ILNAS-EN ISO 14644-3:2019 - Preview only Copy via ILNAS e-Shop

ILNAS-EN ISO 14644-3:2019

Cleanrooms and associated controlled

environments - Part 3: Test methods
(ISO 14644-3:2019, Corrected version
2020-06)
Reinräume und zugehörige
Reinraumbereiche - Teil 3: Prüfverfahren
(ISO 14644-3:2019, korrigierte Fassung
2020-06)
Salles propres et environnements
maîtrisés apparentés - Partie 3: Méthodes
d'essai (ISO 14644-3:2019, Version
corrigée 2020-06)

10/2019
 ILNAS-EN ISO 14644-3:2019

National Foreword

This European Standard EN ISO 14644-3:2019 was adopted as Luxembourgish

Standard ILNAS-EN ISO 14644-3:2019.

Every interested party, which is member of an organization based in Luxembourg, can

participate for FREE in the development of Luxembourgish (ILNAS), European (CEN,
CENELEC) and International (ISO, IEC) standards:

- Participate in the design of standards

- Foresee future developments
- Participate in technical committee meetings
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https://portail-qualite.public.lu/fr/normes-normalisation/participer-normalisation.html

THIS PUBLICATION IS COPYRIGHT PROTECTED

Nothing from this publication may be reproduced or utilized in
any form or by any mean - electronic, mechanical, photocopying
or any other data carries without prior permission!
 ILNAS-EN ISO 14644-3:2019
EUROPEAN STANDARD EN ISO 14644-3
NORME EUROPÉENNE
EUROPÄISCHE NORM October 2019

ICS 13.040.35 Supersedes EN ISO 14644-3:2005

English Version

Cleanrooms and associated controlled environments - Part

3: Test methods (ISO 14644-3:2019, Corrected version
2020-06)
Salles propres et environnements maîtrisés apparentés Reinräume und zugehörige Reinraumbereiche - Teil 3:
ILNAS-EN ISO 14644-3:2019 - Preview only Copy via ILNAS e-Shop

- Partie 3: Méthodes d'essai (ISO 14644-3:2019, Prüfverfahren (ISO 14644-3:2019, korrigierte Fassung
Version corrigée 2020-06) 2020-06)

This European Standard was approved by CEN on 24 July 2019.

This European Standard was corrected and reissued by the CEN-CENELEC Management Centre on 17 June 2020.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this
European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references
concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN
member.

This European Standard exists in three official versions (English, French, German). A version in any other language made by
translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management
Centre has the same status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway,
Poland, Portugal, Republic of North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and
United Kingdom.

EUROPEAN COMMITTEE FOR STANDARDIZATION

COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG

CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels

© 2019 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 14644-3:2019 E
worldwide for CEN national Members.
 EN ISO 14644-3:2019 (E) ILNAS-EN ISO 14644-3:2019

Contents Page

European foreword....................................................................................................................................................... 3
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2
 ILNAS-EN ISO 14644-3:2019 EN ISO 14644-3:2019 (E)

European foreword

This document (EN ISO 14644-3:2019) has been prepared by Technical Committee ISO/TC 209
"Cleanrooms and associated controlled environments" in collaboration with Technical Committee
CEN/TC 243 “Cleanroom technology” the secretariat of which is held by BSI.

This European Standard shall be given the status of a national standard, either by publication of an
identical text or by endorsement, at the latest by April 2020, and conflicting national standards shall be
withdrawn at the latest by April 2020.

Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CEN shall not be held responsible for identifying any or all such patent rights.

This document supersedes EN ISO 14644-3:2005.

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According to the CEN-CENELEC Internal Regulations, the national standards organizations of the
following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,
Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland,
Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Republic of
North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the
United Kingdom.

Endorsement notice

The text of ISO 14644-3:2019, Corrected version 2020-06 has been approved by CEN as EN ISO 14644-
3:2019 without any modification.

