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2015-06

OPERATION MANUAL

Automatic Dicing Saw

DAD323
DAD3240
DAD3360
SOFTWARE VERSION 2.2 SERIES

Copyright of this document is owned by DISCO CORPORATION


("DISCO"). No part of this document may be copied or reproduced
in any form or by any means, without the express written permission
of DISCO. Also, this document may not be disclosed or transferred
to third parties.

This document is printed on recyclable Lint-Free Paper.


・The blue paper is recyclable as used paper just like plain paper.
・The cover paper and adhesive portions are non-recyclable.
(Remove the cover and adhesive portions before recycling.
UPESPE*W22B Recycle the blue paper only.)
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READ CAREFULLY BEFORE USING THIS


MANUAL
Introduction
This machine cuts materials such as silicon wafers, glass substrates and ceramic substrates (hereinafter
called workpiece) and therefore has rotary sections which rotate at high speed, high-voltage sections
which may present electric shock hazard and drive sections which may catch the operating personnel’s
body and clothing.
If the machine is not properly operated, safety hazards that could result in serious injury or death may
occur.

Read before using the machine


Before using the machine, thoroughly read this manual and follow the instructions set forth in it.
To assure safety in operating and maintaining the machine, it is important that you know the locations of
potential safety hazards. It is difficult for DISCO to predict each and every potential hazard. However, this
manual and the separate Safety Manual carry various precautionary notes and warnings wherever the
presence of any safety hazard is foreseeable. For increased safety assurance, therefore, it is essential that
you observe all the precautions and other relevant instructions set forth in this manual and the separate
Safety Manual.
If you modify the machine without prior consent of DISCO or repair it in a manner not stated in this
manual, the safety assurance features of the machine may be seriously affected.
Never attempt to modify or repair the machine in a manner not approved by DISCO.

Scope of responsibility
DISCO shall not be responsible for any accident due to any of the following events:
・Any parts other than the genuine DISCO brand are mounted onto the machine.
・Any parts other than periodic replacement or consumable parts are replaced without prior consent
of DISCO.
・Any parts designed by the customer are mounted onto the machine without prior consent of
DISCO.
・Equipment of another manufacturer is added to the machine.
・The machine or part of the machine is transported, reused, resold or modified.
If the customer refuses to disclose the names and contents of the process materials or piping parts used for
the machine as trade secret or confidential commercial information, DISCO may not be able to carry out
repair or maintenance on the machine for protection of the safety and health of our service personnel.

Parts replacement
When you replace any parts other than periodic replacement or consumable parts described below, consult
your nearest DISCO office or DISCO service office. If they are replaced without consulting DISCO,
DISCO shall assume no liability for the consequences arising therefrom.
・Operation Manual
・Maintenance Manual
・When specified in a separate document (e.g., Technical news letter, Operation guide)
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Hazard level
The safety precautions set forth in this document are classified into DANGER, WARNING and
CAUTION categories which represent three degrees of hazards latent in the machine. These categories are
defined as detailed below in accordance with the seriousness and probability level of the hazards. In
addition to the above three safety precaution levels, CAUTION without the safety alert symbol ( )
and NOTICE are used to give safety usage instructions to the user.
Before using the machine, be sure to read and understand all the associated safety precautions set forth in
the manual.
The hazard levels defined for the machine are detailed as follows:
If you cannot avoid the incident in question, a critical situation in which
either critical injury or death is very likely to result.
DANGER This symbol is used for the incident in which the injury is critical and there
is high probability of occurrence.
If you cannot avoid the incident in question, a serious situation in which
either critical injury or death may result.
WARNING This symbol is used for the incident in which the injury is serious but there is
not high probability of occurrence.
If you cannot avoid the incident in question, a medium or slight injury may
result.
CAUTION This symbol is used for the incident in which the injury is slight and there is
not high probability of occurrence.
If you cannot avoid the incident in question, an accident of property damage
may occur.
CAUTION

Indicates the safe way of using the machine as well as precautions to avoid
accidents resulting in damage to property.
NOTICE
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Safety labels
Safety labels are attached to the hazardous sections of the machine. Before using the machine, confirm the
label positions and thoroughly understand the precautions and warnings represented by these labels.
・The language used for the safety labels affixed to the machine outer covers can be requested by
customers. The language used for the safety labels affixed to the machine interior is only English,
Japanese, or Korean (DAD3240 only).
Label Hazard Level Hazard Descriptions
There is a danger that your hands or
fingers may be cut by the rotating blade.
・Do not place your hands or fingers
near the blade or flange until the
spindle comes to a complete stop.
・Do not open the covers until the
WARNING spindle comes to a complete stop.
・It takes approximately 15 seconds for
the spindle to stop completely after
the stop process is executed
(including in case of EMO and a
power failure).
[DAD323 only] There is a possibility that your hands or
fingers may get caught and injured in
the drive sections.
・Do not place your hands or fingers in
CAUTION the drive sections.
・Before performing maintenance work,
make sure to turn OFF the machine
power and lock out the breaker.
[DAD323 only] There is a possibility that yours hands or
fingers may be caught and injured by
the drive sections.
・Do not place your hands or fingers
CAUTION near the drive sections.
・The maintenance work of the
machine should be done only by
operators with the maintenance
qualification.
[DAD3360 only] There is a possibility that your hands or
fingers may get caught and injured in
the drive sections.
・Do not place your hands or fingers in
the drive sections.
・Do not place tools or other irrelevant
items near them.
CAUTION
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Safety labels (Continued)

Label Hazard Level Hazard Descriptions


There is a possibility that you may burn
your hands or fingers by touching the
hot parts of the machine.
・Turn OFF the machine, and then
CAUTION
perform maintenance work only after
the machine cools down sufficiently.

There is a danger that you may die or


get seriously injured from electric
shocks.
・Do not touch the electrically charged
WARNING sections.
・Before performing maintenance work,
make sure to shut off the machine
power, and lock out the breaker.
Even if you turn the power circuit
breaker of the machine to "OFF"
position, the primary side of the breaker
remains energized.
WARNING There is a danger that you may die or
get seriously injured from electric
shocks.
・Do not touch the energized sections.
There is a possibility that you may burn
your hands or fingers by touching the
hot parts of the machine.
・Turn OFF the machine, and then
CAUTION perform maintenance work only after
the machine cools down sufficiently.

MSAAA-00015-0
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INTRODUCTION
About this manual
This Operation Manual describes the operation procedures of Automatic Dicing Saw 300 Series Model
DAD323, and Automatic Dicing Saw 3000 Series Models DAD3240 and DAD3360. Note that this
manual is based on the software of version 2.2 series.

To ensure safety
To ensure safety, be sure to thoroughly read and understand the contents of this manual before performing
any operation.
When performing any operation, make sure that the procedures set forth in this manual are followed.
This manual is the 'Original instructions'.

Definition of a manager and operator


The definition of "manager" and "operator" applied in this manual is as follows:
Category Applicable Personnel Job Description
Management The person who is responsible for overall management of
Manager
representative the machine and the personnel.
Maintenance personnel The qualified person who received machine maintenance
training.
Data maintenance The qualified person who is responsible for the management
Operator
personnel of software data used for the machine.
Machine operator The person who operates the machine to process
workpieces.

Manuals prepared for this machine


This manual is the Operation Manual in the list below indicated by an arrow.
Manual Who should read Contents
Safety Manual ・Management representative Information for ensuring safety during machine
・Data maintenance personnel operation, installation and maintenance
・Maintenance personnel
Installation Manual Maintenance personnel Machine installation and adjustment procedures
Operation Manual Machine operator Operational procedures to be performed by
the machine operator
Data Maintenance Data maintenance personnel Screen contents for data entry and machine
Manual operation data setting procedures
Maintenance Manual Maintenance personnel Servicing, inspection and adjustment
procedures to be performed by the customer
Technical Reference Maintenance personnel Machine specifications/
Circuit diagrams/Illustrations/Part list

Unit notation
International System of Unit is adopted to express any unit.
Also, all the pressure values are expressed in gauge pressure.

Introduction-1
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Nominal conventions

This Represents
The operating procedures that the operator should perform
************

The operation that the machine automatically performs


************

Indicates a specific screen is called up

<XXXXXX>
[x.x]

The touch panel button to be pressed by the operator in the


operating procedure

The order or flow of operating steps

< > The name of the touch panel button


・Troubleshooting
・Exceptional operation procedure

The flow of procedures when encountering trouble or


exceptional operation

→ Other pages or manuals that should be read for reference

Introduction-2
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CONTENTS
CONTENT S

READ CAREFULLY BEFORE USING THIS MANUAL

INTRODUCTION ..............................................Introduction-1

CONTENTS.......................................................... Contents-1

IMPORTANT SAFETY INFORMATION .................... Safety-1

A. OPERATION GUIDE....................................................A-1
1. Screen Constituents..................................................................................................... A-2
1-1. Top Bar .......................................................................................................................................... A-4
1-2. Main Area ...................................................................................................................................... A-7
1-3. Sensor Status Area ..................................................................................................................... A-11
1-4. Software Keyboard Area ............................................................................................................. A-13
1-4-1. Direct operation keyboard ................................................................................................ A-14
1-4-2. Axis control keyboard ....................................................................................................... A-17
1-4-3. Numeric keyboard ............................................................................................................ A-21
1-4-4. Text keyboard ................................................................................................................... A-23

2. Handling of Microscope Image (How to Use XIS)...................................................... A-24


2-1. Outline of XIS .............................................................................................................................. A-25
2-2. XIS Screen (Hairline Display)...................................................................................................... A-26
2-3. XIS Screen (Target Window Display) .......................................................................................... A-31
2-4. XIS Measure Function................................................................................................................. A-33

3. LAYER Mode and CUT CHART Mode ....................................................................... A-35

B. START-UP AND TERMINATION OF THE MACHINE...B-1


1. Starting Up the Machine............................................................................................... B-2
1-1. Opening Stopcocks of Air, Water and Duct and Turning ON the Power of the Plant Facility........ B-3
1-2. Turning the Power ON................................................................................................................... B-4
1-3. Checking Supply Pressure of Air................................................................................................... B-9
1-4. Check the Flow Rate of the Spindle Coolant Water.................................................................... B-10
1-5. Executing Initialization................................................................................................................. B-12
1-6. Executing Warming Up (Idling) ................................................................................................... B-13

Contents-1
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CONTENTS
2. Terminating the Machine............................................................................................ B-17
2-1. Verification of Stoppage of Spindle and Wheel Coolant Water and Initialization ........................ B-18
2-2. Cleaning Operation ..................................................................................................................... B-19
2-3. Turning the Power OFF............................................................................................................... B-25
2-4. Stopping Facility Supply of Air and Water and Closing the Duct ................................................ B-26

C. CUTTING OPERATION ...............................................C-1


1. Full Automation Operation ........................................................................................... C-3
1-1. Preparation of Operation...............................................................................................................C-4
1-2. Verification of Device Data ............................................................................................................C-5
1-3. Setting a Workpiece ......................................................................................................................C-8
1-4. Calling Up the FULL AUTOMATION Screen [1.0] (LAYER Mode Only) .....................................C-12
1-5. Executing Full Automation...........................................................................................................C-14
1-6. Making Corrections during Cutting Operation.............................................................................C-16
1-6-1. Correcting hairline alignment ...........................................................................................C-17
1-6-1-1. Suspending cutting operation................................................................................C-18
1-6-1-2. Adjusting light intensity and microscope focus......................................................C-19
1-6-1-3. Executing hairline alignment .................................................................................C-21
1-6-1-4. What to do after correcting hairline alignment.......................................................C-22
1-6-2. Correcting cutting position................................................................................................C-24
1-6-2-1. Suspending cutting operation................................................................................C-25
1-6-2-2. Adjusting light intensity and microscope focus......................................................C-26
1-6-2-3. Executing correction of cutting position.................................................................C-28
1-6-2-4. What to do after correcting cutting position...........................................................C-30
1-6-3. Changing feed speed .......................................................................................................C-32
1-6-4. Correcting blade height ....................................................................................................C-34
1-6-5. Executing auto dress [optional accessory (DAD3360)]....................................................C-36
1-7. Completion of Full Automation ....................................................................................................C-39

2. Manual Operation ...................................................................................................... C-41


2-1. Outline of Manual Operation .......................................................................................................C-42
2-2. Procedures for Manual Operations .............................................................................................C-44
2-2-1. Executing alignment .........................................................................................................C-44
2-2-2. Executing automatic cutting .............................................................................................C-45
2-2-2-1. LAYER mode Executing automatic cutting............................................................C-46
2-2-2-2. CUT CHART mode Executing automatic cutting ..................................................C-50
2-2-3. Executing semi-automatic cutting ....................................................................................C-53
2-2-3-1. LAYER mode Executing semi-automatic cutting...................................................C-54
2-2-3-2. CUT CHART mode Executing semi-automatic cutting..........................................C-59
2-2-4 Executing process control table running (except for cutting) ............................................C-63

3. Alignment ................................................................................................................... C-67


3-1. Automatic Alignment....................................................................................................................C-69
3-1-1. Calling up the MANUAL ALIGNMENT screen [2.2] (LAYER mode only) .........................C-70

Contents-2
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CONTENTS
3-1-2. Executing automatic alignment ........................................................................................C-72
3-2. Manual Alignment........................................................................................................................C-74
3-2-1. Calling up the MANUAL ALIGNMENT screen [2.2]..........................................................C-75
3-2-2. Adjusting light intensity .....................................................................................................C-77
3-2-3. Adjusting microscope focus..............................................................................................C-80
3-2-4. Executing θ alignment of the channel 1 ...........................................................................C-82
3-2-5. Executing street adjustment of the channel 1 ..................................................................C-84
3-2-6. Executing θ alignment of the channel 2 ...........................................................................C-85
3-2-7. Executing street adjustment of the channel 2 ..................................................................C-87

D. BLADE MAINTENANCE ..............................................D-1


1. Blade Replacement...................................................................................................... D-2
1-1. Preparation for Blade Replacement ..............................................................................................D-4
1-2. Saving Data of Used Blades .........................................................................................................D-7
1-3. Replacement of Blades ...............................................................................................................D-10
1-3-1. Removing the wheel cover ............................................................................................... D-11
1-3-2. Removing the blade breakage detector [optional accessory] ..........................................D-14
1-3-3. Removing the blade .........................................................................................................D-15
1-3-4. Installing a new blade.......................................................................................................D-26
1-4. Data Setting for the Installed Blade.............................................................................................D-37
1-4-1. Data setting for a new blade.............................................................................................D-38
1-4-2. Data setting for a used blade ...........................................................................................D-41
1-5. Adjusting the Blade Breakage Detector [Optional Accessory] ....................................................D-44
1-6. Executing Warming Up (Idling) ...................................................................................................D-47
1-7. Executing Setup ..........................................................................................................................D-49

2. Setup ......................................................................................................................... D-52


2-1. Preparation for Setup ..................................................................................................................D-53
2-2. Executing Chuck Table Setup .....................................................................................................D-56
2-3. Executing Non-Contact Setup [Optional Accessory]...................................................................D-60
2-4. Executing Sensor Calibration Setup [Optional Accessory] .........................................................D-63
2-4-1. Sensor calibration setup when the auto dress is used (DAD3360 only)..........................D-68

3. Blade Dressing Operation.......................................................................................... D-69


3-1. Preparation of Operation.............................................................................................................D-71
3-2. Verification of Dress Data............................................................................................................D-72
3-3. Setting a Dresser Board..............................................................................................................D-75
3-4. Calling Up the SINGLE CH ALIGNMENT Screen [2.4.4]............................................................D-76
3-5. Adjusting Light Intensity ..............................................................................................................D-77
3-6. Adjusting Microscope Focus .......................................................................................................D-80
3-7. Executing θ Alignment.................................................................................................................D-82
3-8. Designation of Dress Cutting Start Position ................................................................................D-84

Contents-3
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CONTENTS
3-9. Executing Dress Cutting..............................................................................................................D-86
3-10. Completion of Dress Cutting .....................................................................................................D-87

4. Hairline Alignment ...................................................................................................... D-90


4-1. Setting a Dummy Workpiece.......................................................................................................D-91
4-2. Adjusting Light Intensity ..............................................................................................................D-94
4-3. Adjusting Microscope Focus .......................................................................................................D-97
4-4. Executing θ Alignment.................................................................................................................D-98
4-5. Executing Hairline Alignment ....................................................................................................D-100
4-6. What to Do after Hairline Alignment ..........................................................................................D-103

E. ERROR RECOVERY ...................................................E-1


1. Errors during Cutting.................................................................................................... E-3
1-1. Remedies for Blade Errors during Cutting .................................................................................... E-4
1-2. Remedies for Setup Errors during Cutting .................................................................................... E-5
1-3. Remedies for Waste-Choked Errors [DAD3240/DAD3360].......................................................... E-6
1-4. Remedies for Water Leakage Errors [Optional Accessory]........................................................... E-7
1-5. Remedies for Errors Related to Spindle Load............................................................................... E-8
1-6. Remedies for Errors Related to Spindle Carbon Brush ................................................................ E-9

2. Interlock Errors of the Covers .................................................................................... E-10


2-1. Remedies for Interlock Errors of the Covers ............................................................................... E-11

3. Errors during Setup.................................................................................................... E-13


3-1. Remedies for Manual Setup Errors............................................................................................. E-13
3-1-1. Remedies for setup errors related to machine ................................................................. E-14
3-1-2. Remedies for setup errors................................................................................................ E-15
3-1-3. Remedies for non-contact setup errors [optional accessory]........................................... E-17
3-1-4. Remedies for other setup errors [optional accessory] ..................................................... E-19
3-2. Remedies for Auto Setup Errors ................................................................................................. E-20
3-2-1. Remedies for setup errors related to machine ................................................................. E-21
3-2-1-1. Executing RETRY ................................................................................................. E-23
3-2-1-2. Executing EXIT FULL AUTO ................................................................................. E-24
3-2-1-3. Executing AUTO SETUP PASS ............................................................................ E-25
3-2-1-4. Executing BLADE INFORMATION........................................................................ E-26
3-2-1-5. Executing NCS SENSOR CLEANING [optional accessory] ................................. E-28

4. Errors during Alignment ............................................................................................. E-32


4-1. Remedies for Alignment Errors ................................................................................................... E-32
4-1-1. Executing RETRY ............................................................................................................ E-34
4-1-2. Executing MANUAL ALIGNMENT.................................................................................... E-35
4-1-3. Executing EXIT FULL AUTO ............................................................................................ E-37

5. Errors during Kerf Check ........................................................................................... E-38

Contents-4
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CONTENTS
5-1. Remedies for Kerf Check Errors Caused by Inferior Cutting Results ......................................... E-39
5-2. Remedies for Kerf Check Errors Caused by Erroneous Machine Recognition .......................... E-40
5-2-1. Executing RETRY ............................................................................................................ E-42
5-2-2. Executing KERF CHECK TEACH .................................................................................... E-43
5-2-3. Executing STOP CORRECTION...................................................................................... E-44
5-2-4. Executing CUT CONTINUE ............................................................................................. E-45

6. Blade Breakage Detector Errors [Optional Accessory]............................................... E-46


6-1. Remedies for Blade Breakage Detector Errors........................................................................... E-47
6-1-1. Executing RESTART ........................................................................................................ E-50
6-1-2. Executing EXIT FULL AUTO ............................................................................................ E-51
6-1-3. Executing BLADE REPLACEMENT................................................................................. E-52
6-1-4. Executing BLADE INFORMATION................................................................................... E-55

7. Errors Related to Supply Utility .................................................................................. E-57


7-1. Remedies for Main Air Errors ...................................................................................................... E-58
7-2. Remedies for Wheel Coolant Water Errors [Optional Accessory]............................................... E-60
7-3. Remedies for Spindle Coolant Water Errors ............................................................................... E-63

8. Measure Alignment Errors [Optional Accessory] ........................................................ E-65


8-1. Remedies for Measure Alignment Errors <1>............................................................................. E-66
8-2. Remedies for Measure Alignment Errors <2>............................................................................. E-68
8-3. Remedies for Measure Alignment Errors <3>............................................................................. E-70
8-4. Details of Remedies for Measure Alignment Errors .................................................................... E-72
8-4-1. Executing RETRY ............................................................................................................ E-73
8-4-2. Executing MANUAL ALIGNMENT.................................................................................... E-74
8-4-3. Executing RETRY PROCESS TABLE.............................................................................. E-76
8-4-4. Executing EXIT FULL AUTO ............................................................................................ E-77
8-4-5. Executing PASS NOW WORKPIECE .............................................................................. E-78
8-4-6. Executing ERROR POINT TEACH .................................................................................. E-79
8-4-7. Executing CHANGE START POSITION .......................................................................... E-83

9. Auto Dress Errors [Optional Accessory] ..................................................................... E-86


9-1. Remedies for Auto Dress Non-Completion Errors ...................................................................... E-87
9-2. Remedies for Errors Related to Sub Chuck Table Vacuum ........................................................ E-89
9-3. Remedies for Errors Related to Dresser Board .......................................................................... E-90
9-3-1. Executing BOARD EXCHANGE ...................................................................................... E-91
9-3-2. Executing DRESS PASS.................................................................................................. E-94

10. Other Errors ............................................................................................................. E-95

WHOM TO CONTACT IN AN EMERGENCY

IN THE EVENT OF AN ACCIDENT

Contents-5
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IMPORTANT SAFETY INFORMATION


Contents of this chapter
This chapter describes the precautionary matters for ensuring safety during operation.

WARNING

Please follow the Safety Manual for safety precautions which are not described
in this document
This document describes the operation procedures of Automatic Dicing Saw 300
Series Model DAD323, and Automatic Dicing Saw 3000 Series Models DAD3240
and DAD3360.

NOTICE

Make sure to receive an explanation of the safety precautions described in the


Safety Manual from the management representative, so that you understand
them sufficiently before performing operations
Also, if you are assigned to multiple tasks, make sure to receive an explanation of all
the safety precautions related to the assigned tasks written in the relevant manuals
from the management representative, so that you understand them sufficiently. There
are 6 manuals provided for this machine: Safety Manual, Installation Manual,
Operation Manual, Data Maintenance Manual, Maintenance Manual and Technical
Reference.

Safety-1
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A. OPERATION GUIDE
Contents of this chapter

Section No. Title Contents


1 Screen Constituents ・Constituents of the touch panel screen
・Function of the buttons on the touch panel
2 Handling of Microscope Image ・Method to handle the microscope image by
(How to Use XIS) using XIS (Extended Interface System)
3 LAYER Mode and CUT CHART ・Explanation of 2 types of operation modes
Mode

A-1
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1. Screen Constituents
Summary of this section

Section No. Title Contents


1-1 Top Bar ・Names and functions of the items displayed in
the top bar
1-2 Main Area ・Names and functions of the items displayed in
the main area
1-3 Sensor Status Area ・Names and functions of the items displayed in
the sensor status area
1-4 Software Keyboard Area ・Names and functions of the items displayed in
the software keyboard area

A-2
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Screen area constitution

Top bar

Sensor
Main area status area

Software keyboard area Function selector button

Area Function
Top bar Displays operation buttons and messages common to all the screens
→For the top bar, see Section 1-1 [Top Bar] of this chapter.
Main area Displays operation screens.
→For the main area, see Section 1-2 [Main Area] of this chapter.
Sensor status area Displays the sensor status.
→For the sensor status area:
See Section 1-3 [Sensor Status Area] of this chapter.
Software keyboard Displays the software keyboard selected by the function selector button.
area →For the software keyboard area:
See Section 1-4 [Software Keyboard Area] of this chapter.
Function selector Select the software keyboard to use.
button

A-3
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1-1. Top Bar


Components of the top bar

Basic operation Basic operation


button Status area button

Message area

Name Function
Basic operation Operation buttons that are always displayed on the screen.
buttons →See the next page [Button function].
Status area Displays the current date and time.
Message area Displays various messages such as an operating direction and error message.

A-4
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Button function

Button Function
<DISCO> button
This button is used to lock the touch panel screen and save the screens displayed on
the touch panel into an external storage device.
Pressing this button will display the menu below.

Menu

List box

Locks the touch panel screen. Locking the screen during


operations such as blade replacement prevents the touch panel
from being touched accidentally, thus preventing the machine from

being operated accidentally. To unlock the button, press


again.
Saves the screens displayed on the touch panel into an external
storage device (USB flash drive).
How to save the screens:
1. Set an external storage device on the machine.
2. Press <Screen Copy>.
3. The screens are saved in the external storage device. When the
screens are completely saved, the message "G0125 Copying
screen data completed." will appear.
<Z-EM> button
Emergency withdrawal of the Z-axis is performed. When this button is pressed, the
withdrawal operation is performed in the order of 1 to 3.
1. The Z-axis ascends to the upper end.
2. The X-, Y- and θ-axes decelerate and stop.
3. An error occurs and an alarm sounds.
<Sensor Status> button
Displays the sensor status area.

A-5
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Button function (Continued)

Button Function
<Password Lock> button
Before performing machine maintenance operation, the appropriate password for the
level of the operation needs to be entered to release password lock.
When the button is pressed, PASSWORD screen is displayed and the password lock
can be released or the screen can be locked with password.
Also, the button display changes depending on the password lock status.
After finishing the operation, the password lock of the screen remains released until

the button is pressed. The screen needs to be locked with password


after finishing the operation, since an operator can access to the operation screens
dedicated for the data maintenance personnel or higher level.

When is displayed:
The screen is locked with password. Only operations at the operator level can be
performed.

When , or is displayed:
The password lock is released. Operations at the data maintenance personnel level
can be performed.

When is displayed:
The password lock is released. Operations at the maintenance personnel level can be
performed.
<Alarm Clear> button
Stops the alarm while an alarm sounds due to error occurrence.

A-6
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1-2. Main Area


Precautions for the touch centering function

WARNING

Do not place your fingers or hands in the drive sections when the microscope
images are displayed on the touch panel
If you touch the touch panel while the microscope images are displayed on the touch
panel, the axes will be driven by the touch centering function. If you place your
fingers or hands in the drive sections, they may be caught or cut off.

Main area constituents

[Screen example 1]
Screen title List box

Text display box

Name Function
Screen title Displays the name of the screen.
List box Displays a list of choices.
If there are more choices than the list box can display, you can scroll the list
box.
Text display box Displays data (letters or numeric values) required for implementation of
function. The box is displayed in gray. Data cannot be inputted into the box.

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Main area constituents (Continued)

[Screen example 2]
Option button Text input box

Item tile Drop-down list box Scroll bar

Name Function
Option button Only one option at a time can be selected from the multiple displayed options.
A black dot ( ) will appear in the selected option button.
Text input box Enter data (letters or numeric values) required for implementation of function.
The text input box is displayed in white.
・When the data is changed, the box will turn yellow.
・If data beyond the setting range is entered, the box will turn red.
Item title Indicates the title of the item.
Drop-down list box Indicates the current selection out of available choices. When you select the
down arrow in the square box at the right, a list of available choices appears.
Scroll bar Scrolls the screen up and down or right and left.

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Main area constituents (Continued)

[Screen example 3]

Name Function
<NEXT> button Press the button when moving from the current operation to the next operation
or when starting machine operation.
<ENTER> button Press the button to finalize editing of texts or values.
<EXIT> button Press the button to cancel the current operation and go back to the previous
screen.
Letters displayed on the button vary depending on operations.

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Main area constituents (Continued)

[Screen example 4]

Microscope
image

Name Function
Microscope image When performing an operation such as manual alignment or teach using the
microscope, a microscope image will be displayed on the screen.
The image can be moved by using the direct operation keyboard or touch
centering function.
→For the direct operation keyboard:
See Section 1-4 [Software Keyboard Area] of this chapter.
Touch centering While the axes are stopped and a microscope image is displayed on the screen
function (during the operations such as teach, alignment, stop correction, hairline
alignment or measurement), if you touch the touch panel, the axes are
activated and the image you touched moves to the center of the screen.
When the cover is open, the touch centering function is unavailable.

