Download as xlsx, pdf, or txt
Download as xlsx, pdf, or txt
You are on page 1of 16

NUM ProductionPASS USER LOT SLOT TIME PROJECT AFBestPos

1 PASS SLOTAL 2024-02-01 17:51:15


A35W_AK7323 844
2 PASS SLOTAR 2024-02-01 17:51:15
A35W_AK7323 856
3 PASS SLOTBL 2024-02-01 17:52:25
A35W_AK7323 208
X_PCAL X_NCAL Y_PCAL Y_NCAL [X] Center [X] Raw St[X] FullCo [X] ZeroCo[X] Hall Cal
910 466 916 462 13 SKIP 1.5 5.6 SKIP
941 485 888 453 12 SKIP 2.7 5.3 SKIP
899 472 865 441 16 SKIP 2.9 8.8 SKIP
[X] LensAn[X] DC Len[X] Centeri[X] Max Cu[X] +Stroke[X] -Stroke[X] Full St [X] Moving [X] Centeri
- - 11.8 63.3 222.6 228.1 450.7 4 -2.7
- - 9.6 51.9 219.8 227 446.9 4 -3.6
- - 11.1 60.6 217.6 227.3 445 4 -4.8
[X] DeCent[X] Hystere[X] Linearit[X] OIS Lo [X] OIS Ph[X] OIS 4d [X] OIS Shi[X] OIS Shi[X] OIS Shif
5 5.9 7.1 40.2 57.7 58.3 -6.6 0 -234
2.9 5.8 7.5 42.6 52.2 51.5 -1.9 0 -214
6.9 4.3 7.5 38.9 73.5 75.8 -2.3 0 -298
[X] Sinewa[X] Sinewa[X] Sinewa[X] Ringing[X] Ringin [X] AF Pha[X] AF 4dB[Y] Center [Y] Raw St
PASS 0 54 PASS 21 96.8 103.5 13 SKIP
PASS 0 48 PASS 40 95.9 103.2 14 SKIP
PASS 0 63 PASS 18 94.4 102.2 11 SKIP
[Y] FullCo [Y] ZeroCo[Y] Hall Cal[Y] LensAn[Y] DC Len[Y] Centeri[Y] Max Cu[Y] +Stroke[Y] -Stroke
3.6 1.2 SKIP - - 11.8 61.9 225.9 239.8
0.2 0.7 SKIP - - 9.6 56.6 226.6 234.3
1.7 2.3 SKIP - - 11.1 64.6 226.4 235.7
[Y] Full St [Y] Moving [Y] Centeri[Y] DeCent[Y] Hystere[Y] Linearit[Y] OIS Lo [Y] OIS Ph[Y] OIS 4d
465.8 4 -6.9 8.3 8 9.8 41 60.7 60.3
460.9 4 -3.8 -13.4 7.8 7.6 40.8 54.6 55.6
462.2 4 -4.6 -1.7 7.5 8.4 40.8 70.8 73.5
[Y] OIS Shi[Y] OIS Shi[Y] OIS Shif[Y] Sinewa[Y] Sinewa[Y] Sinewa[Y] Ringing[Y] Ringin [Y] AF Pha
18 0 264 PASS 0 42 PASS 17 SKIP
7.5 0 -235 PASS 0 43 PASS 39 SKIP
6.6 0 -276 PASS 0 67 PASS 14 SKIP
[Y] AF 4dB PhaseMargin
SKIP
SKIP
SKIP
Channel DateTime LotID Station Machine SITE Project JudgementPosture
LIMIT_MIN
LIMIT_MIN
1 ### 1 AF 2 11 A35W - 0
2 ### 1 AF 2 11 A35W - 0
3 ### 1 AF 2 11 A35W - 0
Laser_PosiCheck_Co PCAL NCAL Mecha_StrNegEPA PosEPA NegCutOffPosCutOff
-1200 0 0 0 -550 0 0 0 0
1200 1 255 255 550 255 255 0 0
-1050.5 OK 0 0 0 0 0 0 0
-464.36 OK 0 0 0 0 0 0 0
-1077.95 OK 0 0 0 0 0 0 0
Full_StrokeInit_CurrenCode_CurrMax_CurreHolding_CuSlope Hysteresis Linearity Phase Ang
410 0 0 0 0 0 -6 -12 40
470 120 50 130 90 1 6 12 180
440.48 17.2 15.07 36.51 20.84 0.11 -2.37 -2.86 96.23
432.08 8.79 27.03 50.01 43.35 0.11 4.01 -5.57 94.72
457.82 6.82 28.93 69.2 36.45 0.11 -2.34 -5.18 93.49
Phase AnglSettling Stability Laser_PosiFull_Strok Init_Curre Code_CurrMax_CurreHolding_Cu
40 0 0 -1200 410 0 0 0 0
180 50 100 1200 470 120 50 130 90
110.26 15 65.94 -545.91 438.81 43.96 21.98 45.93 32.55
108.01 12.6 62.33 -121.14 453.74 41.29 12.4 43.39 31.31
105.86 12.45 65.49 -733.39 452.14 34.64 5.74 36.63 24.79
Slope_180Hysteresis Linearity_180
0 -6 -12
1 6 12
0.11 1.91 1.95
0.11 -1.61 4.31
0.11 2.67 -4.09

You might also like