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Growth of Epitaxial (K, Na) NbO3 Films With Various Orientations by Hydrothermal Method and Their Properties (KNN 老師要的)
Growth of Epitaxial (K, Na) NbO3 Films With Various Orientations by Hydrothermal Method and Their Properties (KNN 老師要的)
Physics
{100}c-, {110}c- and {111}c-oriented epitaxial (K, Na)NbO3 thin films were grown at 240 °C on (100)cSrRuO3//(100)SrTiO3, (110)cSrRuO3//
(110)SrTiO3, and (111)cSrRuO3//(111)SrTiO3 substrates by the hydrothermal method. Their film thicknesses increased with the deposition time
and then eventually saturated at longer deposition times. Their saturated film thicknesses were mainly determined by their orientation and the order
was {100}c-, {110}c- and {111}c-orientation regardless of any experimental conditions. These films consisted of grains with characteristic
morphologies. All of the films exhibited similar ferroelectric and piezoelectric properties irrespective of the film orientation. The remnant
polarizations (Pr) and coercive fields (Ec) of the {100}c-, {110}c- and {111}c-oriented films at the maximum electric field of 500 kV cm−1 were
31 μC cm−2 and 111 kV cm−1, 27 μC cm−2 and 94 kV cm−1, and 25 μC cm−2 and 110 kV cm−1, respectively, while their effective values of
piezoelectric coefficient (d33) were approximately 31–33 pm V−1. Similar films are associated with its mixed domain structure.
© 2019 The Japan Society of Applied Physics
(a) (b)
Fig. 2. (Color online) (a) Relationships between the orthorhombic unit cell and pseudo-cubic unit cell of (K, Na)NbO3 and (b) the schematic illustration of
orientation relationship of {100}c-(K, Na)NbO3 epitaxial film deposited on (100)cSrRuO3//(100)SrTiO3.
hydrothermal process proceeds with competitive reactions of (K0.88Na0.12)NbO3 films deposited on all oriented substrates.
film deposition and powder formation and that the saturation Each film thicknesses increased almost linearly with the
time agreed with the time required for consuming the residual deposition time within the time range of 2–5 h irrespective of
Nb source.41) The data shown in Fig. 1(b) and 1(c) revealed the film orientation, where their deposition rates depended on
that the consumption time of the residual Nb source each orientation of their substrates. The order of the deposition
decreased when the concentration of the mixture solution rate agreed well with that of the saturation thickness [see
increased. On the other hand, the deposition rate of the film Fig. 3(a)]. The deposition rates of (K0.88Na0.12)NbO3 films on
before saturation time clearly shows that the deposition of the (100)cSrRuO3//(100)SrTiO3, (110)cSrRuO3//(110)SrTiO3 and
films was rate-limited by the concentration of the KOH and (111)cSrRuO3//(111)SrTiO3 were 2.9, 2.0 and 1.8 μm h−1,
NaOH within the limit of the present condition. respectively. The deposition rates of (K0.88Na0.12)NbO3 films on
Further, the dependences of the film thickness on the (100)cSrRuO3//(100)SrTiO3 and (110)cSrRuO3//(110)SrTiO3
orientation of the substrate, which will correspond to the film substrates were 1.5 and 1.1 times larger than that on
orientation, were evaluated under various hydrothermal condi- (111)cSrRuO3//(111)SrTiO3 substrate. As discussed later, the
tions. Figure 3(a) shows the film thicknesses as a function of the ratios of the deposition rate accord to the ratios of the saturation
deposition time for (K0.88Na0.12)NbO3 films deposited on thickness. This indicates that the saturated thickness was
(100)cSrRuO3//(100)SrTiO3, (110)cSrRuO3//(110)SrTiO3 and determined by the deposition rate of each oriented film. This
(111)cSrRuO3//(111)SrTiO3 substrates. The concentration of is because these times for starting deposition and saturating the
the KOH/NaOH solution and input mass of Nb2O5 powder film thickness were almost independent of the film orientation.
were fixed at 7 mol l−1 and 0.25 g, respectively. All of the films Figures 3(c) and 3(d) show the film thicknesses as a
deposited on their oriented substrates exhibited similar trends function of the concentration of the KOH/NaOH solution and
for their film thicknesses against the deposition time. Their film input mass of Nb2O5 powder, respectively. Their film
thicknesses increased with the deposition time and then thicknesses increased monotonously with the concentration
saturated above 4 h. No dependency of the saturation time on of the KOH/NaOH solution in the range of 5–7 mol l−1 for all
the substrate orientation is reasonable because the saturation oriented films. On the other hand, their film thicknesses
time was mainly determined by the time for consuming the Nb increased with the input mass of Nb2O5 powder up to 1 g and
source in solution. The film thicknesses after saturation time in then decreased with excessive Nb2O5, irrespective of the
Fig. 3(a) were ordered as follows: {100}c-, {110}c- and orientations of their substrates. The film thicknesses were
{111}c-oriented films. Figure 3(b) shows their film thicknesses ordered as follows: {100}c-, {110}c- and {111}c-oriented
as a function of the deposition time enlarged from 0 to 5 h for films, similarly to the result in Fig. 3(a). The decrease in the
SLLB14-3 © 2019 The Japan Society of Applied Physics
Jpn. J. Appl. Phys. 58, SLLB14 (2019) Y. Ito et al.
