Integrated Circuit Processes of Semiconductor (MSE 445.

411_001)
HW2

You can write your answers in English or Korean. 답안 작성은 영어/한국어/혼용 가능합니다.

1. (10 pts) What is the integrated circuits (IC)?

2. (40 pts) Sketch a process flow that would result in the structure shown below by drawing a series of
drawings similar to those in lecture 2. For each drawing, explain what each process step does (e.g.
etching SiO2, photolithography, Ti deposition, source/drain ion implantation, annealing, and etc).

Ti