68
1, MARCH 1996
Micro Mechatronics and Micro Actuators
Hidenoni Ishihara, Fumihito Arai, Member, IEEE, and Toshio Fukuda, Fellow, IEEE
(Invited Paper)
Abstract-Micro mechatronics is the synergetic integration of
both mechanical and electronic systems based on scaling effects
in the micro world. A micro mechatronics system is expected
to be the key component of the mechanical system, such as in
electronic automotive technologies. Micro mechatronics requires
the organic combinationof micro devices such as micro processor,
micro sensor, and micro actuator. Among the micro devices, the
micro processor and micro sensor have been widely employed
in advanced mechatronics products, but not the micro actuator.
This paper surveys the state of the art of micro mechatronics and
deals with micro actuators as new devices for micro mechatronics
and advanced mechatronics, which play an important role in
today’s integrated mechanical products. Since micro actuators
are still under development, we focus on micro actuators for
further research and development in this paper.
I. INTRODUCTION
ECENT developments in mechatronics expand their ap-
plication fields. Mechatronic devices and systems have
been introduced into various fields, industrial applications,
medical devices, and others.
The evolution of mechatronic systems requires superior
functions. Also, their structures and mechanisms become more
complex. As each element in constructing the complex inte-
grated mechanical system becomes miniaturized, it requires
advanced functions and higher reliability, especially in organic
combinations of multiple miniaturized actuators and sensors
that can construct mechanical systems to perform complex
motions. However, the improvement of mechanical systems
is not achieved by only miniaturization of those devices, but
combinations of them based on the effects of miniaturization.
Micro technologies are becoming key and crucial to system
performance, such as seen in electric automotive technologies.
Micro processors and micro sensors have been introduced as
units in pressure control of the fuel injection system.
To realize the organic combination of micro devices, micro
mechatronics has been proposed. We define micro mechatron-
ics as “Synergetic integration with mechanical engineering
and electronic engineering base on scaling effects in the
micro world.” In mechanical systems, the elements produced
according to micro mechatronics become the key component
for control of the system performance. Micro mechatronics is
expected to be applied in a number of fields, such as medical,
bio-engineering, industrial, and service fields. Table I shows
the application fields of micro mechatronics and their examples
[I].
Manuscript received November 13, 1995, revised December 20, 1995
The authors are with the Department of Micro System Engineenng, Nagoya
University, Nagoya, 464-01 Japan.
Publisher Item Identifier S 1083-4435(96)02294-6.
10834435/96$05.OO 0 1996 IEEE
IEEUASME TRANSACTIONS ON MECHATRONICS, VOL. 1, NO.
Micro mechatronics consists in the development of micro
devices, as well as their integration and control. Micro devices
have been developed by using micro machining, such as silicon
micro fabrication, and conventional machining. However, the
integration and control of these devices have been rarely seen
except in the integration of micro processor and sensors for au-
tomotive technologies. The evolution of micro mechatronics,
the integration with micro actuators and other micro devices
especially is considered to be needed.
When considering micro mechatronics, the scaling effect
is important for designing micro mechatronic systems and
controlling these systems. When the objects are miniaturized,
physical phenomena are different from the macro world. For
example, viscosity force and friction force become more
effective than inertial force. This scaling effect requires a dif-
ferent approach between micro mechatronics and conventional
mechatronics.
In this paper, we survey micro mechatronics, and introduce
micro actuators for micro mechatronics and some applications.
Among micro devices such as the micro processor, micro
sensor, and micro actuator in micro mechatronics, the micro
processor and micro sensor have been widely employed in
advanced mechatronics products, but not the micro actuator.
Since micro actuators are still under development, we focus
on the micro actuators in this paper.
11. MICROMECHATRONICS
Micro mechatronics is considered to need the following
elements and the organic combination of them as shown in
Fig. 1 [2].
A. Micro Processor
Micro processors control the micro mechatronics system.
Control method is classified as a simple control by sequential
logic, and a more complex control by superior functions such
as judgment and deduction. The control method decides kinds
of micro processor such as logic devices and CPU.
B. Micro Sensor
In micro mechatronics, to intellectualize its systems, there
are requirements such as developing sensors to dctcct the
environmental situation. Micro machining functionalizes mi-
cro sensors, and facilitates constructing new types of micro
sensors. Especially, in micro machining, the micro fabrication
technologies have introduced micro structure into the micro
ISHIHARA el al.: MICRO MECHATRONICS AND MICRO ACTUATORS
TABLE I
APPLICATION
FIELDSAND EXAMPLESOF MICROMECHATRONICS
Mcdical Ficld
Industrial Ficld
sensors, and integrated them with electric circuits. Micro
fabricated micro sensors have been developed as follows:
1) pressure sensors [31;
2) acceleration sensors [4];
3) chemical sensors [5].
Some of these micro sensors have been already introduced
as a pressure controller of the fuel injection system in auto-
mobiles.
C. Micro Actuator
Micro actuators employ the motion of the micro mecha-
tronic systems. There have been proposed various kinds of the
micro actuators such as the follows:
1) electromagnetic micro actuators [6]-[101;
2) electrostatic micro actuators [ 1114181;
3) piezoelectric micro actuators [ 191-[241;
4) optical micro actuators [24]-[28];
5 ) others [29]-[38].
Such micro actuators have been developed by the com-
bination of micro machining and conventional technologies.
However, there are large differences between theoretical de-
signs and properties of the prototype, so that previous micro
actuator cannot be used without evaluation of the properties