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1-3. Sensor Status Area


About sensor status area
You can check the state of each utility shown below in the sensor status area.
・Main air pressure
・Workpiece vacuum pressure
・Spindle load current
・Spindle rotation speed
・Wheel coolant water (blade cooler) flow rate [optional accessory]
・Wheel coolant water (shower) flow rate [optional accessory]
・Wheel coolant water (spray) flow rate [optional accessory] (DAD3240/DAD3360 only)

[PRES] tab
The [PRES] tab is displayed when <PRES> button is pressed.

Name Function
Main Air Shows the current main air pressure in real time.
C/T Work vacuum Shows the current workpiece vacuum pressure in real time.
Sub C/T vacuum Only for the machine equipped with the auto dress [optional accessory
(DAD3360 only)]:
Shows the current workpiece vacuum pressure of sub chuck table in real time.

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[SPDL] tab
The [SPDL] tab is displayed when <SPDL> button is pressed.

Name Function
Spindle Current Shows the spindle load current (A) as graphs in real time.
Spindle Rev Shows the spindle revolution speed (rpm=min-1) as graphs in real time.

[WATER] tab [optional accessory]


On the machines equipped with the flow rate controller for wheel coolant water [optional accessory], the
[WATER] tab is displayed when <WATER> button is pressed.

Name Function
Blade Shows the current flow rate (L/min) of wheel coolant water discharged from
the blade cooler nozzle of a wheel cover in real time.
Shower Shows the current flow rate (L/min) of wheel coolant water discharged from
the shower nozzle of a wheel cover in real time.
Spray Only for the wheel cover with spray nozzle [optional accessory
(DAD3240/DAD3360)]:
Shows the current flow rate (L/min) of wheel coolant water discharged from
the spray nozzle of a wheel cover in real time.

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1-4. Software Keyboard Area


About software keyboard area
Four types of keyboard are displayed in software keyboard area of screens. The keyboard can be switched
by pressing the function selector button of the software keyboard area.
Button Function
<Direct> button
Displays the direct operation keyboard.

<Axis control> button


Displays the axis control keyboard.

<Numeric> button
Displays the numeric keyboard.

<Text> button
Displays the text keyboard.

Summary of this section

Section No. Title Contents


1-4-1 Direct operation keyboard ・Layout of the direct operation keyboard
・Function of the buttons on the direct operation
keyboard
1-4-2 Axis control keyboard ・Layout of the axis control keyboard
・Function of the buttons on the axis control
keyboard
1-4-3 Numeric keyboard ・Layout of the numeric keyboard
・Function of the buttons on the numeric
keyboard
1-4-4 Text keyboard ・Layout of the text keyboard
・Function of the buttons on the text keyboard

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1-4-1. Direct operation keyboard


About the direct operation keyboard
The direct operation keyboard is a group of single-function buttons. This keyboard is displayed when the

button of the function selector buttons is pressed.

Keyboard layout
Press this button to display
the direct operation keyboard.

Button function

Button Function
<Blade Setup> button
When this button is pressed during the standard mode chuck table setup,
the Z-axis reference position (setup point) for determining the amount
left uncut of workpiece is detected as shown below and setup is
performed.
Blade

Setup point Workpiece


thickness
Chuck table Amount left uncut

<Device Data> button


Calls up the DEVICE DATA LIST screen.

<Aux.> button
Calls up the AUXILIARY MENU screen.

<Measure> button
Calls up the MEASURE screen. This screen is used to measure the
distance between targets and streets.
<System Initial> button
Pressing this button moves each axis (X, Y, Z and θ) to its origin position.

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Button function (Continued)

Button Function
During spindle stoppage <Spindle> button

When is pressed, the spindle starts rotating. The factory


preset value for the rotating speed is the one a user specified before
During spindle rotation

shipping. When is pressed, the spindle stops its rotation.

During wheel coolant <Cutting Water> button


water stoppage

When is pressed, the wheel coolant water begins to flow.

During wheel coolant When is pressed, wheel coolant water stops.


water supply

<Option> button
This is reserved for an optional accessory. It does not work on standard
specification machines.
When the machine is equipped with the auto dress [optional accessory

(DAD3360 only)], the button changes to , and turns


ON/OFF the sub chuck table vacuum.
During vacuum OFF <C/T Vacuum> button

When is pressed, a workpiece placed on the chuck table is


vacuumed. For the workpiece suction level, see the sensor status area
During vacuum ON
called up by pressing the button.

When is pressed, vacuuming is released.


Usually, while closing the microscope section cover, pressing

moves the chuck table and Y-axis to their origin positions.


However, if the microscope section cover is opened and the chuck table
is located at its origin position, the Y-axis will not move to its origin
position.
<Log Viewer> button
Displays the LOG VIEWER screen.

<Log Analyzer> button


Displays the machine running conditions. The running conditions consist
of operations, blade, device data and errors information.

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Button function (Continued)

Button Function
<Microscope cover Open/Close> button (DAD3360 only)
Opens/closes the microscope section cover.
・When the cover is open, the color of this button turns yellow.
・During machine operation, such as cutting, the cover does not open
even if this button is pressed.

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1-4-2. Axis control keyboard


About the axis control keyboard
The axis control keyboard is a group of the buttons to manually operate the X-, Y- and θ -axes. This

keyboard is displayed when the button of the function selector buttons is pressed.
Note that the axis control keyboard buttons are inoperative during cutting, setup or system initialization.

Keyboard layout

[When button is pressed (index mode)]


Press this button to display
Axis control button Axis scan button
the axis control keyboard.

[Index mode]
button

Axis movement
selector button

[When button is pressed (screen index mode)]


Press this button to display
Axis control button Axis scan button
the axis control keyboard.

[Screen index
mode] button

Axis movement
selector button

Function of the axis movement selector button

Button Axis operations with the button pressed


When you press an axis control button with this button pressed, the axis moves by
the index amount or rotates by the angle designated in the device data.

When you press an axis control button with this button pressed, the axis moves by
one screen on the high magnification of the microscope or rotates by 1°.

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Button function [index mode]


When you press an axis control button in the index mode, the axis moves by the index amount or rotates
by the angle designated in the device data.

Button Function
Moves the chuck table to the left by the index amount designated in the device data.
The microscope image moves to the left.

Moves the chuck table to the right by the index amount designated in the device
data. The microscope image moves to the right.

Moves the Y-axis to the rear by the index amount designated in the device data. The
microscope image moves upward.

Moves the Y-axis to the front by the index amount designated in the device data.
The microscope image moves downward.

Rotates the θ-axis 90° or the angle designated in the device data clockwise.

Rotates the θ-axis 90° or the angle designated in the device data counterclockwise.

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Button function [screen index mode]


When you press an axis control button in the screen index mode, the axis moves by one screen on the high
magnification of the microscope or rotates by 1°.

Button Function
Moves the chuck table to the left by one monitor screen on the high magnification
of the microscope.

Moves the chuck table to the right by one monitor screen on the high magnification
of the microscope.

Moves the Y-axis to the rear by one monitor screen on the high magnification of the
microscope.

Moves the Y-axis to the front by one monitor screen on the high magnification of
the microscope.

Rotates the θ-axis 1° clockwise.

Rotates the θ-axis 1° counterclockwise.

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Button function [scan mode]


When the axis scan operation button is pressed, the axis makes a scan movement, and once the button is
released, the scan operation stops.
Set the speed of the axis scan movement on the OPERATION DATA MAINTENANCE [5.3.2] screen.

Button Function
Moves the chuck table to the left.

Moves the chuck table to the right.

Moves the Y-axis to the rear.


The microscope image moves upward.

Moves the Y-axis to the front.


The microscope image moves downward.

Rotates the θ-axis clockwise.

Rotates the θ-axis counterclockwise.

Once this button is pressed, the color of the button changes to yellow. By pressing
the axis operation scan button during that time, the axis moves at the speed
specified at <Scan speed: High> on the OPERATION DATA MAINTENANCE
screen [5.3.2]. By pressing this button once again, this setting is canceled and the
color of the button returns to gray.

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1-4-3. Numeric keyboard


About the numeric keyboard
The numeric keyboard is a group of the buttons to input and set a numeric data. These keys are used when
the operator registers the index amount, workpiece size, the amount left uncut, cutting speed and so on, on

the machine. This keyboard is displayed when the button of the function selector buttons is
pressed.
When you touch a text input box to enter numeric values or letters, the keyboard will be displayed on the
screen.

Keyboard layout [Numeric buttons]


Press this button to display
the numeric keyboard.

Button function [Numeric buttons]

Button Function
Inputs numeric values.
to
Toggles the sign of the numerical data between + and -.

Inputs a decimal point.

Moves the cursor ( ) of the text input box.

Finalizes the data entered in the text input box currently selected, and
moves the cursor to the next text input box.

Changes the keyboard display from numeric values to symbols.

Deletes the character to the left of the cursor.

Deletes the character to the right of the cursor or selected ones.

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Keyboard layout [symbol buttons]

Button function [symbol buttons]

Button Function
Inputs symbols.

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1-4-4. Text keyboard


About the text keyboard
The text keyboard is a group of the buttons to input a text, which is used for example to register the device

data name. This keyboard is displayed when the button of the function selector buttons is
pressed.
When you touch a text input box to enter numeric values or letters, the keyboard will be displayed on the
screen.

Keyboard layout
Press this button to display
the text keyboard.

Button function

Button Function

Enters alphabet characters from a to z (or A to Z). When is


to pressed, alphabet characters switch between uppercase and lowercase
characters.
Switches between uppercase characters and lowercase characters of
alphabet.

Enters underscore ( _ ).

Enters hyphen ( – ).

Moves the cursor ( ) of the text input box.

Finalizes the data entered in the text input box currently selected, and
moves the cursor to the next text input box.

Deletes the character to the left of the cursor.

Deletes the character to the right of the cursor or selected ones.

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2. Handling of Microscope Image (How to Use XIS)


Summary of this section

Section No. Title Contents


2-1 Outline of XIS ・Function outline of XIS (Extended Interface
System)
2-2 XIS Screen (Hairline Display) ・Explanation of the function of XIS screen
(hairline display)
2-3 XIS Screen (Target Window ・Explanation of the function of XIS screen
Display) (target window display)
2-4 XIS Measure Function ・Explanation of the procedure for using XIS
measure

Touch centering function

WARNING

Do not place your fingers or hands in the drive sections when the microscope
images are displayed on the touch panel
If you touch the touch panel while the microscope images are displayed on the touch
panel, the axes will be driven by the touch centering function. If you place your
fingers or hands in the drive sections, they may be caught or cut off.

While the axes are stopped and a microscope image is displayed on the screen (during the operations such
as teach, alignment, correction during cutting operation, hairline alignment or measurement), if you touch
the touch panel, the axes are activated and the image you touched moves to the center of the screen.
This touch centering function does not work while the splash cover (splash cover F in DAD3360) or
microscope section cover is open.

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2-1. Outline of XIS


Outline of XIS
XIS (Extended Interface System) is a function to handle or adjust the microscope image.
When an operation with the microscope such as manual alignment or teaching operation is performed, the
XIS screen is displayed on the microscope image. Since frequently used functions such as shifting of
microscope image, light intensity adjustment and focus adjustment can be performed from the XIS screen,
operations related to the microscope image can be performed efficiently.

XIS screen

Operations which can be performed by using XIS:


・Moves the microscope image (moves the axis).
・Adjusts light intensity.
・Adjusts the focus.
・Rotates the θ-axis.
・Changes the magnification of the microscope (high/low).
(This operation can be performed only when the machine is equipped with the macro microscope
[optional accessory].)
・Adjusts the size of the target window during teaching.

Example of XIS usage:


・Move the currently displayed image to the desired position (the touch centering function to move the
touched position of the image to the center of the screen).
・Adjust light intensity and the focus when the microscope image is hard to see.

Other:
・XIS cannot be used during the cutting operation.

Types of XIS screen


There are two types of XIS screen: hairline display and target window display. When an operation with
the microscope is performed, either of the screens is displayed according to the operation.
Screen display See Section
Hairline display 2-2
Target window display 2-3

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2-2. XIS Screen (Hairline Display)


XIS screen (hairline display)
This is the XIS screen which is normally displayed when operations with the microscope are performed.

When is pressed on the main screen, the sub screen opens, and light intensity and focus can be
adjusted.
Hairline

Switches the display


of XIS screen.
[1]

[2] Moves the image up


and down (moves the
Y-axis).

[3] [5]
Current position and
Moves the image to magnification of the
the right and left [4] microscope can be
(moves the X-axis). [Main screen] checked here.
[1] Press [1] Press

[6] Press [11] Press

Changes the channel. Rotates the θ-axis.

Changes the display of XIS screen. Changes the display of XIS screen.
Adjusts focus automatically. Adjusts focus manually.

[6] [11]
[7]
[12]

[8] [6]
Press

[9] [13]
Press

[10] [11]

[Sub 1 screen] [Sub 2 screen]

Changes the magnification of the microscope. (Only when the machine is


Adjusts light intensity. equipped with the macro microscope [optional accessory])

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XIS screen (hairline display) (Continued)

Item No. Description


[1] Button to switch from the main screen to the sub screen.
Displays Sub 1 screen.
Note that Sub 2 screen is displayed when this button is pressed again after
returning to the main screen from Sub 2 screen.
[2] Buttons to move the image horizontally. They are not displayed during cutting operation.
・The chuck table moves horizontally.
Moves the image to the left by one index.
・The chuck table moves to the machine left side.
Moves the image to the left at high speed.
・The chuck table moves to the machine left side.
Moves the image to the left at low speed.
・The chuck table moves to the machine left side.
Moves the image to the right at low speed.
・The chuck table moves to the machine right side.
Moves the image to the right at high speed.
・The chuck table moves to the machine right side.
Moves the image to the right by one index.
・The chuck table moves to the machine right side.
[3] Buttons to move the image up and down. They are not displayed during cutting operation.
・The Y-axis moves back and forth.
Moves the image upward by one index.
・The Y-axis moves to the rear side.
Moves the image upward at high speed.
・The Y-axis moves to the rear side.
Moves the image upward at low speed.
・The Y-axis moves to the rear side.
Moves the image downward at low speed.
・The Y-axis moves to the front side.
Moves the image downward at high speed.
・The Y-axis moves to the front side.
Moves the image downward by one index.
・The Y-axis moves to the front side.

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XIS screen (hairline display) (Continued)

Item No. Description


[4] Displays the current position of the microscope image and the magnification of the
microscope.

[4-1]
[4-2]

When ([5], green) is pressed:


The reading of [4-1] turns red, and the value is cleared. It displays the travel distance in

the Y direction from the position where (green) is pressed.

When ([5], white) is pressed:


The reading of [4-1] turns green. It displays the current microscope position.
Indicates the position of the microscope image relative to the workpiece
using points on the axes.
The axis position is indicated by relative position with respect to the center
of the chuck table ("0"). The unit used is mm.

Y= Minus (-)
display
Chuck table center
[4-1] Y=0

Y= Plus display
(without sign)

X= Minus (-) X= Plus display


display X=0 (without sign)
Machine front

[4-2] Displays the current magnification of the microscope.


[5] Buttons to start or terminate the XIS measure function.
This button is displayed in green before the XIS measurement starts.
(green) Pressing this starts measurement.
This button is displayed in white during XIS measurement. Pressing
(white) this terminates measurement.
[6] Buttons to switch from Sub 1 screen to the main screen or to Sub 2 screen.
Returns to the main screen.

Displays Sub 2 screen.

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XIS screen (hairline display) (Continued)

Item No. Description


[7] Buttons to adjust the focus. They are used when the image is hard to see. The adjusted
focus position is used only for the workpiece currently displayed.
Performs auto focus with the position away from the chuck table upper
surface by "tape thickness + workpiece thickness" as the center. "Tape
thickness" and "workpiece thickness" are the values specified in the device
data currently used.
Effective use condition:
・When workpiece thickness does not vary.
Performs auto focus.

Performs auto focus on the wide area (approx. 4 mm width).


Effective use condition:
・When the focus is off even after the focus adjustment of <Small Stroke>
is performed.
Performs auto focus on the narrow area (approx. 0.4 mm width).
Effective use condition:
・When you want to perform focus adjustment in a short time.
[8] Only for the machine equipped with the macro microscope [optional accessory]:
Buttons to switch the magnification of the microscope.
Switches the magnification of the microscope to high (micro).
Switches the magnification of the microscope to low (macro).
[9] Buttons to change the channel by rotating the θ-axis.
Rotates the θ-axis in the order of CH4 → CH3 → CH2 → CH1.

Rotates the θ-axis in the order of CH1 → CH2 → CH3 → CH4.


[10] Buttons to adjust light intensity. They are used when the image is hard to see. The adjusted
light intensity is used only for the workpiece currently displayed.
[10-1] [10-2] [10-3] [10-4] [10-5]

[10-3]

DIR: Direct light intensity


[10-1]
OBL: Oblique light (ring light) intensity [optional accessory]
[10-2] Reduces light intensity by 1%.
[10-3] When dragged, light intensity changes.
[10-4] Increases light intensity by 1%.
[10-5] Indicates current light intensity.
[11] Buttons to switch from Sub 2 screen to the main screen or to Sub 1 screen.
Returns to the main screen.

Displays Sub 1 screen.

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XIS screen (hairline display) (Continued)

Item No. Description


[12] Buttons to adjust focus manually. They are used for fine adjustment of the focus after
performing auto focus by pressing the [7] button.

[12-1]

[12-1] Displays the current focus position.


Moves up the microscope at a low speed.
Moves down the microscope at a low speed.
[13] Buttons to rotate the θ-axis.
Rotates the θ-axis counterclockwise at a low speed.

Rotates the θ-axis clockwise at a low speed.

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2-3. XIS Screen (Target Window Display)


XIS screen (target window display)
This is the XIS screen displayed when the teaching operation is performed.
Difference from the XIS screen (hairline display):
・A target window is displayed on the screen center.
・Buttons to handle the target window are added.
Display, functions and operations other than the above are the same as those of the XIS screen (hairline
display).
Target window

[Main screen]
Press Press

Press Press

Press
[1]

Press
[2]
[3]

[Sub 1 screen] [Sub 2 screen]

Adjusts the size of the target window Adjusts the size of the target window
by dragging the button. by clicking the buttons.
Size of the target window
can be checked here.

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XIS screen (target window display) (Continued)

Item No. Description


[1] Button to adjust the size of the target window (performed by dragging the button).
By dragging this button while pressing it, you can change the size of the
target window continuously.
[2] Displays the width (W) and height (H) of the current target window.
The unit is pixel.
[3] Buttons to adjust the size of the target window (performed by clicking the buttons).
Lengthens the window frame by 2 pixels.

Shortens the window frame by 2 pixels.

Widens the window frame by 2 pixels.

Narrows the window frame by 2 pixels.

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2-4. XIS Measure Function


Function overview
The XIS measure function is to measure the kerf width or the like on the screen that displays microscope
image.
The measure function can be executed only on the MEASURE screen. On the other hand, the XIS
measure function can be executed on the screen that displays the microscope image.

Measurement procedure
This section explains XIS measurement procedure using the MEASURE screen as an example. However,
the XIS measurement is possible on any screen that displays microscope image.

is displayed on the screen on which this function can be executed.

NOTICE

Both the ordinary measure function and the XIS measure function can be used
on the MEASURE screen.

The result measured by the XIS measure function cannot be taken in the device
data.
The XIS measure function can be used for measurement only.

Step No. Procedure


1 On the screen that displays microscope image, align the hairline with the measurement

start point by using .

・Press last.

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Measurement procedure (Continued)

Step No. Procedure


2
Press (green) to start measurement.
・The color of the reading showing current microscope position changes from green to
red. The values are cleared.

Green Red (cleared to zero)


3
Using , move the Y-axis toward the measurement end position.

・Press last.

・The travel distance in the Y direction from the position where (green) is pressed
is shown in red.
4 When it reaches the measurement end position, check the displayed measurement result.
5
Press (white) to end the measurement function.
・The color of the reading showing the distance changes to green. The values show the
current position on the screen that displays microscope image.

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3. LAYER Mode and CUT CHART Mode


LAYER mode and CUT CHART mode
This machine is equipped with 2 kinds of operation modes. You can switch the mode according to your
work method.

LAYER mode:
The LAYER mode has a hierarchical screen structure based on that of the existing Automatic Dicing Saw
3000 series. You can cut workpieces by the same operation method as for the existing model.

CUT CHART mode:


In the CUT CHART mode, all the functions related to cut operation are arranged in a single screen. The
operator follows the directions displayed on the screen step by step, which allows the machine to prepare
for cut operation and start it.

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B. START-UP AND TERMINATION OF THE


MACHINE
Contents of this chapter

Section No. Title Contents


1 Starting Up the Machine ・Procedures to startup the machine
2 Terminating the Machine ・Procedures to terminate the operation

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1. Starting Up the Machine


Operation flow

WARNING

When not using the touch panel, press the button located at the upper left
of the screen in order to lock and deactivate the touch panel
Unexpected operation of the machine may cause the operator to be injured.

1-1 Opening Stopcocks of Air,


Water and Duct and Turning ON the Power of the Plant Facility

1-2 Turning the Power ON

1-3 Checking Supply Pressure of Air

1-4 Check the Flow Rate of the Spindle Coolant Water

1-5 Executing Initialization

1-6 Executing Warming Up (Idling)

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1-1. Opening Stopcocks of Air, Water and Duct and


Turning ON the Power of the Plant Facility
Procedures for opening the stopcocks of air, water and duct and turning ON the power of the plant
facility
The following is the procedures to open the stopcocks of air, water and duct and turn ON the power of the
plant facility.
They may be always left open, which differs with plants. Therefore, make sure to ask the relevant
administrator whether they are open.

WARNING

When the machine or floor is wet with water, do not turn ON the machine power
until it gets dry
You may get an electric shock which could lead to death or severe injury.

When the air supply is switched on or off, do not allow anybody else than the
operator to touch the machine
Even when the machine itself is turned off, the air-driven parts may move when the
air supply is switched on or off. If you place your fingers or hands in the drive
sections or operation space, they may be caught or cut off.

Open the main valve of duct.

Open the main valve of air.

Open the main valves for spindle and wheel coolant water.

Turn ON the facility power source.

!!! This procedure is to be continued in the next section. !!!

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1-2. Turning the Power ON


Procedures for turning the power ON

WARNING

When the machine or floor is wet with water, do not turn ON the machine power
until it gets dry
You may get an electric shock which could lead to death or severe injury.

CAUTION

Before restoring power to the machine, wait 1 minute or longer after the machine
power is completely shut off
If the machine power is turned on and off successively, the machine may break.

NOTICE

When turning on power to the machine, turn the key which has been inserted
into the main switch right to the "START" position and then release your hand
from the key
Releasing your hand from the key returns the main switch to the "ON" position and
turns on power to the machine.
ON position
START position

Key Main switch

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Procedures for turning the power ON (Continued)

!!! This procedure is continued from: !!!


Section 1-1 [Opening Stopcocks of Air, Water and Duct
and Turning ON the Power of the Plant Facility]

When turning on the power again after turning it off:


Wait at least one minute after the last machine power OFF.

Go to the rear of the machine.

Turn the circuit breaker lever to the ON position.


ON position

When the circuit breaker is locked out by a padlock:


Ask your maintenance personnel to release the lock.
→For the circuit breaker:
See Section 4 [Power Circuit Breaker] of IMPORTANT SAFETY INFORMATION in the Safety
Manual.

Go back to the front of the machine.

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Procedures for turning the power ON (Continued)

Insert a key into the main switch.


[DAD323] [DAD3240]

Main switch

[DAD3360]

Main switch

Turn the key clockwise to the START position, and then release the key.

The main switch turns ON and the machine starts up.

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Procedures for turning the power ON (Continued)

When the machine does not start up even if the main switch is turned ON:
・The EMO switch may possibly be activated. Cancel the EMO switch as directed below.
How to release the EMO switch:

When you turn the EMO switch clockwise, it automatically pops up to


deactivate itself.

When the machine still does not start up even after the EMO switch is released:
USB flash drive may have been inserted.
Remove the USB flash drive, and then turn ON the machine again.
・EMO switch and USB port positions
[DAD323] [DAD3240]

USB port

EMO switch

[DAD3360]

EMO switch

USB port

If the machine still does not start up:


Immediately contact the maintenance personnel in charge.

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Procedures for turning the power ON (Continued)

When the machine completely starts up, the MAIN MENU screen [0.0] or the CUT CHART screen
appears on the monitor.

[LAYER mode] [CUT CHART mode]

When nothing appears on the screen after three minutes:


1. Turn the main switch key to the OFF position.
2. Restart the machine after one minute.
When the machine still does not start up:
Immediately contact your maintenance personnel in charge.

!!! This procedure is to be continued in the next section. !!!

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1-3. Checking Supply Pressure of Air


Procedures for checking the supply pressure of air

!!! This procedure is continued from: !!!


Section 1-2 [Turning the Power ON]

Make sure that the air pressure displayed on the right side of the screen indicates 0.5MPa or higher.

Air pressure: 0.5MPa

[LAYER mode] [CUT CHART mode]

When the pressure gauge indicates a totally different value:


Check the current status of the procedures indicated in Section 1-1 [Opening Stopcocks of Air,
Water and Duct and Turning ON the Power of the Plant Facility] of this chapter.
When the value is still different:
Immediately contact your maintenance personnel in charge.

!!! This procedure is to be continued in the next section. !!!

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1-4. Check the Flow Rate of the Spindle Coolant Water


Procedures for checking the flow rate of the spindle coolant water

!!! This procedure is continued from: !!!


Section 1-3 [Checking Supply Pressure of Air]

DAD323/DAD3240
Go to the rear side of the machine.

Check the flow rate of the spindle coolant water with the spindle coolant water flow rate sensor.
・The flow rate of spindle coolant water differs depending on customers. Ask your maintenance
personnel to check the flow rate.
[DAD323] [DAD3240]

Spindle coolant water


flow rate sensor

Rear side Rear side

[DAD3360]
Spindle coolant water
flow rate sensor

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Procedures for checking the flow rate of the spindle coolant water (Continued)

DAD323/DAD3240
Return to the front side of the machine.

!!! This procedure is to be continued in the next section. !!!

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1-5. Executing Initialization


About initialization
Initialization means to move the machine's mobile sections to their own respective origin positions.
The origin position is a standard position of the movement of the machine's respective sections.

Procedures for initialization

!!! This procedure is continued from: !!!


Section 1-4 [Check the Flow Rate of the Spindle Coolant Water]

Press the or button to effect system initialization.

The message "G0006 Initialization started." appears.

When an alarm sounds:

1. Press the button to clear the alarm.


2. Make sure that both the splash cover (splash cover F in DAD3360) and microscope section cover
are closed firmly.

3. Press the or button again.

All axes move to their origin positions to complete the system initialization process.

The message "G0007 Initialization completed." appears.

DAD3360 when the microscope section cover is set to open/close automatically:


The microscope section cover opens when no workpiece is set on the chuck table.

!!! This procedure is to be continued in the next section. !!!

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1-6. Executing Warming Up (Idling)


About warming up (idling)
Warming up (idling) refers to the operation to wait about 30 minutes with the spindle rotating and the
wheel coolant water supplied. The purpose of this operation is to ensure consistent accuracy in machine
operation.

Procedures for warming up (idling)

CAUTION

Idle the machine for at least 30 minutes after starting up the machine
If you fail to follow this instruction, the machine accuracy becomes unstable.

!!! This procedure is continued from: !!!


Section 1-5 [Executing Initialization]

Check with your data maintenance personnel about the spindle rotation.

Make sure that both the splash cover (splash cover F in DAD3360) and microscope section cover are
closed.

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Procedures for warming up (idling) (Continued)

Press the or button to start the spindle rotation.


[DAD323] [DAD3240]

Spindle

Splash cover
Splash cover
Microscope
section cover

Microscope
section cover

[DAD3360]

Spindle

Splash cover F
Microscope
section cover

From outside the cover, visually check that the spindle is rotating.

Press the or button to supply the wheel coolant water.

