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面向感存算一体化的光电忆阻器件研究进展
面向感存算一体化的光电忆阻器件研究进展
引用信息 Citation: Acta Physica Sinica, 71, 148701 (2022) DOI: 10.7498/aps.71.20220350
在线阅读 View online: https://doi.org/10.7498/aps.71.20220350
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物 理 学 报 Acta Phys. Sin. Vol. 71, No. 14 (2022) 148701
专题: 面向类脑计算的物理电子学
面向感存算一体化的光电忆阻器件研究进展*
单旋宇 1) 王中强 1)2)† 谢君 1) 郑嘉慧 1) 徐海阳 1)2) 刘益春 1)2)
脑启发神经形态计算系统有望从根本上突破传统冯·诺依曼计算机系统架构瓶颈, 极大程度地提升数据
处理速度和能效. 新型神经形态器件是构建高能效神经形态计算的重要硬件基础. 光电忆阻器作为新兴的纳
米智能器件, 因具备整合光学感知、信息存储和逻辑计算等功能特性, 被认为是发展类脑视觉系统的重要备
选. 本文将综述面向感存算功能一体化的光电忆阻器研究进展, 包括光电忆阻材料与机制、光电忆阻器件与
特性、感存算一体化功能及应用等. 具体将根据机制分类介绍光子-离子耦合型和光子-电子耦合型光电忆阻
材料, 根据光电忆阻特性调节方式介绍光电调制型和全光调制型光电忆阻器件, 根据感存算一体化功能介绍
其在认知功能模拟、光电逻辑运算、神经形态视觉功能、动态探测与识别等方面的应用. 最后总结光电忆阻
器的主要优势以及所面临的挑战, 并展望光电忆阻器的未来发展.
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光子-离子 材料 光子-电子
耦合型 机制 耦合型
光电 算
调 光
运
器 型
逻辑
全
制
光电忆阻
件
器件
特 件
功能
性
器
应用
调 电
神经 系统
器 型
视觉
光
制
件
形态
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光电忆阻器的阻态调节, 其中主要包括光调制离子
2 光电忆阻材料与机制 化合价和光调制离子迁移型两种类型.
光致变色材料是一类通过光辐照诱导材料结
材料是器件的基础, 光电忆阻材料的优选在构 构发生改变的材料体系. 其中, 无机光致变色材料
筑高性能光电忆阻器方面十分重要. 光电忆阻器不 的颜色改变通常伴随着氧化-还原反应以及离子化
仅要求电学信号能够调制器件阻态, 而且光学信号 合价变化, 比如 MoO3, WO3 等半导体材料 [30,33].
同样要有调制作用 [31]. 在光电忆阻材料选择中, 如 基于光致变色过程中的光子-离子耦合作用, 无机
何引入光子作用实现光子-离子耦合、光子-电子耦 光致变色材料能够通过光学信号诱导离子价态发
合乃至三者协同作用是发展光电忆阻材料的根本 生变化, 从而调节材料微观结构和电子输运特性,
问题. 一方面, 多数光电忆阻材料自身具有良好的 是光电忆阻材料的重要备选体系之一. 香港理工大
光敏特性, 能够有效利用光学信号调制忆阻特性, 学 Chai 研究组 [30] 基于 MoOx 材料研制出了具有
例如多种半导体材料 [14,15]、光致变色材料 [32]、有机-无 光调制功能的光电阻变式存储器 (ORRAM), 器件
机杂化钙钛矿材料 [18]、新型二维材料 [19] 等. 另一方 具有简单的 Pd/MoOx/ITO 三明治结构 (图 2(a)).
面, 一些光电忆阻材料则需要通过复合材料体系、器 在 365 nm 紫外光照射下, MoOx 基光电忆阻器件
件结构设计等方案实现其光电忆阻特性 [26,31]. 本节 能够从初始高阻态转变为低阻态, 实现光信号对忆
将围绕光电忆阻材料的优选与设计进行介绍, 包括 阻器的存储开启操作; 撤去光信号后仍然保持在低
光子-离子耦合型和光子-电子耦合型两个主要方面. 阻态, 展示出良好的信息保持特性. 反之, 器件在
负向电压作用下可以由低阻态转变至高阻状态, 从
2.1 光子-离子耦合型光电忆阻材料 而获得电学信号对器件的信息关闭操作 (图 2(b)).