after construction. To apply micro actuators into some fields,
the design method and the machining technologies must be
improved for the micro actuator to perform the expected
motion.
D. Interfuce
Two types of interface are considered to be important
for micro mechatronics: One is the interface between the
micro devices and another is between the micro mechatronics
system and the operator [39]-[41]. The interfaces between the
elements help to convert signals between the different physi-
cal amounts. The interface between the micro mechatronics
69
system and the operator makes it smoother to transfer the
information between them.
E. Energy
All micro devices, such as micro actuators, micro sensors
and micro processors, require energy to drive themselves, and
electrical energy is usually used for driving the devices. To de-
velop the micro mechatronic system, it must be clarified what
energy is used as the driving energy, and how it is supplied.
In previous micro mechanical systems, electrical energy was
supplied through electric cables. However, the supply cables
become the obstacle in the system’s performance, because
the resistance of the cable becomes larger than the working
force required of those systems when miniaturizing. Therefore,
several investigations on the energy supply system have been
carried out, and a typical method to supply the energy is the
following.
1) Noncontact energy supply: As the medium of trans-
porting the energy, this supply method uses the energy
spreading in air or in water such as light, magnetic field,
and ultrasonic waves [42].
2) Energy supply from a battery: The battery inside the
body supplies the energy for each device. A typical
battery is a chemical battery such as a Lithium battery,
a Silver Oxide battery or a Nickel-Cadmium battery.
However, since the capacity of a chemical battery is
dependent on its size, it is difficult to miniaturize the
chemical battery.
F. Materials
Materials for micro mechatronics are classified as structural
materials and functional materials in constructing micro actu-
ators and micro sensors. Structural materials, such as metal,
silicon, and polymers have been used. Functional materials
have an ability to aid in developing new mechanisms for micro
actuators and micro sensors.
70
Micro Actuator Micro Sensor
Fig. 1. Organic combination of micro devices.
G. Machining
The evolution of micro devices is partially dependent on
improvements in machining. Micro devices are produced by
micro machining such as silicon technologies, photo fabrica-
tion, and LIGA process [43]-[46]. These machining methods
make it possible to develop micro structure whose dimensions
are less than a 1-mm cube, but it is still impossible to assemble
these micro devices produced by micro machining. To develop
the micro mechatronics systems of the future, it is necessary
to improve micro machining and develop micro assembling
technologies.
In this survey, we introduce the micro actuator for micro
mechatronics and some applications of those micro actuators.
Also, we show other problems in micro physics, having much
influence in initial design.
111. MICROPHYSICS
Differences of dimensions between the macro and micro
world cause a difference in the influential physical phenomena,
motion of the objects, and relative change of the system
performance between those worlds. Here, we define “micro
physics” as the natural science to study motion, structure of the
objects, thermal, optical, electrical, and magnetic effects that
change or become dominant when the objects are miniaturized.
Micro physics is very important in the design, fabrication
and control of the micro mechatronics system because of the
miniaturization of the key components. For example, attraction
forces are dominant in the micro world compared to gravita-
tional force. Brownian motion is not negligible in a liquid.
Since the dominating physical laws are completely different
between the macro and micro world, we must consider micro
physics in designing, fabricating, and controlling miniaturized
objects. However, these problems have not been treated so
seriously before. Especially, study on the attraction forces is
an essential matter in handling small objects. In this section
we introduce typical attraction forces that must be considered
in controlling and manipulating miniaturized objects.
IEEWASME TRANSACTIONS ON MECHATRONICS, VOL. 1, NO. 1, MARCH 1996
Atom
Micro Sphere Micro Sphere
(b) (C)
Fig. 2. Attraction force between micro objects. (a) van der Waals. (b) Liquid
bridge force. (c) Electrostatic force.
For a rough estimate of the miniaturization effects on
performance, scaling law is frequently used. For example,
performance of the micro actuator is so much influenced by
miniaturization. Oln the basis of on the scaling analysis, we can
estimate a suitable principle for actuation. Scaling law is also
a powerful tool for designing the micro mechatronics system,
which includes micro mechanisms, energy supply components,
and so on. In this paper, we focus on the micro actuators, which
become a key component to attain good system performance,
and introduce suitable actuation principles that come from
scaling advantage when miniaturizing.
A. Attraction Forces
Attraction forces are dominant in the micro world compared
to gravitational force. Typical attraction forces that have great
influence in the air can be summarized as follows:
1) Van der Waals forces;
2 ) electrostatic forces;
3 ) surface tension forces.
Fig. 2 shows the model of these attraction forces. Rela-
tionship of these forces is fully dependent on environmental
conditions, such as humidity, temperature, surface condition,
material, and relative motion. We have studied reduction and
control methods of these forces to control and manipulate
small objects smoothly [47]-[49].
B. Scaling Efsects of Micro Actuators
Differences of dimensions between the macro and micro
world cause a difference in the physical phenomena and the
motion of the objects between those worlds. Table I1 shows the
dimensions of several forces. As shown in Table 11, each force
has different dimension, and is influenced by miniaturization.
For example, the viscosity forces and friction forces become
dominant for the motion of small objects compared with
the inertial forces. From this table, we can evaluate suitable
actuation methods for the micro actuators.
 ~