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Procedures for warming up (idling) (Continued)

From outside the cover, visually check that the nozzle ejects water.

Check the flow rate of the wheel coolant water with the flowmeter on the front of the machine.
・The flow rate of wheel coolant water differs depending on customers. Ask your maintenance
personnel to check the flow rate.
[DAD323]

Wheel coolant water flowmeter (shower)


Wheel coolant water flowmeter
(blade cooler)

[DAD3240]
Wheel coolant water flowmeter (spray)
[optional accessory]
Wheel coolant water flowmeter
(shower)
Wheel coolant water flowmeter
(blade cooler)

[DAD3360]
Wheel coolant water flowmeter (spray)
[optional accessory]
Wheel coolant water flowmeter
(shower)
Wheel coolant water flowmeter
(blade cooler)

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Procedures for warming up (idling) (Continued)

Wait for about 30 minutes leaving the machine in this condition.


・This step is called warming up (idling). If you neglect this, the machine becomes unstable in
maintaining accuracy, so be sure to do this.

!!! The procedure to start up the machine is complete. !!!

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2. Terminating the Machine


Safety precautions for terminating the machine

WARNING

When the air supply is switched on or off, do not allow anybody else than the
operator to touch the machine
Even when the machine itself is turned off, the air-driven parts may move when the
air supply is switched on or off. If you place your fingers or hands in the drive
sections or operation space, they may be caught or cut off.

When not using the touch panel, press the button located at the upper left
of the screen in order to lock and deactivate the touch panel
Unexpected operation of the machine may cause the operator to be injured.

Operation flow

2-1 Verification of Stoppage of Spindle and Wheel Coolant Water and Initialization

2-2 Cleaning Operation

2-3 Turning the Power OFF

2-4 Stopping Facility Supply of Air and Water and Closing the Duct

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2-1. Verification of Stoppage of Spindle and Wheel Coolant


Water and Initialization
Procedures for verification of stoppage of spindle and wheel coolant water and initialization



MAIN MENU CUT CHART


[0.0]

or

Let the spindle run free for 5 to 15 minutes with wheel coolant water flowing.

Press the or button to stop the wheel coolant water.

Let the spindle run free for 15 to 20 minutes with the wheel coolant water turned off.

Press the or button to effect system initialization.

Visually check that the spindle and wheel coolant water have stopped and that initialization has been
properly completed.

!!! This procedure is to be continued in the next section. !!!

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2-2. Cleaning Operation


Safety precautions for cleaning operation

WARNING

Make sure to halt the operation and confirm all axes have come to a complete
stop before starting the cleaning operation
If you place your fingers or hands in the drive sections, they may be caught or cut off.

Do not place your fingers or hands in the drive sections or operation space while
the drive sections are operating
Also, make sure that all axes have come to a complete stop before performing the
operation. Otherwise, your fingers or hands may be caught or cut off.

Wear protective gloves and goggles and use forceps to clean the inside of the
machine and remove broken workpieces
If you perform such operation with bare hands, they may be slashed or stabbed by
workpiece fragments.

Use a soft brush for cleaning the bellows and bellows protective cover
A hard brush wears the bellows and bellows protective cover, which could result in
water leakage.

NOTICE

If a lot of cutting particles are generated and accumulated, ask the maintenance
personnel for cleaning
If cutting particles are accumulated, it becomes necessary to clean the machine with
its components removed. The accumulation of cutting particles could lead to machine
trouble. This Operation Manual describes how operators should do the cleaning.

Use the safety goggles, protective gloves, stepstools, flashlights and alcohol
which are furnished in your factory or comply with your factory's standards
Safety goggles, protective gloves, stepstools, flashlights and alcohol are not supplied
with the machine.

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Procedures for cleaning the water case [DAD323/DAD3240]

!!! This procedure is continued from: !!!


Section 2-1 [Verification of Stoppage of Spindle and Wheel Coolant Water and Initialization]

MAIN MENU CUT CHART


[0.0]

or

Press the button of the axis control keyboard to move the chuck table to the left until it
reaches the left end.

Open the microscope section cover.

Wear protective gloves and safety goggles.

With a soft brush, clean the bellows located to the right of the chuck table. If there is any dirt or
fragments in the water case, remove them with forceps.

Close the microscope section cover.

Press the button of the axis control keyboard to move the chuck table to the right until it
reaches the right end.

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Procedures for cleaning the water case [DAD323/DAD3240] (Continued)

Open the splash cover.

With a soft brush, clean the bellows located to the left of the chuck table. If there is any dirt or
fragments in the water case, remove them with forceps.

Close the splash cover.

Press the or button to effect system initialization.

!!! This procedure is to be continued to: !!!


Section 2-3 [Turning the Power OFF] of this chapter

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Procedures for cleaning the water case [DAD3360]

!!! This procedure is continued from: !!!


Section 2-1 [Verification of Stoppage of Spindle and Wheel Coolant Water and Initialization]

MAIN MENU CUT CHART


[0.0]

or

Press the button of the axis control keyboard to move the chuck table to near the X-axis
center.

Open the splash cover F.

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Procedures for cleaning the water case [DAD3360] (Continued)

Press the button to open the microscope section cover.

Microscope section cover

Wear protective gloves and safety goggles.

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Procedures for cleaning the water case [DAD3360] (Continued)

With a soft brush, clean the bellows located to the right of the chuck table. If there is any dirt or
remnant in the water case, remove them with forceps.

Open the splash cover S.

With a soft brush, clean the bellows located to the left of the chuck table. If there is any dirt or remnant
in the water case, remove them with forceps.

Close the splash cover S.

Close the splash cover F.

Press the or button to effect system initialization.

!!! This procedure is to be continued to: !!!


Section 2-3 [Turning the Power OFF] of this chapter

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2-3. Turning the Power OFF


Procedures for turning the power OFF

!!! This procedure is continued from: !!!


Section 2-2 [Cleaning Operation]

Turn OFF the main switch.


[DAD323] [DAD3240]

Main switch

[DAD3360]

Main switch

When the water temperature control unit is used:


Turn OFF the power switch of the water temperature control unit.
→For the water temperature control unit, see the Instruction Manual included with the unit.

Ask the maintenance personnel to lock out the circuit breaker lever at the rear of the machine.

!!! This procedure is to be continued in the next section. !!!

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2-4. Stopping Facility Supply of Air and Water and Closing


the Duct
Procedures for stopping facility supply of air and water and closing the duct

CAUTION

Make sure that the spindle is stopped completely before shutting off air supply
If the air supply is shut off during spindle rotation, the spindle may fail.

!!! This procedure is continued from: !!!


Section 2-3 [Turning the Power OFF]

Shut OFF the facility power source.

Close the main valves of spindle coolant and wheel coolant water.

Close the main valve of air.

Close the duct.

!!! The procedure to terminate the machine is complete. !!!

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C. CUTTING OPERATION
Contents of this chapter

Section No. Title Contents


1 Full Automation Operation ・A series of full automation operation from the
preparation up to cutting position correction
during full automation operation
2 Manual Operation ・Procedures for conducting an individual basis
cutting operation
3 Alignment ・Procedures for alignment

Types of standard cutting

Cut method Function Refer to


Automatically carries out alignment
(positioning of cutting position) for workpiece
on the chuck table, and then continuously
Full automation Section 1 of Chapter C
carries out cutting operations for several
channels in succession according to the device
data setting.
Carries out alignment automatically
(automatic alignment) or manually (manual [LAYER mode]
alignment) for workpiece on the chuck table, Section 2-3-2-1 of
and then carries out cutting operation for Chapter C
Automatic cutting several channels in succession according to
the device data setting. When using the [CUT CHART mode]
measure alignment [optional accessory] in the Section 2-3-2-1 of
CUT CHART mode, specify workpiece to be Chapter C
cut by selecting "All Work" or "One Only."
Carries out alignment manually for workpiece
on the chuck table after selecting one channel,
and then carries out cutting operation for only
the selected channel. When using the measure
alignment [optional accessory], also select the [LAYER mode]
Semi-automatic cutting workpiece to be cut. Section 2-3-3-1 of
Chapter C
In the semi-automatic cutting, specify cutting
direction (rear or front) before starting
cutting. Also, the number of cut lines can be
specified.

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Safety precautions for operation

WARNING

Before removing workpieces, make sure that all axes are stopped completely
If you open any cover and place your fingers or hands in the drive sections while the
axes are moving, your fingers or hands may be caught or cut off.

When not using the touch panel, press the button located at the upper left
of the screen in order to lock and deactivate the touch panel
Unexpected operation of the machine may cause the operator to be injured.

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1. Full Automation Operation


Operation flow

1-1 Preparation of Operation

1-2 Verification of Device Data

1-3 Setting a Workpiece

1-4 Calling Up the FULL AUTOMATION Screen [1.0] (LAYER Mode Only)

1-5 Executing Full Automation

1-6 Making Corrections during Cutting Operation

1-7 Completion of Full Automation

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1-1. Preparation of Operation


Procedures for preparation before operation

Press the or button to effect system initialization.


→For the system initialization, see Section 1-5 [Executing Initialization] of Chapter B.

Press the or button to execute setup.


→For the setup, see Section 2 [Setup] of Chapter D.

!!! This procedure is to be continued in the next section. !!!

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1-2. Verification of Device Data


About the verification of device data
This is the operation to check whether the target device data is registered in the device data list and the
registered device data name agrees with the device ID.

Procedures for verification of device data

!!! This procedure is continued from: !!!


Section 1-1 [Preparation of Operation]

Check the following items regarding the device data of the workpiece to be processed with your data
maintenance personnel.
・Name of the directory in which the device data is saved
・Device data name
・Device ID

MAIN MENU CUT CHART


[0.0]

or

or

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Procedures for verification of device data (Continued)

Select the target directory from <Directory>.

Device data in the selected directory is displayed in <Device Data>.

Select the device data of the workpiece to be processed from the data displayed in <Device Data>.
・Device ID (Device ID) and index value (Index) of the selected device data will be displayed in
<About Device Data>.
If the device data to be used is not saved:
Ask the data maintenance personnel to create the associated device data.
If the device data name and device ID do not correspond to each other:
Ask the data maintenance personnel to confirm the device data.

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Procedures for verification of device data (Continued)

MAIN MENU CUT CHART


[0.0]

or

Make sure that the directory and device data name (Device No.) to be processed are displayed at the
lower right of the MAIN MENU screen [0.0] or the CUT CHART screen.

!!! This procedure is to be continued in the next section. !!!

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1-3. Setting a Workpiece


About workpiece setting
This is the operation to place a workpiece which is subjected to processing on the chuck table and turn
ON the vacuum to secure it.

Procedures for setting a workpiece

WARNING

Before removing or setting workpieces, make sure that all axes are stopped
completely

The X-axis may move the moment you press the , or

button. If you place your fingers or hands in the drive sections, they
may be caught or cut off.

!!! This procedure is continued from: !!!


Section 1-2 [Verification of Device Data]

FULL AUTOMATION CUT CHART


[1.0]

or

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Procedures for setting a workpiece (Continued)

DAD323/DAD3240
Open the microscope section cover.
[DAD323] [DAD3240]

Microscope Microscope
section cover section cover

DAD3360 when the microscope section cover is closed:

Press the button to open the microscope section cover.


[DAD3360]

Microscope section cover

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Procedures for setting a workpiece (Continued)

Set a workpiece on the chuck table.


If the chuck table does not match the type of workpiece:
Ask the maintenance personnel to replace the chuck table.

Press the , or button to turn ON the chuck table vacuum.

When the auto dress [optional accessory (DAD3360 only)] is used:


Place a dresser board on the sub chuck table.

Press the <PRES> button on the sensor status area to check the vacuum pressure of the sub chuck
table.

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Procedures for setting a workpiece (Continued)

DAD323/DAD3240
Close the microscope section cover.
DAD3360 when the microscope section cover is set not to open/close automatically:

!!! This procedure is to be continued in the next section. !!!

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1-4. Calling Up the FULL AUTOMATION Screen [1.0]


(LAYER Mode Only)
Procedures for calling up the FULL AUTOMATION screen [1.0]
This procedure is necessary only for LAYER mode.
!!! This procedure is continued from: !!!
Section 1-3 [Setting a Workpiece]

MAIN MENU
[0.0]

Make sure that the directory and device data name (Device No.) to be processed are displayed at the
lower right of the MAIN MENU screen [0.0].
If the device data name is not displayed on the screen:
Go back to Section 1-2 [Verification of Device Data] of this chapter.

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Procedures for calling up the FULL AUTOMATION screen [1.0] (Continued)

Make sure that the workpiece to be processed is set on the chuck table.
When no workpiece is set on the chuck table:
→See Section 1-3 [Setting a Workpiece] of this chapter.

!!! This procedure is to be continued in the next section. !!!

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1-5. Executing Full Automation


Procedures for executing full automation

!!! This procedure is continued from: !!!


Section 1-3 [Setting a Workpiece]
Section 1-4 [Calling Up the FULL AUTOMATION Screen [1.0] (LAYER Mode Only)]

FULL AUTOMATION CUT CHART


[1.0]

or

Only when using the measure alignment [optional accessory]:


When cutting all the workpieces on the chuck table:
Select "All Work."
When cutting specified one workpiece on the chuck table:
Select "One Only."
Also, confirm the workpiece No. to be processed to the data maintenance personnel. Enter the
confirmed workpiece No. at <Workpiece No.>. When one workpiece is processed, enter "1."

DAD3360 when the microscope section cover is set to open/close automatically:


The microscope section cover closes.

The machine starts the full automation operation. The green light of the status indicator lights up.

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Procedures for executing full automation (Continued)

If the error of either "A0531 Macro target not found." or "A0532 Micro target not found."
occurs:
The teaching operation has not been properly completed. In this case, contact your maintenance
personnel.

!!! This procedure is to be continued in the next section. !!!

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1-6. Making Corrections during Cutting Operation


Summary of this section

Section No. Title


1-6-1 Correcting hairline alignment
1-6-2 Correcting cutting position
1-6-3 Changing feed speed
1-6-4 Correcting blade height
1-6-5 Executing auto dress [optional accessory (DAD3360 only)]

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1-6-1. Correcting hairline alignment


About correction for hairline alignment
The correction for hairline alignment is executed during cutting to align the position of hairline with that
of the cut line (kerf).
If cutting is allowed to continue while the cut line is not aligned with the hairline, the alignment and
cutting positions do not agree. It means that cutting does not take place at target cutting position.

Kerf
Hairline

Correcting hairline alignment

Operation flow

To correct the hairline alignment, press the button during cutting to stop the cutting
process.

1-6-1-1 Suspending cutting operation

1-6-1-2 Adjusting light intensity and microscope focus

1-6-1-3 Executing hairline alignment

1-6-1-4 What to do after correcting hairline alignment

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1-6-1-1. Suspending cutting operation


Procedures for suspending cutting operation

During cutting operation

Cutting is suspended.

When images on the screen are hard to be seen:


Adjust the light intensity and microscope focus.
→See Section 1-6-1-2 [Adjusting light intensity and microscope focus] of this chapter.

!!! This procedure is to be continued to: !!!


Section 1-6-1-3 [Executing hairline alignment]

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1-6-1-2. Adjusting light intensity and microscope focus


Purpose of adjustment of light intensity and microscope focus
When the cut line and hairline displayed on the screen are not visible when you correct hairline alignment,
adjust the light intensity of the monitor screen and microscope focus.

Procedures for adjusting light intensity and microscope focus

!!! This procedure is continued from: !!!


Section 1-6-1-1 [Suspending cutting operation]

STOP CORRECTION

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Procedures for adjusting light intensity and microscope focus (Continued)

Adjust the light intensity using the button of or .

If you use the button for adjustment:


→See Section 3-2-2 [Adjusting light intensity] of this chapter.

Adjust the focus using the button.


→See Section 3-2-3 [Adjusting microscope focus] of this chapter.

STOP CORRECTION

!!! This procedure is to be continued in the next section. !!!

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1-6-1-3. Executing hairline alignment


Procedures for executing hairline alignment

!!! This procedure is continued from: !!!


Section 1-6-1-1 [Suspending cutting operation]
Section 1-6-1-2 [Adjusting light intensity and microscope focus]

STOP CORRECTION

Perform the hairline alignment by using the following buttons. In hairline alignment, the edges of the
kerf are aligned with the upper and lower hairline.
Buttons Description
Moves the monitor image upward and the microscope to the machine
rear direction.

Moves the monitor image downward and the microscope to the


machine front direction.

Narrows the width of the hairline with the central line fixed.

Widens the width of the hairline with the central line fixed.

Alignment

Cut line edges Hairline

The hairline alignment is performed.


・The message "G0056 Hairline adjusted." appears.

!!! This procedure is to be continued in the next section. !!!

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1-6-1-4. What to do after correcting hairline alignment


Procedures for operation after correcting hairline alignment

!!! This procedure is continued from: !!!


Section 1-6-1-3 [Executing hairline alignment]

STOP CORRECTION

Cutting is resumed.

CUT STATUS

Cutting is suspended.

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Procedures for operation after correcting hairline alignment (Continued)

Repeat the procedures from Section 1-6-1-3 of this chapter to check cut line and hairline positions.
When their positions are not aligned with each other:
Repeat hairline alignment until their positions are aligned with each other.

Cutting is resumed.

CUT STATUS

!!! Hairline alignment correction is complete. !!!

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1-6-2. Correcting cutting position


About correcting cutting position
When the line which has been cut (kerf) is not aligned with the target cutting position due to misalignment
of the target pattern or incorrectly-inputted index data, the cutting position in the Y-direction is corrected
on this screen.
・Before correcting the cutting position, check that the kerf and hairline are aligned with each other. If the
kerf and hairline are not aligned with each other, make hairline adjustment.

Cut line Hairline

Correcting cutting position

Operation flow

To make correction for a cutting position, press the button during cutting to stop the
cutting process.

1-6-2-1 Suspending cutting operation

1-6-2-2 Adjusting light intensity and microscope focus

1-6-2-3 Executing correction of cutting position

1-6-2-4 What to do after correcting cutting position

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1-6-2-1. Suspending cutting operation


Procedures for suspending cutting operation

During cutting operation

Cutting is suspended.

STOP CORRECTION

When images on the screen are hard to be seen:


Adjust the light intensity and microscope focus.
→See Section 1-6-2-2 [Adjusting light intensity and microscope focus] of this chapter.

!!! This procedure is to be continued to: !!!


Section 1-6-2-3 [Executing correction of cutting position]

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1-6-2-2. Adjusting light intensity and microscope focus


Purpose of adjustment of light intensity and microscope focus
When the cut line and hairline displayed on the screen are not visible when you correct the cutting
position, adjust the light intensity and microscope focus.

Procedures for adjusting light intensity and microscope focus

!!! This procedure is continued from: !!!


Section 1-6-2-1 [Suspending cutting operation]

STOP CORRECTION

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Procedures for adjusting light intensity and microscope focus (Continued)

Adjust the light intensity using the button of or .

If you use the button for adjustment:


→See Section 3-2-2 [Adjusting light intensity] of this chapter.

Adjust the focus using the button.


→See Section 3-2-3 [Adjusting microscope focus] of this chapter.

STOP CORRECTION

!!! This procedure is to be continued in the next section. !!!

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1-6-2-3. Executing correction of cutting position


Procedures for executing correction of cutting position

!!! This procedure is continued from: !!!


Section 1-6-2-1 [Suspending cutting operation]
Section 1-6-2-2 [Adjusting light intensity and microscope focus]

STOP CORRECTION

Use buttons to move the hairline to


the center of the street line.
Hairline

Street

If the correction value is greater than 0.05 mm:


The message "G0060 Correction is >0.05 mm. If correct, please execute again." appears.

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Procedures for executing correction of cutting position (Continued)

The machine corrects the cutting position.


・The message "G0059 Cutting position is adjusted." appears.

!!! This procedure is to be continued in the next section. !!!

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1-6-2-4. What to do after correcting cutting position


Procedures to perform after correcting cutting position

!!! This procedure is continued from: !!!


Section 1-6-2-3 [Executing correction of cutting position]

STOP CORRECTION

Cutting is resumed.

CUT STATUS

Cutting is suspended.

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Procedures to perform after correcting cutting position (Continued)

Repeat the procedures from Section 1-6-2-3 [Executing correction of cutting position] of this chapter
to check the position of cut line and hairline.
When the cutting position is deviated:
Repeat the cutting position correction until it is corrected.
When intended position is not cut:
The index value may be wrong. Check with your maintenance personnel.

Cutting is resumed.

CUT STATUS

!!! Cutting position correction is complete. !!!

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1-6-3. Changing feed speed


About changing feed speed
This operation is conducted to change the feed speed for cutting from the one specified as device data to
another, when "YES" is selected for <Speed Change> on the USER DEFINE DATA 1 screen [7.4].

Screens that enables speed change


You can change the feed speed in the following screens:
Screen No. Screen Title
1.0 FULL AUTOMATION screen (LAYER mode only)
- CUT STATUS screen
2.3 AUTO CUT screen
2.4 SEMI AUTOMATIC CUTTING screen
- STOP CORRECTION screen

Procedures for changing the feed speed

NOTICE

For changing the feed speed specified in the device data, ask the data
maintenance personnel
The modified feed speed will be cleared, when the full automation, automatic cutting
or semi-automatic cutting operation is aborted or when the device data No. is
changed.

During cutting operation or a cutting pause

Make sure that the displayed screen is the one enabling you to change the feed speed.

CUT STATUS

Enter a new feed speed in <Change Speed>.

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Procedures for changing the feed speed (Continued)

When the difference between the new speed and the value determined in the device data is
30 mm/s or more:
The message "G0061 Rapid change in Speed. If correct, press the button again." appears.

Check the new data.

If acceptable, press the button again.

Press the button on the screens other than the CUT STATUS screen.

The machine starts cutting at the new speed from the next line.

!!! Feed speed changing procedure is complete. !!!

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1-6-4. Correcting blade height


About correcting blade height
This operation is to correct the blade height that is registered in the device data, when "YES" is selected
for <Height Change> on the USER DEFINE DATA 1 screen [7.4].

Screens that enables blade height change


You can change the blade height in the following screens:
Screen No. Screen Title
1.0 FULL AUTOMATION screen (LAYER mode only)
- CUT STATUS screen
2.3 AUTO CUT screen
2.4 SEMI AUTOMATIC CUTTING screen
- STOP CORRECTION screen

Procedures for correcting the blade height

NOTICE

Correction value of the blade height


You cannot enter any blade height correction value falling outside the range of
± 0.1 mm. Also, the corrected value is automatically cleared when the setup process is
completed.

During cutting operation or a cutting pause

Make sure that the displayed screen is the one enabling you to change the blade height.

CUT STATUS

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Procedures for correcting the blade height (Continued)

Enter the blade height correction amount in <Height Adjust> on the displayed screen.
To cut deeper than the current height by 0.01 mm, enter -0.01 mm.
To cut shallower than the current height by 0.01 mm, enter 0.01 mm.

When the difference between the current blade height and new value is ± 0.03 mm or more:
The message "G0063 Rapid change in height adjustment. If correct, press the button again."
appears.

Check the new data.

If acceptable, press the button again.

Press the button on the screens other than the CUT STATUS screen.

The machine starts cutting at the new blade height from the next line.

!!! Blade height correction is complete. !!!

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1-6-5. Executing auto dress [optional accessory (DAD3360)]


About executing auto dress during a pause
In the machine equipped with the auto dress [optional accessory], when the need to dress arises during
workpiece processing, you can execute dressing after suspending the cutting operation.

Procedures for executing auto dress during a pause

During cutting operation

Cutting is suspended.

STOP CORRECTION

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Procedures for executing auto dress during a pause (Continued)

STOP CORRECTION

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Procedures for executing auto dress during a pause (Continued)

The machine resumes cutting after executing dressing.

!!! Auto dress execution during a pause is complete. !!!

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1-7. Completion of Full Automation


Procedures for completing full automation

WARNING

Before removing or setting workpieces, make sure that all axes are stopped
completely
The chuck table moves to the right concurrently with the completion of the operation.
If you place your fingers or hands in the drive sections, they may be caught or cut off.

!!! This procedure is continued from: !!!


Section 1-5 [Executing Full Automation]

When the full automation operation has been properly completed, the chuck table returns to the right
(origin position). The status indicator blinks in yellow.

Press the button to cancel the alarm.

FULL AUTOMATION CUT CHART


[1.0]

or

Press the or button to turn OFF the chuck table vacuum.

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Procedures for completing full automation (Continued)

DAD3360 when the microscope section DAD323/DAD3240


cover is set to open/close automatically: Open the microscope section cover.
The microscope section cover opens.
DAD3360 when the microscope section
cover is set not to open/close
automatically:

Remove the workpiece from the chuck table.

If the next workpiece to be processed is the same type as the previous one:
Go back to Section 1-3 [Setting a Workpiece] of this chapter.

DAD323/DAD3240 DAD3360
Close the microscope section cover.

LAYER mode only:

MAIN MENU
[0.0]

When you want to terminate the machine:


→See Section2 [Terminating the Machine] of Chapter B.

!!! Full automation operation is complete. !!!

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2. Manual Operation
Summary of this section

Section No. Title


2-1 Outline of Manual Operation
2-2 Procedures for Manual Operations

Safety precautions for operation

WARNING

When not using the touch panel, press the button located at the upper left
of the screen in order to lock and deactivate the touch panel
Unexpected operation of the machine may cause the operator to be injured.

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2-1. Outline of Manual Operation


Operations you can do individually in the manual operation
You can select the manual operation you want to do by pressing the following function buttons on the
MANUAL OPERATION screen [2.0].

Press To Do Description Who to Press


Teach Registers the target patterns Data maintenance
necessary for automatic alignment. personnel

Alignment Carries out manual alignment or Operator


automatic alignment.

Automatic cutting Cuts one workpiece. Operator

Semi-automatic cutting Cuts only one channel and from the Operator
alignment position.

Run process Executes the operational processes Operator


(excluding cutting) that are set in the device data.

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Manual operation in the CUT CHART mode


In the CUT CHART mode, automatic alignment, manual alignment, automatic cutting, and semi-
automatic cutting can be executed from the CUT CHART screen. Only the execution of the process
control table needs to be performed from the MANUAL OPERATION screen [2.0].

[For full automation/automatic cutting]

Manual alignment
→Automatic cutting

Calling up the CUT CHART


(SEMI-AUTO) screen

Automatic alignment
→Automatic cutting

[For semi-automatic cutting]

Single channel alignment


→Semi-automatic cutting

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2-2. Procedures for Manual Operations


Summary of this section

Section No. Title


2-2-1 Executing alignment
2-2-2 Executing automatic cutting
2-2-3 Executing semi-automatic cutting
2-2-4 Executing process control table running (except for cutting)
Note: "TEACH OPERATION" must be performed by data maintenance personnel. When such operations
are required, ask them to carry out the operation.

2-2-1. Executing alignment


About alignment
Alignment is the operation to search the designated target patterns on a workpiece and calculate the street
position using such patterns and the operation to align the street position manually.
→See Section 3 [Alignment] of this chapter.

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2-2-2. Executing automatic cutting


About automatic cutting
Automatic cutting is the operation to automatically cut the workpieces according to the directed cutting
position.

Safety precautions for automatic cutting

WARNING

While any axis is operating, do not place your hands in any movable section
after opening its cover
While the automatic cutting is in progress, the X- and Y-axes are moving. If you open
the cover during the automatic operation and place your hands in the cutting section,
they may be caught or cut off.

Before removing or setting workpieces, make sure that all axes are stopped
completely

When you press the or button at the completion of


automatic cutting, the chuck table moves to the right concurrently. If you place your
fingers or hands in the drive sections, they may be caught or cut off.

Summary of this section

Section No. Title


2-2-2-1 LAYER mode Executing automatic cutting
2-2-2-2 CUT CHART mode Executing automatic cutting

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2-2-2-1. LAYER mode Executing automatic cutting


Procedures for automatic cutting [LAYER mode]

MAIN MENU
[0.0]

MANUAL OPERATION
[2.0]

Set a workpiece on the chuck table.


