Technical+Reference+ (English) Dicing Saw DAD323

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2021-11
TECHNICAL REFERENCE
Automatic Dicing Saw
DAD323
Copyright of this document is owned by DISCO CORPORATION

("DISCO"). No part of this document may be copied or reproduced
in any form or by any means, without the express written permission
of DISCO. Also, this document may not be disclosed or transferred
to third parties.
This document is printed on recyclable Lint-Free Paper.

・The blue paper is recyclable as used paper just like plain paper.
・The cover paper and adhesive portions are non-recyclable.
(Remove the cover and adhesive portions before recycling.
URTSTE*000G Recycle the blue paper only.)
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INTRODUCTION
About this manual
This Technical Reference is provided as reference material for maintaining, repairing, and servicing
Automatic Dicing Saw 300 Series Model DAD323.
Some information described in this document (such as part IDs for example) may disagree with your
machine depending on the time when the machine was manufactured or the specification of the machine.
To ensure safety
Installation and maintenance of the machine must be carried out by qualified persons who have completed
DISCO's education curriculum (hereinafter referred to as maintenance personnel).
This manual is the 'Original instructions'.
Scope of responsibility
DISCO shall not be responsible for any accident due to any of the following events:
・Any parts other than the genuine DISCO brand are mounted onto the machine;
・Any parts other than periodic replacement or consumable parts are replaced without prior consent
of DISCO;
・Any parts designed by the customer are mounted onto the machine without prior consent of
DISCO;
・Equipment of another manufacturer is added to the machine;
・The machine or part of the machine is transported, reused, resold or modified;
If the customer refuses to disclose the names and contents of the process materials or piping parts used for
the machine as trade secret or confidential commercial information, DISCO may not be able to carry out
repair or maintenance on the machine for protection of the safety and health of our service personnel.
Parts replacement
When you replace any parts other than periodic replacement or consumable parts described below, consult
your nearest DISCO office or DISCO service office. If they are replaced without consulting DISCO,
DISCO shall assume no liability for the consequences arising therefrom.
・Operation Manual
・Maintenance Manual
・When specified in a separate document (e.g., Technical news letter, Operation guide)
Unit notation
International System of Unit is adopted to express any unit. Also, all the pressure values are expressed in
gauge pressure.
Introduction-1
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CONTENTS
INTRODUCTION ..............................................Introduction-1
CONTENTS.......................................................... Contents-1
A. MACHINE SPECIFICATIONS
1. Basic Structure ............................................................................................................. A-1
2. Accuracy ...................................................................................................................... A-6
3. Standard Accessories .................................................................................................. A-6
4. Elective Accessories .................................................................................................... A-7
5. Optional Accessories ................................................................................................... A-9
B. CIRCUIT DIAGRAM
C. ELECTRICAL PARTS ARRANGEMENT DIAGRAM
D. ILLUSTRATION AND PARTS LIST
E. WATER AND AIR PIPING
Contact Information
Contents-1
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A. MACHINE SPECIFICATIONS
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1. Basic Structure
Microscope section (alignment)
System Pattern matching system based on the target patterns from the CCD camera
Scope 0.64 mm square
Functions Pattern matching
Magnification ・7.5x (pixel size: 0.0013 mm)
Direct light (LED) + Ring light (LED)[optional accessory]
・Ring light provides workpieces with 360 degree illumination to deal with
various workpiece surface conditions and kerf angle after cut.
・Compensation on a hairline standard
・Kerf width max./min.
Kerf check
・Check setting of random locations
・Check setting for each cut line number
Automatic light intensity adjustment
Auto focus
Auto alignment
Microscope Single objective lens
・Monitor magnification: Approx. 227x
and single camera
Visible range of From chuck table center
microscope Right: Entire workpiece
Left: 75 mm
Front: Micro microscope 81 mm, Macro microscope 41 mm
Rear: Micro microscope 81 mm, Macro microscope 81 mm
(Macro microscope is an optional accessory.)
Machine front
Visible range
* The values shown above are for reference. The actual visible range differs
depending on the workpiece position on the chuck table.
Device type change Alignment conditions can be switched automatically at the same time when the
device data are changed.
Alignment accuracy ± 0.0013 mm
Alignment capable 0.4 mm or more
die size
A-1
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Cutting section
The cutting section consists of X-, Y-, Z- and θ-axes.
X-axis
Drive and slide ・Motor: AC servomotor
system ・Transfer mechanism: Ball-bearing leadscrew
・Guide: Linear guide
Maximum stroke 248 mm
Cutting range 160 mm
80 mm to the left and 80 mm to the right from the spindle center
Workpiece size Up to 160 mm
setting range Step 0.001 mm
Operating speed ・Transfer speed input range: 0.1 to 800 mm/s
・Return speed: 800 mm/s
Control system Closed loop system using AC servomotor
Y-axis
Drive and slide ・Motor: Stepping motor
Maximum stroke 162 mm
Cutting range 162 mm
81 mm to the front and 81 mm to the rear from the table center
Workpiece size Up to 160 mm
setting range Step 0.001 mm
Index setting range Input: 0 to 160 mm Step: 0.0001 mm
Feed speed 200 mm/s
Control system Open loop system using a stepping motor
Motor resolution 0.0002 mm
A-2
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Cutting section (Continued)
Z-axis
[Common to 2.0kW spindle specification and 1.8kW spindle specification (optional accessory)]
Drive and slide ・Motor: Stepping motor
Maximum stroke Blade diameter (2-inch) (unit: mm)
Origin position
Chuck table
* The values shown above are for reference.

Input range for Input: 0.001 to 10.000 mm Step: 0.001 mm
amount left uncut
Feed speed 80 mm/s
Control system Open loop system using a stepping motor
Moving resolution 0.00005 mm
θ-axis
Drive system ・Motor: Direct drive motor
・Transfer mechanism: Direct drive
Maximum rotating 102.5 in the negative (-) direction and 217.5 in the positive (+) direction from
angle the origin position, viewing from the top surface of the table base.
Positive (+) Negative (-)

direction direction
Origin position
Control system Closed loop system using a rotary encoder

Motor resolution 0.08" (angle)
A-3
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Spindle section
2.0kW spindle specification

Mechanism ・Bearing: Air bearing
・Motor: DC brushless motor
Rotation speed range 3,000 to 40,000 min-1 (The data can be set for every device data.)
Output 2.0kW at 40,000 min-1 (Rated torque: 0.477 N･m)
Taper section Large diameter: 15.0 mm
Taper ratio: 1/15 equivalent
Available for 2-inch hub mount or R-type flange
Applicable blade 2-inch hub blade or 2-inch hubless (washer) blade
Maximum blade thickness: 1 mm
1.8kW spindle specification [optional accessory]

Mechanism ・Bearing: Air bearing
・Motor: DC brushless motor
Rotation speed range 6,000 to 60,000 min-1 (The data can be set for every device data.)
Output 1.8kW at 60,000 min-1 (Rated torque: 0.286 N･m)
Taper section Large diameter: 15.0 mm
Taper ratio: 1/15 equivalent
Available for 2-inch hub mount or R-type flange
Applicable blade 2-inch hub blade or 2-inch hubless (washer) blade
Maximum blade thickness: 1 mm
Operation section
Touch panel
Touch panel A 15-type color LCD is employed to display alignment operation, cutting data,
error messages, and other relevant information. It is also possible to operate the
machine by directly touch the LCD.
Operation screens Easy operation is realized by adopting GUI (Graphical User Interface).
Displayed guidance Can be selected from Japanese, English, Chinese (Simplified), or Chinese
language (Traditional).
USB port
Connector type USB type A connector (receptacle)
Electrical/mechanical USB Rev.1.1 compliant
specification
Transfer rate 12 Mbps (maximum)
Supported USB USB Mass Storage Class compliant flash memory
devices
Number of ports 1
Precautions Do not use a USB flash drive which is equipped with security functions. Also,
please note that DISCO shall not guarantee any machine operation if you use
other than the USB flash drive included with the machine or the one of the
optional accessory.
A-4
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Status indicator
Turning on and off of the buzzer and illumination and flashing of lamps are programmable.
However, the alarm setting cannot be changed. It is fixed to red flashing with buzzer sound.
Color Red/yellow/green
Standard specification Green light: The machine is operating in the full-auto mode.
Yellow flashing: The full-auto operation is completed.
Yellow light: The machine is on stand-by.
Red flashing: An alarm (error or emergency) condition has occurred.
A-5
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2. Accuracy
Chuck table upper surface parallelism (when measuring at 22°C)
0.005 mm/150 mm
Y-axis Index positioning accuracy

Single error: 0.003 mm or less/5 mm
Positioning accuracy: 0.005 mm or less/160 mm
Z-axis repeatability
0.001 mm (range)
3. Standard Accessories
Standard accessories
No. Specification Selection Specifications (Size) Qty

1 USB flash drive 1
2 Duct cuffs 32 2
50 2
3 Duct hoses I.D. 32.0 2 m 1
I.D. 50.6 2 m 1
4 Pipe band 35-38 2
53-60 2
5 Locating pin For chuck table 1
6 Wheel cover Centrifugal for 2.0kW spindle 1
(resin type)
A-6
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4. Elective Accessories
Elective accessories
In order for customers to use this machine to meet their requested specifications, the elective accessories
are prepared as standard.
Customers are asked to choose one of the alphabet items from each category of accessories in the table
below.
No. Specification Selection Specifications (Size) Qty
A Hub specifications Wheel mount set for hub 1
48.2 × 40.0 1
Flange 49.4 × 40.0 1
1 specification R-type flange
selection*1) B 50.6 × 40.0 1
specifications*2)
52.0 × 40.0 1
54.0 × 40.0 1
A Japanese 1 set
Label selection B English 1 set
C German ・Rotating blade 1 set
・The D French ・Moving parts 1 set
2 languages E Italian ・Hot surface 1 set
used for the
labels on the F Chinese (Simplified) ・Hazardous voltage 1 set
machine G Chinese (Traditional) ・Line voltage always present*3) 1 set
outer cover H Portuguese 1 set
I Korean 1 set
*1）[Flange specification selection] does not include the jigs required for blade replacement and
conditioning. If you need the blade replacing and conditioning jigs, select the starter kit [optional
accessory].
*2）[R-type flange specifications] does not include the dresser board. The type of the dresser board
differs depending on the blade type to be used. If you need the dresser board, ask your DISCO sales
representative.
*3）Even when selecting any of the languages C to I, the safety labels to be adhered to the inside of the
machine are in Japanese or English.
A-7
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Elective accessories (Continued)
No. Specification Selection Instruction Manual Language Qty