光子-离子耦合型光电忆阻器材料工作机理主 如图 2(c) 所示, MoOx 基光电忆阻器的工作机理
要是利用光学信号调制离子动力学特性, 从而实现 是: 在光照过程中, 光生空穴可以与薄膜吸附的水
ITO
Pd MoO ITO
MoO
(AScm-2)
100
Pd H2O
Mo6+
SiO2 Mo6+
10-1 H+ Mo5+ H+
Si
0 200 400 600 800
Time/s
polarized polarized
CH2 CH2
n
N(CH2CH3) N(CH2CH3)
tio
10-5 D
ia
ep
nt
re
te
ss
Po
io
n
Pulse intensity
1 NO2
ITO
0
Gla
ss N N
Nanorod/PDR1A -1 N N
hybrid material 0 10 20 30
Ar+ laser
Optical pulses
NO2
图 2 (a) MoOx 光电阻变式存储器的结构示意图; (b) Pd/MoOx/ITO 器件的脉冲开关特性; (c) 器件阻变机制示意图 [30]; (d) 基
于 PDR1A 材料光学忆阻器结构示意图; (e) ITO/ZnO/PDR1 A/Al 结构器件的可逆电阻调制过程; (f) PDR1A 分子化学结构的示
意图 [32]
Fig. 2. (a) Structural illustration of the MoOx ORRAM; (b) pulse-switching characteristics of Pd/MoOx/ITO device; (c) schematic
of switching mechanism[30]; (d) schematic of PDR1A based optical memristor; (e) conductance modulation of ITO/ZnO/PDR1A/
Al device; (f) schematic of the PDR1A molecules[32].
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(a) (b)
Broadband visible light
+
S S
Inhibited I/ T
I formation Accelerated I/ T
I annihilation
S
- I/ T
I
7
(c) V (d) 1 (e)
6 0 mW/cm2
0 50 mW/cm2
Current/mA
Current/mA
0 mW/cm2 5
-1 100 mW/cm2
CH 50 mW/cm2 4
3N
H
3P
Al or Au -2 150 mW/cm2
bI 100 mW/cm2 3
3
200 mW/cm2
FTO -3 150 mW/cm2
2 250 mW/cm2
-4 200 mW/cm2
1
250 mW/cm2
-5 0
-2 0 2 4 6 8 10 -20 0 20 40 60
Voltage/V Time/ms
Light intensity/(mWScm-2)
Light (L=8.16 mWScm-2) 10-9 0
CH3NH+
3 Input pulse (a=0.15 V, W=0.4 s) 10-10
10-7
Pb2+ 10-11
0 20 40 60 80 100
(iii) 10
I-
PSC/A
PSC/A
(i) 10-9
10-8 0
10-10
(ii) 10-11
Ag 0 20 40 60 80 100
10-9 9T10-10 10
CH3NH3PbI3 6T10-10 0
ITO 3T10-10
Glass
10-10
0 2 4 6 8 10 12 14 16 18 20 0 10 20 30
/s /s
图 3 (a) 基于 MAPbI3 材料的平面结构器件示意图; (b) 光照抑制 VI·/VI×形成加速 VI·/VI×湮灭 [49]; (c) MAPbI3 忆阻器结构图;
(d), (e) 光照强度对 MAPbI3 器件开启电压和过充电流的影响 [18]; (f) Ag/CH3NH3PbI3 (OHP)/ITO 结构光突触器件示意图; (g) 器
件在光电脉冲刺激下的响应; (h) 响应幅值随照射时间、频率和强度的变化 [51]
Fig. 3. (a) Schematic of MAPBI3 based planar device; (b) light illumination inhibits the formation and accelerate the annihilation of
VI·/VI× [49]; (c) structural illustration of MAPbI3 based memristor; (d), (e) the variations of VForming and IOV (overshoot current)
with light intensity[18]; (f) structural illustration of Ag/CH3NH3PbI3 (OHP)/ITO optoelectronic memristor; (g) current response un-
der the stimulation of electrical and optical pulse; (h) current response depending on exposure time, frequency and intensity[51].