ISHIHARA et al.: MICRO MECHATRONICS AND MICRO ACTUATORS 71

TABLE I1
SCALING EFFECTSDIMENSIONS
OF FORCES

Scaling
Equation IEffect I
-Sm B p : permeability b : magnetic field density
L2
2P sm : area of cross section of coil

Electrostatic Force

Thermal Expansional
'static
_ES
.-

2
v2
4 I 1 Lo
E : permittivity
V : applied voltage
S: surface area
d gap between electrodes
e : Young's Modules L : length
Flhermal I. T : temDerature AL: strain
Force
eS ~
W E )
I.
I r,2 I e : Young's Modules L : length
T : temDerature AL: strain
m : mass I : time
Inertial Force
x : disdacement

I Viscosity Force
c : viscosity coefficient S: surface area
x : displacement L : length I : time I
1 Elastic Force 1 Fe e$-
AL
I.
1 1 L2
e : Young's Modules S: cross section area
AL: strain L : lennth I
In Table 11, the electrostatic force Fstatic is represented by Since the electromagnetic force also depends on the power of
the following equation: the electromagnetic field, it isn't said that the electromagnetic
force is not suitable for the micro actuator. However, it is true
ES v2 that the efficiency of the electromagnetic force generated in the
Fstatic = --
2 d2 micro structure is questionable, because the electromagnetic
where E is dielectric coefficient, S is surface area of electrode, field depends on the size of the magnetic elements.
V is applied voltage, and d is distance of gap between
electrodes. Dimension of ( 1) is represented by the following IV. MICROACTUATOR
equation:
Many types of micro actuators have been proposed in
[Fstaticl = [-
EV2
4
s previous studies. Design of the actuator is decided by how
to obtain the physical energy required. The relationship of the
energy transformation is shown in Fig. 3. In Fig. 3, the basic
energy is classified as optical, electric, thermal, mechanical,