Safety Manual 1
Installation Manual 1
Japanese set Operation Manual 1
A Japanese
manuals Data Maintenance Manual 1
Maintenance Manual 1
Technical Reference 1
Safety Manual 1
Installation Manual 1
English set Operation Manual 1
B English
manuals Data Maintenance Manual 1
Maintenance Manual 1
Technical Reference 1
The manuals in the following languages are also available as optional accessories.
Safety Manual 1
Chinese version Installation Manual 1
English set Operation Manual 1
C manuals English
[optional Data Maintenance Manual 1
Attached accessory] Maintenance Manual 1
3 manual Technical Reference 1
selection Chinese
Safety Manual (simplified)
1
Chinese
Installation Manual (simplified)
1
Chinese
(simplified) Chinese
Operation Manual (simplified)
1
D set manuals
[optional Chinese
accessory] Data Maintenance Manual (simplified)
1
Chinese
Maintenance Manual (simplified)
1
Technical Reference English 1
Chinese
Safety Manual (simplified)
1
Chinese
Chinese version Installation Manual (simplified)
1
Chinese Chinese
(simplified) Operation Manual (simplified)
1
E set manuals
[optional Chinese
Data Maintenance Manual (simplified)
1
accessory]
Chinese
Maintenance Manual (simplified)
1
Technical Reference English 1
A-8
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5. Optional Accessories
Optional accessories list
No. Optional Accessories

1 1.8kW spindle specification
2 Tape frame
3 Cassette
4 Starter kit for 2-inch hub mount
5 Starter kit for R-type flange
6 Spare 2-inch hub mount (for 2.0kW/1.8kW spindle)
7 2-inch hub mount jig (spare)
8 Chuck table
9 Maintenance parts kit
10 General tool
11 Advanced tool
12 Lifting jig set
13 Axis metal fixture (spare)
14 Machine anchoring bracket
15 Braided hose
16 Braided hose joint
17 Pipe band
18 Non-contact setup
19 Abrasive material for non-contact setup sensor
20 Blade breakage detector
21 Wheel cover
22 Power cables
23 Transformer unit for use outside Japan (internal type)
24 Uninterruptible power supply
25 Booster pump unit
26 Water leakage sensor
27 Duct fan unit (internal type)
28 Water temperature control unit
29 Magnification of microscope (micro)
30 Macro microscope
31 Direct light high-brightness LED specification
32 Ring light specification
33 Wheel coolant water (shower) flow switch
34 Wheel coolant water (blade cooler) flow switch
35 Flow rate controller for the wheel coolant water
36 Spare USB flash drive
37 Stylus pen
38 Spare manuals
39 Kerf center alignment
40 Slow-in cutting function
A-9
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Optional accessories list (Continued)
No. Optional Accessories

41 Measure alignment package
42 CE-marking specification
43 CC Filter unit
44 High pressure air blower
45 Linear scale (Y-axis)
46 Duct capacity measuring instrument
47 Anti-soiling porous chuck table
A-10
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B. CIRCUIT DIAGRAM
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Circuit Diagram
Contents
AC POWER LINE (for UPS model: N11A502DHR/N11A502DVR) ........................................................... B-1

AC POWER LINE (for UPS model: MSP832SFEAC2T-CPN/MSP832SFEAH2T-CPN) ............................ B-2
DC POWER LINE ......................................................................................................................................... B-3
X, R-AXIS MOTOR LINE ............................................................................................................................ B-4
Y, Z-AXIS MOTOR LINE ............................................................................................................................. B-5
SAFETY SIGNAL LINE................................................................................................................................ B-6
SAFETY SIGNAL LINE (OPTION) ............................................................................................................. B-7
PCB1 (PCLESS) 1/7....................................................................................................................................... B-8
PCB1 (PCLESS) 2/7....................................................................................................................................... B-9
PCB1 (PCLESS) 3/7..................................................................................................................................... B-10
PCB1 (PCLESS) 4/7..................................................................................................................................... B-11
PCB1 (PCLESS) 5/7..................................................................................................................................... B-12
PCB1 (PCLESS) 6/7..................................................................................................................................... B-13
PCB1 (PCLESS) 7/7..................................................................................................................................... B-14
AC POWER TR (OPTION) (for UPS model: N11A502DHR/N11A502DVR) ........................................... B-15
AC POWER TR (OPTION) (for UPS model: MSP832SFEAC2T-CPN/MSP832SFEAH2T-CPN) ........... B-16
BOOSTER PUMP UNIT/FRC (OPTION) ................................................................................................... B-17
Y-AXIS MOTOR (OPTION) ....................................................................................................................... B-18
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B-1
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B-2
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B-3
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B-4
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B-5
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B-6
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B-7
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B-8
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B-9
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B-10
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B-11
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B-12
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B-13
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B-14
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B-15
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B-16
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B-17
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B-18
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C. ELECTRICAL PARTS ARRANGEMENT

DIAGRAM
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Electrical Parts Arrangement Diagram

Contents
CONTROL BOX LAYOUT ........................................................................................................................... C-1

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C-1
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D. ILLUSTRATION AND PARTS LIST

Barcodes
Barcodes in the parts list indicate part numbers. They can be scanned by a barcode reader.
・The symbol of the barcodes is Code 39.
・Data processing of scanned barcode information is a user-specified specification.
・Reference (Specification of the barcode reader used for the scanning test):
Item Specification
Resolution 0.1 mm
Light source Visible LED 660 nm
Light receiving element 2,048 element linear imager
PCS value 0.45 min
Scan rate 100 scans per second
Contents
Fig. No. Title

01 COVER SECTION (A)
・Machine top side
・Touch panel section
02 COVER SECTION (B)
・Machine front side
・Machine right side
03 COVER SECTION (C)
・Machine left side
・Machine rear side
04 COVER SECTION (D)
・Splash cover
・Microscope section cover
05 MAIN BODY SECTION (A)
・Water case
・Partition
06 MAIN BODY SECTION (B)
・Inside of water case
・Spindle waterproof plate
07 MAIN BODY SECTION (C)
・Main body frame
・Sub frame
08 PIPING SECTION (A)
・Cutting water flowmeter
・Air valve unit (backside of touch panel)
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Contents (Continued)
Fig. No. Title

09 PIPING SECTION (B)
・Main duct
・Main drain
・Valve unit (machine front side)
・Cutting water flow rate sensor [optional accessory]
10 PIPING SECTION (C)
・Air clean unit
11 XYZ-AXIS SECTION (A)
・XYZ-axis unit
・Water cover
12 XYZ-AXIS SECTION (B)
・XYZ-axis unit
・Axis motor
13 θ-AXIS SECTION
14 SPINDLE SECTION
15 WHEEL COVER SECTION
16 MICROSCOPE SECTION
17 DUCT FAN SECTION [OPTIONAL ACCESSORY]
18 FLOW RATE CONTROLLER SECTION [OPTIONAL ACCESSORY]
19 NON-CONTACT SETUP SECTION [OPTIONAL ACCESSORY]
20 MICROSCOPE-AXIS SECTION [OPTIONAL ACCESSORY]
21 Y-AXIS SCALE SECTION [OPTIONAL ACCESSORY]
22 1.8KW SPINDLE SPECIFICATION [OPTIONAL ACCESSORY]
23 WHEEL COVER SECTION (CENTRIFUGAL) [OPTIONAL ACCESSORY]
24 WHEEL COVER SECTION (DEEP CUTTING) [OPTIONAL ACCESSORY]
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List of illustrations (01-16)
01 COVER SECTION (A) 02 COVER SECTION (B) 03 COVER SECTION (C) 04 COVER SECTION (D)
MAIN BODY SECTION MAIN BODY SECTION MAIN BODY SECTION

05 (A) 06 (B) 07 (C) 08 PIPING SECTION (A)
09 PIPING SECTION (B) 10 PIPING SECTION (C) 11 XYZ-AXIS SECTION (A) 12 XYZ-AXIS SECTION (B)
WHEEL COVER
13 θ-AXIS SECTION 14 SPINDLE SECTION 15 SECTION 16 MICROSCOPE SECTION
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List of illustrations (17-24)
FLOW RATE NON-CONTACT SETUP MICROSCOPE-AXIS