→For the procedures of workpiece setting, see Section 1-3 [Setting a Workpiece] of this chapter.

Only when using the measure alignment [optional accessory]:


Confirm the workpiece No. to be processed to the data maintenance personnel. Enter the confirmed
workpiece No. at <Workpiece No.>. When one workpiece is processed, enter "1."

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Procedures for automatic cutting [LAYER mode] (Continued)

Specify the cutting position.


To perform automatic alignment:

Press the button.


The chuck table moves to under the microscope and the Y-axis moves frontward. Automatic alignment
is performed on the AUTO ALIGNMENT screen [2.2.1].
To perform manual alignment:

Press the button.


The chuck table moves to under the microscope and the Y-axis moves frontward.
→For the procedures of alignment operation, see Section 3 [Alignment] of this chapter.

The cutting operation starts.


When the correction is required during the cutting operation:
→See Section 1-6 [Making Corrections during Cutting Operation] of this chapter.

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Procedures for automatic cutting [LAYER mode] (Continued)

When the cutting operation is completed, the chuck table automatically moves to under the
microscope.

AUTO CUT
[2.3]

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Procedures for automatic cutting [LAYER mode] (Continued)

To remove the workpiece from the chuck table:

Press the button to turn OFF the chuck table vacuum.

The chuck table moves to the right (origin position) and the Y-axis moves to the rear (origin
position) automatically.

DAD3360 when the microscope section DAD323/DAD3240


cover is set to open/close automatically: Open the microscope section cover.
The microscope section cover opens.
DAD3360 when the microscope section
cover is set not to open/close
automatically:

Remove the workpiece from the chuck table.

DAD323/DAD3240 DAD3360
Close the microscope section cover.

MANUAL OPERATION
[2.0]

!!! The automatic cutting is complete. !!!

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2-2-2-2. CUT CHART mode Executing automatic cutting


Procedures for automatic cutting [CUT CHART mode]

CUT CHART

Set a workpiece on the chuck table.


→For the procedures of workpiece setting, see Section 1-3 [Setting a Workpiece] of this chapter.

Only when using the measure alignment [optional accessory]:


When cutting all the workpieces placed on the chuck table:
Select "All Work."
When cutting the specified one workpiece placed on the chuck table:
Select "One Only."
Also, confirm the workpiece No. to be processed to the data maintenance personnel. Enter the
confirmed workpiece No. at <Workpiece No.>. When one workpiece is processed, enter "1."

Specify the cutting position.


To perform automatic alignment:

Press the button.


The chuck table moves to under the microscope and the Y-axis moves frontward. The automatic
alignment is executed on the AUTO ALIGNMENT screen [2.2.1].
To perform manual alignment:

Press the button.


The chuck table moves to under the microscope and the Y-axis moves frontward.
→For the procedures of alignment operation, see Section 3 [Alignment] of this chapter.

CUT CHART

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Procedures for automatic cutting [CUT CHART mode] (Continued)

The cutting operation starts.


When the correction is required during the cutting operation:
→See Section 1-6 [Making Corrections during Cutting Operation] of this chapter.

When the cutting operation is completed, the chuck table automatically moves to under the
microscope.

CUT CHART

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Procedures for automatic cutting [CUT CHART mode] (Continued)

To remove the workpiece from the chuck table:

Press the button to turn OFF the chuck table vacuum.

The chuck table moves to the right (origin position) and the Y-axis moves to the rear (origin
position) automatically.

DAD3360 when the microscope section DAD323/DAD3240


cover is set to open/close automatically: Open the microscope section cover.
The microscope section cover opens.
DAD3360 when the microscope section
cover is set not to open/close
automatically:

Remove the workpiece from the chuck table.

DAD323/DAD3240 DAD3360
Close the microscope section cover.

!!! The automatic cutting is complete. !!!

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2-2-3. Executing semi-automatic cutting


About semi-automatic cutting
In the semi-automatic cutting, you should designate the cutting direction of Front or Rear. Then the
machine cuts only one channel from the specified position in the designated direction.

Safety precautions for semi-automatic cutting

WARNING

While any axis is operating, do not place your hands in any movable section
after opening its cover
While the semi-automatic cutting is in progress, the X- and Y-axes are moving. If you
open the cover during automatic operation and place your hands in the cutting section,
they may be caught or cut off.

Before removing or setting workpieces, make sure that all axes are stopped
completely

When you press the or button at the completion of


automatic cutting, the chuck table moves to the right concurrently. If you place your
fingers or hands in the drive sections, they may be caught or cut off.

Summary of this section

Section No. Title


2-2-3-1 LAYER mode Executing semi-automatic cutting
2-2-3-2 CUT CHART mode Executing semi-automatic cutting

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2-2-3-1. LAYER mode Executing semi-automatic cutting


Procedures for semi-automatic cutting [LAYER mode]

MAIN MENU
[0.0]

MANUAL OPERATION
[2.0]

Set a workpiece on the chuck table.


→For the procedures of workpiece setting, see Section 1-3 [Setting a Workpiece] of this chapter.

Only when using the measure alignment [optional accessory]:


Confirm the workpiece No. to be processed to the data maintenance personnel. Enter the confirmed
workpiece No. at <Workpiece No.>. When one workpiece is processed, enter "1."

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Procedures for semi-automatic cutting [LAYER mode] (Continued)

When cutting all the lines of one channel:


Enter "0" at <Cut Line>.
When cutting a part of the channel:
Confirm the number of cut lines with your data maintenance personnel, and enter the confirmed
number in <Cut Line>.

The chuck table moves to under the microscope and the Y-axis moves frontward.
When using the measure alignment [optional accessory], the microscope moves to a position near the
line specified in <Measuring Align Start Line>.

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Procedures for semi-automatic cutting [LAYER mode] (Continued)

Perform single channel alignment.


→For the procedures of alignment operation, see Section 3 [Alignment] of this chapter.

SEMI AUTOMATIC
CUTTING
[2.4]

Designate the cutting direction.


To cut rearward (the direction in which the Y-axis moves toward the rear of the machine):

Press the button.


To cut frontward (the direction in which the Y-axis moves toward the front of the machine):

Press the button.

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Procedures for semi-automatic cutting [LAYER mode] (Continued)

The machine starts cutting.


When the correction is required during the cutting operation:
→See Section 1-6 [Making Corrections during Cutting Operation] of this chapter.

When the cutting operation is completed, the chuck table automatically moves to under the
microscope.

SEMI AUTOMATIC
CUTTING
[2.4]

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Procedures for semi-automatic cutting [LAYER mode] (Continued)

To remove the workpiece from the chuck table:

Press the button to turn OFF the chuck table vacuum.

The chuck table moves to the right (origin position) and the Y-axis moves to the rear (origin
position) automatically.

DAD3360 when the microscope section DAD323/DAD3240


cover is set to open/close automatically: Open the microscope section cover.
The microscope section cover opens.
DAD3360 when the microscope section
cover is set not to open/close
automatically:

Remove the workpiece from the chuck table.

DAD323/DAD3240 DAD3360
Close the microscope section cover.

MANUAL OPERATION
[2.0]

!!! The semi-automatic cutting operation is complete. !!!

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2-2-3-2. CUT CHART mode Executing semi-automatic cutting


Procedures for semi-automatic cutting [CUT CHART mode]

CUT CHART

Set a workpiece on the chuck table.


→For the procedures of workpiece setting, see Section 1-3 [Setting a Workpiece] of this chapter.

Only when using the measure alignment [optional accessory]:


Confirm the workpiece No. to be processed to the data maintenance personnel. Enter the confirmed
workpiece No. at <Workpiece No.>. When one workpiece is processed, enter "1."

When starting alignment from the beginning of the channel:


Enter "0" in <Start line for 1CH Measuring alignment>.
When starting alignment from the middle of the channel:
Confirm the No. of the line from which measurement alignment is to be started with your data
maintenance personnel, and enter the No. in <Start line for 1CH Measuring alignment>.

When cutting all the lines of one channel:


Enter "0" in <Cut Line>.
When cutting a part of the channel:
Confirm the number of cut lines with your data maintenance personnel, and enter the confirmed
number in <Cut Line>.

The chuck table moves to under the microscope and the Y-axis moves frontward.
When using the measure alignment [optional accessory], the microscope moves to a position near the
line specified in <Start line for 1CH Measuring alignment>.

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Procedures for semi-automatic cutting [CUT CHART mode] (Continued)

Perform single channel alignment.


→For the procedures of alignment operation, see Section 3 [Alignment].

CUT CHART

Designate the cutting direction.


To cut rearward (the direction in which the Y-axis moves toward the rear of the machine):

Press the button.


To cut frontward (the direction in which the Y-axis moves toward the front of the machine):

Press the button.

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Procedures for semi-automatic cutting [CUT CHART mode] (Continued)

The cutting operation starts.


When the correction is required during the cutting operation:
→See Section 1-6 [Making Corrections during Cutting Operation] of this chapter.

When the cutting operation is completed, the chuck table automatically moves to under the
microscope.

CUT CHART

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Procedures for semi-automatic cutting [CUT CHART mode] (Continued)

To remove the workpiece from the chuck table:

Press the button to turn OFF the chuck table vacuum.

The chuck table moves to the right (origin position) and the Y-axis moves to the rear (origin
position) automatically.

DAD3360 when the microscope section DAD323/DAD3240


cover is set to open/close automatically: Open the microscope section cover.
The microscope section cover opens.
DAD3360 when the microscope section
cover is set not to open/close
automatically:

Remove the workpiece from the chuck table.

DAD323/DAD3240 DAD3360
Close the microscope section cover.

!!! The semi-automatic cutting is complete. !!!

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2-2-4 Executing process control table running (except for cutting)


About process control table running (except for cutting)
In this operation, the process control (operation procedure) programmed in the device data is
automatically executed. This operation skips cutting and conducts other procedures.

Procedures for running process control table

WARNING

Close the splash cover (splash cover F in DAD3360) and the microscope section
cover before running the process control program

When you press the button on the MANUAL OPERATION screen [2.0],
all axes move concurrently. If you place your fingers or hands in the drive sections,
they may be caught or cut off.

While the axis is operating, do not place your hands in any movable section after
opening its cover
While the process control is in progress, the X- and Y-axes are moving. If you open
the cover during automatic operation and place your hands in the cutting section, they
may be caught or cut off.

Before removing or setting workpieces, make sure that all axes are stopped
completely

When you press the button at the completion of the operation, the chuck
table moves to the right concurrently. If you place your fingers or hands in the drive
sections, they may be caught or cut off.

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Procedures for running process control table (Continued)

MAIN MENU CUT CHART


[0.0]

or

CUT CHART mode only:

MAINTENANCE
MENU

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Procedures for running process control table (Continued)

Make sure that the directory and device data name (Device No.) of the designated device data are
displayed at the lower right of the MANUAL OPERATION screen [2.0].
If the device data name is not displayed:
Go back to Section 1-2 [Verification of Device Data] of this chapter.

Set a workpiece on the chuck table.


→For the procedures of workpiece setting, see Section 1-3 [Setting a Workpiece] of this chapter.

Only when using the measure alignment [optional accessory]:


Confirm the workpiece No. to be processed to the data maintenance personnel. Enter the confirmed
workpiece No. at <Workpiece No.>. When one workpiece is processed, enter "1."

The machine executes the process control excluding cutting.


After the process control is completed, the machine automatically stops.

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Procedures for running process control table (Continued)

MANUAL OPERATION
[2.0]

To remove the workpiece from the chuck table:

Press the button to turn OFF the chuck table vacuum.

The chuck table moves to the right (origin position) and the Y-axis moves to the rear (origin
position) automatically.

DAD3360 when the microscope section DAD323/DAD3240


cover is set to open/close automatically: Open the microscope section cover.
The microscope section cover opens.
DAD3360 when the microscope section
cover is set not to open/close
automatically:

Remove the workpiece from the chuck table.

DAD323/DAD3240 DAD3360
Close the microscope section cover.

!!! The process control table running is complete. !!!

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3. Alignment
About alignment
Alignment is the operation to search the same pattern with the designated target pattern on a workpiece
and determine the street position based on the detected pattern, and the operation to manually determine
the street position.

Types of alignment

Alignment Function
Determines the cutting position automatically by recognizing the mark
(target pattern) on the workpiece used as the reference for determining
the cutting position. Alignment is performed automatically for all the
Automatic alignment channels to be cut. When performing automatic alignment, teaching
operation needs to be performed beforehand.
→For teaching operation:
See Section 3 [Teach] of Chapter B in the Data Maintenance Manual.
Determines the cutting position manually while looking at the
Manual alignment microscope image. Alignment is performed for all the channels to be
cut according to the instruction on the screen.
Specifies a channel and determines the cutting position manually while
Single channel alignment looking at the microscope image. This alignment method is used when
semi-automatic cutting is performed.

About macro alignment in automatic alignment


Macro alignment can be performed only when the machine is equipped with the macro microscope
[optional accessory].
Specification Installed microscope Automatic alignment operation
Machine with Macro (low magnification) Macro alignment (rough alignment)
macro microscope + ↓
[optional accessory] Micro (high magnification) Micro alignment (precise alignment)
Standard machine Micro (high magnification) only Micro alignment only

Section No. Title


3-1 Automatic Alignment
3-2 Manual Alignment

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Safety precautions for operation

WARNING

While any axis is operating, do not place your hands in any movable section
after opening its cover
While the alignment is in progress, the X- and Y-axes are moving. If you open the
cover during the operation and place your hands in the drive section, they may be
caught or cut off.

When not using the touch panel, press the button located at the upper left
of the screen in order to lock and deactivate the touch panel
Unexpected operation of the machine may cause the operator to be injured.

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3-1. Automatic Alignment


About automatic alignment
Automatic alignment is the operation to automatically determine the street position. It can be conducted
only when teaching operation has been completed.

Operation flow

1-3 Setting a Workpiece

3-1-1 Calling up the MANUAL ALIGNMENT screen [2.2] (LAYER mode only)

3-1-2 Executing automatic alignment

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3-1-1. Calling up the MANUAL ALIGNMENT screen [2.2]


(LAYER mode only)
Procedure for calling up the MANUAL ALIGNMENT screen [2.2]

WARNING

Do not place your fingers or hands in any drive sections

When you press the button on the MANUAL OPERATION screen [2.0],
the chuck table moves to under the microscope and the Y-axis moves frontward
concurrently. If you place your fingers or hands in the drive sections, they may be
caught or cut off.

This procedure is necessary only for LAYER mode.

!!! This procedure is continued from: !!!


Section 1-3 [Setting a Workpiece]

MAIN MENU
[0.0]

MANUAL OPERATION
[2.0]

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Procedure for calling up the MANUAL ALIGNMENT screen [2.2] (Continued)

Make sure that the directory and device data name (Device No.) of the designated device data are
displayed at the lower right of the MANUAL OPERATION screen [2.0].
If the device data name is not displayed:
Go back to Section 1-2 [Verification of Device Data] of this chapter.

The chuck table moves to under the microscope and the Y-axis moves frontward.

!!! This procedure is to be continued in the next section. !!!

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3-1-2. Executing automatic alignment


Procedure for executing automatic alignment

!!! This procedure is continued from: !!!


Section 1-3 [Setting a Workpiece]
Section 3-1-1 [Calling up the MANUAL ALIGNMENT screen [2.2] (LAYER mode only)]

MANUAL ALIGNMENT CUT CHART


[2.2]

or

or

High mag. High mag. High mag.


CH1 (Left) CH1 (Right) CH1
Street
θ adjustment Y-θ adjustment adjustment

Low mag. High mag. High mag. High mag.


CH2 (Left) CH2 (Right) CH2
Pattern Street
matching result θ adjustment Y-θ adjustment adjustment

Current image

The machine executes automatic alignment.

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Procedure for executing automatic alignment (Continued)

If the error of either "A0531 Macro target not found." or "A0532 Micro target not found."
occurs:
The teaching operation has not been properly completed. Contact your maintenance personnel.

When the automatic alignment has been normally completed, the message "G0573 Auto alignment
completed." appears.

MANUAL ALIGNMENT CUT CHART


[2.2]

or

LAYER mode only:

MANUAL OPERATION
[2.0]

!!! The automatic alignment operation is complete. !!!

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3-2. Manual Alignment


About manual alignment
The manual alignment is the operation to determine the street position manually.

Operation flow

1-3 Setting a Workpiece

3-2-1 Calling up the MANUAL ALIGNMENT screen [2.2]

3-2-2 Adjusting light intensity

3-2-3 Adjusting microscope focus

3-2-4 Executing θ alignment of the channel 1

3-2-5 Executing street adjustment of the channel 1

3-2-6 Executing θ alignment of the channel 2

3-2-7 Executing street adjustment of the channel 2

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3-2-1. Calling up the MANUAL ALIGNMENT screen [2.2]


Procedures for calling up the MANUAL ALIGNMENT screen [2.2]

!!! This procedure is continued from: !!!


Section 1-3 [Setting a Workpiece]

MANUAL OPERATION CUT CHART


[2.0]

or

LAYER mode only:

MANUAL OPERATION
[2.0]

Make sure that the directory and device data name (Device No.) of the designated device data are
displayed at the lower right of the MANUAL OPERATION screen [2.0] or the CUT CHART screen.
If the device data name is not displayed:
Go back to Section 1-2 [Verification of Device Data] of this chapter.

or

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Procedures for calling up the MANUAL ALIGNMENT screen [2.2] (Continued)

The chuck table moves to under the microscope and the Y-axis moves frontward.

MANUAL ALIGNMENT
[2.2]

!!! This procedure is to be continued in the next section. !!!

C-76
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3-2-2. Adjusting light intensity


Methods to adjust light intensity
The table below shows various methods to adjust light intensity.
Note: Since the light condition provided by the automatic light intensity is relatively dark, it is
recommended that you adjust it manually.
Adjusting method Screen to use Button to use
Adjust manually MANUAL ALIGNMENT
screen [2.2]

Automatically adjust the MANUAL ALIGNMENT


direct light screen [2.2]
Press the button for one
second or longer.
Automatically adjust the MANUAL ALIGNMENT
oblique light screen [2.2]
Press the button for one
second or longer and then press it once
more.
Automatically adjust the MANUAL ALIGNMENT
direct and oblique light screen [2.2]
Press the button for one
second or longer and then press it twice
more.
LIGHT LEVEL ADJUST
screen

Return the light intensity LIGHT LEVEL ADJUST


to default screen

C-77
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Procedures for adjusting light intensity

!!! This procedure is continued from: !!!


Section 3-2-1 [Calling up the MANUAL ALIGNMENT screen [2.2]]

MANUAL ALIGNMENT
[2.2]

When you manually adjust the light intensity:


Press the adjust button displayed on the MANUAL ALIGNMENT screen [2.2].

Light intensity adjust


button for direct light

Light intensity adjust


button for oblique
Indicates the current light
light intensity.

When you adjust the light intensity by using the <F8> button on the MANUAL ALIGNMENT
screen [2.2]:

You can adjust the light intensity variously depending on the way of pressing the
button.
If you Machine will
Press it for one second or more Carry out the automatic light intensity adjustment of direct
light.
Press it for one second or more, Carry out the automatic light intensity adjustment of oblique
then once more light.
Press it for one second or more, Carry out the automatic light intensity adjustment of direct
then twice more light and oblique light.

C-78
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Procedures for adjusting light intensity (Continued)

When you adjust the light intensity by using the LIGHT LEVEL ADJUST screen:

Press the button on the MANUAL ALIGNMENT screen [2.2] to call up the LIGHT
LEVEL ADJUST screen.

Automatically adjusts light intensity.

Return the light intensity to default.

MANUAL ALIGNMENT
[2.2]

!!! This procedure is to be continued in the next section. !!!

C-79
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3-2-3. Adjusting microscope focus


Procedures for adjusting microscope focus

!!! This procedure is continued from: !!!


Section 3-2-2 [Adjusting light intensity]

MANUAL ALIGNMENT
[2.2]

You can adjust the microscope focus variously depending on the way of pressing the

button.
If you Machine will
Press it once Call up the FOCUS ADJUSTMENT screen.
Press it for one second or Automatically carry out the automatic focusing.
more

C-80
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Procedures for adjusting microscope focus (Continued)

Adjust the microscope focus. Use the following buttons to carry out focusing.
Microscope goes up Microscope goes
down

Auto Focus by Data Auto Focus

Large Stroke Small Stroke

Auto Focus After 0


(Origin)

If the message "A0552 Focus maintenance has not been performed." appears:
Ask the maintenance personnel to perform the focus maintenance procedure.

MANUAL ALIGNMENT
[2.2]

!!! This procedure is to be continued in the next section. !!!

C-81
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3-2-4. Executing θ alignment of the channel 1


About θ alignment
The θ alignment is the operation to adjust the workpiece angle so that the machine enables to cut the
workpiece exactly along the street.
The θ adjustment operation can also be automatically performed. To initiate automatic θ adjustment,

press the button for a certain period of time.

Procedures for θ alignment of the channel 1

!!! This procedure is continued from: !!!


Section 3-2-3 [Adjusting microscope focus]

MANUAL ALIGNMENT
[2.2]

Use or the XIS buttons to align an arbitrary reference position with the
horizontal center of hairline.

Street

Hairline

The chuck table automatically moves from the right to the left.

C-82
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Procedures for θ alignment of the channel 1 (Continued)

At the place where the chuck table has moved from the right to the left,

use or the XIS buttons to align again an arbitrary reference position


with the horizontal center of hairline.

Street

Hairline

The chuck table automatically moves from the left to the right.

When the hairline position matches with the aligned position, go to the next step.
When the hairline position is deviated from the aligned position:
Repeat the procedures from the first step of this section.

!!! This procedure is to be continued in the next section. !!!

C-83
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3-2-5. Executing street adjustment of the channel 1


About street adjustment
Street adjustment is the operation to align the position and width of hairline with the street on workpiece
for setting the line to cut.

Procedures for street adjustment of the channel 1

!!! This procedure is continued from: !!!


Section 3-2-4 [Executing θ alignment of the channel 1]

Use the or the XIS buttons and /


buttons to align the horizontal center of hairline with the center of the street.

Street

Hairline

The workpiece automatically rotates 90°.

!!! This procedure is to be continued in the next section. !!!

C-84
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3-2-6. Executing θ alignment of the channel 2


Procedures for θ alignment of the channel 2

!!! This procedure is continued from: !!!


Section 3-2-5 [Executing street adjustment of the channel 1]

Use or the XIS buttons to align an arbitrary reference position with the
horizontal center of hairline.

Street

Hairline

The chuck table automatically moves from the right to the left.

At the place where the chuck table has moved from the right to the left,

use or the XIS buttons to align again an arbitrary reference position


with the horizontal center of hairline.

Street

Hairline

C-85
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Procedures for θ alignment of the channel 2 (Continued)

The chuck table automatically moves from the left to the right.

When the hairline position matches with the aligned position, go to the next step.
When the hairline position is deviated from the aligned position:
Repeat the procedures from the first step of this section.

!!! This procedure is to be continued in the next section. !!!

C-86
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3-2-7. Executing street adjustment of the channel 2


Procedures for street adjustment of the channel 2

!!! This procedure is continued from: !!!


Section 3-2-6 [Executing θ alignment of the channel 2]

Use the or the XIS and / buttons to


align the horizontal center of hairline with the center of the street.

Street

Hairline

The machine registers the cutting positions of the channel 1 and 2.

LAYER mode only:

MANUAL OPERATION
[2.0]

C-87
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Procedures for street adjustment of the channel 2 (Continued)

MAIN MENU CUT CHART


[0.0]

or

!!! The manual alignment operation is complete. !!!

C-88
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D. BLADE MAINTENANCE
Contents of this chapter

Section No. Title Contents


1 Blade Replacement ・Procedure for blade replacement
2 Setup ・Procedure for setup
3 Blade Dressing Operation ・Procedure for blade dressing operation
4 Hairline Alignment ・Procedure for hairline alignment

D-1
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1. Blade Replacement
Safety precautions for blade replacement

WARNING

When not using the touch panel, press the button located at the upper left
of the screen in order to lock and deactivate the touch panel
Unexpected operation of the machine may cause the operator to be injured.

Do not allow anybody else other than the operator to touch the machine during
the blade replacement operation
If the drive section is inadvertently activated, the person's hands and fingers may be
caught or cut off.

While the axis is operating, do not place your hands in any movable section after
opening its cover
If you place your hands inside the cover during axis operation, your fingers or hands
may be caught and cut off by the drive section.

CAUTION

Before replacing the blade, call up and display the BLADE REPLACEMENT
screen [4.1] and confirm that air is supplied to the machine in the sensor status
area on the screen
If you replace the blade while air supply to the machine is stopped, the spindle may be
damaged. Also, you cannot replace the blade without displaying the BLADE
REPLACEMENT screen [4.1] because the spindle shaft is locked only when it is
displayed.

D-2
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Operation flow

1-1 Preparation for Blade Replacement

1-2 Saving Data of Used Blades

1-3 Replacement of Blades

1-4 Data Setting for the Installed Blade

1-5 Adjusting the Blade Breakage Detector [Optional Accessory]

1-6 Executing Warming Up (Idling)

1-7 Executing Setup

3 Blade Dressing Operation

4 Hairline Alignment

D-3
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1-1. Preparation for Blade Replacement


Preparation for blade replacement
When carrying out blade replacement work, special jigs are required to remove the blade.
Before carrying out blade replacement work, prepare the jigs appropriate to the blade type.

NOTICE

Use alcohol which is furnished in your factory or complies with your factory's
standards
Alcohol is not supplied with the machine.

Name Shape

Handle
Bit

Torque driver set


(for 400 cN・m)
Torque driver

・Screw the handle into the torque driver as shown above.


・Insert the larger end of the bit into the end of the torque driver fully as
shown above.

Nut demounting jig

Hub blade demounting jig


(Only for hub-type blade)

・Alcohol
Other
・Lint-free cloth

D-4
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Procedures for preparation for blade replacement

MAIN MENU CUT CHART


[0.0]

or

LAYER mode only:

BLADE
MAINTENANCE
[4.0]

or

Spindle rotation and the wheel coolant water supply stop.


Note: It takes about 15 seconds until the spindle stops completely.

The Y-axis moves frontward to the blade replacement position.

D-5
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Procedures for preparation for blade replacement (Continued)

When you save the information of the When you will not use the removed
removed blade: blade as a used blade afterward:
Go to Section 1-2 Go to Section 1-3-1
[Saving Data of Used Blades]. [Removing the wheel cover].

D-6
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1-2. Saving Data of Used Blades


About used blades
"Used blades" refers to the blades which were removed once from the spindle.
When you cut workpieces of multiple types, you have to use a different type of blade for each type of
workpiece. In this case, you have to replace the blade even when the blade wear has not reached its limit.

Saving/loading information of used blades


In order to reuse such used blades afterward, information of the removed blade should be saved in the
machine.
And, when you want to use the used blade, load these data on the machine.

Cautions for using used blades


It is important to check that the installed used blade corresponds to the loaded information. If wrong
information is applied, it may deteriorate the cutting accuracy.

Procedures for saving the data of used blades

WARNING

Do not touch the flange or blade after opening the covers during spindle rotation
Since the blade edge is sharp, if your fingers or hands come into contact with it, they
may be slashed or cut off. The splash cover (splash cover F and splash cover S in
DAD3360) is designed not to open during spindle rotation.

Do not place your fingers or hands under the blade


Since the blade edge is sharp, if your fingers or hands come into contact with it, they
may be slashed or cut off.

D-7
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Procedures for saving the data of used blades (Continued)

!!! This procedure is continued from: !!!


Section 1-1 [Preparation for Blade Replacement]

BLADE
REPLACEMENT
[4.1]

Enter the ID.

Check the used blade data displayed on the USED BLADE DATA SAVE screen [4.1.1].

Enter a new ID of the blade to be removed to <Used Blade ID>.


・Up to 20 alphanumeric characters can be entered.

D-8
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Procedures for saving the data of used blades (Continued)

Make sure that the saved information of the used blade is displayed.