3
 INTERNATIONAL
ILNAS-EN ISO 14644-3:2019
ISO
STANDARD 14644-3

Second edition
2019-08

Corrected version
2020-0͸

Cleanrooms and associated controlled

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environments —
Part 3:
Test methods
Salles propres et environnements maîtrisés apparentés —
Partie 3: Méthodes d'essai

Reference number
ISO 14644-3:2019(E)

© ISO 2019
 ISO 14644-3:2019(E) ILNAS-EN ISO 14644-3:2019
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COPYRIGHT PROTECTED DOCUMENT

© ISO 2019
ŽŽ”‹‰Š–•”‡•‡”˜‡†ǤŽ‡••‘–Š‡”™‹•‡•’‡ ‹ϐ‹‡†ǡ‘””‡“—‹”‡†‹–Š‡ ‘–‡š–‘ˆ‹–•‹’Ž‡‡–ƒ–‹‘ǡ‘’ƒ”–‘ˆ–Š‹•’—„Ž‹ ƒ–‹‘ƒ›
„‡”‡’”‘†— ‡†‘”—–‹Ž‹œ‡†‘–Š‡”™‹•‡‹ƒ›ˆ‘”‘”„›ƒ›‡ƒ•ǡ‡Ž‡ –”‘‹ ‘”‡ Šƒ‹ ƒŽǡ‹ Ž—†‹‰’Š‘–‘ ‘’›‹‰ǡ‘”’‘•–‹‰
‘–Š‡‹–‡”‡–‘”ƒ‹–”ƒ‡–ǡ™‹–Š‘—–’”‹‘”™”‹––‡’‡”‹••‹‘Ǥ‡”‹••‹‘ ƒ„‡”‡“—‡•–‡†ˆ”‘‡‹–Š‡” ƒ––Š‡ƒ††”‡••
„‡Ž‘™‘” ǯ•‡„‡”„‘†›‹–Š‡ ‘—–”›‘ˆ–Š‡”‡“—‡•–‡”Ǥ
 ‘’›”‹‰Š–‘ˆϐ‹ ‡
CP 401 • Ch. de Blandonnet 8
 ǦͳʹͳͶ‡”‹‡”ǡ ‡‡˜ƒ
Phone: +41 22 749 01 11
ƒšǣΪͶͳʹʹ͹ͶͻͲͻͶ͹
ƒ‹Žǣ ‘’›”‹‰Š–̷‹•‘Ǥ‘”‰
Website: www.iso.org
Published in Switzerland

ii © ISO 2019 – All rights reserved

 ILNAS-EN ISO 14644-3:2019 ISO 14644-3:2019(E)

Contents Page

Foreword ........................................................................................................................................................................................................................................ iv
Introduction..................................................................................................................................................................................................................................v
1 Scope ................................................................................................................................................................................................................................. 1
2 Normative references ...................................................................................................................................................................................... 1
͵ ‡”•ƒ††‡ϐ‹‹–‹‘• ..................................................................................................................................................................................... 1
͵Ǥͳ ‡‡”ƒŽ–‡”• ........................................................................................................................................................................................... 1
3.2 Terms related to airborne particles ...................................................................................................................................... 3
͵Ǥ͵ ‡”•”‡Žƒ–‡†–‘ƒ‹”ϐ‹Ž–‡”•ƒ†•›•–‡• ............................................................................................................................ 3
͵ǤͶ ‡”•”‡Žƒ–‡†–‘ƒ‹”ϐŽ‘™ƒ†‘–Š‡”’Š›•‹ ƒŽ•–ƒ–‡• ................................................................................................. 4
3.5 Terms related to electrostatic measurement ................................................................................................................ 5
3.6 Terms related to measuring apparatus and measuring conditions .......................................................... 5
͵Ǥ͹ ‡”•”‡Žƒ–‡†–‘‘ —’ƒ ›•–ƒ–‡•......................................................................................................................................... 6
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4 Test procedures ..................................................................................................................................................................................................... 6