17 DUCT FAN SECTION 18 CONTROLLER SECTION 19 SECTION 20 SECTION
1.8kW SPINDLE WHEEL COVER WHEEL COVER

21 Y-AXIS SCALE SECTION 22 SPECIFICATION 23 SECTION (CENTRIFUGAL) 24 SECTION (DEEP CUTTING)
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COVER SECTION (A)
カバー部 (A) [Fig.01]
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COVER SECTION (A)
カバー部 (A) [Fig.01]
No. Part No. Bar Code Description Remarks Qty
1 FRTC-010001-0
*FRTC-010001-0* COVER (MONITOR) ASSY. 1
2 LNEC-010028-1
*LNEC-010028-1* STICKER (EMO) 1
3 LRTC-010016-0
*LRTC-010016-0* COVER (MONITOR) 1
4 LRTC-010022-0
*LRTC-010022-0* BRACKET (USB) 1
5 LNEC-010054-0
*LNEC-010054-0* BRACKET (MONITOR) L 1
6 LNEC-010055-0
*LNEC-010055-0* BRACKET (MONITOR) R 1
7 LRTC-010012-0
*LRTC-010012-0* PLATE (MONITOR) 1
8 LRTC-010001-0
*LRTC-010001-0* NAME PLATE (DAD323) 1
9 LRTC-010013-1
*LRTC-010013-1* COVER (T) 1
10 LKKH-010023-0
*LKKH-010023-0* CUSHION (RUBBER) 4
11 LELC-020001-0
*LELC-020001-0* WASHER 2
101 M6N-040-1UN-0
*M6N-040-1UN-0* HEXAGON NUT M4 2
102 MSS030006UN-0
*MSS030006UN-0* HEXAGON SOCKET HEAD CAP SCREW M3×6 4
103 MSS040006UN-0
104 MTK040008UN-0
*MTK040008UN-0* TRUSS HEAD SCREW M4×8 4
105 MWP-040-1UN-0
*MWP-040-1UN-0* PLAIN WASHER M4 8
106 MWS-040-1UN-0
*MWS-040-1UN-0* SPRING LOCK WASHER M4 6
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COVER SECTION (B)
カバー部 (B) [Fig.02]
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COVER SECTION (B)
カバー部 (B) [Fig.02]
1 LRTC-010017-0
*LRTC-010017-0* COVER (F, L) 1
2 LRTC-010018-0
*LRTC-010018-0* COVER (R, L) 1
3 LRTC-010019-1
*LRTC-010019-1* COVER (R, U) 1
4 LRTC-510001-0
*LRTC-510001-0* WASHER 5
5 LELC-020001-0
6 LELC-910147-0
7 LNEC-010027-0
*LNEC-010027-0* COVER BOLT (M4X10) 5
8 LPFH-010005-0
*LPFH-010005-0* MAGNET CATCH 1
101 MSS040008UN-0
102 MTK040005UN-0
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COVER SECTION (C)
カバー部 (C) [Fig.03]
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COVER SECTION (C)
カバー部 (C) [Fig.03]
1 DXJBSF40801-0
*DXJBSF40801-0* SPACER (M4 8MM) 2
2 DXJBSF46001-0
*DXJBSF46001-0* SPACER (M4 60MM) 2
3 LRTC-010014-2
*LRTC-010014-2* COVER (B, U) 1
4 LRTC-010015-1
*LRTC-010015-1* COVER (B, L) 1
5 LRTC-010020-0
*LRTC-010020-0* COVER (L, L) 1
6 LRTC-010023-0
*LRTC-010023-0* COVER (L, U) 1
7 LRTC-510001-0
*LRTC-510001-0* WASHER 9
8 LELC-020001-0
9 LELC-910147-0
10 LNEC-010026-0
11 LNEC-010027-0
101 MTK040005UN-0
102 MWP-040-1UN-0
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COVER SECTION (D)
カバー部 (D) [Fig.04]
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COVER SECTION (D)
カバー部 (D) [Fig.04]
1 DSZHS9ZA601-0
*DSZHS9ZA601-0* OPERATION KEY (STRAIGHT) 2
2 ENUM-010013-0
*ENUM-010013-0* SWITCH (SAFETY DOOR) 2
3 LENT-910061-0
*LENT-910061-0* TUBE FITTING (D4, M5) 4
4 LHRH-910016-0
*LHRH-910016-0* ROLLER 4
5 LKKC-010010-0
*LKKC-010010-0* HINGE PIN (D5, L12) 4
6 LKKC-010011-0
*LKKC-010011-0* WASHER (T1.5) 4
7 LKKC-010008-1
*LKKC-010008-1* HANDLE 1
8 LKKC-010009-1
*LKKC-010009-1* HANDLE 1
9 LKKC-010022-1
*LKKC-010022-1* FLAT SPRING (L) 1
10 LKKC-010023-0
*LKKC-010023-0* FLAT SPRING (R) 1
11 LKBH-010001-0
*LKBH-010001-0* AIR CYLINDER 1
12 LNEH-010031-0
*LNEH-010031-0* CYLINDER 1
13 LNUC-010093-0
*LNUC-010093-0* SLIDE RAIL 1
14 LRTC-010028-0
*LRTC-010028-0* COVER (CUT AREA) 1
15 LRTC-010024-0
*LRTC-010024-0* COVER (MICROSCOPE AREA) 1
16 LRTC-010006-0
*LRTC-010006-0* BRACKET (CUT AREA COVER) 1
17 LRTC-010007-0
*LRTC-010007-0* BRACKET (SCOPE AREA COVER) 1
18 LRTC-010025-0
*LRTC-010025-0* BRACKET (SW, L) 1
19 LRTC-010011-0
*LRTC-010011-0* BRACKET (SW, R) 1
20 LRTH-010032-0
*LRTH-010032-0* BRACKET (CYLINDER) 2
21 LRTH-010052-0
*LRTH-010052-0* BASE (GUIDE) 1
101 M6N-040-1UN-0
102 MSS040008UN-0
103 MSS040014UN-0
104 MTK040005UN-0
105 MTK040008UN-0
107 MWP-040-1UN-0
108 MWS-040-1UN-0
109 LRGC-010505-0
*LRGC-010505-0* SCREW (PIN BUTTON TRX, 4X8) TRX M4×8 2
*LRGC-010506-0*
TRX
110 LRGC-010506-0 SCREW (PIN BUTTON TRX, 4X12) 4
M4×12
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MAIN BODY SECTION (A)
本体部 (A) [Fig.05]
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MAIN BODY SECTION (A)
本体部 (A) [Fig.05]
1 LTKH-510017-0
*LTKH-510017-0* BRACKET (PARTITION, F) 1
2 LRTH-010046-0
*LRTH-010046-0* PARTITION 1
3 LRTH-010050-0
*LRTH-010050-0* PARTITION (WATERPROOF) 1
4 LRTH-010029-0
*LRTH-010029-0* BRACKET (PARTITION) 1
5 LRTH-010047-0
*LRTH-010047-0* PARTITION (WATERPROOF) 1
6 LRTH-010049-0
*LRTH-010049-0* GUIDE (PLATE) 1
7 LRTX-010011-0
*LRTX-010011-0* CONNECTING ROD 2
8 LRTH-010051-0
*LRTH-010051-0* PLATE (PARTITION) 1
101 M6N-060-1UN-0
102 MSS050030UN-0
103 MTK040005UN-0
104 MTK040006UN-0
105 MWP-060-1UN-0
106 MSK030004UN-0
*MSK030004UN-0* FLAT HEAD SCREW M3×4 2
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MAIN BODY SECTION (B)
本体部 (B) [Fig.06]
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MAIN BODY SECTION (B)
本体部 (B) [Fig.06]
1 DXZOAW22601-0
*DXZOAW22601-0* CABLE GLAND 1
2 LKKX-010008-0
*LKKX-010008-0* GROMMET 2
3 LKKX-010009-0
*LKKX-010009-0* FILTER 2
4 LRTX-010021-3
*LRTX-010021-3* CASE (WATER) 1
5 LRTX-010003-0
*LRTX-010003-0* SEAL PLATE (V) 1
6 LRTX-010004-0
*LRTX-010004-0* COVER (SEAL) 1
7 LRTX-010005-0
*LRTX-010005-0* BLOCK (U) 1
8 LRTX-010006-0
*LRTX-010006-0* GUIDE (R) 1
9 LNEX-010010-0
*LNEX-010010-0* GUIDE (L) 1
10 LRTX-010014-0
*LRTX-010014-0* SPONGE (T10) 1
11 LRTX-010018-0
*LRTX-010018-0* SPONGE (T3) 1
12 LRTX-010019-0
*LRTX-010019-0* COVER (WATER, SIDE) 1
101 M6N-040-1UN-0
102 MSK030012UN-0
103 MTK030006UN-0
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MAIN BODY SECTION (C)
本体部 (C) [Fig.07]
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MAIN BODY SECTION (C)
本体部 (C) [Fig.07]
1 DXZSL14N-01-0
*DXZSL14N-01-0* CABLE CLAMP 1
2 LRTH-010028-0
*LRTH-010028-0* BRACKET (CABLE) 1
3 FRTH-010001-0
*FRTH-010001-0* FRAME (SUB) ASSY. 1
4 FRTH-010002-0