(a)
(b)
(c)
(e)
(b)
(c) (f)
Fig. 6. (Color online) XRD θ–2θ profiles near (a) (K, Na)NbO3 {300}c,
Fig. 5. (Color online) (a)–(c) XRD θ–2θ profiles and (d)–(f) X-ray pole (b) (K, Na)NbO3{220}c and (c) (K, Na)NbO3 {222}c, for (K0.88Na0.12)NbO3
figures of the (K0.88Na0.12)NbO3 films grown on [(a), (d)] (100)cSrRuO3// films grown on (a) (100)cSrRuO3//(100)SrTiO3, (b) (110)cSrRuO3//
(100)SrTiO3, [(b), (e)] (110)cSrRuO3//(110)SrTiO3, and [(c), (f)] (110)SrTiO3 and (c) (111)cSrRuO3//(111)SrTiO3 substrates, respectively.
(111)cSrRuO3//(111)SrTiO3 substrates. Data shown in (d)–(f) was measured
at fixed 2θ angles corresponding to the (K0.88Na0.12)NbO3{110}c, {100}c,
and {111}c for films deposited on [(a), (d)] (100)cSrRuO3//(100)SrTiO3,
[(b), (e)] (110)cSrRuO3//(110)SrTiO3 and [(c), (f)] (111)cSrRuO3// (110)cSrRuO3//(110)SrTiO3 and (111)cSrRuO3//(111)SrTiO3
(111)SrTiO3 substrates, respectively. substrates, respectively. These peaks were found to separate
into two or three, suggesting the presence of a multi-domain
structure. {300}c peaks consist of about 82% of (003)pc and
perhaps due to the crystal structure and surface energy (300)pc and 18% of (030)pc ones in integrated intensities as
anisotropies. shown in Fig. 6(a) for the (K0.88Na0.12)NbO3 films deposited on
3.2. Crystal structures and surface morphologies of (100)cSrRuO3//(100)SrTiO3 substrates, while {220}c peaks
the deposited films consist of about 23% (202)pc, 34% of (20-2)pc and 43% of
In this section, crystal structure and surface morphology were (022)pc, (0–22)pc, (220)pc and (2–20)pc for the films deposited
observed using these films with 3–4 μm in thickness grown on (110)cSrRuO3//(110)SrTiO3 substrates. Finally {222}c peaks
on (100)cSrRuO3//(100)SrTiO3, (110)cSrRuO3//(110)SrTiO3, consist of 56% (222)pc and (2–22)pc and 44% of (−222)pc and
and (111)cSrRuO3//(111)SrTiO3 substrates. It must be noted (22-2)pc for the films on (111)cSrRuO3//(111)SrTiO3 substrates.
we cannot detect an obvious change in electrical properties Taking account of the fact that (K0.88Na0.12)NbO3 films have an
with the film thickness within the present experimental orthorhombic symmetry,30) splittings of the XRD peaks can be
conditions. attributed to the domain structure of these films. In fact, R. M.
Figure 5 shows representative XRD θ–2θ patterns and Fernando et al., reported that that the (K, Na)NbO3 ceramics
X-ray pole figures at fixed 2θ angles corresponding to the with orthorhombic symmetry have 180°, 90°, 60° and 120°
(K0.88Na0.12)NbO3 {110}c, {100}c, and {111}c for films domains with [101]c polar axis.43) The existence of these multi
deposited on (100)cSrRuO3//(100)SrTiO3, (110)cSrRuO3// orientations affects the ferroelectric and piezoelectric properties
(110)SrTiO3, and (111)cSrRuO3//(111)SrTiO3 substrates, re- in Sect. 3.3. It must be noted that we confirmed that the shoulder
spectively. These films were deposited by the hydrothermal that exists at the right side of the 003pc and 300pc peak did not
method with KOH/NaOH concentration of 7 mol l−1 and affect these properties.