4.1 Cleanroom tests...................................................................................................................................................................................... 6
ͶǤͳǤͳ ‡‡”ƒŽ...................................................................................................................................................................................... 6
4.1.2 Supporting tests ............................................................................................................................................................... 7
4.2 Principle........................................................................................................................................................................................................ 7
4.2.1 Air pressure difference test .................................................................................................................................... 7
ͶǤʹǤʹ ‹”ϐŽ‘™–‡•– ........................................................................................................................................................................... 7
ͶǤʹǤ͵ ‹”ϐŽ‘™†‹”‡ –‹‘–‡•–ƒ†˜‹•—ƒŽ‹œƒ–‹‘ ...................................................................................................... 8
ͶǤʹǤͶ ‡ ‘˜‡”›–‡•– ....................................................................................................................................................................... 8
4.2.5 Temperature test ............................................................................................................................................................. 8
ͶǤʹǤ͸ —‹†‹–›–‡•– ...................................................................................................................................................................... 8
ͶǤʹǤ͹ •–ƒŽŽ‡†ϐ‹Ž–‡”•›•–‡Ž‡ƒƒ‰‡–‡•–• ................................................................................................................ 8
ͶǤʹǤͺ ‘–ƒ‹‡–Ž‡ƒ–‡•–.................................................................................................................................................. 8
4.2.9 Electrostatic and ion generator tests ............................................................................................................. 8
4.2.10 Particle deposition test............................................................................................................................................... 8
4.2.11 Segregation test ................................................................................................................................................................ 9
5 Test reports ................................................................................................................................................................................................................ 9
Annex A (informative) Choice of supporting tests and checklist .........................................................................................10
Annex B (informative) Supporting test methods ..................................................................................................................................14
Annex C (informative) Test apparatus .............................................................................................................................................................43
Bibliography ............................................................................................................................................................................................................................. 51

© ISO 2019 – All rights reserved iii

 ISO 14644-3:2019(E) ILNAS-EN ISO 14644-3:2019

Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
„‘†‹‡• ȋ  ‡„‡” „‘†‹‡•ȌǤ Š‡ ™‘” ‘ˆ ’”‡’ƒ”‹‰ –‡”ƒ–‹‘ƒŽ –ƒ†ƒ”†• ‹• ‘”ƒŽŽ› ƒ””‹‡† ‘—–
–Š”‘—‰Š  –‡ Š‹ ƒŽ ‘‹––‡‡•Ǥ ƒ Š ‡„‡” „‘†› ‹–‡”‡•–‡† ‹ ƒ •—„Œ‡ – ˆ‘” ™Š‹ Š ƒ –‡ Š‹ ƒŽ
committee has been established has the right to be represented on that committee. International
‘”‰ƒ‹œƒ–‹‘•ǡ ‰‘˜‡”‡–ƒŽ ƒ† ‘Ǧ‰‘˜‡”‡–ƒŽǡ ‹ Ž‹ƒ‹•‘ ™‹–Š ǡ ƒŽ•‘ –ƒ‡ ’ƒ”– ‹ –Š‡ ™‘”Ǥ
 ‘ŽŽƒ„‘”ƒ–‡• Ž‘•‡Ž› ™‹–Š –Š‡ –‡”ƒ–‹‘ƒŽ Ž‡ –”‘–‡ Š‹ ƒŽ ‘‹••‹‘ ȋ Ȍ ‘ ƒŽŽ ƒ––‡”• ‘ˆ
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
†‡• ”‹„‡†‹–Š‡ Ȁ ‹”‡ –‹˜‡•ǡƒ”–ͳǤ ’ƒ”–‹ —Žƒ”ǡ–Š‡†‹ˆˆ‡”‡–ƒ’’”‘˜ƒŽ ”‹–‡”‹ƒ‡‡†‡†ˆ‘”–Š‡
†‹ˆˆ‡”‡––›’‡•‘ˆ †‘ —‡–••Š‘—Ž†„‡‘–‡†ǤŠ‹•†‘ —‡–™ƒ•†”ƒˆ–‡†‹ƒ ‘”†ƒ ‡™‹–Š–Š‡
‡†‹–‘”‹ƒŽ”—Ž‡•‘ˆ–Š‡ Ȁ ‹”‡ –‹˜‡•ǡƒ”–ʹȋ•‡‡www.iso.org/directives).
––‡–‹‘‹•†”ƒ™–‘–Š‡’‘••‹„‹Ž‹–›–Šƒ–•‘‡‘ˆ–Š‡‡Ž‡‡–•‘ˆ–Š‹•†‘ —‡–ƒ›„‡–Š‡•—„Œ‡ –‘ˆ
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’ƒ–‡–”‹‰Š–•Ǥ •ŠƒŽŽ‘–„‡Š‡Ž†”‡•’‘•‹„Ž‡ˆ‘”‹†‡–‹ˆ›‹‰ƒ›‘”ƒŽŽ•— Š’ƒ–‡–”‹‰Š–•Ǥ‡–ƒ‹Ž•‘ˆ