BLADE
REPLACEMENT
[4.1]

!!! This procedure is to be continued in the next section. !!!

D-9
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1-3. Replacement of Blades


Operation flow

WARNING

Before performing the operation, confirm that the spindle is stopped completely
During the blade replacement operation, an operator has to touch the spindle axis
using a jig or directly by hand. Since the blade edge is sharp, if fingers and hands
come into contact with it, they may be slashed or cut off.

CAUTION

Perform blade replacement operation after checking to make sure that air is
supplied to the machine in the sensor status area on the screen
If the blade is replaced while air supply to the machine is stopped, the spindle may

break. The sensor status area is called up by pressing the button located at the
upper right of the screen.

NOTICE

Before replacing the blade, call up and display the BLADE REPLACEMENT
screen [4.1]
The blade cannot be replaced without displaying the BLADE REPLACEMENT
screen [4.1] because the spindle shaft is locked only when it is displayed.

1-3-1 Removing the wheel cover

1-3-2 Removing the blade breakage detector [optional accessory]

1-3-3 Removing the blade

1-3-4 Installing a new blade

D-10
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1-3-1. Removing the wheel cover


Procedures for removing the wheel cover

!!! This procedure is continued from: !!!


Section 1-1 [Preparation for Blade Replacement]
Section 1-2 [Saving Data of Used Blades]

From outside the cover, visually make sure that the spindle is stopped.

Press the button located at the upper left of the screen.

Open the splash cover (splash cover F in DAD3360).

D-11
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Procedures for removing the wheel cover (Continued)

Remove the wheel cover.


Only for the machine without the blade breakage detector [optional accessory]:
1. Loosen the retaining screw by rotating it half counterclockwise.

Retaining screw

Wheel cover Loosen by rotating


counterclockwise.

2. Slide the wheel cover to the left while holding its handle.
・Be sure not to pull the piping section.

Handle

3. Rotate the retaining screw clockwise.


・The wheel cover is secured while it is kept open.

D-12
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Procedures for removing the wheel cover (Continued)

Only for the machine equipped with the blade breakage detector [optional accessory]:
1. Loosen the wheel cover retaining screw by rotating it counterclockwise.

Wheel cover
Retaining
screw

2. Remove the wheel cover (front side).

When the machine is not equipped with When the machine is equipped with the
the blade breakage detector [optional blade breakage detector [optional
accessory]: accessory]:
Go to Section 1-3-3 Go to Section 1-3-2
[Removing the blade]. [Removing the blade breakage detector].

D-13
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1-3-2. Removing the blade breakage detector [optional accessory]


Procedures for removing the blade breakage detector
The operation described in this section is necessary only for the machines incorporating a blade breakage
detector as an optional accessory.
!!! This procedure is continued from: !!!
Section 1-3-1 [Removing the wheel cover]

Loosen the retaining screw of the blade breakage detector by rotating it counterclockwise.
Adjustment knob Retaining screw

Slide

Slide the blade breakage detector upward until it reaches the upper end.

Rotate the retaining screw of the blade breakage detector clockwise and secure it at the upper end.

The blade breakage detector detaches from the blade.

!!! This procedure is to be continued in the next section. !!!

D-14
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1-3-3. Removing the blade


Configurations of a flange (when mounting a hubless blade) [DAD323]

[2.0kW spindle/1.8kW spindle (optional accessory): R-type flange]

Flange A

Blade

Flange B

Flange B lock nut

Washer

Lock bolt

Configurations of a flange (when mounting a hubless blade) [DAD3240]

[1.8kW spindle: R-type flange]

Flange A

Blade

Flange B

Flange B lock nut

Washer
Lock bolt

D-15
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Configurations of a flange (when mounting a hubless blade) [DAD3360]

[1.8kW spindle: R-type flange]

Flange A

Blade

Flange B

Flange B lock nut

Washer
Lock bolt

[2.2kW spindle (optional accessory): S-type flange]

Flange A

Blade

Flange B

Flange B lock nut

Washer

Lock bolt

D-16
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Configuration of a hub mount (when mounting a hub blade) [DAD323]

[2.0kW spindle/1.8kW spindle (optional accessory): 2-inch type]

Hub mount
Hub blade

Lock nut for hub

Lock bolt

Configuration of a hub mount (when mounting a hub blade) [DAD3240]

[1.8kW spindle: 2-inch type]

Hub mount

Hub blade

Lock nut for hub

Lock bolt

D-17
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Configuration of a hub mount (when mounting a hub blade) [DAD3360]

[1.8kW spindle: 2-inch type]

Hub mount

Hub blade

Lock nut for hub

Lock bolt

[2.2kW spindle (optional accessory): 3-inch type]

Hub mount

Hub blade

Lock nut for hub

Washer

Lock bolt

D-18
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Procedures for removing the blade

CAUTION

Carefully take out the hub-type blade from a package or mount/remove it on/from
the machine using a hub blade demounting jig or wearing finger cots
Since the edge of a hub base is sharp, your fingers may be slashed.

CAUTION

When using a torque driver, apply force only in the spindle concentric direction
(Y-axis direction) and rotating direction
The spindle and jig may fail as a result of force applied to the vertical direction.

D-19
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Procedures for removing the blade (Continued)

!!! This procedure is continued from: !!!


Section 1-3-1 [Removing the wheel cover]
Section 1-3-2 [Removing the blade breakage detector]

While pressing down the silver part of the nut demounting jig and letting its hooks up, attach the nut
demounting jig to the spindle lock nut.

Black part

Silver part

Take your hand off the black part while continuing to press the silver part.

Take your hand off the silver part.

Lightly rotate the nut demounting jig until its pin is inserted to the hole of the lock nut.
・If the nut demounting jig can not be extracted by lightly pulling the resin part, it means that the pin
of the nut demounting jig is in the hole of the lock nut.

D-20
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Procedures for removing the blade (Continued)

Check to make sure the silver part has risen to the same height as the black part.
・When the silver part is being pressed (when the height of the black part and that of the silver part are
not the same, or when the silver part is tilted), the hooks of the nut demounting jig may not be
hooked to the lock nut. If the nut demounting jig is turned under such state, the nut demounting jig
may break.

Make sure that the


silver part is not tilted.

Have on hand the torque driver set.

Insert the bit into the hole of the nut demounting jig.

Bit

D-21
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Procedures for removing the blade (Continued)

While pressing the torque driver lightly in the spindle concentric direction (Y-axis direction), turn the
driver counterclockwise once.

1. While pressing
the driver lightly,
2. Turn it
counterclockwise
once.

Cautions for turning the torque driver:


・Do not apply a force in the arrow directions shown below (vertical and horizontal directions against
the spindle axis). It may cause the spindle and nut demounting jig to be damaged.
・The spindle is designed so that the nut demounting jig will be broken by applying a force in the
arrow directions shown in the pictures below.

Left side

Top side

D-22
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Procedures for removing the blade (Continued)

While holding the nut demounting jig with one hand, remove the torque driver set from the jig.
・If you forcibly pull out the driver without holding the nut demounting jig, the jig may be damaged.

1. While holding the jig,

2. Pull out the driver in


the arrow direction.

Turn the nut demounting jig counterclockwise with your hand until it is removed.
・The lock nut comes off together with the nut demounting jig.

D-23
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Procedures for removing the blade (Continued)

For hubless (washer) blade:


Remove the flange B and then remove the blade.
For hub blade:
Carefully enclose the blade by the hub blade demounting jig, or hold the blade with fingers wearing
finger cots, remove the blade slowly.

[Use the demounting jig.] [Wear finger cots.]

D-24
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Procedures for removing the blade (Continued)

When the blade cannot easily be demounted:

Press to release touch panel lock.

Press the button to release spindle shaft lock.

Remove the blade.

Press the button to activate spindle shaft lock.

Press button of the opened menu to lock the touch panel.

!!! This procedure is to be continued in the next section. !!!

D-25
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1-3-4. Installing a new blade


Procedures for installing a new blade

WARNING

When screwing the lock nut, use the provided torque screwdriver and tighten it
to the specified torque
If the nut is tightened to insufficient torque, it may come off and incur flange or hub
mount separation, thereby causing damage to the cover and bellows. Meanwhile, if
the torque is too strong, it might cause breakage of the flange or spindle. Specified
torque for the lock nut is 400 cN・m.

CAUTION

Carefully take out the hub-type blade from a package or mount/remove it on/from
the machine using a hub blade demounting jig or wearing finger cots
Since the edge of a hub base is sharp, your fingers may be slashed.

CAUTION

After mounting the lock nut, do not forget to remove the nut demounting jig
If the spindle starts to rotate with the nut demounting jig being left on, the spindle will
be broken.

Slowly mount the blade on the hub mount while exercising care not to contact it
with any neighboring parts
The blade may be damaged when mounting.

When using a torque driver, apply a force only in the spindle concentric direction
(Y-axis direction) and rotating direction
Force applied in the vertical or horizontal direction may cause the spindle and jig to
be damaged.

D-26
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Procedures for installing a new blade (Continued)

!!! This procedure is continued from: !!!


Section 1-3-3 [Removing the blade]

Carefully take out the new blade from the case.


・For hub-type blade installation, handle the blade using the hub blade demounting jig or wearing
finger cots.

For hub blade:


Clean the inner diameter of blade with lint-free cloth moistened with alcohol. Then, blow air to remove
water.

Install the blade to the machine.


For hubless (washer) blade:
Install the blade to the flange A and sandwich it with the flange B.
For hub blade:
Carefully enclose the blade by the hub blade demounting jig, or hold the blade with fingers wearing
finger cots, install the blade to the hub mount.

[Use the demounting jig.] [Wear finger cots.]

D-27
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Procedures for installing a new blade (Continued)

When the lock nut is disengaged from the nut demounting jig:
1. While pressing down the metal part of the nut demounting jig and letting its hooks up, align the pin
of the nut demounting jig with the hole of the lock nut. Be careful about the lock nut direction.
2. Place the lock nut on the nut demounting jig.
3. Take hand off from the metal part.
・The lock nut is set on the nut demounting jig.
[1.8kW spindle/2.0kW spindle]

Put the side with a larger


circumference (flat side) to the nut
demounting jig.

[2.2kW spindle]

Put the side with pin


hole to the nut
demounting jig.

D-28
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Procedures for installing a new blade (Continued)

Clean the flange or hub mount with a lint-free cloth moistened with alcohol.
Clean here.

Check to make sure all six hooks of the nut demounting jig are hooked to the lock nut.

Confirm that the spindle shaft is locked.

D-29
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Procedures for installing a new blade (Continued)

Mount the nut demounting jig and embedded lock nut to the spindle by turning them clockwise.

D-30
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Procedures for installing a new blade (Continued)

Have on hand the torque driver set.


[1.8kW spindle/2.0kW spindle]
Ensure that the torque of the torque driver is 400 cN・m.

[2.2kW spindle]
Ensure that the torque of the torque driver is 400 cN・m.

D-31
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Procedures for installing a new blade (Continued)

Insert the bit into the hole of the nut demounting jig.

Bit

D-32
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Procedures for installing a new blade (Continued)

While pressing the torque driver lightly in the spindle concentric direction (Y-axis direction), turn the
driver slowly in a clockwise direction.
・When the set torque is reached, the torque driver goes into a freewheeling condition.

1. While pressing the


driver lightly,
2. Turn it clockwise
slowly.

Cautions for turning the torque driver:


・Do not apply a force in the arrow directions shown below (vertical and horizontal directions against
the spindle axis). It may cause the spindle and nut demounting jig to be damaged.
・The spindle is designed so that the nut demounting jig will be broken by applying a force in the
arrow directions shown in the pictures below.

Left side

Top side

D-33
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Procedures for installing a new blade (Continued)

While holding the nut demounting jig with one hand, remove the torque driver set from the jig.
・If you forcibly pull out the driver without holding the nut demounting jig, the jig may be damaged.

1. While holding the jig,

2. Pull out the driver in


the arrow direction.

While holding the silver part of the nut demounting jig, pull the black part toward you.
・The hooks of the nut demounting jig will open and the jig can be removed from the spindle.

1. While pressing the silver part,

2. Pull the black part toward you.

D-34
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Procedures for installing a new blade (Continued)

While pressing the silver part of the nut demounting jig, remove the jig from the spindle.

1. While pressing the silver part,

2. Remove the jig straight in


the arrow direction.

Cautions for removing the nut demounting jig:


Do not pull the black part without pressing the silver part of the jig. If you forcibly remove the jig, it
may cause the hooks to be damaged or heavily worn.

D-35
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Procedures for installing a new blade (Continued)

Only for the machine not equipped with the blade breakage detector [optional accessory]:
Slide the wheel cover back to its original position.

Ask the maintenance personnel to adjust the positions of the wheel cover nozzles for the following
cases:
・When you replace the blade from the hubless (washer) blade to the hub blade
・When you replace the blade from the hub blade to the hubless (washer) blade
・When you mount the blade of different diameter

Close the splash cover (splash cover F in DAD3360).

Press the button located at the upper left of the screen.

BLADE
REPLACEMENT
[4.1]

!!! This procedure is to be continued in the next section. !!!

D-36
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1-4. Data Setting for the Installed Blade


Summary of this section
The method to set data differs depending on whether the installed blade is a new or used one.
Section No. Title
1-4-1 Data setting for a new blade
1-4-2 Data setting for a used blade

D-37
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1-4-1. Data setting for a new blade


Procedures for setting data for a new blade

!!! This procedure is continued from: !!!


Section 1-3-4 [Installing a new blade]

BLADE
REPLACEMENT
[4.1]

When a DISCO standard blade was installed:

List

D-38
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Procedures for setting data for a new blade (Continued)

When a user-specific blade was installed:

List

Select the specification of the installed blade from the list.


If the specification of the installed blade is not registered:
Ask your data maintenance personnel to save the specification data of the blade.

BLADE
REPLACEMENT
[4.1]

The selected blade specification is automatically loaded to the BLADE REPLACEMENT screen [4.1].
The message "G1342 Loaded the Blade Data." appears.

D-39
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Procedures for setting data for a new blade (Continued)

Make sure that the selected blade data is displayed on the screen.

Make sure that "New" is displayed at <New/Used>.

The message "G0103 Data updated." appears.

When the machine is NOT equipped When the machine is equipped with the
with the blade breakage detector blade breakage detector [optional
[optional accessory]: accessory]:
Go to Section 1-6 Go to Section 1-5
[Executing Warming Up (Idling)]. [Adjusting the Blade Breakage Detector].

D-40
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1-4-2. Data setting for a used blade


Procedures for setting data for a used blade

!!! This procedure is continued from: !!!


Section 1-3-4 [Installing a new blade]

BLADE
REPLACEMENT
[4.1]

List

Select the ID of the used blade which has been installed.


・The selected ID is highlighted in blue.

D-41
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Procedures for setting data for a used blade (Continued)

Check the data displayed on the screen.

BLADE
REPLACEMENT
[4.1]

The selected blade type is automatically loaded to the BLADE REPLACEMENT screen [4.1].
The message "G1341 Loaded the Old Blade Data." appears.

Make sure that the selected blade data is displayed on the screen.

Make sure that "Used" is displayed at <New/Used>.

D-42
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Procedures for setting data for a used blade (Continued)

The message "G0103 Data updated" appears.


・When the data of the used blade is updated on the BLADE REPLACEMENT screen [4.1], the
blade's information is automatically deleted from the table of the USED BLADE LIST screen
[4.1.7].

When the machine is not equipped with When the machine is equipped with the
the blade breakage detector [optional blade breakage detector [optional
accessory]: accessory]:
Go to Section 1-6 Go to Section 1-5
[Executing Warming Up (Idling)]. [Adjusting the Blade Breakage Detector].

D-43
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1-5. Adjusting the Blade Breakage Detector


[Optional Accessory]
Procedures for adjusting the blade breakage detector

WARNING

When adjusting the blade breakage detector, pay due attention to the blade edge
During the adjustment operation for the blade breakage detector, you cannot avoid
touching the spindle axis section wheel cover with your hands. Since the blade edge is
sharp, if your fingers or hands come into contact with it, they may be slashed or cut
off.

!!! This procedure is continued from: !!!


Section 1-4 [Data Setting for the Installed Blade]

BLADE
REPLACEMENT
[4.1]

D-44
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Procedures for adjusting the blade breakage detector (Continued)

Open the splash cover (splash cover F in DAD3360).

Ask maintenance personnel to clean the fiber end surface under the sensor block.

Loosen the retaining screw of the blade breakage detector and rotate the adjustment knob of the blade
breakage detector clockwise to the end.
Adjustment knob Retaining screw

Check whether the maximum sensitivity comes between 90% and 99%.
If the sensitivity is not between 90% and 99%:
Ask your maintenance personnel for cleaning the fiber end surface under the sensor block.

Turn the adjustment knob to adjust the blade breakage detector position so that the sensitivity level
becomes between 7% and 15% (10% is desirable).
・In order to reduce the sensitivity level, turn the adjustment knob counterclockwise.

Turn the retaining screw of the blade breakage detector clockwise to fix the blade breakage detector.

D-45
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Procedures for adjusting the blade breakage detector (Continued)

Ask your maintenance personnel for setting <Blade Wear Level Setting>.

Install the wheel cover (front).

Close the splash cover (splash cover F in DAD3360).

!!! This procedure is to be continued in the next section. !!!

D-46
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1-6. Executing Warming Up (Idling)


Procedures for warming up (idling)

CAUTION

Let the spindle idle (rotate) for 10 minutes or longer before performing the setup
after replacing the blade
Insufficient spindle idling causes inconsistency in the setup positions.

!!! This procedure is continued from: !!!


Section 1-4 [Data Setting for the Installed Blade]
Section 1-5 [Adjusting the Blade Breakage Detector]

BLADE
REPLACEMENT BLADE BREAKAGE
[4.1] DETECTOR
ADJUSTMENT [4.2]
or

When <Setup Default> is "CONTACT": When <Setup Default> is "NONCONTACT":

or

D-47
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Procedures for warming up (idling) (Continued)

Press the button to rotate the spindle.

Press the button to supply the wheel coolant water.

Wait at least 10 minutes with the spindle and wheel coolant system ON.

!!! This procedure is to be continued in the next section. !!!

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1-7. Executing Setup


Procedure for executing setup

WARNING

Do not touch the flange or blade after opening the covers during spindle rotation
Since the blade edge is sharp, if your fingers or hands come into contact with it, they
may be slashed or cut off. The splash cover (splash cover F in DAD3360) is designed
not to open during spindle rotation.

Do not place your fingers or hands under the blade


Since the blade edge is sharp, if your fingers or hands come into contact with it, they
may be slashed or cut off.

CAUTION

Let the spindle idle (rotate) for 10 minutes or longer before performing the setup
after replacing the blade
Insufficient spindle idling causes inconsistency in the setup positions.

!!! This procedure is continued from: !!!


Section 1-6 [Executing Warming Up (Idling)]

CONTACT SETUP NON-CONTACT


[4.3.1] SETUP
[4.3.2]
or

When executing sensor calibration setup:

D-49
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Procedure for executing setup (Continued)

SENSOR
CONTACT SETUP NON-CONTACT CALIBRATION SETUP
[4.3.1] SETUP [4.3.3]
[4.3.2]
, or

Execute setup.
Type of setup Go to
Chuck table setup Section 2-2 of this chapter
Non-contact setup [optional accessory] Section 2-3 of this chapter
Sensor calibration setup [optional accessory] Section 2-4 of this chapter

The setup operation is completed.

LAYER mode only:

BLADE
MAINTENANCE
[4.0]

D-50
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Procedure for executing setup (Continued)

MAIN MENU CUT CHART


[0.0]

or

!!! Blade replacement procedure is complete. !!!

D-51
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2. Setup
About setup
The term "setup" refers to the process where the machine detects and sets the reference position of Z-axis
on the chuck table upper surface to determine the amount left uncut (or cut depth) of workpiece.

Blade

Setup position Workpiece thickness


Chuck table
Amount left uncut

Type of setup
Select the appropriate type of setup depending on the operation you want to do.
Type of setup Characteristics
Chuck table setup Setup is carried out on the chuck table.
Non-contact setup Non-contact setup is performed after replacing only the blade under the
[optional accessory] condition that the sensor calibration setup has been completed. This setup
carried out by the optical sensor prevents the blade edge from damaging.
Sensor calibration setup Sensor calibration setup is executed after the chuck table has been removed
[optional accessory] or replaced, for the machine equipped with the non-contact setup function.
The position on the chuck table upper surface and the optical sensor position
is corrected over again by this setup.

Safety precautions for setup

WARNING

When not using the touch panel, press the button located at the upper left
of the screen in order to lock and deactivate the touch panel
Unexpected operation of the machine may cause the operator to be injured.

Operation flow

2-1 Preparation for Setup

2-2 Executing Chuck Table Setup


2-3 Executing Non-Contact Setup [Optional Accessory]
2-4 Executing Sensor Calibration Setup [Optional Accessory]

D-52
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2-1. Preparation for Setup


Procedures for preparation for setup

WARNING

Do not touch the flange or blade after opening the covers during spindle rotation
Since the blade edge is sharp, if your fingers or hands come into contact with it, they
may be slashed or cut off. The splash cover (splash cover F in DAD3360) is designed
not to open during spindle rotation.

Do not place your fingers or hands under the blade


Since the blade edge is sharp, if your fingers or hands come into contact with it, they
may be slashed or cut off.

CAUTION

Let the spindle idle (rotate) for 10 minutes or longer before performing the setup
after replacing the blade
Insufficient spindle idling causes inconsistency in the setup positions.

When you use the hubless (washer) type blade, conduct dressing (truing) after
blade replacement and perform setup while the blade is properly rounded
If the setup is performed before the blade is properly rounded, the setup position used
as the reference will become displaced, causing the workpiece cutting depth to be
inconsistent.

MAIN MENU CUT CHART


[0.0]

or

Press the or button to stop the spindle rotation.

D-53
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Procedures for preparation for setup (Continued)

Press the or button to stop the wheel coolant water supply.

Make sure that the blade is installed to the spindle.


When the blade is not installed to the spindle:
Install the blade.
→See Section 1 [Blade Replacement] of Chapter D.

Press the or button to start the spindle rotation.

Press the or button to start the wheel coolant water supply.

Wait 10 minutes with the spindle and wheel coolant systems ON.

LAYER mode only:

BLADE
MAINTENANCE
[4.0]

D-54
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Procedures for preparation for setup (Continued)

or

When "CONTACT" is selected for <Setup Default> on the SETUP DATA screen [4.7]:

When "NONCONTACT" is selected for <Setup Default> on the SETUP DATA screen [4.7]:

!!! This procedure is to be continued in the next section. !!!

D-55
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2-2. Executing Chuck Table Setup


Procedures for execution of chuck table setup

WARNING

While the axis is operating, do not place your hands in any movable section after
opening its cover
If you place your hands inside the cover during axis operation, your fingers or hands
may be caught and cut off by the drive section.

Confirm that the spindle and drive axes are stopped completely before blowing
air
If you place your hands, fingers or the air blower in the drive sections, they may be
caught or cut off.

CAUTION

Use the air blower to blow air to water drops on the chuck table upper surface
and nozzle sections
If setup is performed while water drops remain on the chuck table or nozzle, the
machine may recognize the setup results erroneously. In the chuck table setup process,
the Z-axis position is determined based on the continuity between the chuck table
upper surface and blade tip.

Before executing setup, verify the shape and size of the chuck table and setup
area No.
If setup is executed with incorrect data of the chuck table shape or size or the setup
area No, this might result in damage to the chuck table and setup area.

D-56
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Procedures for execution of chuck table setup (Continued)

!!! This procedure is continued from: !!!


Section 2-1 [Preparation for Setup]

Check with your data maintenance personnel about the information of the chuck table currently
mounted on the machine.
When a round chuck table is mounted:
Confirm the chuck table size, chuck table type, spindle rotation, and blade O.D.
When a square chuck table is mounted:
Confirm the setup area No., chuck table type, spindle rotation, and blade O.D.

When <Chuck Table: Shape> is "ROUND":

Check these data.

When <Chuck Table: Shape> is "SQUARE":

Check these data.

D-57
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Procedures for execution of chuck table setup (Continued)

Verify the data.


When the blade outer diameter is incorrect:
Repeat the procedures of Section 1-4 [Data Setting for the Installed Blade] of this chapter.
When other setting is incorrect:
Ask your data maintenance personnel to change the data on the SETUP DATA screen [4.7].

The spindle automatically starts rotating.

The axes automatically move to the setup position and the setup starts.
When setup is not completed normally and an error occurs:
Carry out appropriate error remedies.
→See [ERROR RECOVERY] of Chapter E.
When errors still occur frequently:
Contact your maintenance personnel immediately.

When setup is completed normally,


・The chuck table automatically moves to the right (origin position).
・The Y-axis automatically moves to the origin position.

CONTACT SETUP
[4.3.1]

The message "G0030 Setup completed. (*.***mm consumed)." appears. "*.***" indicates the blade
wear amount.

D-58
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Procedures for execution of chuck table setup (Continued)

LAYER mode only:

BLADE
MAINTENANCE
[4.0]

MAIN MENU CUT CHART


[0.0]

or

!!! Chuck table setup is complete. !!!

D-59
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2-3. Executing Non-Contact Setup [Optional Accessory]


Procedures for execution of non-contact setup

WARNING

While the axis is operating, do not place your hands in any movable section after
opening its cover
If you place your hands inside the cover during axis operation, your fingers or hands
may be caught and cut off by the drive section.

!!! This procedure is continued from: !!!


Section 2-1 [Preparation for Setup]

Check with your data maintenance personnel about the information of spindle rotation and blade O.D.

Check these data.

Verify the data.


When the blade outer diameter is incorrect:
Repeat the procedures of Section 1-4 [Data Setting for the Installed Blade] of this chapter.
When the spindle rotation is incorrect:
Ask your data maintenance personnel to change the data on the SETUP DATA screen [4.7].

D-60
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Procedures for execution of non-contact setup (Continued)

The spindle automatically starts rotating.

The axes automatically move to the setup position and the setup starts.
When setup is not completed normally and an error occurs:
Carry out appropriate error remedies.
→See [ERROR RECOVERY] of Chapter E.
When errors still occur frequently:
Contact your maintenance personnel immediately.

When setup is completed normally,


・The chuck table automatically moves to the right (origin position).
・The Y-axis automatically moves to the origin position.

NON-CONTACT
SETUP
[4.3.2]

The message "G0030 Setup completed. (*.***mm consumed)." appears. "*.***" indicates the blade
wear amount.

D-61
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Procedures for execution of non-contact setup (Continued)

LAYER mode only:

BLADE
MAINTENANCE
[4.0]

MAIN MENU CUT CHART


[0.0]

or

!!! Non-contact setup is complete. !!!

D-62
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2-4. Executing Sensor Calibration Setup


[Optional Accessory]
Procedures for execution of sensor calibration setup
In the sensor calibration setup, the positions of the optical non-contact setup sensor and chuck table upper
surface are aligned. This setup is performed when the chuck table is replaced.
・In the sensor calibration setup, the contact setup is performed and then non-contact setup is carried out.
・To perform the non-contact setup, the sensor calibration setup needs to be completed.

WARNING

While the axis is operating, do not place your hands in any movable section after
opening its cover
If you place your hands inside the cover during axis operation, your fingers or hands
may be caught and cut off by the drive section.

Confirm that the spindle and drive axes are stopped completely before blowing
air
If you place your hands, fingers or the air blower in the drive sections, they may be
caught or cut off.

CAUTION

Use the air blower to blow air to water drops on the chuck table upper surface,
the setup area upper surface and nozzle sections
If setup is performed while water drops remain on the chuck table upper surface, the
setup area or nozzle, the machine may recognize the setup results erroneously. In the
chuck table setup process, the Z-axis position is determined based on continuity
between the chuck table upper surface and blade tip or between the setup area upper
and blade tip.

Before executing setup, verify the shape and size of the chuck table and setup
area No.
If setup is executed with incorrect data of the chuck table shape or size or the setup
area No., this might result in damage to the chuck table and setup area.