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LightIN (input1)
e- e-
IN (Input 2) C
O +
O
OUT (output)
e- e- +
O
+
O +
O
O +
+ + O
ITO +
O O O +
O +
O
20 nm CeO2-
5 nm Al
Al AlO V
100 mm CeO2-
+ -
Si-based substrate AlO
O +
O +e
-
(c) (d)
CB
Axon C
Dendrite Top Top Top
electrode electrode electrode T ③ ④
Si NCs ② ① ⑤
Transparent electrode F
Axon terminal (top electrode) Substrate V
Synapses h
Vesicle (Si NC) Light Light Light
VB
Neurotransmitter (hole)
Dendrite terminal NNH
(transparent electrode)
78
5
vac c Li c
gh
0
nm
t
38
c
+V +V
ITO () f f
s 's
ITO v ITO ITO
BP BP BP
BP@PS
ITO
Glass substrate Electron Hole Traps
Electric stimuli C
C C
p-Si
p-Si C
UV
light Photonic stimuli V
MoS2 V MoS2
W
V V
SiO2 SiO2 SiO2
Trap state Electron
p-Si Output Forward bias Reverse bias
Weight change
图 4 (a) ITO/CeO2 – x/AlOy/Al 结构光电突触示意图; (b) 器件阻变特性机制图 [14]; (c) 生物突触和硅纳米晶器件结构图; (d) 硅
纳米晶能带结构和载流子输运示意图 [54]; (e) 光调制 BP@PS 忆阻器示意图; (f) BP@PS 器件阻变机制的能带模型 [66]; (g) 基于单
层 MoS2 的忆阻突触器件; (h) MoS2/p-Si 结阻变示意图 [56]
Fig. 4. (a) Schematic diagram of optoelectronic synapse with ITO/CeO2–x/AlOy/Al structure; (b) schematic energy band diagram
demonstrating memristive characteristics[14]; (c) schematic of biological synapse and Si-NC-based device; (d) schematic illustration of
the band structure and charge carrier transport of Si NCs[54]; (e) schematic of light modulation BP@PS memristor; (f) energy band
diagram explaining RS mechanism[66]; (g) schematic of memristive synapse based on monolayer MoS2; (h) schematic illustration of
the resistive switching[56].
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Au 7.5
Current/mA
Current/mA
4
Ns
r, P
s P bB 5.0
C N 3
SC
Cu S
T :PS 2.5 Light
E DO On
2
P Off Read@0.1 V
ITO
0 10 20 30 40 50 0 10 20 30 40
Time/s Pulse number/#
3
(e) 10-3 (f) SET
(d) RESET
2
Current/A
Voltage/V
Al
10-4
TiO2 1
Forming curve
RS curve
10-5 (UV irradiation 0 min) 0
GO-TiO2 Forming curve
ITO RS curve
(UV irradiation 15 min)
PET -1
10-6
-1 0 1 2 3 0 5 10 15
Voltage/V Irradiation time/min
(g) Pre-neuron Post-neuron (h)
UV irradiation
GO
Signals RGO e-
RGO
GO-NCQDs
Pre-synapse
H+
Synaptic cleft
NCQD
h+ H2O
Cell body
Graphene NCQD(h+)+H2O NCQD+H++O2
) )
NCQD(e-)+GO NCQD+RGO
RGO-domain NCQDs
Post-synapse
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Lamp
(a) (b) 4.3 (c) 14.4 mW/cm2
12
19.2 mW/cm2
Light 420 nm 530 nm
24.0 mW/cm2
Current/nA
Current/nA
9 4.2
650 nm
Au
6 Dark 4.1
OD-IGZO
OR-IGZO 900 nm T20
3 800 nm 4.0 800 nm
Pt
0
0 50 100 150 200 250 0 30 60 90
Time/s Time/s
230 C C
T100 T100 F F
420 nm 800 nm
160
800 900 1000
Pulse number/#
(f) (g) (h) (i)
4.5
m
28
2.5
0
LTP LTD
36
nm
1.0
Photocurrent/mA
