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Technology for Fabrication of
Microelectromechanical
Systems (MEMS) Transducers
[application areas]
The developed photolithogra-
phy-based fabrication technol-
ogy may be applied to produce
microactuators and microsen-
sors suitable for numerous
applications, e.g. telecom, auto-
motive, medical, measurement
and various industrial equip-
ment. This surface microma-
chining technology uses a com-
bination of different thin film
deposition and etching process-
es such as wet and reactive ion
etching, electron-beam vacuum
evaporation, electroplating, etc.
The technology was
successful-ly implemented for
fabrication of electrostatic
microrelays and micromotors.
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Micro and
Nano-
technologies
[year of invention] 2005. [novelty] [technological “Method of production of [notes]
readiness level] Microelectromechanical
MEMS transducers may be We offer adaptive surface
[authors] Available technological switch”.
fabricated on high-resistivity micromachining technology
Prof. habil. dr. semiconductor substrates, infrastructure enables small- for fabrication of MEMS
[commercialisation]
which enables integration of batch fabrication as well transducers, which have
Vytautas Ostaševičius,
microstructures into as electric and dynamic Have not been commercialised been developed in
Prof. habil. dr. Sigitas
monolithic ICs or they may characterization of yet. MEMS production Lithuania for the first time. It
Tamulevičius,
be realized on dielectric MEMS transducers. technologies ensuring broader may applied for fabrication
dr. Viktoras Grigaliūnas, dr.
substrates, which enables opportunities are entering the of micro-scale components
Rolandas Daukševičius. their integration into hybrid [what are we looking market rapidly. of diverse functionality.
circuits. for in this stage of Dynamic, topographic and
[features, technical development?] [alternatives] electric characterization of
specifications] microstructures in controlled
Searching for partners for MUMPs (MEMSCAP Inc.),
The technology may be vacuum and temperature
joint R&D projects. SUMMiT (Sandia), iMEMS
environment is possible by
applied for fabrication of (Analog Devices), MIDIS,
using Polytec MSA-500 laser
micromechanical components [patenting] MOSIS
with dimensions ranging from measurement system together
LR patent No. 5208 with advanced probe station.
several to several hundred
microns.
national innovation and entrepreneurship centre inventions, R&D projects 165