D-63
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Procedures for execution of sensor calibration setup (Continued)

!!! This procedure is continued from: !!!


Section 2-1 [Preparation for Setup]

Check with your data maintenance personnel about the information of the chuck table currently
mounted on the machine.
When a round chuck table is mounted:
Confirm the chuck table shape, chuck table size, chuck table type, spindle rotation, and blade O.D.
When a square chuck table is mounted:
Confirm the chuck table shape, setup area No., chuck table type, spindle rotation, and blade O.D.

CONTACT SETUP NON-CONTACT


[4.3.1] SETUP
[4.3.2]
or

D-64
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Procedures for execution of sensor calibration setup (Continued)

When <Chuck Table: Shape> is "ROUND":

Check these data.

When <Chuck Table: Shape> is "SQUARE":

Check these data.

Verify the data.


When the blade outer diameter is incorrect:
Repeat the procedures of Section 1-4 [Data Setting for the Installed Blade] of this chapter.
When other setting is incorrect:
Ask your data maintenance personnel to change the data on the SETUP DATA screen [4.7].

D-65
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Procedures for execution of sensor calibration setup (Continued)

The spindle automatically starts rotating.

The axes automatically move to the setup position and the setup starts.
When setup is not completed normally and an error occurs:
Carry out appropriate error remedies.
→See [ERROR RECOVERY] of Chapter E.
When errors still occur frequently:
Contact your maintenance personnel immediately.

When setup is completed normally,


・The chuck table automatically moves to the right (origin position).
・The Y-axis automatically moves to the origin position.

SENSOR
CALIBRATION SETUP
[4.3.3]

The message "G0030 Setup completed. (*.***mm consumed)." appears. "*.***" indicates the blade
wear amount.

D-66
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Procedures for execution of sensor calibration setup (Continued)

LAYER mode only:

BLADE
MAINTENANCE
[4.0]

MAIN MENU CUT CHART


[0.0]

or

!!! Sensor calibration setup is complete. !!!

D-67
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2-4-1. Sensor calibration setup when the auto dress is used


(DAD3360 only)
Sensor calibration setup when the auto dress is used
When the auto dress [optional accessory (DAD3360 only)] is used, you need to make the machine
recognize the positional relation in the Z-axis direction among the height of the chuck table where a
workpiece is placed, the height of the sub chuck table where a dresser board is placed, and the non-contact
setup sensing position.
You can execute the above three setup operations automatically and continuously in order of chuck table
setup → sub chuck table setup → non-contact setup (only on the machine equipped with the non-contact
setup [optional accessory]) by starting setup on the SENSOR CALIBRATION SETUP screen [4.3.3].
However, to execute setup in succession, "ON" should be selected at the item "Auto dress func." on the
FUNCTION DATA MAINTENANCE screen [5.3]. If "NO" is selected, the sub chuck table setup will not
be performed.
・When the blade is exchanged, execute either chuck table setup or non-contact setup. By executing
either of these two setup operations, the machine can recognize the sub chuck table position.
・When the chuck table is replaced, execute all of chuck table setup, non-contact setup and sub chuck
table setup.

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3. Blade Dressing Operation


About blade dressing operation
Blade dressing is a preliminary step to be performed to provide three basic blade elements (abrasive grains,
bond and pores). It refers to the operation in which the dresser board is cut by the blade which will be
used in the actual cutting operation.
Blade dressing falls roughly into two operations: truing and abrasive grain dressing.

Truing and abrasive grain dressing

Truing Abrasive Grain Dressing


Provides the mounted blade with true Removes metal from the blade edge to expose
circumference roundness in compliance with the diamond abrasive grains.
dimensional tolerance on the blade inside diameter
and flange.
When mounted
Rotation direction

Blade inner Roundness


diameter

Abrasive grain

Chip pocket

Safety precautions for blade dressing operation

WARNING

When not using the touch panel, press the button located at the upper left
of the screen in order to lock and deactivate the touch panel
Unexpected operation of the machine may cause the operator to be injured.

NOTICE

Hub-type blade
The hub type blade does not require any dressing operation.

D-69
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Operation flow

3-1 Preparation of Operation

3-2 Verification of Dress Data

3-3 Setting a Dresser Board

3-4 Calling Up the SINGLE CH ALIGNMENT Screen [2.4.4]

3-5 Adjusting Light Intensity

3-6 Adjusting Microscope Focus

3-7 Executing θ Alignment

3-8 Designation of Dress Cutting Start Position

3-9 Executing Dress Cutting

3-10 Completion of Dress Cutting

D-70
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3-1. Preparation of Operation


Procedures for preparation of dressing

Press the or button to effect system initialization.


→For the system initialization, see Section 1-5 [Executing Initialization] of Chapter B.

When using the chuck table for dressing:


Ask your maintenance personnel to replace the chuck table with the one for dressing.
When using the chuck table for cutting for dressing:
The chuck table does not need to be replaced.

Press the or button to execute setup.


→For the setup, see Section 2 [Setup] of this chapter.

!!! This procedure is to be continued in the next section. !!!

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3-2. Verification of Dress Data


Procedures for verification of dress data

!!! This procedure is continued from: !!!


Section 3-1 [Preparation of Operation]

MAIN MENU CUT CHART


[0.0]

or

LAYER mode only:

BLADE
MAINTENANCE
[4.0]

or

D-72
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Procedures for verification of dress data (Continued)

Select the dress data on the DRESS DATA LIST screen [4.4].

D-73
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Procedures for verification of dress data (Continued)

Check the data displayed on the screen.

!!! This procedure is to be continued in the next section. !!!

D-74
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3-3. Setting a Dresser Board


Procedures for setting a dresser board

!!! This procedure is continued from: !!!


Section 3-2 [Verification of Dress Data]

BLADE
DRESS PROGRAM
[4.4.0]

Open the microscope section cover.

Set a dresser board on the chuck table.

Press the button to turn ON the chuck table vacuum.

Make sure that the dresser board is secured on the chuck table.

DAD323/DAD3240
Close the microscope section cover.
DAD3360 when the microscope section cover is set not to open/close automatically:

!!! This procedure is to be continued in the next section. !!!

D-75
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3-4. Calling Up the SINGLE CH ALIGNMENT Screen [2.4.4]


Procedures for calling up the SINGLE CH ALIGNMENT screen [2.4.4]

!!! This procedure is continued from: !!!


Section 3-3 [Setting a Dresser Board]

BLADE
DRESS PROGRAM
[4.4.0]

DAD3360 when the microscope section cover is set to open/close automatically:


The microscope section cover closes.

!!! This procedure is to be continued in the next section. !!!

D-76
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3-5. Adjusting Light Intensity


Methods to adjust light intensity
The table below shows various methods to adjust light intensity.
Note: Since the light condition provided by the automatic light intensity is relatively dark, it is
recommended that you adjust it manually.
Adjusting method Screen to use Button to use
Adjust manually SINGLE CH ALIGNMENT
screen [2.4.4]

Automatically adjust the SINGLE CH ALIGNMENT


direct light screen [2.4.4]
Press the button for one
second or longer.
Automatically adjust the SINGLE CH ALIGNMENT
oblique light screen [2.4.4]
Press the button for one
second or longer and then press it once
more.
Automatically adjust the SINGLE CH ALIGNMENT
direct and oblique light screen [2.4.4]
Press the button for one
second or longer and then press it twice
more.
LIGHT LEVEL ADJUST
screen

Return the light intensity LIGHT LEVEL ADJUST


to default screen

D-77
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Procedures for adjusting light intensity

!!! This procedure is continued from: !!!


Section 3-4 [Calling Up the SINGLE CH ALIGNMENT Screen [2.4.4]]

SINGLE CH
ALIGNMENT
[2.4.4]

When you manually adjust the light intensity:


Press the adjust button displayed on the SINGLE CH ALIGNMENT screen [2.4.4].

Light intensity adjust


button for direct light

Light intensity adjust


button for oblique
Indicates the current light
light intensity.

When you adjust the light intensity by using the <F8> button on the SINGLE CH ALIGNMENT
screen [2.4.4]:

You can adjust the light intensity variously depending on the way of pressing the
button.
If you Machine will
Press it for one second or more Carry out the automatic light intensity adjustment of direct
light.
Press it for one second or more, Carry out the automatic light intensity adjustment of oblique
then once more light.
Press it for one second or more, Carry out the automatic light intensity adjustment of direct
then twice more light and oblique light.

D-78
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Procedures for adjusting light intensity (Continued)

When you adjust the light intensity by using the LIGHT LEVEL ADJUST screen:

Press the button on the SINGLE CH ALIGNMENT screen [2.4.4] to call up the
LIGHT LEVEL ADJUST screen.

Automatically adjusts light intensity.

Returns the light intensity to default.

SINGLE CH
ALIGNMENT
[2.4.4]

!!! This procedure is to be continued in the next section. !!!

D-79
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3-6. Adjusting Microscope Focus


Procedures for adjusting microscope focus

!!! This procedure is continued from: !!!


Section 3-5 [Adjusting Light Intensity]

SINGLE CH
ALIGNMENT
[2.4.4]

You can adjust the microscope focus variously depending on the way of pressing the

button.
If you The machine will
Press it once Call up the FOCUS ADJUSTMENT screen.
Press it for one second or Automatically carry out the automatic focusing.
more

D-80
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Procedures for adjusting microscope focus (Continued)

Adjust the microscope focus. Use the following buttons to carry out focusing.
Microscope goes up Microscope goes
down

Auto Focus by Data Auto Focus

Large Stroke Small Stroke

Auto Focus After 0


(Origin)

If the message "A0552 Focus maintenance has not been performed." appears:
Ask the maintenance personnel to perform the focus maintenance procedure.

SINGLE CH
ALIGNMENT
[2.4.4]

!!! This procedure is to be continued in the next section. !!!

D-81
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3-7. Executing θ Alignment


Procedures for θ alignment

!!! This procedure is continued from: !!!


Section 3-6 [Adjusting Microscope Focus]

SINGLE CH
ALIGNMENT
[2.4.4]

Use or the XIS buttons to align the edge of the dresser board with the
horizontal center of hairline.
Edge of dresser board

Hairline

The chuck table automatically moves from the right to the left.

D-82
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Procedures for θ alignment (Continued)

At the place where the chuck table has moved from the right to the left,

use or the XIS buttons to align again the edge of the dresser board
with the horizontal center of hairline.
Edge of dresser board

Hairline

The chuck table automatically moves from the left to the right.

When the hairline position matches with the aligned position, go to the next step.
When the hairline position is deviated from the aligned position:
Repeat the procedures from the first step of this section.

!!! This procedure is to be continued in the next section. !!!

D-83
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3-8. Designation of Dress Cutting Start Position


Procedures for designation of the dress cutting start position

!!! This procedure is continued from: !!!


Section 3-7 [Executing θ Alignment]

Use buttons to move the Y-axis to the cutting start


position.
Edge of dresser board

Hairline

The cutting position is registered.

BLADE
DRESS PROGRAM
[4.4.0]

D-84
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Procedures for designation of the dress cutting start position (Continued)

Designate the cutting direction.


To cut rearward (the direction in which the Y-axis moves toward the rear of the machine):

Press the button.


To cut frontward (the direction in which the Y-axis moves toward the front of the machine):

Press the button.

The cutting direction is specified.

!!! This procedure is to be continued in the next section. !!!

D-85
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3-9. Executing Dress Cutting


Procedures for execution of dress cutting

!!! This procedure is continued from: !!!


Section 3-8 [Designation of Dress Cutting Start Position]

BLADE
DRESS PROGRAM
[4.4.0]

DRESS STATUS

The machine starts dress cutting. The green light of the status indicator lights up.

The machine performs dress cutting for the number of lines set on the BLADE DRESS PROGRAM
screen [4.4.0].

!!! This procedure is to be continued in the next section. !!!

D-86
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3-10. Completion of Dress Cutting


Procedures for completion of dress cutting

WARNING

Do not place your fingers or hands in any drive section

When you press the button, the chuck table moves to the right and Y-
axis moves to the rear concurrently. If you place your fingers or hands in the drive
sections, they may be caught or cut off.

!!! This procedure is continued from: !!!


Section 3-9 [Executing Dress Cutting]

When the dressing operation is completed normally, the chuck table automatically moves to under the
microscope.

BLADE
DRESS PROGRAM
[4.4.0]

The message "G0041 Cutting completed." appears.

When "YES" is selected for <Setup After Dress> on the BLADE DRESS PROGRAM screen
[4.4.0]:
The machine starts the non-contact setup [optional accessory].

Press the button to turn OFF the chuck table vacuum.

The chuck table moves to the right (origin position) and the Y-axis moves to the rear (origin position)
automatically.

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Procedures for completion of dress cutting (Continued)

DAD3360 when the microscope section DAD323/DAD3240


cover is set to open/close automatically: Open the microscope section cover.
The microscope section cover opens.
DAD3360 when the microscope section
cover is set not to open/close
automatically:

Remove the dresser board from the chuck table.

To carry out dress cutting with different dresser board:


Repeat the procedures from Section 3-3 [Setting a Dresser Board] of this chapter.

DAD323/DAD3240 DAD3360
Close the microscope section cover.

DRESS DATA LIST


[4.4]

D-88
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Procedures for completion of dress cutting (Continued)

LAYER mode only:

BLADE
MAINTENANCE
[4.0]

MAIN MENU CUT CHART


[0.0]

or

!!! Dress cutting is complete. !!!

D-89
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4. Hairline Alignment
About hairline alignment
Hairline alignment is the operation to be carried out when the cut line (kerf) and the hairline on the screen
do not coincide. You can perform this operation even during the full automation operation and semi-
automatic cutting.
→For details of hairline alignment during cutting operations:
See Section 1-6 [Making Corrections during Cutting Operation] of Chapter C.

Operation flow

4-1 Setting a Dummy Workpiece

4-2 Adjusting Light Intensity

4-3 Adjusting Microscope Focus

4-4 Executing θ Alignment

4-5 Executing Hairline Alignment

4-6 What to Do after Hairline Alignment

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4-1. Setting a Dummy Workpiece


Procedures for setting a dummy workpiece

WARNING

Do not place your fingers or hands in any drive section

When you press the button on the BLADE MAINTENANCE screen


[4.0], the chuck table moves under the microscope and the Y-axis moves frontward
concurrently. If you place your fingers or hands in the drive sections, they may be
caught or cut off. Note that in DAD3360, when the microscope section cover is set to
open/close automatically, the microscope section cover automatically closes before
the axes start to move.

MAIN MENU CUT CHART


[0.0]

or

CUT CHART mode only:

MAINTENANCE
MENU

D-91
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Procedures for setting a dummy workpiece (Continued)

BLADE
MAINTENANCE
[4.0]

DAD323/DAD3240
Open the microscope section cover.
DAD3360 when the microscope section cover is closed:

Press the button to open the microscope section cover.

Set a dummy workpiece on the chuck table.

Press the button to turn ON the chuck table vacuum.

Make sure that the dummy workpiece is secured on the chuck table.

DAD323/DAD3240
Close the microscope section cover.
DAD3360 when the microscope section cover is set not to open/close automatically:

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Procedures for setting a dummy workpiece (Continued)

DAD3360 when the microscope section cover is set to open/close automatically:


The microscope section cover is closed.

The chuck table moves to under the microscope and the Y-axis moves frontward automatically.

Verify the displayed data.

!!! This procedure is to be continued in the next section. !!!

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4-2. Adjusting Light Intensity


Methods to adjust light intensity
The table below shows various methods to adjust light intensity.
Note: Since the light condition provided by the automatic light intensity is relatively dark, it is
recommended that you adjust it manually.
Adjusting method Screen to use Button to use
Adjust manually HAIRLINE ALIGNMENT
screen [4.5]

Automatically adjust the HAIRLINE ALIGNMENT


direct light screen [4.5]
Press the button for one
second or longer.
Automatically adjust the HAIRLINE ALIGNMENT
oblique light screen [4.5]
Press the button for one
second or longer and then press it once
more.
Automatically adjust the HAIRLINE ALIGNMENT
direct and oblique light screen [4.5]
Press the button for one
second or longer and then press it twice
more.
LIGHT LEVEL ADJUST
screen

Return the light intensity LIGHT LEVEL ADJUST


to default screen

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Procedures for adjusting light intensity

!!! This procedure is continued from: !!!


Section 4-1 [Setting a Dummy Workpiece]

HAIRLINE
ALIGNMENT
[4.5]

When you manually adjust the light intensity:


Press the adjust button displayed on the HAIRLINE ALIGNMENT screen [4.5].

Light intensity adjust


button for direct light

Light intensity adjust


button for oblique
Indicates the current light
light intensity.

When you adjust the light intensity by using the <F8> button on the HAIRLINE ALIGNMENT
screen [4.5]:

You can adjust the light intensity variously depending on the way of pressing the
button.
If you Machine will
Press it for one second or more Carry out the automatic light intensity adjustment of direct
light.
Press it for one second or more, Carry out the automatic light intensity adjustment of oblique
then once more light.
Press it for one second or more, Carry out the automatic light intensity adjustment of direct
then twice more light and oblique light.

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Procedures for adjusting light intensity (Continued)

When you adjust the light intensity by using the LIGHT LEVEL ADJUST screen:

Press the button on the HAIRLINE ALIGNMENT screen [4.5] to call up the LIGHT
LEVEL ADJUST screen.

Automatically adjusts light intensity.

Returns the light intensity to default.

HAIRLINE
ALIGNMENT
[4.5]

!!! This procedure is to be continued in the next section. !!!

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4-3. Adjusting Microscope Focus


Procedures for adjusting microscope focus

!!! This procedure is continued from: !!!


Section 4-2 [Adjusting Light Intensity]

HAIRLINE
ALIGNMENT
[4.5]

FOCUS ADJUSTMENT

→For the procedures to operate the FOCUS ADJUSTMENT screen:


See Section 3-2-3 [Adjusting microscope focus] of Chapter C.

HAIRLINE
ALIGNMENT
[4.5]

!!! This procedure is to be continued in the next section. !!!

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4-4. Executing θ Alignment


Procedures for θ alignment

!!! This procedure is continued from: !!!


Section 4-3 [Adjusting Microscope Focus]

HAIRLINE
ALIGNMENT
[4.5]

Use the or the XIS buttons to align an arbitrary reference position to


the horizontal center of hairline.

Hairline

Hairline

The chuck table automatically moves from the right to the left.

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Procedures for θ alignment (Continued)

At the place where the chuck table has moved from the right to the left,

use the or the XIS buttons to align again an arbitrary reference


position with the horizontal center of hairline.

Hairline

Hairline

The chuck table automatically moves from the left to the right.

When the hairline position matches with the aligned position, go to the next step.
When the hairline position is deviated from the aligned position:
Repeat the procedures from the first step of this section.

!!! This procedure is to be continued in the next section. !!!

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4-5. Executing Hairline Alignment


Procedures for executing hairline alignment

!!! This procedure is continued from: !!!


Section 4-4 [Executing θ Alignment]

Specify the cutting position.

Use the and /


buttons to align the hairline with the cut line.

Street

Hairline

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Procedures for executing hairline alignment (Continued)

The machine carries out one cycle cut, and the chuck table automatically moves to under the
microscope.

The cut line is displayed on the screen.

Use the and / buttons to align


the hairline with the cut line.

The machine executes hairline alignment.


・The message "G0103 Data updated." appears.

D-101
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Procedures for executing hairline alignment (Continued)

The chuck table moves to the right (origin position) and the Y-axis moves to the rear (origin position)
automatically.

BLADE
MAINTENANCE
[4.0]

!!! This procedure is to be continued in the next section. !!!

D-102
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4-6. What to Do after Hairline Alignment


Procedures for the operation to be performed after hairline alignment

!!! This procedure is continued from: !!!


Section 4-5 [Executing Hairline Alignment]

BLADE
MAINTENANCE
[4.0]

Press the button to turn OFF the chuck table vacuum.

DAD3360 when the microscope section DAD323/DAD3240


cover is set to open/close automatically: Open the microscope section cover.
The microscope section cover opens.
DAD3360 when the microscope section
cover is set not to open/close
automatically:

Remove the dummy workpiece from the chuck table.

DAD323/DAD3240 DAD3360
Close the microscope section cover.

D-103
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Procedures for the operation to be performed after hairline alignment (Continued)

CUT CHART mode only:

MAINTENANCE
MENU

MAIN MENU CUT CHART


[0.0]

or

!!! Hairline alignment procedure is complete. !!!

D-104
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E. ERROR RECOVERY
About error recovery
Error recovery refers to the handling operations to be carried out when an error occurs.

If an error occurs, press the button to cancel the alarm.

Safety precautions for error recovery operations

WARNING

Confirm that all axes have stopped completely before removing the workpiece
In some error recovery operation, you have to remove the workpiece from the
machine. If you place your fingers or hands in the moving section while the axes are
operating, they may be caught or cut off.

When not using the touch panel, press the button located at the upper left
of the screen in order to lock and deactivate the touch panel
Unexpected operation of the machine may cause the operator to be injured.

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Contents of this chapter

Section
Title Contents Error code
No.
1 Errors during Cutting ・Errors that occur during cutting B0031 B0032 B0033
and remedies for them B0253 E0015 E0190
E0797 E0798 E1033
2 Interlock Errors of the ・Errors related to the interlock of E0012 E0174 E0176
Covers the covers and remedies for them E0205 E0224 E1402
V0249 V0252
3 Errors during Setup ・Errors that occur during setup B0023 B0024 B0025
and remedies for them B0026 B0027 B0028
B0029 B0030 B0194
B0195 E0191
4 Errors during Alignment ・Errors that occur during A0531 A0532 A0533
workpiece alignment and A0534 A0535 A0536
remedies for them A0537 A0538 A0539
A0551 A0552 A0596
V1386 V1387
5 Errors during Kerf Check ・Errors that occur during kerf K0038 K0039 K0040
check and remedies for them K0041 K0042 K0043
K0044 K0045 K0046
K0047 K0048 K0049
6 Blade Breakage Detector ・Errors related to the blade B0037 B0184 B0185
Errors breakage detector and remedies E0191
[Optional Accessory] for them
7 Errors Related to Supply ・Errors related to supply utility E0003 E0705 E0711
Utility and remedies for them E0714 E0018
8 Measure Alignment ・Errors that occur during measure A0531 A0532 A0533
Errors alignment and cutting and A0537 A0545 A0801
[Optional Accessory] remedies for them A0802 A1163
9 Auto Dress Errors ・Errors related to the auto dress E0277 O0649 V0814
[Optional Accessory function and remedies for them
(DAD3360 Only)]
10 Other Errors ・Errors requiring you to contact X****
your maintenance personnel

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1. Errors during Cutting


Summary of this section

Section No. Title


1-1 Remedies for Blade Errors during Cutting
1-2 Remedies for Setup Errors during Cutting
1-3 Remedies for Waste-Choked Errors [DAD3240/DAD3360]
1-4 Remedies for Water Leakage Errors [Optional Accessory]
1-5 Remedies for Errors related to Spindle Load
1-6 Remedies for Errors Related to Spindle Carbon Brush

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1-1. Remedies for Blade Errors during Cutting


When does the error occur?
The errors described in this section occur when the blade being used has reached the usage limit specified
in the setup data.

Error message

Error code Error message


B0032 Blade exposure limit. Change blade
B0033 Blade life limit reached. Replace blade.

Procedures for error recovery

An alarm sounds when an error occurs.

Press the button to cancel the alarm.

Replace the blades.


→See Section 1 [Blade Replacement] of Chapter D.

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1-2. Remedies for Setup Errors during Cutting


When does the error occur?
The error described in this section occurs when an attempt is made to execute cutting under the condition
that setup is not completed properly.

Error message

Error code Error message


B0031 Setup data error.

Procedures for error recovery

An alarm sounds when an error occurs.

Press the button to cancel the alarm.

STOP CORRECTION

If the machine is not equipped with the If the machine is equipped with the non-
non-contact setup (optional accessory): contact setup [optional accessory]:

Press the button to perform the


setup operation.

The machine resumes cutting.

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1-3. Remedies for Waste-Choked Errors


[DAD3240/DAD3360]
When does the error occur?
The error described in this section occurs when accumulated waste clogs the strainer net of the water case
and disturbs water drainage and in consequence, then the water level of the water case exceeds the
maximum permissible level.
This error occurs in DAD3240 and DAD3360.

Error message

Error code Error message


E0015 Water case overflow error.

Procedures for error recovery

An alarm sounds when an error occurs.

Press the button to cancel the alarm.

Ask the maintenance personnel to clean the water case.

Make sure that cleaning of the water case has been completed.

The machine resumes cutting.

When the error still arises:


Contact your maintenance personnel.

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1-4. Remedies for Water Leakage Errors


[Optional Accessory]
When does the error occur?
The errors described in this section occur when the water leakage is detected on the machine equipped
with the water leakage sensor [optional accessory].

Error message

Error code Error message


E0190 Water leakage detected. (X-axis)
E1033 Water leakage detected (Theta-axis).

Procedures for error recovery

WARNING

If any water leakage-related error is detected, immediately stop the machine


operation, turn OFF the power and call the maintenance personnel
Operating the machine while water reached in the electrical box or motor section due
to water leakage may cause electric shock hazard which could result in severe
personal injury or death.

An alarm sounds when an error occurs.

Press the button to cancel the alarm.

Turn OFF the power of the machine.

Ask the maintenance personnel to carry out the following operations.


・Lock out the circuit breaker lever.
・Turn OFF the facility power source.
・Check for water leakage location.

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1-5. Remedies for Errors Related to Spindle Load


When does the error occur?
The errors described in this section occur when the load current on the spindle exceeds the permissible
value during cutting. The timing of error occurrence differs depending on customer's setting.

Error message

Error code Error message


E0797 Spindle load current error. (HI)
E0798 Spindle load current error. (LO)

Procedures for error recovery

An alarm sounds when an error occurs.

Press the button to cancel the alarm.

The machine resumes cutting.

When the error still arises:


Contact your maintenance personnel.

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1-6. Remedies for Errors Related to Spindle Carbon Brush


When does the error occur?
The errors described in this section occur when the machine detects that the spindle carbon brush is not
grounded while cutting proceeds to the next channel.

Error message

Error code Error message


B0253 Carbon brush is worn. Replace it promptly.

Procedures for error recovery

An alarm sounds when an error occurs.

Press the button to cancel the alarm.

If processing the workpiece:

Ask your maintenance personnel to replace the carbon brush assembly.

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2. Interlock Errors of the Covers


Summary of this section

Section No. Title


2-1 Remedies for Interlock Errors of the Covers

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2-1. Remedies for Interlock Errors of the Covers


When does the error occur?
The safety interlock systems are provided for the splash cover (splash cover F and splash cover S in
DAD3360), microscope section cover, and machine outer covers (DAD3240/DAD3360). If the cover
opens during axis driving even if the spindle is stopped, or an attempt is made to initiate axis operation
with the cover open, the machine generates an error.
As a function that all axes come to an immediate stop activates when any cover interlock error occurs, the
machine automatically starts the axis initialization after the error occurrence.

Error message

Error code Error message


E0012 Splash cover opened. (DAD323/DAD3240)
E0174 Microscope section cover opened.
E0176 Cover open error.
E0205 Splash cover S (Side) opened. (DAD3360)
E0224 Outside cover opened. (DAD3240/DAD3360)
E1402 Splash cover F (Front) opened. (DAD3360)
V0249 Microscope section cover close error. (DAD3360)
V0252 Microscope section cover open error. (DAD3360)

Procedures for error recovery [E0012/E0174/E0176/E0205/E0224/E1402]

An alarm sounds when an error occurs.

Close the cover.

Press the button to cancel the alarm.

You can resume the operation processed before the error occurrence.
・Before resuming, the machine automatically performs the axis initialization.

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Procedures for error recovery [V0249/V0252]


This error occurs in DAD3360.

An alarm sounds when an error occurs.

Press the button to cancel the alarm.