*FRTH-010002-0* FRAME (MAIN) ASSY. 1
5 LRTH-010021-0
*LRTH-010021-0* FRAME (MAIN) 1
6 LDLH-910482-0
*LDLH-910482-0* GROMMET 4
7 LEDH-910010-0
*LEDH-910010-0* CASTER 2
8 LEGH-910224-0
*LEGH-910224-0* CASTER 2
9 LNEH-010025-1
*LNEH-010025-1* ADJUSTER 4
101 MSS040008UN-0
102 MSS060010UN-0
106 MSS060030UN-0
104 MTK050008UN-0
105 MWP-040-1UN-0
106 MWP-060-1UN-0
107 MWS-060-1UN-0
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PIPING SECTION (A)
本体配管部 (A) [Fig.08]
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PIPING SECTION (A)
本体配管部 (A) [Fig.08]
1 LJKZ-910007-1
*LJKZ-910007-1* CHECK VALVE 3
2 LNLH-010049-0
*LNLH-010049-0* THROTTLE VALVE (2D4) S 2
3 LJTH-910058-1
*LJTH-910058-1* FITTING (3D4) Y 2
4 LJTH-910064-1
*LJTH-910064-1* FITTING (D8-2D6) Y 1
5 LJTP-910005-0
*LJTP-910005-0* TUBE FITTING (D4, M5) 1
6 LKBH-910037-1
*LKBH-910037-1* VALVE UNIT (AIR) 1
7 LKFC-010092-0
*LKFC-010092-0* CABLE CLAMP 2
8 LNEH-010010-2
*LNEH-010010-2* FLOW METER (2L) 2
9 LRTH-010010-0
*LRTH-010010-0* COVER (FLOW METER) 1
10 LRTH-010011-0
*LRTH-010011-0* BRACKET (FLOW METER) 1
11 MFD06L-01-B-1
*MFD06L-01-B-1* FITTING (D6-1/8) L 1
12 MFD08L-01-B-2
*MFD08L-01-B-2* FITTING (D8-1/8) L 3
13 MT060040MAP-0
*MT060040MAP-0* TUBE 2
14 LJPH-910056-0
*LJPH-910056-0* TUBE FITTING (D6) 3
15 FKFH-010000-1
*FKFH-010000-1* AIR BLOWER (HANDHELD) 1
16 LKFH-020033-0
*LKFH-020033-0* TUBE (AIR BLOWER) 1
17 LKFH-010052-0
*LKFH-010052-0* AIR VALVE 1
18 LHEH-910038-0
*LHEH-910038-0* GRIP (AIR BLOWER) 1
19 MSFBF6U-SUS
*MSFBF6U-SUS* CLAMP FITTING 2
20 LKFH-020032-0
*LKFH-020032-0* TUBE (COIL) 1
21 LJTH-010143-0
*LJTH-010143-0* PRESSURE SENSOR 1
22 MFD04S-M5-A-2
*MFD04S-M5-A-2* FITTING (D4-M5) S 1
101 MSS030006UN-0
102 MSS030025UN-0
103 MSS040008UN-0
104 MSS040030UN-0
105 MTK030006UN-0
106 MWP-030-1UN-0
107 MWP-040-1UN-0
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PIPING SECTION (B)
本体配管部 (B) [Fig.09]
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PIPING SECTION (B)
1 DXJSBB41201-0
*DXJSBB41201-0* SPACER (M4 12MM) 4
2 LELH-910033-1
*LELH-910033-1* EJECTOR 1
3 LELH-910034-0
*LELH-910034-0* TUBE FITTING 1
4 LHAH-911145-0
*LHAH-911145-0* PLUG 1
5 LNLH-010050-0
6 LJLV-910515-0
*LJLV-910515-0* PLUG 1
7 LJPH-910015-0
*LJPH-910015-0* TUBE FITTING 1
8 LJPH-910052-0
9 LKJV-010109-0
*LKJV-010109-0* REDUCING UNION TEE (2-D6XD4) 1
10 LJTH-910054-0
*LJTH-910054-0* TUBE FITTING 2
11 LJTH-910057-0
*LJTH-910057-0* UNION MINI TYPE (D6) 1
12 LJTH-910059-0
13 LKBH-510028-0
*LKBH-510028-0* TUBE FITTING 1
14 LKBH-910034-1
*LKBH-910034-1* SOLENOID VALVE (2S, D3) 2
15 LKBH-910035-1
16 LKBH-910036-1
17 LKKH-010033-0
*LKKH-010033-0* TUBE FITTING (2XD8-3XD6) 1
18 LKPV-010009-1
*LKPV-010009-1* FITTING (D12-2D8) Y 1
19 LNEH-010006-0
*LNEH-010006-0* FITTING (2D8-3D4) M 1
20 LNEH-010019-1
*LNEH-010019-1* BRACKET (FLOW METER) 1
21 LNEH-010020-0
*LNEH-010020-0* PIPE BAND 1
22 LNEH-010030-1
*LNEH-010030-1* SOLENOID VALVE (3S, D4) 1
23 LNEH-010046-0
*LNEH-010046-0* CUSHION (RUBBER) 1
24 LPUH-010078-1
*LPUH-010078-1* FLOW CHECKER (2L) 3
25 LPVH-010064-0
*LPVH-010064-0* SOLENOID VALVE 2
26 LRTH-010001-0
*LRTH-010001-0* BASE (VALVE) 1
27 LRTH-010023-0
*LRTH-010023-0* PLATE (FLOW CHECKER) 1
28 LRTH-010024-0
*LRTH-010024-0* PIPE (DRAIN) 1
29 LRTH-010025-0
*LRTH-010025-0* PIPE (DUCT) 1
30 MFD06L-01-B-1
*MFD06L-01-B-1* FITTING (D6-1/8) L 2
31 MFD06L-02-B-1
*MFD06L-02-B-1* FITTING (D6-1/4) L 7
32 MFD08L-01-B-2
*MFD08L-01-B-2* FITTING (D8-1/8) L 4
33 MFD08L-02-B-2
*MFD08L-02-B-2* FITTING (D8-1/4) L 3
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PIPING SECTION (B)
34 MFD08S-01-B-2
*MFD08S-01-B-2* FITTING (D8-1/8) S 2
35 MFD08S-02-B-2
*MFD08S-02-B-2* FITTING (D8-1/4) S 1
36 MFD12L-02-B-2
*MFD12L-02-B-2* FITTING (D12-1/4) L 2
37 MFPLG-6S-01-0
*MFPLG-6S-01-0* HEXAGON SOCKET PLUG 1
38 MFPLG-6S-02-0
39 MFD06T----C-0
*MFD06T----C-0* FITTING (3D6) T 1
40 MHCL-0038AS-0
*MHCL-0038AS-0* HOSE CLAMP (WIRE) 2
41 MHCL-0068CS-0
*MHCL-0068CS-0* HOSE CLAMP (BAND) 2
42 MTDHOSE032--0
*MTDHOSE032--0* DUCT HOSE 2
43 DXZTA1S8-01-0
*DXZTA1S8-01-0* BAND MOUNT 1
44 FRTH-010004-0
*FRTH-010004-0* VALVE ASSY. 1
101 MTK040008UN-0
102 MSS030006UN-0
103 MSS040006UN-0
104 MSS050010UN-0
105 MWP-050-1UN-0
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PIPING SECTION (B)
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PIPING SECTION (C)
本体配管部 (C) [Fig.10]
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PIPING SECTION (C)
本体配管部 (C) [Fig.10]
1 LJPH-910015-0
2 LKKH-010029-0
*LKKH-010029-0* MANIFOLD (WATER) 1
3 LTKH-010051-0
*LTKH-010051-0* AIR CLEAN UNIT 1
4 LTKH-010052-0
*LTKH-010052-0* FILTER REGULATOR 1
5 LNEH-010022-1
*LNEH-010022-1* FITTING (4D8-1/4) L 1
6 LNEH-010023-1
*LNEH-010023-1* PRESSURE SENSOR 1
8 MFD06S-02-B-1
*MFD06S-02-B-1* FITTING (D6-1/4) S 1
9 MFD12L-02-B-2
*MFD12L-02-B-2* FITTING (D12-1/4) L 1
10 MFELB-02----0
*MFELB-02----0* ELBOW 1
11 MFNPL-02----0
*MFNPL-02----0* NIPPLE 2
12 MFPLG-6S-02-0
13 MFTEE-02----0
*MFTEE-02----0* TEE 1
101 MSS060030UN-0
102 MSS080010UN-0
103 MWP-080-1UN-0
103 MWP-080-1UN-0
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XYZ-AXIS SECTION (A)
XYZ 軸部 (A) [Fig.11]
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XYZ-AXIS SECTION (A)
XYZ 軸部 (A) [Fig.11]
1 ENUM-010017-0
*ENUM-010017-0* MAGNET SENSOR (SAFETY) 1
2 LHLX-910005-0
*LHLX-910005-0* SCREW (WITH O RING) 4
3 LNEX-010004-2
*LNEX-010004-2* BELLOWS 2
4 LRTX-010009-0
*LRTX-010009-0* COVER (WATER) 1
5 LHJH-910010-0
*LHJH-910010-0* CUSHION (RUBBER) 3
6 LKKH-010004-0
*LKKH-010004-0* BOLT (STRIPPER) 3
7 LKKX-010021-1
*LKKX-010021-1* CABLE BEARER 1
8 LRTX-010027-0
*LRTX-010027-0* BRACKET (CABLE BEAR) U 1
9 LRTX-010030-0
*LRTX-010030-0* BRACKET (CONNECTOR) 1
10 LRTX-010017-1
*LRTX-010017-1* BRACKET (SENSOR) 1
11 NCPZ-110226-5
*NCPZ-110226-5* 2.0KW (FT) SPINDLE 1
12 LRTX-010029-2