input Nb2O5 mass of 0.25 g. Only {h00}c, {110}c, and Figures 7(a)–7(c) show the surface morphologies of the
{111}c (K0.88Na0.12)NbO3 peaks were observed in Figs. 5(a) {100}c-, {110}c- and {111}c-oriented (K0.88Na0.12)NbO3
–5(c), respectively, suggesting that {100}c-, {110}c-, and films. Their films consisted of grains with characteristic
{111}c-oriented films were obtained on (100)cSrRuO3// shapes depending on the crystal orientation of the films and
(100)SrTiO3, (110)cSrRuO3//(110)SrTiO3 and (111)cSrRuO3// substrates. That is, the {100}-oriented film consisted of
(111)SrTiO3 substrates. Fourfold-, twofold-, and threefold- square-shaped grains rotated by 45° from [001] SrTiO3 [in
symmetry peaks at azimuth ψ angles of 45, 45, and 75° were Fig. 7(a)]. Roof-shaped grains elongated along [001] SrTiO3
exhibited in Figs. 5(d)–5(f), respectively, which indicates in- were observed for the {110}c-oriented film [Fig. 7(b)].
plane crystal orientation of these films deposited on Finally, triangle-shaped grains with edges along [1–10]
(100)cSrRuO3//(100)SrTiO3, (110)cSrRuO3//(110)SrTiO3 and SrTiO3 and flat top surface were observed for the {111}-
(111)cSrRuO3//(111)SrTiO3 substrates. These results certified oriented film [Fig. 7(c)].
that the epitaxial films with three different crystal orientations The characteristic shapes of the grains are attributed to the
of {100}c-, {110}c- and {111}c were grown successfully by growth mechanisms of the epitaxial (K, Na)NbO3 films on
the hydrothermal method. the surfaces of single-crystal substrates. Considering that the
Figures 6(a)–6(c) show XRD θ–2θ profiles near (K, Na) {100}c-oriented film grows faster than the {110}c- and
NbO3{300}c, (K, Na)NbO3{220}c and (K, Na)NbO3 {222}c for {111}c-oriented films, as shown in Fig. 4, possible scenarios
(K0.88Na0.12)NbO3 films grown on (100)cSrRuO3//(100)SrTiO3, can be illustrated as described in Figs. 7(d)–7(f). First, initial
SLLB14-5 © 2019 The Japan Society of Applied Physics
Jpn. J. Appl. Phys. 58, SLLB14 (2019) Y. Ito et al.
(a) (d)
(b) (e)
(c) (f)
Fig. 7. (Color online) (a)–(c) Surface SEM images and (d)–(f) possible growth models for the (K0.88Na0.12)NbO3 films grown on [(a), (d)]
(100)cSrRuO3//(100)SrTiO3, [(b), (e)] (110)cSrRuO3//(110)SrTiO3, and [(c), (f)] (111)cSrRuO3//(111)SrTiO3 substrates.
nuclei oriented along the surface normal direction and {111}c from XRD patterns in Fig. 6 and projections with respect to
facets grow on all of the substrate surfaces. Subsequently, the surface normal directions of these domains. The expected
crystal facet grew faster along {100}c. Further studies are saturation polarization for the {100}-oriented film is 1.3 times
ongoing to clarify the growth mechanism. larger than those for other orientations. This shows almost good
3.3. Ferroelectric and piezoelectric properties agreement with present experimental results, which show
Ferroelectric and piezoelectric properties were also evaluated remanent polarization {100}-oriented film is 1.1 times larger
using the films with 3–4 μm thick grown on (100)cSrRuO3// than that for {110}-oriented film and 1.2 times larger than that
(100)SrTiO3, (110)cSrRuO3//(110)SrTiO3, and (111)cSrRuO3// for the {111}-oriented film. Thus, the small orientation variation
(111)SrTiO3 substrates shown in Figs. 5–7. Figures 8(a)–8(c) can be explained by the formation of multi-domain structures.
show room-temperature polarization–electric-field (P–E) hyster- Similar small orientation dependency is also reported
esis loops measured at 100 kHz for the (K0.88Na0.12)NbO3 for {100}c, {110}c, and {111}c-oriented tetragonal
films deposited on (100)cSrRuO3//(100)SrTiO3, (110)cSrRuO3// Pb(Zr0.35Ti0.65)O3 films.44) In this case, the predicted Pr
(110)SrTiO3, and (111)cSrRuO3//(111)SrTiO3 substrates. All of values based on semi-quantitative estimation using the
the films exhibited clear hysteresis loops originating from their projection of the spontaneous polarization to the surface
ferroelectricity. Their remnant polarizations (Pr) and coercive normal direction for each domain and its volume fraction also
fields (Ec) at the maximum electric field of 500 kV cm−1 were almost agreed with the experimental results.