=.[LO] (. = T).
Equation (2) shows that electrostatic force is generated in
proportion to S/d2, [LO].That is, if S/d2 is constant in minia-
turizing the electrostatic actuator, the generated electrostatic
force isn't changed. Therefore, the electrostatic force is said
to be suitable for the driving force of the micro actuator.
Dimension of electromagnetic force generated in a solenoid
coil is shown as following equation:
[Fmagneticl = [-]
SmB
2PO
B bearings or by other methods. The reason is that the positions
(3)
where Sm is surface area of cross section of the solenoid
coil, B is magnetic field density, and PO is permeability.
Equation (3) shows that the solenoid coil generates the elec-
tromagnetic force in proportion to L2. Because of that, the
electromagnetic force decreases in miniaturizing the structure.
and chemical energy. The actuator is defined as the device
converting the energy between the basic energies as shown in
Fig. 4. As the micro actuator, an electrostatic micro actuator
and an electromagnetic micro actuator have been proposed.
However, these micro actuators have the following problems:
1 ) Output Force: Electromagnetic force and electrostatic
force are often used for the driving force of a micro actuator.
However, both forces generated from a micro structure of less
than 1 mm cube are too weak to move other objects. For
example, electrostatic micro motors have not been reported
able to rotate gears. Because of this, to apply micro actuator
in micro mechanical systems, a new mechanism to generate
larger power is required.
2) Structure: In an electrostatic or electromagnetic actu-
ator, the rotor must be held in its position by the ball
of its movable parts are controlled by the balance between
the driving force and external forces such as elastic forces.
However, a holding structure instead of the ball bearing has
not been developed for micro systems. Fig. 5 shows typical
structures holding the rotor in the micro actuator [ 111, [ 161.
Among holding methods proposed in previous studies, we
survey two methods. One is holding the movable parts by
12
Kl ~ Frlct'on -pGG&-li
Thermal ExpPruwn
Fig 3. Energy transformation between basic energies
Elastic beam , A. ClussiJications of Micro Actuator
Fixed element
t
Movable element
(a)
(b)
Fig 4. Holding mechanisms (a) By elastic beam. (b) By coating with rigid
material
the elastic beams (Fig. 5(a)), and the other is coating the
surface of the contact face with rigid elements (Fig. 5(b)).
The elastic beam is effective for holding the position of the
rotor, and makes it easy to design its structure. However, the
structure of the elastic beams restricts movement, so that it is
difficult to increase the motion of the rotor. The other is used
for holding the rotating rotor around the shaft instead of the
ball bearings, and keeps the rotor and the shaft from binding
by heat generated by friction.
Recently, a functional element has been proposed as a new
material expected to solve the problems related to output force
and structure for micro actuator. Functional elements are the
materials that convert the energy from their physical condi-
tion to mechanical energy. A characteristic of the functional
elements is that their transformation is a reversible process.
When the piezoelectric element, a typical functional element,
has voltage applied, the piezoelectric element expands in
EEUASME TRANSACTIONS ON MECHATRONICS, VOL. 1, NO 1, MARCH 1996
Fig. 5. Electromagnetic motor for micro car.
proportion to the voltage applied, and when the applied voltage
is turned off, piezoelectric element returns to its original
shape. Because of that, the functional elements do not need
a holding mechanism. Also, stacked piezoelectric elements
generate more power than the electromagnetics force does.
Table I11 shows typical micro actuators and their character-
istics. The micro actuators are classified by their mechanisms:
One is driven by the force produced according to electromag-
netics, and the other uses a functional element. The micro
actuators generating the mechanical force according to the
electromagnetics convert the energy from electric energy to
mechanical energy, and are typically an electrostatic micro
actuator and electiromagnetic actuator. Micro actuators using
functional elements convert from the peculiar energy of their
material to mechanical energy, and typical micro actuators
using functional elements are a piezoelectric element, giant
magnetic alloy (GMA), optical actuator, shape memory alloy
(SMA), polymer actuator, and so on. Typical micro actuators
with their application examples are introduced here.
B. Micro Actuator Using Electromagnetics Force
2) Electromagnetic Micro Actuator: Electromagnetic force
has been used as the driving force of conventional actuators
produced by popular machining, since the electromagnetic
force is able to be controlled by the electric signals such
as an electric current. However, an electromagnetic actuator
requires a long cable to make the electric coil that generates
the magnetic field, and has large resistance with large Joule