When the error V0249 occurs: When the error V0252 occurs:

Press the button again to close Press the button again to open
the microscope section cover. the microscope section cover.

You can resume the operation processed before the error occurrence.

If you open the cover while a cutting operation is suspended with the spindle stopped
If you open the cover while a cutting operation is suspended with the spindle stopped, you can resume the
cutting operation by following procedures.

Close the cover.

The axis initialization is effected.

The machine resumes cutting.

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3. Errors during Setup


Summary of this section

Section No. Title


3-1 Remedies for Manual Setup Errors
3-2 Remedies for Auto Setup Errors

3-1. Remedies for Manual Setup Errors


About manual setup
During the manual setup, operators should verify the setup conditions in each step. When a setup error
arises during the manual setup, the ERROR RECOVERY screen is not displayed.

Summary of this section

Section No. Title


3-1-1 Remedies for setup errors related to machine
3-1-2 Remedies for setup errors
3-1-3 Remedies for non-contact setup errors [optional accessory]
3-1-4 Remedies for other setup errors [optional accessory]

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3-1-1. Remedies for setup errors related to machine


When does the error occur?
The errors described in this section occur when there is some defective machine condition during setup.

Error message

Error code Error message


B0023 Spindle continuity error. [optional accessory]
B0027 Setup error (Z-axis position error.)
B0028 Setup error (No detection.)

Procedures for error recovery

An alarm sounds when an error occurs.

Press the button to cancel the alarm.

Contact your maintenance personnel in charge.

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3-1-2. Remedies for setup errors


When does the error occur?
The errors described in this section occur when an incomplete setup operation is performed.

Error message

Error code Error message


B0026 Setup error (error detection.)
B0030 Blade wear check error.
E0191 Internal communication error. Re-start the machine.
B0195 Large difference between first and second Contact Setup.

Procedures for error recovery

WARNING

Before opening the splash cover (splash cover F in DAD3360), make sure that
the spindle rotation, wheel coolant water supply and each axis operation have
stopped completely
Also, for air blowing, use the air blower with a nozzle and keep your hands and arms
away from the drive section. In the error recovery procedures for setup errors, you
may have to carry out air blowing of the chuck table upper surface with the splash
cover (splash cover F in DAD3360) opened. Your fingers or hands may be caught in
the drive sections, slashed or cut off.

An alarm sounds when an error occurs.

Press the button to cancel the alarm.

Perform setup again.

Setup is completed properly.

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Procedures for error recovery (Continued)

When the error occurs again:

Press the button to stop the spindle.

Press the button to stop the wheel coolant water supply.

Open the splash cover (splash cover F in DAD3360).

In order not to leave any waterdrop on the upper surface of the chuck table, blow the chuck table
with the air blower.

Close the splash cover (splash cover F in DAD3360).

Press the button to effect system initialization.

Perform setup again.

Setup is completed properly.

When the error still occurs:


Contact your maintenance personnel in charge.

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3-1-3. Remedies for non-contact setup errors [optional accessory]


When does the error occur?
The errors described in this section occur when the setup operation of non-contact setup is completed
improperly.

Error message

Error code Error message


B0024 Non-Contact Setup check error.
B0029 Large difference between second and third Non-Contact Setup.
E0191 Internal communication error. Re-start the machine.
B0194 The transmittance-check voltage is unstable.

Procedures for error recovery

WARNING

Before opening the splash cover (splash cover F in DAD3360), make sure that
the spindle rotation, wheel coolant water supply and each axis operation have
stopped completely
In the error recovery procedures for the non-contact setup errors, you may have to
clean the non-contact setup sensor with the splash cover (splash cover F in DAD3360)
opened. Your fingers or hands may be caught in the drive section, slashed or cut off.

An alarm sounds when an error occurs.

Press the button to cancel the alarm.

Perform setup again.

Setup is completed properly.

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Procedures for error recovery (Continued)

When the error occurs again;

Press the button to stop the spindle.

Press the button to stop the wheel coolant water supply.

Ask your maintenance personnel to clean the non-contact setup sensor section.

Press the button to effect system initialization.

Perform the sensor calibration setup.


→For the sensor calibration setup:
See Section 2-4 [Executing Sensor Calibration Setup [Optional Accessory]] of Chapter D.

Perform setup again.

Setup is completed properly.

When the error still occurs:


Contact your maintenance personnel in charge.

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3-1-4. Remedies for other setup errors [optional accessory]


When does the error occur?
The error described in this section occurs when the sensor calibration setup has not been performed.

Error message

Error code Error message


B0025 Please perform setup sensor calibration.

Procedures for error recovery

An alarm sounds when an error occurs.

Press the button to cancel the alarm.

Perform the sensor calibration setup.


→For the sensor calibration setup:
See Section 2-4 [Executing Sensor Calibration Setup [Optional Accessory]] of Chapter D.

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3-2. Remedies for Auto Setup Errors


About auto setup
In the auto setup, the machine automatically carries out the setup operation. When a setup error occurs
during the auto setup, the ERROR RECOVERY screen is displayed.

Summary of this section

Section No. Title


3-2-1 Remedies for setup errors related to machine

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3-2-1. Remedies for setup errors related to machine


When does the error occur?
The errors described in this section occur when there is some defective machine condition during setup.

Error message

Error code Error message


B0023 Spindle continuity error.
B0024 Non-Contact Setup check error. [optional accessory]
B0026 Setup error (error detection.)
B0027 Setup error (Z-axis position error.)
B0028 Setup error (No detection.)
B0029 Large difference between second and third Non-Contact Setup.
B0030 Blade wear check error.
E0191 Internal communication error. Re-start the machine.
B0194 The transmittance-check voltage is unstable. [optional accessory]

Procedures for error recovery

An alarm sounds when an error occurs.

Press the button to cancel the alarm.

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Procedures for error recovery (Continued)

Press To do Go to
RETRY
Select <F1> when you want to retry setup operation.
3-2-1-1

EXIT FULL AUTO


Select <F2> when you want to cancel the full
automation operation for the purpose of identifying the 3-2-1-2
cause of the error and restoring the operation.

AUTO SETUP PASS


Select <F3> when you want to resume cutting
operation in accordance with the setup data prevailing 3-2-1-3
before error occurrence.

BLADE INFORMATION
Select <F4> when you want to open the screen to check
the cut line count and other relevant information about 3-2-1-4
the currently installed blade.

NCS SENSOR CLEANING


Select <F5> when you want to clean the optical fiber
end face of the non-contact setup sensor section. 3-2-1-5

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3-2-1-1. Executing RETRY


Procedures for error recovery
This procedure is for performing setup again.
!!! This procedure is continued from: !!!
Section 3-2-1 [Remedies for setup errors related to machine]

ERROR RECOVERY
(SETUP)

The machine carries out setup again.

When the error still occurs:


Contact your maintenance personnel in charge.

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3-2-1-2. Executing EXIT FULL AUTO


Procedures for error recovery
This procedure is for stopping the full automation operation to identify and correct the cause of the error.
!!! This procedure is continued from: !!!
Section 3-2-1 [Remedies for setup errors related to machine]

ERROR RECOVERY
(SETUP)

The machine interrupts the full automation operation.

FULL AUTOMATION CUT CHART


[1.0]

or

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3-2-1-3. Executing AUTO SETUP PASS


Procedures for error recovery
This procedure is for resuming cutting operation without performing automatic setup.
The setup point is not updated in this procedure, since setup is not performed. The machine resumes the
cutting operation with the setup data used before error occurrence.

!!! This procedure is continued from: !!!


Section 3-2-1 [Remedies for setup errors related to machine]

ERROR RECOVERY
(SETUP)

The machine resumes cutting.

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3-2-1-4. Executing BLADE INFORMATION


Procedures for error recovery
This procedure is for opening the screen to check blade-related information such as the cut line count of
the blade currently mounted on the spindle.

!!! This procedure is continued from: !!!


Section 3-2-1 [Remedies for setup errors related to machine]

ERROR RECOVERY
(SETUP)

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Procedures for error recovery (Continued)

Decide whether the blade should be replaced.

When you replace the blade:


→See Section 1 [Blade Replacement] of Chapter D.
When you do not replace the blade:
→See Section 3-2-1-1 [Executing RETRY] of this chapter.

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3-2-1-5. Executing NCS SENSOR CLEANING [optional accessory]


Procedures for error recovery
This procedure is for cleaning the optical fiber end face of the non-contact setup sensor.

WARNING

Do not clean the sensor while the axes are operating


When you select <NCS SENSOR CLEANING>, you have to open the splash cover
(splash cover F in DAD3360) to clean the non-contact setup sensor block. When you
perform the operation with the cover opened, your hands and fingers could be caught,
slashed or cut off.

!!! This procedure is continued from: !!!


Section 3-2-1 [Remedies for setup errors related to machine]

ERROR RECOVERY
(SETUP)

The chuck table moves to the origin position.

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Procedures for error recovery (Continued)

If the spindle is rotating:

The spindle rotation stops.

Visually check that the spindle rotation is stopped.

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Procedures for error recovery (Continued)

When the sensor protecting water is supplied from the non-contact setup sensor block:

The sensor protecting water supply stops.

Visually check that the sensor protecting water is stopped.

When the sensor protecting air is supplied from the non-contact setup sensor block:

The air supply stops.

Visually check that the air supply is stopped.

Ask the maintenance personnel to clean the optical fiber end face of the non-contact setup sensor
section.

E-30
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Procedures for error recovery (Continued)

ERROR RECOVERY
(SETUP)

The machine retries the setup operation.

E-31
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4. Errors during Alignment


Summary of this section

Section No. Title


4-1 Remedies for Alignment Errors

4-1. Remedies for Alignment Errors


When does the error occur?
The errors described in this section occur when there is any defect in the alignment operation.

Error message

Error code Error message


A0531 Macro target not found.
A0532 Micro target not found.
A0533 Alignment time limit.
A0534 Index check target not found.
A0535 Index check Y position error. (Y)
A0536 Index check X position error. (X)
A0537 Angle between channels error.
A0538 Theta adjustment retry repeat error.
A0539 This workpiece has already been cut.
A0551 Workpiece thickness is different from data.
A0552 Focus maintenance has not been performed.
A0596 Street adjust data error. Please re-teach.
V1386 Microscope up error. [optional accessory (DAD323/DAD3240)]
V1387 Microscope down error. [optional accessory (DAD323/DAD3240)]

E-32
<DO NOT COPY>

Procedures for error recovery

An alarm sounds when an error occurs.

Press the button to cancel the alarm.

Press To do Go to
RETRY
Select <F1> when you want to retry the automatic
alignment. 4-1-1

MANUAL ALIGNMENT
Select <F2> when you want to perform the manual
alignment. 4-1-2

EXIT FULL AUTO


Select <F3> when you want to abort the alignment
operation and then cancel the full automation operation. 4-1-3

E-33
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4-1-1. Executing RETRY


Procedures for error recovery
This procedure is for performing automatic alignment again.

!!! This procedure is continued from: !!!


Section 4-1 [Remedies for Alignment Errors]

ERROR RECOVERY
(ALIGNMENT)

The machine retries automatic alignment from the macro alignment.

When the error occurs frequently:


Ask the maintenance personnel to perform the teach operation.

E-34
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4-1-2. Executing MANUAL ALIGNMENT


Procedures for error recovery
This is a procedure for cutting a workpiece after performing alignment manually.

!!! This procedure is continued from: !!!


Section 4-1 [Remedies for Alignment Errors]

ERROR RECOVERY
(ALIGNMENT)

Execute manual alignment.


→See Section 3-2 [Manual Alignment] of Chapter C.

E-35
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Procedures for error recovery (Continued)

The machine resumes cutting.

E-36
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4-1-3. Executing EXIT FULL AUTO


Procedures for error recovery
This procedure is for canceling alignment and cutting operations.

!!! This procedure is continued from: !!!


Section 4-1 [Remedies for Alignment Errors]

ERROR RECOVERY
(ALIGNMENT)

The machine stops alignment operation.

The machine stops full automation operation.

FULL AUTOMATION CUT CHART


[1.0]

or

E-37
<DO NOT COPY>

5. Errors during Kerf Check


Summary of this section

Section No. Title


5-1 Remedies for Kerf Check Errors Caused by Inferior Cutting Results
5-2 Remedies for Kerf Check Errors Caused by Erroneous Machine Recognition

Notes on error recovery

NOTICE

If an error occurs during kerf check, verify the conditions of error occurrence by
observing the microscope image displayed on the screen, and then deal with the
error
Among the errors issued during kerf check, the same error message is issued due to
inferior cutting results and due to erroneous machine recognition. Depending on the
problem's source, different error remedy is required.

E-38
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5-1. Remedies for Kerf Check Errors Caused by Inferior


Cutting Results
When does the error occur?
The errors described in this section occur when an inferior cutting result is detected during the kerf check.
The same errors occur, however, also due to erroneous machine recognition.
Verify the conditions of the error occurrence by observing the microscope image displayed on the screen.

Error message

Error code Error message


K0038 Kerf check: Not found.
K0039 Kerf check: Off center.
K0040 Kerf check: Too wide.
K0041 Kerf check: Too narrow.
K0042 Kerf check: Chipping size.
K0043 Kerf check: Chipping area.
K0044 Kerf check: Target not found.
K0045 Kerf check: Target position error.
K0046 Kerf check: Too wide. (Center to Chipping)
K0047 Kerf check: Too wide. (Include chipping)
K0048 Could not find kerf center. [optional accessory]
K0049 Kerf center position error. [optional accessory]

Procedures for error recovery


When an error occurs due to inferior cutting results, it is necessary to eliminate the cause of the error.
Procedures for elimination differ depending on the customer. Therefore, operators should obtain
instruction from the maintenance personnel regarding how to cope with error occurrence, in advance.

E-39
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5-2. Remedies for Kerf Check Errors Caused by Erroneous


Machine Recognition
When does the error occur?
The errors described in this section are caused by erroneous machine recognition. The same errors arise,
however, also due to inferior cutting results.
Verify the conditions of the error occurrence by observing the microscope image displayed on the screen.

Error message

Error code Error message


K0038 Kerf check: Not found.
K0039 Kerf check: Off center.
K0040 Kerf check: Too wide.
K0041 Kerf check: Too narrow.
K0042 Kerf check: Chipping size.
K0043 Kerf check: Chipping area.
K0044 Kerf check: Target not found.
K0045 Kerf check: Target position error.
K0046 Kerf check: Too wide. (Center to Chipping)
K0047 Kerf check: Too wide. (Include chipping)
K0048 Could not find kerf center. [optional accessory]
K0049 Kerf center position error. [optional accessory]

E-40
<DO NOT COPY>

Procedures for error recovery

An alarm sounds when an error occurs.

Press the button to cancel the alarm.

Press To Do Go To
RETRY
Select <F1> when you want to retry the kerf check
operation. 5-2-1

KERF CHECK TEACH


Select <F2> when you want to set the data of the KERF
CHECK DATA screen again. 5-2-2

STOP CORRECTION
Select <F3> when you want to check the kerf condition
on the camera image on the STOP CORRECTION 5-2-3
screen.

CUT CONTINUE
Select <F4> when you want to ignore the kerf check
error and resume the cutting operation. 5-2-4

E-41
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5-2-1. Executing RETRY


Procedures for error recovery
This procedure is for performing kerf check operation again.

!!! This procedure is continued from: !!!


Section 5-2 [Remedies for Kerf Check Errors Caused by Erroneous Machine Recognition]

ERROR RECOVERY
(KERF CHECK)

The machine performs kerf check again.

When the error occurs frequently:


Ask the maintenance personnel to set the kerf check data again.

E-42
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5-2-2. Executing KERF CHECK TEACH


Procedures for error recovery
This procedure is for resetting kerf check data.

!!! This procedure is continued from: !!!


Section 5-2 [Remedies for Kerf Check Errors Caused by Erroneous Machine Recognition]

ERROR RECOVERY
(KERF CHECK)

KERF CHECK
TEACH

Ask the maintenance personnel to set the kerf check data again.

E-43
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5-2-3. Executing STOP CORRECTION


Procedures for error recovery
This procedure is for checking the kerf shape on the microscope image.

!!! This procedure is continued from: !!!


Section 5-2 [Remedies for Kerf Check Errors Caused by Erroneous Machine Recognition]

ERROR RECOVERY
(KERF CHECK)

STOP CORRECTION

Check the kerf shape on the displayed microscope image.

E-44
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5-2-4. Executing CUT CONTINUE


Procedures for error recovery
This procedure is for ignoring the kerf check error and resuming the cutting operation.

!!! This procedure is continued from: !!!


Section 5-2 [Remedies for Kerf Check Errors Caused by Erroneous Machine Recognition]

ERROR RECOVERY
(KERF CHECK)

The machine resumes cutting.

E-45
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6. Blade Breakage Detector Errors


[Optional Accessory]
Summary of this section

Section No. Title


6-1 Remedies for Blade Breakage Detector Errors

E-46
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6-1. Remedies for Blade Breakage Detector Errors


When does the error occur?
The errors described in this section occur when abnormal conditions are encountered in the blade or by
erroneous recognition of the blade breakage detector.

Error message

Error code Error message


B0037 B.B.D. blade detective error.
B0184 BBD blade detection error. (Partial blade breakage)
B0185 BBD blade detection error. (Total blade breakage)
E0191 Internal communication error. Re-start the machine.

Procedures for error recovery

WARNING

Before opening the splash cover (splash cover F in DAD3360), make sure that
the spindle rotation stopped and that all axes stopped
In recovery procedures for blade breakage detector errors, you have to open the splash
cover (splash cover F in DAD3360) to check the state of blade breakage or replace the
blade. Your fingers or hands may be caught in the machine and slashed or cut off.

Do not put your fingers or hands under the blade


Since the blade edge is sharp, if your fingers or hands come into contact with it, they
may be slashed or cut off.

Do not touch the flange or blade after opening the covers during spindle rotation
Since the blade edge is sharp, if your fingers or hands come into contact with it, they
may be slashed or cut off. The splash cover (splash cover F in DAD3360) is designed
not to open during spindle rotation.

Confirm that the spindle has come to a complete stop from the outside of the
cover before opening the splash cover (splash cover F in DAD3360)
Whether or not to stop the spindle when the ERROR RECOVERY (BLADE
BREAKAGE) screen is displayed is set on the USER DEFINE DATA 1 screen [7.4].

E-47
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Procedures for error recovery (Continued)

When the non-contact setup function is not installed in the machine:

Suspend the full automatic operation by pressing the button on the ERROR
RECOVERY (BLADE BREAKAGE) screen, remove the workpiece from the chuck table and carry
out the procedures of Section 1 [Blade Replacement] and Section 2 [Setup] of Chapter D.

An alarm sounds when an error occurs.

The Z-axis ascends to its origin position. The X-axis moves to under the microscope.

Press the button to cancel the alarm.

E-48
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Procedures for error recovery (Continued)

If the spindle is rotating:

Press the button to stop the spindle rotation.

Visually check that the spindle rotation is stopped.

If the wheel coolant water is supplied:

Press the button to stop the wheel coolant water supply.

Visually check that the wheel coolant water supply is stopped.

Press To Do Go To
RESTART
Select <F1> when there is no defect on the blade.
6-1-1

EXIT FULL AUTO


Select <F2> when you want to interrupt the full
automation operation. 6-1-2

BLADE REPLACEMENT
Select <F3> when you want to replace the blade.
6-1-3

BLADE INFORMATION
Select <F4> when you want to verify the cut line
counts and other necessary data about the blade 6-1-4
currently installed.

E-49
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6-1-1. Executing RESTART


Procedures for error recovery
This procedure is for resuming the cutting operation when the blade is not defective (such as the case of
erroneous detection due to blade wear).
!!! This procedure is continued from: !!!
Section 6-1 [Remedies for Blade Breakage Detector Errors]

ERROR RECOVERY
(BLADE BREAKAGE)

Open the splash cover (splash cover F in DAD3360).

Adjust the sensitivity level on the screen.


→See Section 1-5 [Adjusting the Blade Breakage Detector [Optional Accessory]] of Chapter D.

Close the splash cover (splash cover F in DAD3360).

The machine resumes cutting.

E-50
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6-1-2. Executing EXIT FULL AUTO


Procedures for error recovery
This procedure is for canceling the full automation operation.

!!! This procedure is continued from: !!!


Section 6-1 [Remedies for Blade Breakage Detector Errors]

ERROR RECOVERY
(BLADE BREAKAGE)

The machine stops cutting.

FULL AUTOMATION CUT CHART


[1.0]

or

E-51
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6-1-3. Executing BLADE REPLACEMENT


Procedures for error recovery
This procedure is for resuming the cutting operation after replacing the blade.

!!! This procedure is continued from: !!!


Section 6-1 [Remedies for Blade Breakage Detector Errors]

ERROR RECOVERY
(BLADE BREAKAGE)

The spindle rotation stops.

BLADE
REPLACEMENT
[4.1]

Open the splash cover (splash cover F in DAD3360).

Replace the blade.


→See Section 1 [Blade Replacement] of Chapter D.

E-52
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Procedures for error recovery (Continued)

If the machine is equipped with a blade breakage detector:

BLADE BREAKAGE
DETECTOR
ADJUSTMENT [4.2]

While monitoring the blade breakage detector sensitivity level, adjust the detector.
→See Section 1-5 [Adjusting the Blade Breakage Detector [Optional Accessory]] of Chapter D.

Close the splash cover (splash cover F in DAD3360).

CONTACT SETUP NON-CONTACT


[4.3.1] SETUP
[4.3.2]
or

E-53
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Procedures for error recovery (Continued)

The machine performs setup operation.

STOP CORRECTION

The machine resumes cutting.

Check whether the hairline is aligned with the cutting position. If not, correct the deviation.
→See Section 1-6-1 [Correcting hairline alignment] of Chapter C.

E-54
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6-1-4. Executing BLADE INFORMATION


Procedures for error recovery
This procedure is for checking the information of the currently mounted blade such as cut line count
before replacing the blade.
!!! This procedure is continued from: !!!
Section 6-1 [Remedies for Blade Breakage Detector Errors]

ERROR RECOVERY
(BLADE BREAKAGE)

E-55
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Procedures for error recovery (Continued)

Check the cut line counts and other necessary data about the blade and note down them if necessary.

ERROR RECOVERY
(BLADE BREAKAGE)

E-56
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7. Errors Related to Supply Utility


Summary of this section

Section No. Title


7-1 Remedies for Main Air Errors
7-2 Remedies for Wheel Coolant Water Errors [Optional Accessory]
7-3 Remedies for Spindle Coolant Water Errors

E-57
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7-1. Remedies for Main Air Errors


When does the error occur?
This error is caused by an insufficient supply of main air.

Error message

Error code Error message


E0003 Insufficient main air......Reinitialize.

Procedures for error recovery

An alarm sounds when an error occurs.

Press the button to cancel the alarm.

Check whether the air supply pressure is normal.

Air pressure: 0.5MPa

[LAYER mode] [CUT CHART mode]

Pressure
AIR 0.5MPa

When the pressure gauge does not reach the specified pressure:
Contact your maintenance personnel in charge.

E-58
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Procedures for error recovery (Continued)

Press the button to initialize the system.

When the error occurs again:


Contact your maintenance personnel in charge.

E-59
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7-2. Remedies for Wheel Coolant Water Errors


[Optional Accessory]
When does the error occur?
The errors described in this section occur when the flow rate of wheel coolant water drops on the machine
with the flow rate sensor for wheel coolant water [optional accessory] or the flow rate controller for wheel
coolant water [optional accessory] mounted.

Error message

Error code Error message


E0705 Cut water flow (BLD) lower limit [optional accessory]
E0711 Cut water flow (SHW) lower limit [optional accessory]
E0714 Cut water flow (SP) lower limit [optional accessory] [DAD3240/DAD3360]

Procedures for error recovery

An alarm sounds when an error occurs.

Press the button to cancel the alarm.

The machine starts to supply the wheel coolant water.

E-60
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Procedures for error recovery (Continued)

Check that the flow rate of the wheel coolant water is normal.
・As the flow rate differs depending on customers, ask your maintenance personnel to check the flow
rate.
[DAD323]

Wheel coolant water flowmeter (shower)


Wheel coolant water flowmeter
(blade cooler)

[DAD3240]
Wheel coolant water flowmeter (spray)
[optional accessory]
Wheel coolant water flowmeter
(shower)
Wheel coolant water flowmeter
(blade cooler)

[DAD3360]
Wheel coolant water flowmeter (spray)
[optional accessory]
Wheel coolant water flowmeter
(shower)
Wheel coolant water flowmeter
(blade cooler)

E-61
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Procedures for error recovery (Continued)

For the machine equipped with the flow rate controller for wheel coolant water [optional
accessory]:
Check the flow rate in the sensor status area displayed by pressing the <WATER> button.

or

When the error occurs again:


Contact your maintenance personnel in charge.

E-62
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7-3. Remedies for Spindle Coolant Water Errors


When does the error occur?
The error described in this section occurs when there is a drop in the flow rate of spindle coolant water.

Error message

Error code Error message


E0018 Spindle cooling water flow error.

Procedures for error recovery

An alarm sounds when an error occurs.

Press the button to cancel the alarm.

DAD323/DAD3240
Go to the rear of the machine.

Check the flow rate of the spindle coolant water flow rate sensor.
[DAD323] [DAD3240]

Spindle coolant water


flow rate sensor

Rear side Rear side

E-63
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Procedures for error recovery (Continued)

[DAD3360]
Spindle coolant water
flow rate sensor

If the reading of the flow rate sensor is less than 1.0L/min:


Contact your maintenance personnel in charge.

DAD323/DAD3240
Return to the front side of the machine.

Press the button to rotate the spindle.

When the error occurs again:


Contact your maintenance personnel in charge.

E-64
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8. Measure Alignment Errors [Optional Accessory]


Summary of this section

Section No. Title


8-1 Remedies for Measure Alignment Errors <1>
8-2 Remedies for Measure Alignment Errors <2>
8-3 Remedies for Measure Alignment Errors <3>
8-4 Details of Remedies for Measure Alignment Errors

E-65
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8-1. Remedies for Measure Alignment Errors <1>


When does the error occur?
The errors described in this section occur when the target is not found during alignment in the full
automation operation.

Error message

Error code Error message


A0531 Macro target not found.
A0532 Micro target not found.

Procedures for error recovery

An alarm sounds when an error occurs.

Press the button to cancel the alarm.

E-66
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Procedures for error recovery (Continued)

Press To Do Go To
RETRY
Retries alignment for the current channel on the current
workpiece.
Select this button when the error cause is simple (e.g., 8-4-1
improper focus) and auto alignment operation for the
current channel on the current workpiece can easily be
resumed by a retrial.
MANUAL ALIGN
Calls up the MANUAL ALIGNMENT screen and
carries out manual alignment for the current channel on
the current workpiece.
8-4-2
Select this button when such an error as improper
recognition of the captured image (that is, not the error
that occurs to a defective lot, but those occurs on the
workpiece currently mounted) occurs.
RETRY PROCESS CONTROL TABLE
Retries alignment for all the workpieces mounted on
the chuck table from the beginning when "YES" is
selected for <Batch sequence> on the MEASURING 8-4-3
ALIGNMENT DATA screen [3.1.1].
If "NO" is selected, the machine retries the alignment
operation from the workpiece where an error occurs.
EXIT FULLAUTO
Aborts the full automation.
8-4-4

PASS NOW WORKPIECE


This is effective when two or more workpieces are
mounted. Cancels the processing for the current
8-4-5
workpiece and resumes that for the next workpiece.
Select this button when the current workpiece cannot
be aligned.
ERROR POINT TEACH
Calls up the ERROR POINT TEACH screen.
Select this button when a target is stained or when
accuracy of the workpiece is not favorable. Registers a 8-4-6
target or a street at the point where the error occurs.
After registration, the alignment operation continues.
(It is the data maintenance personnel to register.)
CHANGE START POS.
Calls up the CHANGE START POS. screen and
specifies the position where to start the macro target
searching.
8-4-7
Select this button when accuracy of workpiece
mounting is not favorable and the like.
(It is the data maintenance personnel to change the
position.)