ƒ›’ƒ–‡–”‹‰Š–•‹†‡–‹ϐ‹‡††—”‹‰–Š‡†‡˜‡Ž‘’‡–‘ˆ–Š‡†‘ —‡–™‹ŽŽ„‡‹–Š‡ –”‘†— –‹‘ƒ†Ȁ‘”
on the ISO list of patent declarations received (see www.iso.org/patents).
›–”ƒ†‡ƒ‡—•‡†‹–Š‹•†‘ —‡–‹•‹ˆ‘”ƒ–‹‘‰‹˜‡ˆ‘”–Š‡ ‘˜‡‹‡ ‡‘ˆ—•‡”•ƒ††‘‡•‘–
constitute an endorsement.
‘” ƒ ‡š’Žƒƒ–‹‘ ‘ˆ –Š‡ ˜‘Ž—–ƒ”› ƒ–—”‡ ‘ˆ •–ƒ†ƒ”†•ǡ –Š‡ ‡ƒ‹‰ ‘ˆ  •’‡ ‹ϐ‹  –‡”• ƒ†
‡š’”‡••‹‘• ”‡Žƒ–‡† –‘ ‘ˆ‘”‹–› ƒ••‡••‡–ǡ ƒ• ™‡ŽŽ ƒ• ‹ˆ‘”ƒ–‹‘ ƒ„‘—– ̵• ƒ†Š‡”‡ ‡ –‘ –Š‡
World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT) see www.iso.org/
iso/foreword.html.
Š‹•†‘ —‡–™ƒ•’”‡’ƒ”‡†„› ȀʹͲͻǡCleanrooms and associated controlled environments.
›ˆ‡‡†„ƒ ‘”“—‡•–‹‘•‘–Š‹•†‘ —‡–•Š‘—Ž†„‡†‹”‡ –‡†–‘–Š‡—•‡”ǯ•ƒ–‹‘ƒŽ•–ƒ†ƒ”†•„‘†›Ǥ
complete listing of these bodies can be found at www.iso.org/members.html.
Š‹••‡ ‘†‡†‹–‹‘‘ˆ ͳͶ͸ͶͶǦ͵ ƒ ‡Ž•ƒ†”‡’Žƒ ‡•–Š‡ϐ‹”•–‡†‹–‹‘ȋ ͳͶ͸ͶͶǦ͵ǣʹͲͲͷȌǡ™Š‹ ŠŠƒ•
„‡‡–‡ Š‹ ƒŽŽ›”‡˜‹•‡†ǤŠ‡ƒ‹ Šƒ‰‡• ‘’ƒ”‡†–‘–Š‡’”‡˜‹‘—•‡†‹–‹‘ƒ”‡ƒ•ˆ‘ŽŽ‘™•ǣ
— Clause B.7Šƒ•„‡‡•‹’Ž‹ϐ‹‡†ƒ† ‘””‡ –‡†–‘ƒ††”‡•• ‘ ‡”•‘˜‡”‹–• ‘’Ž‡š‹–›ƒ†‘–‡†‡””‘”•Ǣ
Ȅ ‰—‹†ƒ ‡ ‘ ‡”‹‰ Žƒ••‹ϐ‹ ƒ–‹‘‘ˆƒ‹” Ž‡ƒŽ‹‡••„›ƒ‹”„‘”‡’ƒ”–‹ Ž‡ ‘ ‡–”ƒ–‹‘Šƒ•„‡‡
moved to 14644-1[1]
Ȅ –Š‡–‡š–‘ˆ–Š‡™Š‘Ž‡†‘ —‡–Šƒ•„‡‡”‡˜‹•‡†‘” Žƒ”‹ϐ‹‡†–‘ƒ‹†‹ƒ’’Ž‹ ƒ–‹‘Ǥ
A list of all parts in the ISO 14644 series can be found on the ISO website.
This corrected version of ISO 14644-3:2019 incorporates the following corrections:
— cross-references have been corrected in Table A.1ǡB.4.4ǡC.1ǡC.4.2 and C.4.3Ǣ
— the wording has been changed in B.2.1ƒȌǡTable B.2Ǣ
— old Figure B.2 has been removed.

iv © ISO 2019 – All rights reserved