loss, so it is not suitable for miniaturization. Electromagnetic
actuators have been frequently used for the focusing system
of an optical disk drive and the magnetic head positioner of
the hard disk drive.
Hisanaga and Teshigawara developed the electromagnetic
motor into a micro car, whose dimension is 4.6 mm in length
[6],[7]. This motor has similar structure to a stepmotor used
in a quartz watch and it consists of a small rotating permanent
magnet, a small coil, and a small core shaft as shown in
Fig. 5. The rotating magnet, whose dimensions are 1 mm
in diameter and 01.5 mm in thickness, is a SmCo permanent
magnet 4-pole magnetized in radial direction. The magnetized
intensity is estimated about 600 Gauss or larger. The coil,
ISHIHARA er al.: MICRO MECHATRONICS AND MICRO ACTUATORS
TABLE I11
TYPICAL
MICROACTUATORS
AND THEIR
Fig. 6. Electromagnetic micro mobile actuator.
whose dimensions are 1 mm in diameter and 2.5 mm in length,
is coiled more than 1000 turns.
Itoh et al., have developed a small dc motor, that is a
cylindrical shape, 3 mm in external diameter, and 5 mm in
length [SI. This motor has three thin coils within the motor case
and a rare earth permanent magnet rotor supported by bearings.
Moreover, the rotor size is reduced by using a sensorless and
brushless dc driving method, and electro motive force (EMF)
is used to observe the rotor position. The starting torque of
the motor is 2 x lop5 Nm and the maximum output power is
98 mW when the applied voltage is 2 V.
Fig. 6 shows the design of a micro mobile actuator driven
by electromagnetic force [9], [lo]. The motion principle of
this actuator is that the elastic spring in the electric coil
vibrates by alternative electromagnetic fields generated in the
center of the electric coil. This unit is applied to the moving
mechanism, which converts the vibration to the propelling
force by the inclining cloth. The inclining cloth has inclining
wires implanted on basic cloth, and converts vibration into the
propelling force. This moving mechanism is suitable for micro
mechanism because this mechanism does not need the rotating
mechanism and other complex mechanisms. However, since
the properties of this actuator depend on the characteristics of
the inclining cloth, it is difficult to develop them with constant
properties.
2) Electrostatic Actuator: Since an electrostatic force is
generated between the approaching objects, there is no applica-
13
CHARACTERISTICS
tion for the conventional actuator except in the micro actuator.
In a micro structure, since objects approach each other, an
electrostatic force influences the objects effectively. Because
of that and scaling effect, an electrostatic micro actuator is
suitable for micro actuators and is easy to miniaturize. The
problem in using electrostatic force as the driving force is
that high voltage is needed to generate it. In previous reports,
electrostatic actuators were almost driven by high voltage of
over 100 V. Because of that, isolation and an energy source are
important problems in developing the electrostatic actuators.
Electrostatic force can be used both in linear and in rotary
motors. For an electrostatic micro actuator with liner motion,
there has been proposed a parallel type [Ill-[12], quad type
[13], and comb type of electrostatic actuators [14]. In these
actuators, the movable parts are connected to the substrate
by an elastic joint as shown in Fig. 7(a). Fig. 7(a) shows
the electrostatic micro gripper with three degrees of freedom
[13]. This micro gripper is constructed with a quad type
electrostatic actuator consisting of a movable electrode, four
fixed electrodes, two spacers and four elastic beams as shown
in Fig. 7(b). The pattern used to apply the voltage into the
fixed electrodes controls the motion of the movable electrode.
This actuator needs high voltage, more than 300 V to move
the movable electrode to its maximum position.
Electrostatic rotary micro actuators are classified as top-
drive, side-drive, and wabble (harmonic) type. UCB succeeded
in rotating a side-drive electrostatic micro motor [ 151, and the
MIT group improved the rotation speed to more than 10000
r/min and its life span to more than one week [16]. The
MIT group also developed the wabble type electrostatic micro
motor. The reason for success in developing the micro motor
and improving it was said to be solving the friction problems
between the rotor and the core shaft. The diameter of the rotor
is about 150 pm, and its rotation speed is more than 15000
r/min. By coating the contact surface of the core shaft and
rotor with rigid material, SiZN3, they accomplished a higher
rotation speed and improved its life span.
Other examples of electrostatic micro actuators are elec-
trostatic film actuator [12], insect type micro robot [17],
and air levitated electrostatic actuator system [ 181. Suzuku
et al. developed the flapping mechanism of an insect by
fabrication, using polysilicon and polyimide, and simulated the
14 ElW A S M E TRANSACTIONS ON MECHATRONICS, VOL. 1, NO. 1, MARCH 1996