*LRTX-010029-2* BRACKET (CABLE BEARER) 1
101 M6N-060-1UN-0
102 MSS040006UN-0
103 MSS040008UN-0
104 MSS050008UN-0
105 MSS060016UN-0
106 MTK060010UN-0
107 MTK060014UN-0
108 MWP-040-1UN-0
109 MWS-040-1UN-0
110 LRGC-010505-0
*LRGC-010505-0* SCREW (PIN BUTTON TRX, 4X8) TRX M4×8 2
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XYZ-AXIS SECTION (B)
XYZ 軸部 (B) [Fig.12]
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XYZ-AXIS SECTION (B)
XYZ 軸部 (B) [Fig.12]
1 LRTX-010020-0
*LRTX-010020-0* XYZ-AXIS UNIT 1
2 LNEX-010041-0
*LNEX-010041-0* MOTOR (SERVO, 100W) 1
3 LHRX-010000-0
*LHRX-010000-0* COUPLING (8X8) 1
4 LPEY-010025-0
*LPEY-010025-0* MOTOR (STEPPING) 1
5 LEDY-910006-1
*LEDY-910006-1* COUPLING 1
6 LPVZ-010015-2
*LPVZ-010015-2* MOTOR (STEPPING) 1
7 LKBZ-010000-0
*LKBZ-010000-0* COUPLING (8X9) 1
101 MSS040012UN-0
102 MWS-040-1UN-0
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θ-AXIS SECTION
θ軸部 [Fig.13]
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θ-AXIS SECTION
θ軸部 [Fig.13]
1 LKHR-912901-0
*LKHR-912901-0* RING (CENTER) 1
2 MCO-0555AN--0
*MCO-0555AN--0* O-RING 1
3 LKKR-010014-0
*LKKR-010014-0* SEAL RING 1
4 LKKR-010010-1
*LKKR-010010-1* SEAL (RUBBER) 1
5 LKKR-010015-0
*LKKR-010015-0* V-RING (CR) 1
6 LJTX-910004-0
*LJTX-910004-0* SCREW (O-RING) 3
7 LKKN-510002-0
*LKKN-510002-0* PIN (LOCATING) 1
8 LNER-010025-0
*LNER-010025-0* BASE (TABLE) 1
9 LJTZ-911287-0
*LJTZ-911287-0* TUBE FITTING (D6, M5) 1
10 LELH-911203-0
*LELH-911203-0* TUBE FITTING (D6, M5) 1
11 LKKR-010005-0
*LKKR-010005-0* BASE (INSULATION) 1
12 FCPR-061000-2
*FCPR-061000-2* MOTOR (6DDM-NT-00) 1
13 LRTR-010001-0
*LRTR-010001-0* DOG (SENSOR) 1
14 LRTR-010005-0
*LRTR-010005-0* SPACER 1
15 LJKR-911122-0
*LJKR-911122-0* SPRING (CONICAL) 4
16 LJKR-911120-0
*LJKR-911120-0* WASHER 2
17 LKKR-010006-1
*LKKR-010006-1* BASE (MOTOR) 1
18 LJTR-910009-0
*LJTR-910009-0* COLLAR (ADJUST) 2
19 LRPR-010001-0
*LRPR-010001-0* BOLT (ADJUSTABLE) 2
20 LJKR-911123-0
*LJKR-911123-0* SWIVEL RING 3
21 LKKR-010008-2
*LKKR-010008-2* STAND (INSULATION) 4
22 LRTR-010006-0
*LRTR-010006-0* STAND 4
23 LRTR-010004-0
*LRTR-010004-0* SPACER 4
24 LRTR-010003-0
*LRTR-010003-0* BRACKET (SENSOR) 1
25 DBBEESX9704-0
*DBBEESX9704-0* SENSOR (PHOTO INTERRUPTER) 2
101 M6N-040-1UN-0
102 MSS030006UN-0
103 MSS030008UN-0
104 MSS040008UN-0
105 MSS040016UN-0
106 MSS050022UN-0
107 MSS080050UN-0
108 MTK030006UN-0
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SPINDLE SECTION
スピンドル部 [Fig.14]
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SPINDLE SECTION
スピンドル部 [Fig.14]
1 NCBZ-010050-0
*NCBZ-010050-0* CARBON BRUSH ASSY. 2
2 NCCZ-010004-0
*NCCZ-010004-0* BOLT 1
3 NSTZ-010082-1
*NSTZ-010082-1* SPINDLE CAP 1
4 NSEZ-110633-0
*NSEZ-110633-0* GASKET 1
101 MSK030010UN-0
102 MSS030008UN-0
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WHEEL COVER SECTION
ホイールカバー部 [Fig.15]
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WHEEL COVER SECTION
ホイールカバー部 [Fig.15]
1 FKKZ-010001-4
*FKKZ-010001-4* WHEEL COVER (2") 1
2 LKKZ-010001-0
*LKKZ-010001-0* NUT (PLATE) 1
3 LKKZ-010002-0
*LKKZ-010002-0* SLIDER 1
4 LKKZ-010004-0
*LKKZ-010004-0* MASK 1
5 LKKZ-010005-0
*LKKZ-010005-0* HOLDER 1
6 LKKZ-010006-0
*LKKZ-010006-0* BLOCK (SLIDER) 1
7 LKKZ-010007-0
*LKKZ-010007-0* BOLT 2
8 LKKZ-010008-0
*LKKZ-010008-0* KNOB 1
9 LKKZ-010009-0
*LKKZ-010009-0* NOZZLE (BLOW) 2
10 LKKZ-010011-0
*LKKZ-010011-0* HANDLE 1
11 LKKZ-010028-1
*LKKZ-010028-1* NOZZLE (SI) 1
12 MCO-0501AN--0
13 MFD06S-01-B-1
*MFD06S-01-B-1* FITTING (D6-1/8) S 4
101 MSK040006UN-0
102 MSS030006UN-0
103 MSS040010UN-0
104 MSS040012UN-0
105 MSS040025UN-0
106 MSUK03003UN-0
*MSUK03003UN-0* HEXAGON SOCKET SET SCREW (FLAT POINT) M3×3 2
107 MWP-030-1UN-0
108 MWP-040-1UN-0
109 MWS-030-1UN-0
110 MWS-040-1UN-0
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MICROSCOPE SECTION
顕微鏡部 [Fig.16]
<DO NOT COPY>
MICROSCOPE SECTION
1 LNEP-010005-1
*LNEP-010005-1* BRACKET (FIBER) 1
2 LRTP-010004-0
*LRTP-010004-0* HOLDER (SCOPE) 1
3 LRTP-010026-0
*LRTP-010026-0* BOX (SCOPE) 1
4 LRTP-010020-0
*LRTP-010020-0* GUIDE (SHUTTER) 1
5 LRTP-010021-1
*LRTP-010021-1* SHUTTER (MICRO) 1
6 LKBB-020120-0
*LKBB-020120-0* SPACER (T1.0) 2
7 LKBP-910005-2
*LKBP-910005-2* CYLINDER 1
8 LKBP-910007-0
*LKBP-910007-0* SPEED CONTROLLER 4
9 LRTP-010005-0
*LRTP-010005-0* PLATE (SCOPE) 1
10 LRTP-010006-0
*LRTP-010006-0* BRACKET (BOX) 1
11 LRTP-010018-0
*LRTP-010018-0* COVER (SCOPE) 1 1
12 LRTP-010003-0
*LRTP-010003-0* COVER (SCOPE) 2 1
13 LRTP-010012-1
*LRTP-010012-1* RAIL (SCOPE) L 1
14 LRTP-010013-1
*LRTP-010013-1* SEAL (SCOPE) L 1
15 LRTP-010014-0
*LRTP-010014-0* TAPE (SCOPE) L 1
16 LRTP-010011-0
*LRTP-010011-0* SEAL (SCOPE) 1
17 LRTP-010023-0
*LRTP-010023-0* RAIL (SCOPE) R 1
18 LNEP-010007-0
*LNEP-010007-0* BRACKET (BLOW) 1
19 DBAXCES5001-0
*DBAXCES5001-0* CAMERA (CCD 1/2) 1
20 LPVP-010027-0
*LPVP-010027-0* LED LIGHT 2
21 LJTP-910002-2
*LJTP-910002-2* SCOPE (MICRO) 1
22 LJTP-910005-0
23 LKKP-010012-0
*LKKP-010012-0* BLOCK (NOZZLE) 2
24 LRTP-020012-3
*LRTP-020012-3* SHUTTER (MICRO/MACRO) 1
25 LKKP-010015-1
*LKKP-010015-1* CYLINDER 1
26 LJTH-910058-1
*LJTH-910058-1* FITTING (3D4) Y 2
27 DBAXCES3001-0
28 LJTP-910040-1
*LJTP-910040-1* SCOPE (X1.5) 1
29 LPVH-010064-0
30 LJTH-910054-0
31 LNLH-010049-0
32 LRTP-010027-0
*LRTP-010027-0* LID (CAMERA) 1
35 LPVP-010026-0
*LPVP-010026-0* RING LIGHT (1) 2
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MICROSCOPE SECTION
36 DBAXCST7002-0
*DBAXCST7002-0* CAMERA (CCD 2/3) 1
37 LRTP-020017-0
101 M6N-030-1UN-0
102 M6N-040-1UN-0
103 MSS030005UN-0
104 MSS030035UN-0
105 MSS040006UN-0
106 MSS040008UN-0
107 MSS040030UN-0
108 MSS100020UN-0
109 MSUK03005UN-0
110 MTK030005UN-0
111 MTK030006UN-0
112 MTK040008UN-0
113 MWP-030-1UN-0
114 MWP-040-1UN-0
115 MWP-100-1UN-0
116 MWS-040-1UN-0
117 MWS-100-1UN-0
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MICROSCOPE SECTION