4.0 280 nm 365 nm
2.0
0.8 3.5
1.5 3.0
PO 0.6
BP GS: 0 V GS: 0 V
u 1.0 2.5
SiO2/Si /A DS: 50 mV DS: 50 mV Pulse width=20 ms
Cr 0.4
Back ga 0 40 80 120 0 40 80 120 0 100 200 300 400
te
Time/s Time/s No. of pulses
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Current/nA
Current/nA
I Transient reseponse I Transient reseponse
II Current decay 0.03 II Current decay
0.02
I II III Long-term potentiation I II III Long-term depression
Ag 0.02
TiO2 0.01 III
III
Ag/TiO2 Light on 0.01
Light on
0
250 nm 0
FTO FTO 0 50 100 150 200 0 50 100 150 200
Time/s Time/s
1.5 1.5 101
(d) Visible light (e) Ultraviolet light (f)
Ult
Current/nA
Current/nA
Current/nA
1.0 1.0
14.2 mW/cm2
rav
ght
10-1
iole
le li
21.8 mW/cm2
t lig
Visib
0.5 0.5 10-2
ht
1.3 mW/cm2
2.5 mW/cm2
10-3
3.7 mW/cm2
0 0
10-4
0 5 10 15 0 5 10 15 1 2 3 4 5 6 7
Time/min Time/min State/#
(g) Visible light (h) V+ V+
e-
C Ag C Ag0
Ag+
F F Ag+
Ag0
Photo-induced Ag+ Photo-induced
oxidation reduction
Ag0 Ag+ Ag+ Ag0
)
)
V V
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Current/mA
~3 V, 50 ms
PPF/%
120
1.84
115
1.82 110
ITO
1.80 105
0
1.78
0 20 40 60 80 0 200 400 600 800 1000
Time/s
(d) (e) (f)
3.56 mW/cm2
1.86 Light on 1.86 Light on Dark
3.15 mW/cm2 1.86
2.54 mW/cm2 10 s
2.05 mW/cm2 7.5 s
Current/mA
Current/mA
Current/mA
1.84 1.52 mW/cm2 1.84 5.0 s
0.97 mW/cm2 2.5 s 1.84 1.86
Off
Off
Current/mA
Off
0.54 mW/cm2 1.0 s 1.85 Off
Dark 1.84
1.82 1.82 1.82 On
On
1.83 On
On
On
1.82
1.80 1.80 3 4 5 6 7
1.80
0 5 10 15 20 25 30 0 5 10 15 20 25 30 0 10 20 30 40 50
Time/s Time/s Time/s
图 8 (a) TiNxO2 – x/MoS2 异质结光电突触器件; (b) 单个光脉冲引起的增强过程; (c) 对脉冲促进 (PPF) 功能; (d), (e) 不同光照
强度和时间下器件的电导响应; (f) 连续光脉冲引起的电导变化 [86]
Fig. 8. (a) Structural illustration of TiNxO2 – x/MoS2 heterostructure-based optoelectronic synapse; (b) optical potentiation process;
(c) paired pulse facilitation function; (d), (e) conductance response depending on the illumination intensity and duration; (f) transi-
ent response under consecutive optical pulses[86].
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Conduction/mS
Al 6.0 808 nm 0.35 V
Current/A
TiS3 10-3
5.5
ITO 10-4 400 nm 5.0
Glass
530 nm
10-5 808 nm 4.5
Dark Photonic Electrical
10-6 4.0 potentiation habituation
-1.0 0 1.0 2.0 0 5 10 15 20
Voltage/V Pulse number
(d) Ringing bell Food Ringing bell+food Ringing bell Ringing bell
Optical signal
On
Off
Electronic
On
signal
Off
1.2
Current/mA
1.0
0.8
0.6 No response
Salivation Salivation Salivation No response
0.4
0 5 10 15 20 25 0 5 10 15 20 25 0 5 10 15 20 25 0 5 10 15 20 25 0 5 10 15 20 25
Time/s Time/s Time/s Time/s Time/s
(a) A (b)
Opt. 60 pW/mm2 Ele. 10 V
in
OR 4s 4s
B
A out
in
Ele. Opt.