Piezoelectric Element

Mobile Object
I / Mass

(1) Initial
dx condition

(2) Rapid
extension

Movable electrode (4)Sudden

stop
dx
Spacer

Fixed electrode
Fig. 8. Principle of precise positioner using PZT.

(b)
Fig. 7. Electrostatic micro gnpper with three degrees of freedom. (a)
Prototype of electrostatic micro gripper. (b) Structure of electrostatic micro
gripper.

wing joints and muscles of an insect type micro robot [17].

Pister et al. controlled the levitated particle by electrostatic
force in noncontact [ 181. They accomplished the nonfriction
condition by using an air bearing, and achieved movement by
electrostatic force.

C. Micro Actuator Using Functional Elements

I ) Piezoelectric (PZT)Actuator: The piezoelectric actua-
tor has high resolution (order of nm) and good response (order
of kHz), and generates a large force. Therefore, the piezoelec-
tric actuator is often applied in servo-positioning mechanisms
such as the precision positioning of X-Y automatic table [19].
For example, it is quite popular to use PZT (PbZrO3PbTiO3 :
52/48) for the precise positioner of a micro manipulator and
STMIAFM. Higuch et al., proposed the precise positioner with
the repetitive control of quick deformation of PZT [20]. Fig.
8 shows the principle of this precise positioner, which applies
the impact force and the difference between the inertial forces
of the mass on both sides of PZT at quick deformation. Fukuda (b)
et al. developed the micro manipulator with multi-degrees of Fig. 9. Micro fish. (a) Micro fish with two degrees of freedom. (b) Magni-
freedom using stacked-type PZT, and force experiments were fication mechanism of Type 11.
conducted to show its effectiveness [21]. Since the PZT has
the problems of hysteresis and creep phenomena, they should mechanism (Type 11). These robots employ the stacked type
be considered properly to control them. PZT actuator using the magnification mechanism expanding its
On the other hand, the piezoelectric actuator has the char- displacement up to 250 times (theoretically). Fig. 9(b) shows
acteristic that a high voltage is needed to drive it, and that the magnification mechanism of the fish with two degrees of
its strain is small (about 0.1%). Because of that, the PZT freedom. This micro fish moves backward at the first resonant
actuator is used with magnification mechanisms. Fig. 9 shows frequency (100 Hz in water) and moves forward at the second
a micro fish with 2 degrees of freedom using the steering resonant frequency (275 Hz in water).
ISHIHARA et al.: MICRO MECHATRONICS AND MICRO ACTUATORS
Fig. 10. Optical micro gripper using bimorph PLZT.
As another example of stacked-type PZT actuator, Ikuta
et al. proposed the cybernetic actuator combined with the
continuous actuation of the PZT, sliding mechanism, and a
brake actuated by electromagnetic force 1241. The mechanism
of continuous actuation and the sliding mechanism are as same
as the precise positioner proposed by Higuchi et al.
Except for the stacked-type PZT, bimorph-type PZT has
been applied in several micro actuators. Exceptionally, thin
films of PZT are promising for the future application of the
micro actuator. Morita et al. developed an ultrasonic motor
based on PZT thin film. This film is made on a titanium
cylinder by the hydrothermal method [25], and its thickness is
about 7-9 pm. A screw bolt was rotated by this motor of 300
r/min at about 33 driving voltage.
2) Optical Micro Actuator: The optical actuator is driven
by light, and does not need an electrical connection. Because
of that, the optical actuator does not experience the influence
of electrical noise, so it may become a desirable actuator. The
deformation principle of the optical actuator is effected by a
combination of the following three phenomena:
1) photostrictive effect of generating the photostrictive volt-
age, and the strain caused by the piezoelectric effect;
2) pyroelectric effect of generating pyroelectric current by
the temperature difference, and the strain caused by the
piezoelectric effect;
3) thermal deformation caused by applied heat fluctuation.
The PLZT (LdPbZr03PbTi03 : 3/52/48) is applied to the
actuator to convert from a light energy to a displacement [26].
The PLZT generates pyroelectric current caused by UV ray
(375-nm wave length peak with narrow spectral band width)
irradiation. Fig. 10 shows the optical micro gripper using the
bimorph of PLZT [27], [28]. The prototype consists of two
bimorphs of PLZT, two mirrors, two fingers, and two light
guides. When the light illuminates the surface of the bimorph
of PLZT, the bimorph bends itself and then the manipulator
performs a grasping motion. In another experiment, the re-
sponse and the controllability of the bimorph of PLZT have
been ascertained.
3) Giant Magnetostrictive Alloy Actuator: The giant mag-
netostrictive alloy (GMA) is the magnetic material that gen-
erates strain when the magnetic field is applied. The GMA
extends along the line of the magnetic field direction and
15
Fig. 11. In-pipe micro mobile robot.
generates the strain. The GMA has large force output and large
displacement compared with a piezoelectric element (about
two times), and the weight per unit stress of the GMA is so
small that it can be its great advantage as an actuator [29].
Fig. 11 shows an in-pipe micro mobile robot actuated by the
GMA, dimensions of 6 mm in diameter and 4 mm in length.
To drive this robot, we provide an alternative magnetic field
from outside of the pipe, and achieve the cableless mobile
robot. Maximum speed of this robot is about 0.5 m d s .
4 ) Shape Memory Alloy (SMA) Actuator: The shape mem-
ory alloy (SMA, ex., TiNi) has a shape memory effect, which
deforms itself by external force and returns to its original
shape at a specific temperature. The maximum strain is usually
set around 2%, so that the shape memory effect will not be
partially lost. Heat capacity decreases and heat radiation from
the surface of the SMA relatively increases by miniaturization
of the SMA, so we can expect to improve the response speed.
The SMA is applied in several fields, such as medical operation
tools [30]-[32]. Fig. 12 shows an active catheter with multi
degrees of freedom using SMA wires in the lumina, and multi
degrees of freedom by serial-parallel structure. This catheter
is a tool used in medical surgery, and is expected to improve
operationability during minimum invasive surgery. Trimmer et
al. developed the switching system of optical fiber by SMA
actuator [33]. Thin film SMA actuator has various qualities to
expand its application field. Walker et al. developed the curled
SMA thin film actuator that extends the film at 20 Hz [34].
5) Polymer Actuator: Polymer actuator is defined by such
characteristics as a) being strong against impact, force and
moment; b) easy to be produced; and c) lightweight. Most of
the polymer actuators are slow to respond, so that a polymer
actuator that has a fast response with low driving energy is
desired.
As medical use of drug delivery, a micro pump using
thennoresponsive polymer gel has been proposed [35]. The
thermoresponsive polymer expands its volume by absorbing
water when heat is applied. As another application of the
polymer actuator, the ionic conducting polymer film (ICPF)
has been of interest recently [36],[37]. ICPF is made from a
film of perfuorosolfonic acid polymer (Nafion 117, duPont and
company) chemically plated on both sides with platinum. The
ICPF is driven by low voltage (about 1.5 V) in liquid without
electrolysis, and is bent into anode side when the voltage is
applied to it. The ICPF has quick response with low driving
76 IEEEIASME TRANSACTIONS ON MECHATRONICS, VOL. 1, NO. 1, MARCH 1996