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DUCT FAN SECTION [OPTIONAL ACCESSORY]
ダクトファン部【特別付属品】 [Fig.17]
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DUCT FAN SECTION [OPTIONAL ACCESSORY]
ダクトファン部【特別付属品】 [Fig.17]
1 FRTN-010001-0
*FRTN-010001-0* DUCT FAN ASSY. 1
2 LKKN-010045-1
*LKKN-010045-1* BRACKET (FAN) 1
3 LKKN-010047-2
*LKKN-010047-2* BRACKET (DUCT FAN) 1
4 LKKN-010015-0
*LKKN-010015-0* RUBBER 1
5 LKKN-010105-0
*LKKN-010105-0* SIROCCO FAN 1
6 LKKN-010044-0
*LKKN-010044-0* SEAL (DUCT, OUT) 1
7 LNEN-010003-0
*LNEN-010003-0* PIPE (DUCT, OUT) 1
8 LEGN-911117-0
*LEGN-911117-0* SEAL 2
9 LKKN-010051-0
*LKKN-010051-0* FLANGE (DUCT, IN) 1
10 LTKN-020010-0
*LTKN-020010-0* PIPE (DUCT, IN) 1
11 LKBN-010004-0
*LKBN-010004-0* SEAL WASHER 1
12 MFD08L-01-B-2
*MFD08L-01-B-2* FITTING (D8-1/8) L 3
13 MFPLG-6S-01-0
101 MSS030006UN-0
102 MSS030010UN-0
103 MSS030025UN-0
104 MSS040006UN-0
105 MSS040025UN-0
106 MSS050008UN-0
107 MSS050012UN-0
108 MWP-030-1UN-0
109 MWP-040-1UN-0
110 MWP-050-1UN-0
111 MWS-030-1UN-0
112 MWS-040-1UN-0
113 MWS-050-1UN-0
114 MSS040010UN-0
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FLOW RATE CONTROLLER SECTION [OPTIONAL ACCESSORY]
流量コントローラ部【特別付属品】 [Fig.18]
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FLOW RATE CONTROLLER SECTION [OPTIONAL ACCESSORY]
流量コントローラ部【特別付属品】 [Fig.18]
1 FRTC-020001-0
*FRTC-020001-0* COVER (MONITOR) ASSY. 1
2 LKFH-010068-0
*LKFH-010068-0* FILTER (INLINE) 1
3 LKKH-010042-9
*LKKH-010042-9* FLOW CONTROLLER (2) 1
4 LRTH-010020-0
*LRTH-010020-0* BRACKET (F/C) 1
5 MFD06L-02-B-1
*MFD06L-02-B-1* FITTING (D6-1/4) L 1
6 MFD08L-02-B-2
*MFD08L-02-B-2* FITTING (D8-1/4) L 1
7 MFD12S-03-B-2
*MFD12S-03-B-2* FITTING (D12-3/8) S 3
101 MSS040010UN-0
102 MSS050008UN-0
103 MWP-050-1UN-0
104 MWS-050-1UN-0
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NON-CONTACT SETUP SECTION [OPTIONAL ACCESSORY]
非接触セットアップ部【特別付属品】 [Fig.19]
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1 DBCHPFP0002-2
*DBCHPFP0002-2* SENSOR (OPTICAL FIBER NCS) 1
2 ESYM-010005-0
*ESYM-010005-0* SENSOR (AMP (NCS) 1
3 FRTX-020001-0
*FRTX-020001-0* COVER (WATER, NCS) ASSY. 1
4 LNEX-010036-0
*LNEX-010036-0* BLOCK (NCS, FIBER) 1
5 LRTX-020001-0
*LRTX-020001-0* COVER (WATER, NCS) 1
6 LHLX-910104-0
*LHLX-910104-0* O-RING 2
7 LJTH-910054-0
8 LKHX-912927-0
*LKHX-912927-0* TUBE FITTING (D4) 2
9 LNLH-010049-0
10 LNNG-010517-1
*LNNG-010517-1* THROTTLE VALVE 1
11 LKKX-010017-0
*LKKX-010017-0* BASE (NCS) 1
12 LKKX-010025-0
*LKKX-010025-0* PLATE (FIBER, NCS) 1
13 LKKX-010026-0
*LKKX-010026-0* SHEET (INSULATION) 1
14 LKKX-010027-0
*LKKX-010027-0* COLOR (INSULATION) 2
15 LKKX-510042-0
*LKKX-510042-0* STAY (NCS) 2 1
16 LNEH-010024-0
*LNEH-010024-0* ADAPTER (D8-D4) S 1
17 LNEX-010021-1
*LNEX-010021-1* NOZZLE (NCS, WATER) 2
18 LNEX-010022-1
*LNEX-010022-1* NOZZLE (NCS, AIR) 2
19 LRTH-010053-0
*LRTH-010053-0* SOLENOID VALVE (3S, D2.2) 1
20 LPVH-010064-0
21 LRTX-020002-0
*LRTX-020002-0* STAY (NCS) 1 1
22 MCO-0520AN--0
23 MFD04L-02-C-0
*MFD04L-02-C-0* FITTING (D4-1/4) L 1
24 MFD04S-M5-A-2
*MFD04S-M5-A-2* FITTING (D4-M5) S 2
25 MFD06L-02-B-1
*MFD06L-02-B-1* FITTING (D6-1/4) L 1
26 MFD06S-02-B-1
*MFD06S-02-B-1* FITTING (D6-1/4) S 1
27 MFD08L-02-B-2
*MFD08L-02-B-2* FITTING (D8-1/4) L 1
28 MFD08S-02-B-2
*MFD08S-02-B-2* FITTING (D8-1/4) S 1
101 MSS030006UN-0
102 MSS030008UN-0
103 MSS040006UN-0
104 MSS040010UN-0
105 MSS040016UN-0
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106 MSS040022UN-0
107 MWP-040-1UN-0
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MICROSCOPE-AXIS SECTION [OPTIONAL ACCESSORY]
顕微鏡軸部【特別付属品】 [Fig.20]
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1 DBBEESX9702-0
*DBBEESX9702-0* SENSOR (PHOTO INTERRUPTER) 1
2 LENT-910061-0
*LENT-910061-0* TUBE FITTING (D4, M5) 1
3 LJTH-910058-1
*LJTH-910058-1* FITTING (3D4) Y 3
4 LKBP-910007-0
*LKBP-910007-0* SPEED CONTROLLER 4
5 LKKH-010030-0
*LKKH-010030-0* SOLENOID VALVE (5S) 1
6 LKKP-010020-1
*LKKP-010020-1* BASE (SCOPE AXIS) 1
7 LKKP-010025-1
*LKKP-010025-1* TRAY (GUIDE) 1
8 LKKP-010028-0
*LKKP-010028-0* JOINT (CYLINDER) 1
9 LKKP-010029-0
*LKKP-010029-0* BRACKET (CYLINDER) 1
10 LKKP-010030-0
*LKKP-010030-0* STOPPER (CYLINDER) 1
11 LKKP-010031-0
*LKKP-010031-0* FIXTURE (SCOPE AXIS) 1
12 LKKP-010036-2
13 LKKP-010037-1
*LKKP-010037-1* GUIDE (SCOPE AXIS) 1
14 LKLP-010010-0
*LKLP-010010-0* CYLINDER 1
15 LRTP-020003-0
*LRTP-020003-0* COVER (SCOPE AXIS) 2 1
16 LRTP-020004-0
*LRTP-020004-0* SLIDER (SCOPE AXIS) 1
17 LRTP-020005-0
*LRTP-020005-0* BRACKET (BOX) 1
18 LRTP-020006-0
*LRTP-020006-0* SEAL (SCOPE AXIS) 1
19 LRTP-020018-0
*LRTP-020018-0* COVER (SCOPE AXIS) 1 1
20 LRTP-020016-1
*LRTP-020016-1* BOX (SCOPE AXIS) 1
21 DBAXCES3001-0
22 LNLH-010049-0
23 LJTH-910054-0
24 LJTP-910005-0
25 LKBB-020120-0
*LKBB-020120-0* SPACER (T1.0) 1
26 LKBP-910024-1
*LKBP-910024-1* MICROSCOPE (X0.75) 1
27 LKKP-010012-0
*LKKP-010012-0* BLOCK (NOZZLE) 1
28 LKKP-010015-1
29 LPVH-010064-0
30 LPVP-010027-0
*LPVP-010027-0* LED LIGHT 1
31 LRTP-020012-3
*LRTP-020012-3* SHUTTER (MICRO MACRO) 1
32 LRTP-010027-0
101 M6N-030-1UN-0
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102 M6N-040-1UN-0
103 MSS030006UN-0
104 MSS030030UN-0
105 MSS030035UN-0
106 MSS040006UN-0
107 MSS040008UN-0
108 MSS040020UN-0
109 MSS040030UN-0
110 MSS050008UN-0
111 MSS050010UN-0
112 MSS050014UN-0
113 MSS060030UN-0
114 MSS100030UN-0
115 MSUK03006UN-0
116 MSUK04004UN-0
117 MTK030005UN-0
118 MWP-030-1UN-0
119 MWP-040-1UN-0
120 MWP-100-1UN-0
121 MWS-040-1UN-0
122 MWS-100-1UN-0
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Y-AXIS SCALE SECTION [OPTIONAL ACCESSORY]
Y 軸スケール部【特別付属品】 [Fig.21]
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Y-AXIS SCALE SECTION [OPTIONAL ACCESSORY]
Y 軸スケール部【特別付属品】 [Fig.21]
1 LPEY-010023-0
*LPEY-010023-0* GLASS SCALE (220MM) 1
2 LPFY-110019-0
*LPFY-110019-0* CLAMP (SCALE) 2
3 LNLY-030008-0
*LNLY-030008-0* SCALE HEAD 1
4 LRTY-020002-0
*LRTY-020002-0* STAY (SCALE) 1 1
5 LRTY-020003-0
*LRTY-020003-0* STAY (SCALE) 2 1
6 LRTY-020004-0
*LRTY-020004-0* BRACKET (SCALE HEAD) 1
7 LRTY-020006-0
*LRTY-020006-0* COVER (SCALE) 1
8 LRTY-020008-0
*LRTY-020008-0* BASE (SCALE) 1
9 LEDX-510007-0
*LEDX-510007-0* COUPLING 1
10 LRTY-020007-0
*LRTY-020007-0* ADAPTER (MOTOR) 1
11 LPEX-010027-0
*LPEX-010027-0* MOTOR (SERVO, 200W) 1
12 LRTY-020010-0
*LRTY-020010-0* DOG (SENSOR) Y 1
101 MSS030006UN-0
102 MSS030010UN-0
103 MSS040008UN-0
104 MSS040012UN-0
105 MSS040020UN-0
106 MSS050016UN-0
107 MSUK04004UN-0
108 MTK040006UN-0
109 MWP-040-1UN-0
110 MWS-030-1UN-0
111 MWS-040-1UN-0
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1.8KW SPINDLE SPECIFICATION [OPTIONAL ACCESSORY]
1.8kW スピンドル仕様【特別付属品】 [Fig.22]
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1.8KW SPINDLE SPECIFICATION [OPTIONAL ACCESSORY]
1.8kW スピンドル仕様【特別付属品】 [Fig.22]
1 NCPZ-110227-3
*NCPZ-110227-3* 1.8KW SPINDLE ASSY. 1
2 NCBZ-010050-0
*NCBZ-010050-0* CARBON BRUSH ASSY. 2
3 NCCZ-010004-0
*NCCZ-010004-0* BOLT 1
4 NSEZ-010140-2
*NSEZ-010140-2* CAP (FRONT) 1
5 NSEZ-110633-0
*NSEZ-110633-0* GASKET 1
101 MSS030008UN-0
102 MSS030010UN-0
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WHEEL COVER SECTION (CENTRIFUGAL) [OPTIONAL ACCESSORY]
ホイールカバー部（回転落射）【特別付属品】 [Fig.23]
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A01 FRTW-020009-3
*FRTW-020009-3* WHEEL COVER ASSY. (58.0) 1
A02 FRTW-020006-2
*FRTW-020006-2* NOZZLE (SI) ASSY. 1
A03 LKBW-010001-0
*LKBW-010001-0* JOINT 1
A04 LRTW-020057-2
*LRTW-020057-2* NOZZLE (SI, R) 1
A05 LRTW-020058-2
*LRTW-020058-2* NOZZLE (SI, F) 1
A06 MCO-0002AN--0
*MCO-0002AN--0* O-RING (P5) 1
A07 LJTX-910066-0
*LJTX-910066-0* TUBE FITTING 1
A08 LKBZ-910016-0
*LKBZ-910016-0* BOLT (CLAMP) 1
A09 LKKZ-010021-0
A10 LRTW-020018-2
*LRTW-020018-2* BASE 1
A11 LRTW-020036-0
*LRTW-020036-0* BLOCK (F) 1
A12 LRTW-020059-0
*LRTW-020059-0* DUCT (SPLASH) 1
A13 LRTW-020060-0
*LRTW-020060-0* BLOCK (BLOW) 1
A14 LRTW-020065-0
*LRTW-020065-0* BLOCK (BASE) 1
A15 LRTW-020067-0
*LRTW-020067-0* NOZZLE (D2) 1
A16 MFD06L-01-B-1
*MFD06L-01-B-1* FITTING (D6-1/8) L 3
A101 DXZSL5N--01-0
*DXZSL5N--01-0* CABLE CLAMP 1
A102 LRTW-020038-0
*LRTW-020038-0* WASHER M4 2
A103 MSS040006UN-0
A104 MSS040012UN-0
A105 MSS040014UN-0
A106 MSS040018UN-0
A107 MSS040025UN-0
A108 MSUK04005UN-0
A109 MSUK04010UN-0
A110 MSUK04016UN-0
A111 MWS-040-1UN-0
B01 FRTW-020010-3
*FRTW-020010-3* WHEEL COVER BBD ASSY. (58.0) 1
B02 FRTW-020006-2
B03 LKBW-010001-0
*LKBW-010001-0* JOINT 1
B04 LRTW-020057-2
B05 LRTW-020058-2
B06 MCO-0002AN--0
*MCO-0002AN--0* O-RING (P5) 1
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B07 LJKZ-911414-0
*LJKZ-911414-0* SHAFT (BBD) 1
B08 LJKZ-911432-0
*LJKZ-911432-0* KNOB (UP/DOWN) 1
B09 LJKZ-911497-0
*LJKZ-911497-0* KNOB (CLAMP, BBD) 1
B10 LJTX-910066-0
B11 LJTZ-910006-0
*LJTZ-910006-0* HOLDER (BBD) 1
B12 LJTZ-910009-0
*LJTZ-910009-0* LEVER 1
B13 LJTZ-910013-0
*LJTZ-910013-0* SPRING 1
B14 LKBZ-910016-0
B15 LKKZ-010021-0
B16 LRTW-020018-2
*LRTW-020018-2* BASE 1
B17 LRTW-020023-0
*LRTW-020023-0* BLOCK (L) 1