0 0 1 1
Input
B
AND
0 1 0 1
0.1 s 0.4‘OR’
Reset: -2 V
A B
out/nA
‘0’
0
0.4‘AND’ Read @ 0.2 V
(c) Input Output
Opt. Ele. current
out/nA
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Current density/(mAScm-2)
(a) (1) Input image (2) Output image (3) After 1 min
1.0 110
D=200 ms
A
0.8
Normalized signals
0.2
B 80
0 0 100 200 300
Time/s
(b)
age
l im y
Rea arra Neural network 1.0
R AM
OR ge
ima
put Input Output
Out neurons neurons
0.9
Accuracy
0.8
Output
0.7 With ORRAM
Without ORRAM
0.6
0 500 1000 1500 2000 2500
Neuromorphic preprocessing Image recognition Epochs
Nir
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1.4 1.5
Eye Visual 1T10-8 1T10-7
Synaptic
Conductance/S
Recognition rate/%
T20 different shapes
80
60
40
20
0
Single-color digits Mixed-color digits 0 150 300 450 600
(target: single-colored & distinct shape) Epoch
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1.5 -1.0
Dds/mA
Dds/mA
ds
A
-1.5
D S 1.0
WSe2
-2.0
h-BN
0.5
Al2O3 -2.5
Gate
Dds 0
G 0 150 300 450 0 150 300 450 600
Time/ms Time/ms
(, )
(, )
Recognition
by ANN
Time
(e)
Trajectory of the cross measured by our system
Trace prediction by RNN
coordinate
T1
coordinate
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0.8 V
0.3 0.6 V
Au 0.1
Optical stimuli:
h-BN
0 637 nm, 2.73 nW, 50 ms
WSe2
0 Optical stimuli:
Au 637 nm, 2.73 nW, 100 ms
NPC/mA
BP Drain
Al2O3 Au -1
voltage
0.9 V
-2 0.8 V
0.6 V
-3
200 400 600 800 1000 1200 1400
Time/ms
(c) Original image pixel distribution Detected image pixel distribution
105 Static
Frequency
104
103
102
101
100
105 Moving
Frequency
104
105 Total: 462570
Frequency
104 103
103 102
102
101 101
100 100
0 0.2 0.4 0.6 0.8 1.0 0 0.2 0.4 0.6 0.8 1.0
Brightness/arb. units Brightness/arb. units
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Adv. Electron. Mater. 6 2000536 [103] McCollough C 1965 Science 149 1115
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148701-19
物 理 学 报 Acta Phys. Sin. Vol. 71, No. 14 (2022) 148701
2) (National Demonstration Center for Experimental Physics Education, Northeast Normal University, Changchun 130024, China)
Abstract
Neuromorphic computing system, inspired by human brain, has the capability of breaking through the
bottlenecks of conventional von Neumann architecture, which can improve the energy efficiency of data
processing. Novel neuromorphic electronic components are the hardware foundation of efficient neuromorphic
computation. Optoelectronic memristive device integrates the functions of sensing, memorizing and computing
and is considered as a promising hardware candidate for neuromorphic vision. Herein, the recent research
progress of optoelectronic memristive device for in-sensor computing are reviewed, including optoelectronic
materials and mechanism, optoelectronic memristive device/characteristics as well as functionality and
application of in-sensor computing. We first review the optoelectronic materials and corresponding memristive
mechanism, including photon-ion coupling and photon-electron coupling type. Then optoelelctronic and all-
optical modulated memristive device are introduced according to the modulation mode. Moreover, we exhibit
the applications of optoelectronic device in cognitive function simulation, optoelectronic logic operation,
neuromorphic vision, object tracking, etc. Finally, we summarize the advantages/challenges of optoelectronic
memristor and prospect the future development.
* Project supported by the fund from the Ministry of Science and Technology of China (Grant No. 2018YFE0118300) and the
National Natural Science Foundation of China (Grant Nos. 11974072, U19A2091).
† Corresponding author. E-mail: wangzq752@nenu.edu.cn
148701-20