E-67
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8-2. Remedies for Measure Alignment Errors <2>


When does the error occur?
The errors described in this section occur during alignment in the full automation operation.

Error message

Error code Error message


A0533 Alignment time limit.
A0537 Angle between channels error.
A0545 Least-square method theta adjustment limit error.
A0801 Y index correction limit error. (Line no. )
A0802 Theta correction limit error. (Line no. )
A1163 Invalid device data. Confirm device data and re-teach.

Procedures for error recovery

An alarm sounds when an error occurs.

Press the button to cancel the alarm.

E-68
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Procedures for error recovery (Continued)

Press To Do Go To
RETRY
Retries alignment for the current channel on the current
workpiece.
Select this button when the error cause is simple (e.g., 8-4-1
improper focus) and auto alignment operation for the
current channel on the current workpiece can easily be
resumed by a retrial.
MANUAL ALIGN
Calls up the MANUAL ALIGNMENT screen and
carries out manual alignment for the current channel on
the current workpiece.
8-4-2
Select this button when such an error as improper
recognition of the captured image (that is, not the error
that occurs to a defective lot, but those occurs on the
workpiece currently mounted) occurs.
RETRY PROCESS CONTROL TABLE
Retries alignment for all the workpieces mounted on
the chuck table from the beginning when "YES" is
selected for <Batch sequence> on the MEASURING 8-4-3
ALIGNMENT DATA screen [3.1.1].
If "NO" is selected, the machine retries the alignment
operation from the workpiece where an error occurs.
EXIT FULLAUTO
Aborts the full automation.
8-4-4

PASS NOW WORKPIECE


This is effective when two or more workpieces are
mounted. Cancels the processing for the current
8-4-5
workpiece and resumes that for the next workpiece.
Select this button when the current workpiece cannot
be aligned.
CHANGE START POS.
Calls up the CHANGE START POS. screen and
specifies the position where to start the macro target
searching.
8-4-7
Select this button when accuracy of workpiece
mounting is not favorable and the like.
(It is the data maintenance personnel to change the
position.)

E-69
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8-3. Remedies for Measure Alignment Errors <3>


When does the error occur?
The errors described in this section occur when the target is not found during alignment in other than the
full automation operation.

Error message

Error code Error message


A0531 Macro target not found.
A0532 Micro target not found.

Procedures for error recovery

An alarm sounds when an error occurs.

Press the button to cancel alarm.

E-70
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Procedures for error recovery (Continued)

Press To Do Go To
RETRY
Retries alignment for the current channel on the current
workpiece.
Select this button when the error cause is simple (e.g., 8-4-1
improper focus) and auto alignment operation for the
current channel on the current workpiece can easily be
resumed by a retrial.
EXIT FULL AUTO
Aborts the full automation.
8-4-4

ERROR POINT TEACH


Calls up the ERROR POINT TEACH screen.
Select this button when a target is stained or when
accuracy of the workpiece is not favorable. Registers a 8-4-6
target or a street at the point where the error occurs.
After registration, the alignment operation continues.
(It is the data maintenance personnel to register.)
CHANGE START POS.
Calls up the CHANGE START POS. screen and
specifies the position where to start the macro target
searching.
8-4-7
Select this button when accuracy of workpiece
mounting is not favorable and the like.
(It is the data maintenance personnel to change the
position.)

E-71
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8-4. Details of Remedies for Measure Alignment Errors


Summary of this section

Section No. Title


8-4-1 Executing RETRY
8-4-2 Executing MANUAL ALIGNMENT
8-4-3 Executing RETRY PROCESS TABLE
8-4-4 Executing EXIT FULL AUTO
8-4-5 Executing PASS NOW WORKPIECE
8-4-6 Executing ERROR POINT TEACH
8-4-7 Executing CHANGE START POSITION

E-72
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8-4-1. Executing RETRY


Procedures for error recovery
This procedure is for performing automatic alignment again.

!!! This procedure is continued from: !!!


Section 8-1 [Remedies for Measure Alignment Errors <1>] of this chapter
Section 8-2 [Remedies for Measure Alignment Errors <2>] of this chapter
Section 8-3 [Remedies for Measure Alignment Errors <3>] of this chapter

ERROR RECOVERY
(ALIGNMENT)

The machine retries the automatic alignment from the current channel.

When the error occurs frequently:


Ask the data maintenance personnel to perform the teach operation.

E-73
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8-4-2. Executing MANUAL ALIGNMENT


Procedure for error recovery
This is a procedure for resuming the full automation operation again after performing the alignment
manually.
!!! This procedure is continued from: !!!
Section 8-1 [Remedies for Measure Alignment Errors <1>] of this chapter
Section 8-2 [Remedies for Measure Alignment Errors <2>] of this chapter

ERROR RECOVERY
(ALIGNMENT)

Execute manual alignment.


→See Section 3-2 [Manual Alignment] of Chapter C.

E-74
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Procedure for error recovery (Continued)

The machine resumes the full automation operation.

E-75
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8-4-3. Executing RETRY PROCESS TABLE


Procedure for error recovery
This procedure is for retrying the alignment operation specified in the process table of the device data
from the beginning of it.
!!! This procedure is continued from: !!!
Section 8-1 [Remedies for Measure Alignment Errors <1>] of this chapter
Section 8-2 [Remedies for Measure Alignment Errors <2>] of this chapter

ERROR RECOVERY
(ALIGNMENT)

The machine retries the alignment operation specified in the "Process Table" in the device data from
the beginning.

E-76
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8-4-4. Executing EXIT FULL AUTO


Procedure for error recovery
This procedure is for canceling alignment operation, and then stopping the full automation operation if the
full automation operation is being executed.
!!! This procedure is continued from: !!!
Section 8-1 [Remedies for Measure Alignment Errors <1>] of this chapter
Section 8-2 [Remedies for Measure Alignment Errors <2>] of this chapter
Section 8-3 [Remedies for Measure Alignment Errors <3>] of this chapter

ERROR RECOVERY
(ALIGNMENT)

The machine stops the full automation operation.

E-77
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8-4-5. Executing PASS NOW WORKPIECE


Procedures for error recovery
This procedure is for stopping the process of the workpiece where an error occurs and continuing process
from the next workpiece on the chuck table. If the next workpiece cannot be processed, the machine
moves as the same as executing rejection.

!!! This procedure is continued from: !!!


Section 8-1 [Remedies for Measure Alignment Errors <1>] of this chapter
Section 8-2 [Remedies for Measure Alignment Errors <2>] of this chapter

ERROR RECOVERY
(ALIGNMENT)

The machine stops processing the workpiece where an error occurs.

The machine starts processing of the next workpiece.


If the error workpiece is the last one:
If there are other workpieces to be processed on the chuck table, the machine continues processing.
If not, the machine ends the full automation operation.

E-78
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8-4-6. Executing ERROR POINT TEACH


Procedures for error recovery
This procedure is for registering the target or street at the position where the error occurs. Ask the data
maintenance personnel to register only the error point.
!!! This procedure is continued from: !!!
Section 8-1 [Remedies for Measure Alignment Errors <1>] of this chapter
Section 8-3 [Remedies for Measure Alignment Errors <3>] of this chapter

ERROR RECOVERY
(ALIGNMENT)

E-79
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Procedures for error recovery (Continued)

Ask the data maintenance personnel to register the target or the street.

Only the error point is registered by the data maintenance personnel.

The screen preceding the error is displayed, and the machine resumes the alignment operation.

E-80
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ERROR POINT TEACH screen


This is a screen to register the position of the target or street of which an error occurred.
[When registering the target position on this screen]
・When an error occurs during macro alignment.
・When an error occurs during the micro alignment operation for the first line with a condition that
"CENTER" is selected at the item <Position of first line> on the MEASURING ALIGNMENT DATA
screen [3.1.1].
→A target window is displayed on the screen. Register the target at the center of the screen.
[When registering the street position on this screen]
・In the cases other than the above.
→Hairline is displayed on the screen.

[1]
[2]
[3]

[4]

Item No. Description


[1] Only for the machine equipped with the macro microscope [optional accessory]
Indicates the current microscope magnification.
[2] Indicates the channel of which the position of target or street is being registered.
[3] Indicates the current hairline width.
[4] Indicates the workpiece No. of which the position of target or street is to be registered.
When the number of workpieces placed on the chuck table is one, "1" is displayed.

E-81
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ERROR POINT TEACH screen (Continued)

Press To
F4 Narrow the hairline width on the screen.
This button appears only when hairline is displayed on the screen.
F5 Perform the θ alignment which corrects the θ angle to make the workpiece horizontal. If
pressed for more than a second, automatic θ alignment starts.
F8 Call up the LIGHT LEVEL ADJUST screen. You can adjust the light intensity variously
depending on the way of pressing the <F8> button.
Press it once. Call up the LIGHT LEVEL ADJUST screen.
Press it for one second or more. Carry out the automatic light intensity adjustment of
direct light.
Press it for one second or more, Carry out the automatic light intensity adjustment of
then once more. oblique light.
Press it for one second or more, Carry out the automatic light intensity adjustment of
then twice more. direct light and oblique light.
F9 Call up the FOCUS ADJUSTMENT screen. You can adjust the microscope focus
variously depending on the way of pressing the <F9> button.
Press it once. Call up the FOCUS ADJUSTMENT screen.
Press it for one second or more. Carry out the automatic focusing.
F10 Widen the hairline width on the screen.
This button appears only when hairline is displayed on the screen.
F11 Only for the machine equipped with the macro microscope [optional accessory]
Switch the microscope magnification (high/low).
ENTER Finalize the target or street position.
・The screen preceding the error is displayed, and the alignment is resumed.
EXIT Return the screen to the ERROR RECOVERY (ALIGNMENT) screen.

E-82
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8-4-7. Executing CHANGE START POSITION


Procedures for error recovery
This procedure is for designating the position to start macro target searching. Ask the data maintenance
personnel to change the alignment start position.
!!! This procedure is continued from: !!!
Section 8-1 [Remedies for Measure Alignment Errors <1>] of this chapter
Section 8-2 [Remedies for Measure Alignment Errors <2>] of this chapter
Section 8-3 [Remedies for Measure Alignment Errors <3>] of this chapter

ERROR RECOVERY
(ALIGNMENT)

E-83
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Procedures for error recovery (Continued)

Ask the data maintenance personnel to designate the position where macro alignment starts.

The position where the alignment starts is changed by the data maintenance personnel.

ERROR RECOVERY
(ALIGNMENT)

The machine retries the alignment operation.

E-84
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CHANGE START POS. screen


This is a screen for registering the position where to start macro target searching. The position registered
on this screen is valid only for the next macro alignment.

[1]

Item No. Description


[1] Indicates the workpiece No. to be aligned. When the number of workpieces placed on the
chuck table is one, "1" is displayed.

Press To
ENTER Saves the position from which macro target searching operation is to be started when the
next macro alignment is carried out. The screen will go back to the ERROR RECOVERY
(ALIGNMENT) screen.
EXIT Return the screen to the ERROR RECOVERY (ALIGNMENT) screen.

E-85
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9. Auto Dress Errors [Optional Accessory]


Summary of this section

Section No. Title


9-1 Remedies for Auto Dress Non-Completion Errors
9-2 Remedies for Errors Related to Sub Chuck Table Vacuum
9-3 Remedies for Errors Related to Dresser Board

E-86
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9-1. Remedies for Auto Dress Non-Completion Errors


When does the error occur?
If you abort auto dress during auto dress execution and try to start cutting operation, this error occurs.

Error message

Error code Error message


E0277 Dress not completed. Press START button to select the process.

Procedures for error recovery

An alarm sounds when an error occurs.

Press the button to cancel the alarm.

E-87
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Procedures for error recovery (Continued)

When you start cutting operation after When you start cutting operation without
executing auto dress: executing auto dress:

The machine performs auto dress.

The machine performs cutting.

The machine performs auto dress at the next auto dress timing.

E-88
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9-2. Remedies for Errors Related to Sub Chuck Table


Vacuum
When does the error occur?
The vacuum pressure of the sub chuck table is monitored during auto dressing. If the pressure drops to a
lower value, this error occurs.

Error message

Error code Error message


V0814 Sub chuck table vacuum error.

Procedures for error recovery

An alarm sounds when an error occurs.

Press the button to cancel the alarm.

Check that the sub chuck table vacuum pressure is normal.


When the pressure does not reach the specified pressure:
Contact your maintenance personnel in charge.

The machine resumes cutting.

When the error occurs again:


Stop the operation.

E-89
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9-3. Remedies for Errors Related to Dresser Board


When does the error occur?
If no space is left on a dresser board while the auto dress operation is performed, this error occurs.

Error message

Error code Error message


O0649 Dress board life limit reached.

Procedures for error recovery

An alarm sounds when an error occurs.

Press the button to cancel the alarm.

Press To Do Go To
Board Exchange
Select <F1> when you want to exchange the dresser
board. 9-3-1

Dress Pass
Select <F2> when you want to resume cutting without
executing the dressing operation. 9-3-2

E-90
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9-3-1. Executing BOARD EXCHANGE


Procedures for error recovery
This procedure is for exchanging the dresser board to continue auto dress.

!!! This procedure is continued from: !!!


Section 9-3 [Remedies for Errors Related to Dresser Board]

ERROR RECOVERY
(AUTO DRESS)

The chuck table moves to the right (origin position) and the Y-axis moves to the rear (origin position).

E-91
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Procedures for error recovery (Continued)

When the microscope section cover is set When the microscope section cover is set
to open/close automatically: not to open/close automatically:
The microscope section cover opens.

Press the button to turn OFF the sub chuck table vacuum.

Exchange the dresser board.

Press the button to turn ON the sub chuck table vacuum.

When the microscope section cover is set not to open/close automatically:

Press the button to register an action of a dresser board exchange on the machine.

E-92
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Procedures for error recovery (Continued)

STOP CORRECTION

When the microscope section cover is set to open/close automatically:


The microscope section cover closes.

The machine resumes cutting after executing dressing.

E-93
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9-3-2. Executing DRESS PASS


Procedures for error recovery
This procedure is for continuing cutting without executing dressing.

!!! This procedure is continued from: !!!


Section 9-3 [Remedies for Errors Related to Dresser Board]

ERROR RECOVERY
(AUTO DRESS)

The machine resumes cutting.

At the next dress timing:


The error "O0649 Dress board life limit reached." occurs again.

E-94
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10. Other Errors


About other errors
Errors displaying error numbers of X are related to the machine actuation. Ask your maintenance
staff to cope with the error.
Call your maintenance staff if the error that is not included in this manual occurs.

E-95
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INDEX
INDEX

Dummy workpiece, setting ................................................... D-91


A
ABORT FULL AUTO, executing............................................E-51
Air of the plant facility, opening stopcocks...............................B-3 E
Air, stopping facility supply....................................................B-26 Error recovery ........................................................................ E-1
Alignment errors, remedies...................................................E-32 Error remedies
Alignment, executing ............................................................C-44 alignment.................................................................... E-32
Alignment .............................................................................C-67 auto setup, related to machine.................................... E-21
Auto dress, executing ...........................................................C-36 auto setup................................................................... E-20
Auto setup errors, remedies .................................................E-20 blade breakage detector ............................................. E-47
AUTO SETUP PASS, executing ...........................................E-25 cover interlock ............................................................ E-11
Automatic alignment, executing ............................................C-72 dresser board ............................................................. E-90
Automatic alignment.............................................................C-69 kerf check errors caused by erroneous machine
Automatic cutting, executing.................................................C-45 recognition............................................................... E-40
Axis control keyboard ...........................................................A-17 kerf check errors caused by inferior cutting results...... E-39
main air....................................................................... E-58
manual setup, related to machine ............................... E-14
B manual setup .............................................................. E-13
Blade breakage detector non-contact setup ....................................................... E-17
adjusting .....................................................................D-44 relating blade during cutting .......................................... E-4
removing .....................................................................D-14 setup errors during cutting ............................................ E-5
Blade breakage detector errors, remedies ............................E-47 setup, other................................................................. E-19
Blade data, setting setup .......................................................................... E-15
new blade ...................................................................D-38 spindle coolant water .................................................. E-63
used blade ..................................................................D-41 spindle load .............................................................. E-8, 9
Blade dressing operation......................................................D-69 sub chuck table vacuum ............................................. E-89
Blade errors during cutting, remedies .....................................E-4 waste-choked ............................................................... E-6
Blade height, correcting........................................................C-34 water leakage ............................................................... E-7
BLADE INFORMATION, executing wheel coolant water .................................................... E-60
auto setup errors.........................................................E-26 Errors
blade breakage detector errors ...................................E-55 during alignment ......................................................... E-32
BLADE MAINTENANCE.........................................................D-1 during cutting ................................................................ E-3
BLADE REPLACEMENT, executing .....................................E-52 during kerf check ........................................................ E-38
Blade replacement, preparation..............................................D-4 during setup................................................................ E-13
Blade replacement .................................................................D-2 others ......................................................................... E-95
Blade, removing ...................................................................D-15 relating auto dress function ......................................... E-86
BOARD EXCHANGE, executing...........................................E-91 relating blade breakage detector................................. E-46
relating cover interlock ................................................ E-10
relating supply utility ................................................... E-57
C Executing automatic cutting
Calling up CUT CHART mode ..................................................... C-50
FULL AUTOMATION screen [1.0]................................C-12 LAYER mode .............................................................. C-46
MANUAL ALIGNMENT screen [2.2] ......................C-70, 75 Executing semi-automatic cutting
SINGLE CH ALIGNMENT screen [2.4.4] .....................D-76 CUT CHART mode ..................................................... C-59
Chuck table setup, executing................................................D-56 LAYER mode .............................................................. C-54
Cleaning operation ...............................................................B-19 Executing Setup................................................................... D-49
Correcting blade height ........................................................C-34 EXIT FULL AUTO, executing
Correcting cutting position ....................................................C-24 alignment errors.......................................................... E-37
Correcting hairline alignment ................................................C-17 auto setup errors......................................................... E-24
Correction of cutting position, executing ...............................C-28 measure alignment errors ........................................... E-77
Corrections during cutting operation .....................................C-16
Cover interlock errors, remedies........................................... E-11
CUT CHART mode...............................................................A-35 F
CUT CONTINUE, executing .................................................E-45 Feed speed, changing.......................................................... C-32
Cutting operation, suspending Flow rate of the spindle coolant water, checking................... B-10
correcting cutting position ..........................................C-25 Full automation
correcting hairline alignment .......................................C-18 completion .................................................................. C-39
CUTTING OPERATION..........................................................C-1 executing .................................................................... C-14
Cutting position, correcting ...................................................C-24 Full automation operation....................................................... B-3
FULL AUTOMATION screen [1.0], calling up ........................ C-12
D
Data of used blades, saving ...................................................D-7 H
Data setting for the installed blade........................................D-37 Hairline alignment, correcting
Device data, verification .........................................................C-5 cutting operation ......................................................... C-17
Direct operation keyboard.....................................................A-14 Hairline alignment, executing ................................... C-21, D-100
Dress cutting start position, designation ...............................D-84 Hairline alignment ................................................................ D-90
Dress cutting, completion .....................................................D-87 Handling of microscope image (how to use XIS) .................. A-24
Dress cutting, executing .......................................................D-86
Dress data, verification .........................................................D-72
DRESS PASS, executing......................................................E-94 I
Dresser board erros, remedies .............................................E-90 Idling, executing
Dresser board, placement ....................................................D-75 blade maintenance ..................................................... D-47
Duct of the plant facility, opening stopcocks............................B-3 starting up the machine............................................... B-13
Duct, closing.........................................................................B-26 Important safety information ........................................... Safety-1

Index-1
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INDEX
Initialization, executing .........................................................B-12 RESTART, executing............................................................ E-50
Initialization, verifying ...........................................................B-18 RETRY PROCESS TABLE, executing
measure alignment errors ........................................... E-76
RETRY, executing
K alignment errors.......................................................... E-34
Kerf check errors caused by erroneous machine recognition, auto setup errors......................................................... E-23
remedies ...........................................................................E-40 kerf check errors ......................................................... E-42
Kerf check errors caused by inferior cutting results, measure alignment errors ........................................... E-73
remedies ...........................................................................E-39
KERF CHECK TEACH, executing ........................................E-43
Keyboard S
axis control keyboard ..................................................A-17 Screen constituents................................................................ A-2
direct operation keyboard............................................A-14 Semi-automatic cutting, executing........................................ C-53
numeric keyboard .......................................................A-21 Sensor calibration setup, executing...................................... D-63
text keyboard ..............................................................A-23 Setup errors during cutting, remedies..................................... E-5
Setup errors related to machine, remedies..................... E-14, 21
Setup errors, remedies......................................................... E-15
L Setup, preparation................................................................ D-53
LAYER mode........................................................................A-35 Setup ................................................................................... D-52
Light intensity, adjusting SINGLE CH ALIGNMENT screen [2.4.4], calling up ............. D-76
blade dressing operation .............................................D-77 Software keyboard area ....................................................... A-13
correcting cutting position............................................C-26 Spindle coolant water errors, remedies ................................ E-63
correcting hairline alignment .......................................C-19 Spindle load errors, remedies............................................. E-8, 9
correcting hairline alignment .......................................D-94 Spindle, verifying of stoppage............................................... B-18
manual alignment........................................................C-77 Starting up the machine.......................................................... B-2
START-UP OF THE MACHINE .............................................. B-1
STOP CORRECTION, executing ......................................... E-44
M Street adjustment, executing
Main air errors, remedies......................................................E-58 for channel 1............................................................... C-84
MANUAL ALIGNMENT screen [2.2], calling up for channel 2............................................................... C-87
auto alignment ............................................................C-70 Sub chuck table vacuum errors, remedies............................ E-89
manual alignment........................................................C-75 Supply pressure of air, checking............................................. B-9
MANUAL ALIGNMENT, executing
measure alignment errors ...........................................E-74
MANUAL ALIGNMENT, executing ........................................E-35 T
Manual alignment .................................................................C-74 Terminating the machine ...................................................... B-17
Manual operation TERMINATION OF THE MACHINE........................................ B-1
outline .........................................................................C-42 Text keyboard....................................................................... A-23
procedures..................................................................C-44 Top bar................................................................................... A-4
Manual operation..................................................................C-41 Turning the power OFF ........................................................ B-25
Manual setup errors, remedies .............................................E-13 Turning the power ON ............................................................ B-4
Measure alignment errors, details.........................................E-72
Measure alignment errors, remedies ........................ E-66, 68, 70
Measure alignment errors.....................................................E-65 W
Microscope focus, adjusting Warming up, executing
blade dressing operation .............................................D-80 blade maintenance ..................................................... D-47
correcting cutting position............................................C-26 starting up the machine............................................... B-13
correcting hairline alignment .......................................C-19 Waste-choked errors, remedies.............................................. E-6
correcting hairline alignment .......................................D-97 Water leakage errors, remedies ............................................. E-7
manual alignment........................................................C-80 Water of the plant facility, opening stopcocks ......................... B-3
Water, stopping facility supply .............................................. B-26
Weel coolant water, verifying of stoppage ............................ B-18
N What to do after correcting cutting position........................... C-30
NCS SENSOR CLEANING, executing ..................................E-28 What to do after correcting hairline alignment....................... C-22
New blade, installing.............................................................D-26 What to do after hairline alignment ..................................... D-103
Non-contact setup errors, remedies......................................E-17 Wheel coolant water errors, remedies .................................. E-60
Non-contact setup, executing ...............................................D-60 Wheel cover, removing......................................................... D-11
Numeric keyboard ................................................................A-21 Workpiece, setting.................................................................. C-8

O X
Other setup errors, remedies................................................E-19 XIS
how to use .................................................................. A-24
measure function .................................................. A-25, 33
P XIS screen
Power of the plant facility, turning on ......................................B-3 hairline display............................................................ A-26
Preparation of operation target window display.................................................. A-31
blade dressing operation .............................................D-71
cutting operation ...........................................................C-4
Process control table running (except for cutting), executing θ
..........................................................................................C-63 θ alignment, executing
for blade dressing ....................................................... D-82
for blade replacement ................................................. D-98
R for channel 1............................................................... C-82
Replacement of blades.........................................................D-10 for channel 2............................................................... C-85

Index-2
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WHOM TO CONTACT IN AN EMERGENCY


DISCO Offices
The contact list is subject to change without notice. The latest list is available on the Internet.
DISCO home page http://www.disco.co.jp/
Japan Head Office Osaka Branch Office
13-11, Omori-Kita 2-chome, Ota-ku, Tokyo 143-8580 Japan 3-12, Nishi-Nakajima 6-chome, Yodogawa-ku, Osaka-shi,
(Overseas Sales Department) Osaka 532-0011 Japan
Phone: 81-3-4590-1100 Fax: 81-3-4590-1075 (Sales Department) Phone: 81-6-6390-0388 Fax: 81-6-6302-0258
Kyushu Branch Office Sendai Branch Office
16-14, Kamisuizenji 2-chome, Chuo-ku, Kumamoto-shi, Oku-sendai Bldg F-1, 5-1, Honcho 2-chome, Aoba-ku, Sendai-shi,
Kumamoto 862-0951 Japan Miyagi 980-0014 Japan
(Sales Department) Phone: 81-96-385-3411 Fax: 81-96-384-1410 (Sales Department) Phone: 81-22-262-3345 Fax: 81-22-262-3346
Shinshu Regional Office
480, Toyohira, Chino-shi, Nagano 391-0294 Japan
Phone: 81-266-82-6201 Fax: 81-266-73-7201

DISCO HI-TEC AMERICA, INC. DISCO HI-TEC (CHINA) CO., LTD. Shanghai Head Office
USA Head Office Sales & Service Office 1F, Building 5, No.690 Bi-Bo Rd, ZhangJiang High-Tech Park, Shanghai
3270 Scott Blvd., Santa Clara, CA 95054-3011, U.S.A. 201203 P.R. China
Phone: 1-408-987-3776 Fax: 1-408-987-3785 Phone: 86-21-50278018 Fax: 86-21-50278178
DISCO HI-TEC TAIWAN CO., LTD. DISCO HI-TEC (SINGAPORE) PTE LTD Singapore Head Office
1F., No.188, Baoqiao Rd., Xindian Dist., New Taipei City, Taiwan 80 Ubi Avenue 4, #06-01
(R.O.C.) Singapore 408831
Phone: 886-2-2913-8877 Fax: 886-2-2913-2525 Phone: 65-6747-3737 Fax: 65-6745-0266
DISCO HI-TEC KOREA Corporation DISCO HI-TEC EUROPE. GmbH
3F, DHK Solution Bldg., 28, Pangyo-ro 255beon-gil, Bundang-gu, Europe Head Office
Seongnam-si, Gyeonggi-do, Korea 463-400 Liebigstrasse 8
Phone: 82-31-8038-8240 Fax: 82-31-8038-8241 D-85551 Kirchheim b. Muenchen, Germany
Phone: 49-89-90903-0 Fax: 49-89-90903-199

Agent Offices

AUROTECH CORPORATION DHK SOLUTION CORPORATION


2021 Buencamino Street, Alabang, Muntinlupa, Philippines 8F., DHK Solution Bldg., 28, Pangyo-ro 255beon-gil, Bundang-gu,
Phone: 63-2-809-0155 Fax: 63-2-807-7419 Seongnam-si, Gyeonggi-do, Korea 463-400
Phone: 82-31-8038-8111 Fax: 82-31-8038-8113
NEW TRONICS CO., LTD.
Flat F, 11th Floor, Valiant Ind. Bldg.
2-12 Au Pui Wan Street, Fotan, Shatin, N.T., Hong Kong
Phone: 852-26871431 Fax: 852-26874283

IN THE EVENT OF AN ACCIDENT


Be sure to contact us
Immediately get in touch with the nearest DISCO or DISCO Service Office if a situation arises where an
accident has occurred or might occur that involves injury or death during the operation of DISCO equipment.
Sales representative

Attach the business card of your


DISCO sales representative.
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