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  • StepToolCalibrationReport L-CHR 950 2023-12!13!173527

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    Yassine jbili
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    This document summarizes the results of a calibration test of measurement equipment. The equipment included a CT300 platform with various components and a CAL-1000 S5A tool. Measurements of three dimensions (A, B, and C) were taken 25 times each. The results showed average errors of 0.01 μm or less for each dimension. All measurements passed with a maximum allowed error of 0.40 μm. The equipment was certified by Manuel Wolfsteiner of cyberTECHNOLOGIES GmbH to be accurate until its next certification date.

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    This document summarizes the results of a calibration test of measurement equipment. The equipment included a CT300 platform with various components and a CAL-1000 S5A tool. Measurements of three dimensions (A, B, and C) were taken 25 times each. The results showed average errors of 0.01 μm or less for each dimension. All measurements passed with a maximum allowed error of 0.40 μm. The equipment was certified by Manuel Wolfsteiner of cyberTECHNOLOGIES GmbH to be accurate until its next certification date.

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    3 views2 pages

    StepToolCalibrationReport L-CHR 950 2023-12!13!173527

    Uploaded by

    Yassine jbili
    This document summarizes the results of a calibration test of measurement equipment. The equipment included a CT300 platform with various components and a CAL-1000 S5A tool. Measurements of three dimensions (A, B, and C) were taken 25 times each. The results showed average errors of 0.01 μm or less for each dimension. All measurements passed with a maximum allowed error of 0.40 μm. The equipment was certified by Manuel Wolfsteiner of cyberTECHNOLOGIES GmbH to be accurate until its next certification date.

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    © All Rights Reserved
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    of 2

    System: CT300 Platform with Stage Set (318x318 mm), Spii CMba, Magnetic Linear Actuator,

    Autom. z-axis 48VDC


    System S/N: 2612239
    Tool type: CAL-1000 S5A
    Name:
    Company: ST Microelectronics, Bouskoura Tool S/N: 92151-8
    Location: Calibration date: 10/19/2023

    Sensor type: L-CHR 950 Number of scans: 25


    Sensor S/N: 300835 | 300535 System tolerance (±): 0.40 µm

    Results:

    Dimension A Dimension B Dimension C

    Certified Height: 899.93 µm 599.99 µm 200.18 µm


    Xq: 899.94 µm 600.00 µm 200.18 µm
    Avg Error: 0.01 µm 0.01 µm 0.01 µm
    Max Error: 0.04 µm 0.03 µm 0.02 µm
    StdDev: 0.0110 µm 0.0103 µm 0.0068 µm
    Range: 0.05 µm 0.04 µm 0.03 µm
    Cg (> 1.670): 12.120 12.985 19.529
    Cgk (> 1.670): 11.695 12.722 19.410

    Ra X: 0.05 µm Tilt X: -0.0015 °


    Measurements:
    Dimension A Dimension B Dimension C Error A Error B Error C
    1 899.92 µm 599.98 µm 200.18 µm 0.01 µm 0.01 µm 0.00 µm
    2 899.94 µm 600.00 µm 200.18 µm 0.01 µm 0.01 µm 0.00 µm
    3 899.93 µm 599.99 µm 200.18 µm 0.00 µm 0.00 µm 0.00 µm
    4 899.93 µm 599.98 µm 200.18 µm 0.00 µm 0.01 µm 0.00 µm
    5 899.95 µm 600.00 µm 200.20 µm 0.02 µm 0.01 µm 0.02 µm
    6 899.93 µm 599.98 µm 200.19 µm 0.00 µm 0.01 µm 0.01 µm
    7 899.94 µm 600.00 µm 200.17 µm 0.01 µm 0.01 µm 0.01 µm
    8 899.94 µm 599.98 µm 200.18 µm 0.01 µm 0.01 µm 0.00 µm
    9 899.96 µm 600.02 µm 200.19 µm 0.03 µm 0.03 µm 0.01 µm
    10 899.95 µm 599.99 µm 200.18 µm 0.02 µm 0.00 µm 0.00 µm
    11 899.94 µm 600.00 µm 200.18 µm 0.01 µm 0.01 µm 0.00 µm
    12 899.97 µm 600.02 µm 200.19 µm 0.04 µm 0.03 µm 0.01 µm
    13 899.95 µm 600.01 µm 200.20 µm 0.02 µm 0.02 µm 0.02 µm
    14 899.95 µm 600.01 µm 200.19 µm 0.02 µm 0.02 µm 0.01 µm
    15 899.97 µm 600.00 µm 200.19 µm 0.04 µm 0.01 µm 0.01 µm
    16 899.94 µm 600.00 µm 200.19 µm 0.01 µm 0.01 µm 0.01 µm
    17 899.94 µm 600.00 µm 200.18 µm 0.01 µm 0.01 µm 0.00 µm
    18 899.94 µm 599.99 µm 200.18 µm 0.01 µm 0.00 µm 0.00 µm
    19 899.94 µm 599.99 µm 200.18 µm 0.01 µm 0.00 µm 0.00 µm

    Status PASSED Signature, Stamp

    Certified by: Manuel Wolfsteiner


    Company: cyberTECHNOLOGIES GmbH
    Date: 12/13/2023 Next due date: 12/13/2024

    Created with Scan CT Certification Wizard 8.14 (8626) www.cybertechnologies.com 1/2


    System: CT300 Platform with Stage Set (318x318 mm), Spii CMba, Magnetic Linear Actuator,
    Autom. z-axis 48VDC
    System S/N: 2612239
    Tool type: CAL-1000 S5A
    Name:
    Company: ST Microelectronics, Bouskoura Tool S/N: 92151-8
    Location: Calibration date: 10/19/2023

    Sensor type: L-CHR 950 Number of scans: 25


    Sensor S/N: 300835 | 300535 System tolerance (±): 0.40 µm

    Dimension A Dimension B Dimension C Error A Error B Error C


    20 899.94 µm 600.00 µm 200.18 µm 0.01 µm 0.01 µm 0.00 µm
    21 899.95 µm 600.00 µm 200.18 µm 0.02 µm 0.01 µm 0.00 µm
    22 899.94 µm 600.00 µm 200.18 µm 0.01 µm 0.01 µm 0.00 µm
    23 899.94 µm 599.98 µm 200.18 µm 0.01 µm 0.01 µm 0.00 µm
    24 899.94 µm 600.00 µm 200.17 µm 0.01 µm 0.01 µm 0.01 µm
    25 899.95 µm 600.01 µm 200.18 µm 0.02 µm 0.02 µm 0.00 µm

    Status PASSED Signature, Stamp

    Certified by: Manuel Wolfsteiner


    Company: cyberTECHNOLOGIES GmbH
    Date: 12/13/2023 Next due date: 12/13/2024

    Created with Scan CT Certification Wizard 8.14 (8626) www.cybertechnologies.com 2/2

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