B18 LRTW-020024-0
*LRTW-020024-0* BLOCK (R) 1
B19 LRTW-020059-0
B20 LRTW-020060-0
B21 LRTW-020065-0
B22 LRTW-020067-0
*LRTW-020067-0* NOZZLE (D2) 1
B23 MFD06L-01-B-1
*MFD06L-01-B-1* FITTING (D6-1/8) L 3
B101 DXZSL5N--01-0
B102 LRTW-020038-0
B103 MSS040006UN-0
B104 MSS040012UN-0
B105 MSS040014UN-0
B106 MSS040018UN-0
B107 MSS040025UN-0
B108 MSUK03003UN-0
B109 MSUK04005UN-0
B110 MSUK04010UN-0
B111 MSUK04016UN-0
B112 MWP-030-1UN-0
B113 MWS-030-1UN-0
B114 MWS-040-1UN-0
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WHEEL COVER SECTION (DEEP CUTTING) [OPTIONAL ACCESSORY]
ホイールカバー部（深切り）【特別付属品】 [Fig.24]
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A01 FRTW-020007-3
*FRTW-020007-3* WHEEL COVER ASSY. (58.0) 1
A02 FRTW-020006-2
A03 LKBW-010001-0
*LKBW-010001-0* JOINT 1
A04 LRTW-020057-2
A05 LRTW-020058-2
A06 MCO-0002AN--0
*MCO-0002AN--0* O-RING (P5) 1
A07 LJTX-910066-0
A08 LKBZ-910016-0
A09 LKKZ-010021-0
A10 LRTW-020018-2
*LRTW-020018-2* BASE 1
A11 LRTW-020036-0
*LRTW-020036-0* BLOCK (F) 1
A12 LRTW-020059-0
A13 LRTW-020060-0
A14 LRTW-020061-0
*LRTW-020061-0* BLOCK (SWING) 1
A15 LRTW-020062-1
*LRTW-020062-1* NOZZLE 1
A16 LRTW-020063-0
*LRTW-020063-0* SWING ARM (F) 1
A17 LRTW-020064-0
*LRTW-020064-0* SWING ARM (R) 1
A18 LRTW-020065-0
A19 LRTW-020066-0
*LRTW-020066-0* DOWELL PIN 1
A20 MCO-0501AN--0
A21 MCO-0502AN--0
A22 MFD06L-01-B-1
*MFD06L-01-B-1* FITTING (D6-1/8) L 3
A101 DXZSL5N--01-0
A102 LRTW-020038-0
A103 MSS040006UN-0
A104 MSS040012UN-0
A105 MSS040014UN-0
A106 MSS040018UN-0
A107 MSS040025UN-0
A108 MSUK04005UN-0
A109 MSUK04010UN-0
A110 MSUK04016UN-0
A111 MWS-040-1UN-0
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B01 FRTW-020008-3
*FRTW-020008-3* WHEEL COVER BBD ASSY. (58.0) 1
B02 FRTW-020006-2
*FRTW-020006-2* NOZZLE (SI) ASSY 1
B03 LKBW-010001-0
*LKBW-010001-0* JOINT 1
B04 LRTW-020057-2
B05 LRTW-020058-2
B06 MCO-0002AN--0
*MCO-0002AN--0* O-RING (P5) 1
B07 LJKZ-911414-0
*LJKZ-911414-0* SHAFT (BBD) 1
B08 LJKZ-911432-0
*LJKZ-911432-0* KNOB (UP/DOWN) 1
B09 LJKZ-911497-0
*LJKZ-911497-0* KNOB (CLAMP, BBD) 1
B10 LJTX-910066-0
B11 LJTZ-910006-0
*LJTZ-910006-0* HOLDER (BBD) 1
B12 LJTZ-910009-0
*LJTZ-910009-0* LEVER 1
B13 LJTZ-910013-0
*LJTZ-910013-0* SPRING 1
B14 LKBZ-910016-0
B15 LKKZ-010021-0
B16 LRTW-020018-2
*LRTW-020018-2* BASE 1
B17 LRTW-020023-0
*LRTW-020023-0* BLOCK (L) 1
B18 LRTW-020024-0
*LRTW-020024-0* BLOCK (R) 1
B19 LRTW-020059-0
B20 LRTW-020060-0
B21 LRTW-020061-0
*LRTW-020061-0* BLOCK (SWING) 1
B22 LRTW-020062-1
*LRTW-020062-1* NOZZLE 1
B23 LRTW-020063-0
*LRTW-020063-0* SWING ARM (F) 1
B24 LRTW-020064-0
*LRTW-020064-0* SWING ARM (R) 1
B25 LRTW-020065-0
B26 LRTW-020066-0
*LRTW-020066-0* DOWELL PIN 1
B27 MCO-0501AN--0
B28 MCO-0502AN--0
B29 MFD06L-01-B-1
*MFD06L-01-B-1* FITTING (D6-1/8) L 3
B101 DXZSL5N--01-0
B102 LRTW-020038-0
B103 MSS040006UN-0
B104 MSS040012UN-0
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B105 MSS040014UN-0
B106 MSS040018UN-0
B107 MSS040025UN-0
B108 MSUK03003UN-0
B109 MSUK04005UN-0
B110 MSUK04010UN-0
B111 MSUK04016UN-0
B112 MWP-030-1UN-0
B113 MWS-030-1UN-0
B114 MWS-040-1UN-0
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Parts Index
D LJKZ-911414-0 ............................. Fig.24 LKKC-010023-0 ............................ Fig.04
DBAXCES3001-0 .......................... Fig.16 LJKZ-911432-0 ............................. Fig.23 LKKH-010004-0 ............................ Fig.11
DBAXCST7002-0 .......................... Fig.16 LJKZ-911497-0 ............................. Fig.24 LKKH-010030-0 ............................ Fig.20
DBBEESX9702-0 .......................... Fig.20 LJLV-910515-0.............................. Fig.09 LKKH-010033-0 ............................ Fig.09
DBBEESX9704-0 .......................... Fig.13 LJPH-910015-0............................. Fig.09 LKKH-010042-9 ............................ Fig.18
DBCHPFP0002-2 .......................... Fig.19 LJPH-910015-0............................. Fig.10 LKKN-010015-0 ............................ Fig.17
DSZHS9ZA601-0 .......................... Fig.04 LJPH-910052-0............................. Fig.09 LKKN-010044-0 ............................ Fig.17
DXJBSF40801-0 ........................... Fig.03 LJPH-910056-0............................. Fig.08 LKKN-010045-1 ............................ Fig.17
DXJBSF46001-0 ........................... Fig.03 LJTH-010143-0 ............................. Fig.08 LKKN-010047-2 ............................ Fig.17
DXJSBB41201-0 ........................... Fig.09 LJTH-910054-0 ............................. Fig.09 LKKN-010051-0 ............................ Fig.17
DXZOAW22601-0.......................... Fig.06 LJTH-910054-0 ............................. Fig.16 LKKN-010105-0 ............................ Fig.17
DXZSL14N-01-0 ............................ Fig.07 LJTH-910054-0 ............................. Fig.19 LKKN-510002-0 ............................ Fig.13
DXZSL5N--01-0............................. Fig.23 LJTH-910054-0 ............................. Fig.20 LKKP-010012-0 ............................. Fig.16
DXZTA1S8-01-0 ............................ Fig.09 LJTH-910058-1 ............................. Fig.20 LKKP-010020-1 ............................. Fig.20
LJTH-910059-0 ............................. Fig.09 LKKP-010025-1 ............................. Fig.20
E LJTH-910064-1 ............................. Fig.08 LKKP-010028-0 ............................. Fig.20
ENUM-010013-0 ........................... Fig.04 LJTP-910002-2 ............................. Fig.16 LKKP-010029-0 ............................. Fig.20
ENUM-010017-0 ........................... Fig.11 LJTP-910005-0 ............................. Fig.08 LKKP-010030-0 ............................. Fig.20
ESYM-010005-0 ............................ Fig.19 LJTP-910005-0 ............................. Fig.16 LKKP-010031-0 ............................. Fig.20
LJTP-910005-0 ............................. Fig.20 LKKP-010036-2 ............................. Fig.20
F LJTP-910040-1 ............................. Fig.16 LKKP-010037-1 ............................. Fig.20
FCPR-061000-2 ............................ Fig.13 LJTR-910009-0 ............................. Fig.13 LKKR-010005-0 ............................ Fig.13
FKFH-010000-1............................. Fig.08 LJTX-910004-0 ............................. Fig.13 LKKR-010006-1 ............................ Fig.13
FKKZ-010001-4 ............................. Fig.15 LJTX-910066-0 ............................. Fig.23 LKKR-010008-2 ............................ Fig.13
FRTC-010001-0 ............................ Fig.01 LJTX-910066-0 ............................. Fig.23 LKKR-010010-1 ............................ Fig.13
FRTC-020001-0 ............................ Fig.18 LJTX-910066-0 ............................. Fig.24 LKKR-010014-0 ............................ Fig.13
FRTH-010001-0 ............................ Fig.07 LJTX-910066-0 ............................. Fig.24 LKKR-010015-0 ............................ Fig.13
FRTH-010002-0 ............................ Fig.07 LJTZ-910006-0 ............................. Fig.23 LKKX-010008-0 ............................. Fig.06
FRTH-010004-0 ............................ Fig.09 LJTZ-910006-0 ............................. Fig.24 LKKX-010009-0 ............................. Fig.06
FRTN-010001-0 ............................ Fig.17 LJTZ-910009-0 ............................. Fig.23 LKKX-010017-0 ............................. Fig.19
FRTW-020006-2 ............................ Fig.23 LJTZ-910009-0 ............................. Fig.24 LKKX-010021-1 ............................. Fig.11
FRTW-020007-3 ............................ Fig.24 LKBB-020120-0 ............................ Fig.16 LKKX-510042-0 ............................. Fig.19
FRTW-020008-3 ............................ Fig.24 LKBB-020120-0 ............................ Fig.20 LKKZ-010001-0 ............................. Fig.15
FRTW-020009-3 ............................ Fig.23 LKBH-010001-0 ............................ Fig.04 LKKZ-010002-0 ............................. Fig.15
FRTW-020010-3 ............................ Fig.23 LKBH-510028-0 ............................ Fig.09 LKKZ-010004-0 ............................. Fig.15
FRTX-020001-0............................. Fig.19 LKBH-910034-1 ............................ Fig.09 LKKZ-010005-0 ............................. Fig.15
LKBH-910035-1 ............................ Fig.09 LKKZ-010006-0 ............................. Fig.15
L LKBH-910036-1 ............................ Fig.09 LKKZ-010007-0 ............................. Fig.15
LDLH-910482-0 ............................. Fig.07 LKBH-910037-1 ............................ Fig.08 LKKZ-010008-0 ............................. Fig.15
LEDH-910010-0 ............................ Fig.07 LKBN-010004-0 ............................ Fig.17 LKKZ-010009-0 ............................. Fig.15
LEDX-510007-0............................. Fig.21 LKBP-910005-2 ............................ Fig.16 LKKZ-010011-0 ............................. Fig.15