the three chambers in a flexible tube, and is bent by the

change of pressure in the chambers. This actuator has good
controllability, and performs a number of tasks.

v. OF MICROMECHATRONICS
APPLICATIONS
Application fields of micro mechatronics and their examples
have been shown in Table I. In this paper, we introduce
examples of applying micro mechatronics.

A. Micro Active Catheter System

Recently, neurosurgery using micro catheters has been car-
ried out. These micro catheters have multiple functions, but

1
-d
the inserting operation depends on the skill of operator. When
the micro catheter is inserted into a narrow blood vessel, it
is very difficult to insert it into a selected vessel smoothly. It
takes considerable time and the patient is stressed. To reduce
the burden to patients, the micro catheter must be improved in
order to insert more it smoothly. However, since the diameter
of a micro catheter for neurosurgery is about 1 mm, there has
not been an effective method of improving the micro catheter.
Fig. 12. Active catheter with multi degrees of freedom using SMA wires. Use of the micro actuator has been yet proposed as a method
(a) Prototype (single unit). (b) Configuration.
to improve it. Figs. 12 and 13 show the prototypes of micro
active catheters using SMA wired actuators and active guide
wire using polymer actuator.

B. Micro Scanner
Improvements in optical engineering have created precision
optical systems, and laser beams whose diameters is less
than 1 mm. This evolution also requires developing precision
optical instruments. Yasseen et al. developed the diffraction
grating micro scanners using the polysilicon micromotor [50].
This micro scanner applies use of the side-drive electrostatic
micro motor produce by Mehregany et al. Diameter of this
micro scanner is 500 pm, and the roughness of its polysilicon
rotor is reduced from 420 A to 17 A by chemical-mechanical
polishing. The gratings are tested at visible wavelengths (633
nm) and are verified to have spatial periods of 1.80 pm and
Lead wire Micro tube Electrode 3.86 bm, closely matching their design. This micro scanner
can be operated with a maximum operational speed of 1100
r/min at voltage as low as 18 V. They have goals such as use
in the preliminary bar code scanning without an external lens
system.

(b)
Fig. 13. Active guide wire using ICPF actuator. (a) Prototype. (b) Config-
uration.
voltage and is superior to a conventional polymer actuator.
Fig. 13 shows the active guide wire using ICPF actuator.
D. The Other Micro Actuator
Suzumori et al. proposed a type of pneumatic actuator,
they call flexible micro actuator (FMA) [38]. The FMA has
C. Focusing System of the Optical Disk Drive
Properties of the optical disk drive and hard disk drive are
decided by the quality of head positioning. Recent position-
ing systems use the precision positioner of electromagnetic
actuators. Fig. 14 shows the moving coil type electromagnetic
actuator for the focusing system of the optical disk drive.
This kind of actuator consisting of a permanent magnet and
an electromagnetic coil is controlled by the Flemming’s law.
Since the output power strongly depends on the permanent
magnet, the size and power of the permanent magnet effect
I the dimension of this actuator.
ISHIHARA et al.: MICRO MECHATRONICS AND MICRO ACTUATORS 77

Permanent
Disk i Electro-
Magnet magnetic
Elastic,Spring \ 1

4Restoration
1 Force Coil1 ‘ i 1 MagneticFlux
Fig: 14. Moving coil type electromagnetic actuator for focusing system of
optu:al disk drive.