31 μC cm−2 and 111 kV cm−1, 27 μC cm−2 and 94 kV cm−1, Figures 8(d)–8(f) show the S–E curves measured at
and 25 μC cm−2 and 110 kV cm−1, respectively. These results 5.2 Hz. These curves originating from the ferroelectricity
suggest that the ferroelectric properties did not depend on the were clearly observed for all of the films. The effective
orientation considerably. To understand the ferroelectric prop- values of piezoelectric coefficient, d33, of the films
erty, we must take into account the effect of the multi-domain on (100)cSrRuO3//(100)SrTiO3, (110)cSrRuO3//(110)SrTiO3,
structure as already discussed in Fig. 6. This multi-domain and (111)cSrRuO3//(111)SrTiO3 substrates estimated from
structure is considered to result in the small anisotropy of the strain curves were 33, 31, and 31 pm V−1, respectively.
the remnant polarization of these films. The polar axis of These results suggested that the piezoelectricity also did not
(K, Na)NbO3 with orthorhombic symmetry is 〈101〉c and shows depend so strongly on the film orientation. The multi-domain
180°, 90°, 60° and 120° domains, in general. We expect that structure ascertained in Figs. 7(d)–7(f) should contribute to
saturation polarization of polarization for {100}c-, {110}c- and the piezoelectric response, similar to the ferroelectric polar-
{111}c-oriented (K0.88Na0.12)NbO3 films should be 0.57Ps, ization. However, the piezoelectric coefficient is more
0.45Ps, and 0.45Ps, respectively, where Ps is a spontaneous complicated because it is a third-order tensor. Therefore,
polarization, taking into account volume fractions estimated here we discuss them indirectly; that is, generally, the d33 can
SLLB14-6 © 2019 The Japan Society of Applied Physics
Jpn. J. Appl. Phys. 58, SLLB14 (2019) Y. Ito et al.
Fig. 8. (Color online) (a)–(c) P–E loops measured at 100 kHz and (d)–(f) strain–electric-field (S–E) loops measured at 5.2 Hz for the (K0.88Na0.12)NbO3
films grown on [(a), (d)] (100)cSrRuO3//(100)SrTiO3, [(b), (e)] (110)cSrRuO3//(110)SrTiO3, and [(c), (f)] (111)cSrRuO3//(111)SrTiO3 substrates.
be described as d33 = 2QPrεrε0, where Q, εr and ε0 are an {111}c-oriented films, almost independent on the deposition
electrostrictive coefficient and relative dielectric constant conditions within the present study. These films consisted of
and dielectric constant of the vacuum, respectively. The grains with characteristic shapes depending on the orienta-
εr values measured for (K0.88Na0.12)NbO3 films grown tions of the substrates, which could be explained by the
on (100)cSrRuO3//(100)SrTiO3, (110)cSrRuO3//(110)SrTiO3 promoted crystal growth along the {100}c direction.
and (111)cSrRuO3//(111)SrTiO3 substrates at 1 kHz were However, significant orientation dependencies of the ferroe-
337, 418 and 453, respectively. The measured εr values are lectricity and piezoelectric response were not observed in the
not so largely varied by the crystal orientation, as well as the P–E and S–E characteristics, which suggest the strong
values of remnant polarization, Pr as observed in Figs. 8(a)– contribution of the non-180° domains.
8(c). Therefore, we can consider again that the d33 values in
Acknowledgments
this study also do not show so marked dependence on the
crystal orientation by assuming the almost constant Q value This research was partially supported by the Japan Science
for each orientation. Note that the order of the value of and Technology Agency and the Adaptable and Seamless
polarization is {100}c > {110}c > {111}c, whereas that of Technology Transfer Program through Target-driven R&D
dielectric constant is {111}c > {110}c > {100}c. These or- (A-STEP) Grant No. JPMJTS1616.
ders in opposite relation would also contribute to the piezo-
ORCID iDs
electric responses without significant dependency against the
crystal orientation. Takao Shimizu https://orcid.org/0000-0001-9508-7601
Takahisa Shiraishi https://orcid.org/0000-0002-2154-0589
4. Conclusions Takanori Kiguchi https://orcid.org/0000-0003-4541-8761
{100}c-, {110}c- and {111}c-oriented epitaxial (K0.88Na0.12) Toyohiko J. Konno https://orcid.org/0000-0002-3396-
NbO3 films were deposited on (100)cSrRuO3//(100)SrTiO3, 1049
(110)cSrRuO3//(110)SrTiO3 and (111)cSrRuO3//(111)SrTiO3 Hiroshi Funakubo https://orcid.org/0000-0002-1106-200X
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