tool type: CAL-3900 S5A
    Name:
    Company: ST Microelectronics, Bouskoura Tool S/N: 90650-2
    Location: Calibration date: 10/6/2023

    Sensor type: L-CHR 3900 Number of scans: 25


    Sensor S/N: 300835 | 300202 System tolerance (±): 1.50 µm

    Results:

    Dimension A Dimension B Dimension C

    Certified Height: 3,500.06 µm 2,000.07 µm 500.05 µm


    Xq: 3,500.21 µm 2,000.11 µm 500.03 µm
    Avg Error: 0.15 µm 0.04 µm 0.03 µm
    Max Error: 0.28 µm 0.15 µm 0.15 µm
    StdDev: 0.0574 µm 0.0417 µm 0.0408 µm
    Range: 0.24 µm 0.18 µm 0.19 µm
    Cg (> 1.670): 8.709 11.981 12.242
    Cgk (> 1.670): 7.839 11.657 12.052

    Ra X: 0.13 µm Tilt X: -0.0022 °


    Measurements:
    Dimension A Dimension B Dimension C Error A Error B Error C
    1 3,500.09 µm 2,000.07 µm 500.05 µm 0.03 µm 0.00 µm 0.00 µm
    2 3,500.20 µm 2,000.04 µm 500.03 µm 0.14 µm 0.03 µm 0.02 µm
    3 3,500.11 µm 2,000.09 µm 500.06 µm 0.05 µm 0.02 µm 0.01 µm
    4 3,500.14 µm 2,000.06 µm 500.02 µm 0.08 µm 0.01 µm 0.03 µm
    5 3,500.15 µm 2,000.09 µm 500.02 µm 0.09 µm 0.02 µm 0.03 µm
    6 3,500.17 µm 2,000.07 µm 500.02 µm 0.11 µm 0.00 µm 0.03 µm
    7 3,500.21 µm 2,000.12 µm 500.05 µm 0.15 µm 0.05 µm 0.00 µm
    8 3,500.20 µm 2,000.08 µm 500.04 µm 0.14 µm 0.01 µm 0.01 µm
    9 3,500.23 µm 2,000.13 µm 500.06 µm 0.17 µm 0.06 µm 0.01 µm
    10 3,500.23 µm 2,000.11 µm 500.09 µm 0.17 µm 0.04 µm 0.04 µm
    11 3,500.19 µm 2,000.07 µm 500.00 µm 0.13 µm 0.00 µm 0.05 µm
    12 3,500.13 µm 2,000.10 µm 500.00 µm 0.07 µm 0.03 µm 0.05 µm
    13 3,500.20 µm 2,000.10 µm 500.02 µm 0.14 µm 0.03 µm 0.03 µm
    14 3,500.26 µm 2,000.11 µm 500.00 µm 0.20 µm 0.04 µm 0.05 µm
    15 3,500.25 µm 2,000.07 µm 499.97 µm 0.19 µm 0.00 µm 0.08 µm
    16 3,500.24 µm 2,000.15 µm 500.06 µm 0.18 µm 0.08 µm 0.01 µm
    17 3,500.24 µm 2,000.16 µm 500.01 µm 0.18 µm 0.09 µm 0.04 µm
    18 3,500.20 µm 2,000.12 µm 499.98 µm 0.14 µm 0.05 µm 0.07 µm
    19 3,500.27 µm 2,000.17 µm 500.09 µm 0.21 µm 0.10 µm 0.04 µm

    Status PASSED Signature, Stamp

    Certified by: Manuel Wolfsteiner


    Company: cyberTECHNOLOGIES GmbH
    Date: 12/14/2023 Next due date: 12/14/2024

    Created with Scan CT Certification Wizard 8.14 (8626) www.cybertechnologies.com 1/2


    System: CT300 Platform with Stage Set (318x318 mm), Spii CMba, Magnetic Linear Actuator,
    Autom. z-axis 48VDC
    System S/N: 2612239
    Tool type: CAL-3900 S5A
    Name:
    Company: ST Microelectronics, Bouskoura Tool S/N: 90650-2
    Location: Calibration date: 10/6/2023

    Sensor type: L-CHR 3900 Number of scans: 25


    Sensor S/N: 300835 | 300202 System tolerance (±): 1.50 µm

    Dimension A Dimension B Dimension C Error A Error B Error C


    20 3,500.25 µm 2,000.13 µm 500.08 µm 0.19 µm 0.06 µm 0.03 µm
    21 3,500.18 µm 2,000.09 µm 499.90 µm 0.12 µm 0.02 µm 0.15 µm
    22 3,500.25 µm 2,000.11 µm 500.01 µm 0.19 µm 0.04 µm 0.04 µm
    23 3,500.31 µm 2,000.14 µm 500.03 µm 0.25 µm 0.07 µm 0.02 µm
    24 3,500.22 µm 2,000.17 µm 500.05 µm 0.16 µm 0.10 µm 0.00 µm
    25 3,500.34 µm 2,000.22 µm 500.02 µm 0.28 µm 0.15 µm 0.03 µm

    Status PASSED Signature, Stamp

    Certified by: Manuel Wolfsteiner


    Company: cyberTECHNOLOGIES GmbH
    Date: 12/14/2023 Next due date: 12/14/2024

    Created with Scan CT Certification Wizard 8.14 (8626) www.cybertechnologies.com 2/2

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