Ink.
zzle
Ncgati
Pressu
Heater Element

Fig. 15. Principle of bubble jet method.
D. Ink Jet Printer
Recently, printing quality has been improved by introducing
the ink jet method. Bubble jet method and piezoelectric method
are as well known as the ink jet method. Fig. 15 shows the
principle of the bubble jet method. Bubble jet method uses
surface evaporation phenomena. The surface of the heater is
heated from 2OOOC to 5OOOC in a couple of microseconds,
and the ink around the heater rapidly expands. Then, a drop
of ink is spouted by rapid thermal expansion. This method
is suitable to speed up the printing time according to the
miniaturization of ink jet nozzles, and recent ink jet frequency
is realized for about a couple of kHz order. Thermal sensitivity
becomes higher and thermal response time will be improved
by the miniaturization. By introducing micro machining and
miniaturizing the mechanism, its response can be improved to
more than 10-kHz frequency.
E. Micro Autonomous Mobile Robot
Seiko Co. Ltd. developed the micro autonomous mobile
robot “Monsieur” series. Monsieur consists of two small
stepmotors, the same structure as used in quartz watches, two
optical sensors, rechargeable battery, and the processing chip.
It includes ninety-eight kinds of micro parts inside a 1-cm3
body. Monsieur moves by chasing light, and a new type can
(b)
Fig. 16. Micro autonomous robotic system. (a) Prototype of micro au-
tonomous robotic system (b) System architecture.
memorize its motion and transcribe the memorized motion.
This micro robot is produced by conventional machining and
assembling as for a watch.
Fukuda et al. developed the micro autonomous robotic
system (MARS) as shown in Fig. 16 [51]. MARS consists
of the MPU including a processing chip, two stepmotors,
several sensors, communication unit, batteries, and interfaces.
MARS can perform a number of motions according to the
program downloaded by an operator. Fig. 16(b) shows a
system architecture of MARS.
VI. CONCLUSIONS
In this paper, we survey micro actuators for micro mecha-
tronics. Recently developed mechanical systems consist of
complex structures, and may become more complex in the fu-
ture. Micro mechatronics can improve the mechanical systems
of the next generation. Especially, the micro actuator that may
becomes the new mechanism to drive mechanical systems.
The combination of micro mechatronics and conventional
mechanical systems will be greatly increased in the future.
To improve the micro actuator, there are many problems
to solve such as improving the energy supply, machining
and assembly. The PZT actuator, for example, needs a high
voltage supply to drive itself, and the electrostatic actuator
78
also required a high voltage supply of over 100 V. Since the
displacement of a micro actuator is small, the signal from
sensors is slight compared with the driving signal. Because
of that, the sensor signal acquires the electrical noise from
the driving signal. Another problem is machining, which
effects the development of micro devices. Previously, micro
device mechanisms and functions were decided by machining
technologies. The electrostatic micro motor, such as the side-
drive electrostatic micro motor, is usually produced by micro
machining, but assembly with other devices is so impossible
that micro motors have not been able to be applied in any
applications. To use the micro actuator as an element of
integrated systems in the future, it is important to improve
machining technology and develop assembling technology.
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Hidenori Ishihara graduated from the Nagoya Uni-
versity, Japan, in 1991, and received M.Eng. degree
from Nagoya University in 1993. He received the
Ph.D. degree in engineering from Nagoya Univer-
sity in 1995.
At present, he is a Research Associate of the
Department of Micro System Engineering and the
Department of Mechano-Informatics and Systems,
Nagoya University, Japan. He is mainly engaging
in the research fields of micro robotics and micro
mechatronics.
79
Fumihito Arai (M’91) received the M.E. degree
from the Science University of Tokyo in 1988. He
received the Doctor of Engineering degree from
Nagoya University in 1993.
From 1988 to 1990, he was a Research Fellow at
Fuji Photo Film Co. Ltd., Japan. He joined Nagoya
University, Japan, in 1990. At present, he is an
Assistant Professor of the Department of Micro
System Engineering, Nagoya University. His current
research interests are in the area of micro robotics
based on micro physics, intelligent robotic systems
and control, and intelligent human machine interface with multimedia.
Dr. Arai was the General Affairs Chair of the 1995 IEEE International
Conference on Robotics and Automation and the Program Co-chair of the
International Symptom on Micro Machine and Human Science in 1995.
Toshio Fukuda (M’83-SM’93-F’95), for a photograph and biography, see p.
4 of this issue of this TRANSACTIONS.