LEDY-910006-1 ............................. Fig.12 LKBP-910007-0 ............................ Fig.16 LKKZ-010021-0 ............................. Fig.23
LEGH-910224-0 ............................ Fig.07 LKBP-910007-0 ............................ Fig.20 LKKZ-010021-0 ............................. Fig.23
LEGN-911117-0 ............................. Fig.17 LKBP-910024-1 ............................ Fig.20 LKKZ-010021-0 ............................. Fig.24
LELC-020001-0 ............................. Fig.01 LKBW-010001-0 ........................... Fig.23 LKKZ-010021-0 ............................. Fig.24
LELC-020001-0 ............................. Fig.02 LKBW-010001-0 ........................... Fig.23 LKKZ-010028-1 ............................. Fig.15
LELC-020001-0 ............................. Fig.03 LKBW-010001-0 ........................... Fig.24 LKLP-010010-0 ............................. Fig.20
LELC-910147-0 ............................. Fig.02 LKBW-010001-0 ........................... Fig.24 LKPV-010009-1 ............................. Fig.09
LELC-910147-0 ............................. Fig.03 LKBZ-010000-0 ............................ Fig.12 LNEC-010026-0 ............................ Fig.03
LELH-910033-1 ............................. Fig.09 LKBZ-910016-0 ............................ Fig.23 LNEC-010027-0 ............................ Fig.02
LENT-910061-0 ............................. Fig.04 LKBZ-910016-0 ............................ Fig.24 LNEC-010054-0 ............................ Fig.01
LENT-910061-0 ............................. Fig.20 LKFC-010092-0 ............................ Fig.08 LNEC-010055-0 ............................ Fig.01
LHAH-911145-0 ............................. Fig.09 LKFH-010052-0 ............................ Fig.08 LNEH-010006-0 ............................ Fig.09
LHEH-910038-0 ............................ Fig.08 LKFH-010068-0 ............................ Fig.18 LNEH-010010-2 ............................ Fig.08
LHJH-910010-0 ............................. Fig.11 LKFH-020032-0 ............................ Fig.08 LNEH-010019-1 ............................ Fig.09
LHLX-910005-0 ............................. Fig.11 LKFH-020033-0 ............................ Fig.08 LNEH-010020-0 ............................ Fig.09
LHLX-910104-0 ............................. Fig.19 LKHR-912901-0 ............................ Fig.13 LNEH-010022-1 ............................ Fig.10
LHRH-910016-0 ............................ Fig.04 LKHX-912927-0 ............................ Fig.19 LNEH-010023-1 ............................ Fig.10
LHRX-010000-0 ............................ Fig.12 LKJV-010109-0 ............................. Fig.09 LNEH-010024-0 ............................ Fig.19
LJKR-911120-0.............................. Fig.13 LKKC-010008-1 ............................ Fig.04 LNEH-010025-1 ............................ Fig.07
LJKZ-910007-1 ............................. Fig.08 LKKC-010011-0 ............................ Fig.04 LNEH-010046-0 ............................ Fig.09
LJKZ-911414-0 .............................. Fig.23 LKKC-010022-1 ............................ Fig.04 LNEN-010003-0 ............................ Fig.17
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Parts Index
LNEP-010005-1............................. Fig.16 LRTP-010004-0 ............................ Fig.16 LRTX-010009-0 ............................. Fig.11
LNEP-010007-0............................. Fig.16 LRTP-010005-0 ............................ Fig.16 LRTX-010011-0 ............................. Fig.05
LNER-010025-0 ............................ Fig.13 LRTP-010006-0 ............................ Fig.16 LRTX-010014-0 ............................. Fig.06
LNEX-010004-2............................. Fig.11 LRTP-010011-0............................. Fig.16 LRTX-010017-1 ............................. Fig.11
LNEX-010010-0............................. Fig.06 LRTP-010012-1 ............................ Fig.16 LRTX-010018-0 ............................. Fig.06
LNLH-010049-0 ............................. Fig.08 LRTP-010021-1 ............................ Fig.16 LRTX-010029-2 ............................. Fig.11
LNLH-010050-0 ............................. Fig.09 LRTP-010027-0 ............................ Fig.20 LRTY-020002-0 ............................. Fig.21
LNLY-030008-0 ............................. Fig.21 LRTP-020003-0 ............................ Fig.20 LRTY-020003-0 ............................. Fig.21
LNNG-010517-1 ............................ Fig.19 LRTP-020004-0 ............................ Fig.20 LRTY-020004-0 ............................. Fig.21
LNUC-010093-0 ............................ Fig.04 LRTP-020005-0 ............................ Fig.20 LRTY-020006-0 ............................. Fig.21
LPEX-010027-0 ............................. Fig.21 LRTP-020006-0 ............................ Fig.20 LRTY-020007-0 ............................. Fig.21
LPEY-010023-0 ............................. Fig.21 LRTP-020012-3 ............................ Fig.16 LRTY-020008-0 ............................. Fig.21
LPEY-010025-0 ............................. Fig.12 LRTP-020012-3 ............................ Fig.20 LRTY-020010-0 ............................. Fig.21
LPFH-010005-0 ............................. Fig.02 LRTP-020016-1 ............................ Fig.20 LTKH-010051-0 ............................. Fig.10
LPFY-110019-0 ............................. Fig.21 LRTP-020017-0 ............................ Fig.16 LTKH-010052-0 ............................. Fig.10
LPUH-010078-1 ............................ Fig.09 LRTP-020018-0 ............................ Fig.20 LTKH-510017-0 ............................. Fig.05
LPVH-010064-0............................. Fig.09 LRTR-010001-0 ............................ Fig.13 LTKN-020010-0 ............................. Fig.17
LPVH-010064-0............................. Fig.16 LRTR-010003-0 ............................ Fig.13
LPVH-010064-0............................. Fig.19 LRTR-010004-0 ............................ Fig.13 M
LPVH-010064-0............................. Fig.20 LRTR-010005-0 ............................ Fig.13 MCO-0002AN--0 ........................... Fig.23
LPVP-010026-0 ............................. Fig.16 LRTR-010006-0 ............................ Fig.13 MCO-0002AN--0 ........................... Fig.23
LPVP-010027-0 ............................. Fig.16 LRTW-020018-2 ........................... Fig.23 MCO-0002AN--0 ........................... Fig.24
LPVP-010027-0 ............................. Fig.20 LRTW-020018-2 ........................... Fig.23 MCO-0002AN--0 ........................... Fig.24
LPVZ-010015-2 ............................. Fig.12 LRTW-020018-2 ........................... Fig.24 MCO-0501AN--0 ........................... Fig.15
LRGC-010505-0 ............................ Fig.04 LRTW-020018-2 ........................... Fig.24 MCO-0501AN--0 ........................... Fig.24
LRPR-010001-0 ............................ Fig.13 LRTW-020024-0 ........................... Fig.23 MCO-0502AN--0 ........................... Fig.24
LRTC-010001-0............................. Fig.01 LRTW-020024-0 ........................... Fig.24 MCO-0520AN--0 ........................... Fig.19
LRTC-010006-0............................. Fig.04 LRTW-020036-0 ........................... Fig.23 MCO-0555AN--0 ........................... Fig.13
LRTC-010007-0............................. Fig.04 LRTW-020036-0 ........................... Fig.24 MFD04L-02-C-0 ............................ Fig.19
LRTC-010011-0 ............................. Fig.04 LRTW-020057-2 ........................... Fig.23 MFD04S-M5-A-2 ........................... Fig.08
LRTC-010012-0............................. Fig.01 LRTW-020057-2 ........................... Fig.23 MFD04S-M5-A-2 ........................... Fig.19
LRTC-010013-1............................. Fig.01 LRTW-020057-2 ........................... Fig.24 MFD06L-01-B-1 ............................ Fig.08
LRTC-010023-0............................. Fig.03 LRTW-020059-0 ........................... Fig.24 MFD06S-01-B-1 ............................ Fig.15
LRTC-010028-0............................. Fig.04 LRTW-020060-0 ........................... Fig.24 MFD06T----C-0 .............................. Fig.09
LRTH-010001-0............................. Fig.09 LRTW-020061-0 ........................... Fig.24 MFD08L-01-B-2 ............................ Fig.17
LRTH-010011-0 ............................. Fig.08 LRTW-020062-1 ........................... Fig.24 MFD08L-02-B-2 ............................ Fig.18
LRTH-010021-0............................. Fig.07 LRTW-020063-0 ........................... Fig.24 MFD08S-01-B-2 ............................ Fig.09
LRTH-010032-0............................. Fig.04 LRTW-020065-0 ........................... Fig.24 MFELB-02----0 .............................. Fig.10
LRTH-010046-0............................. Fig.05 LRTW-020066-0 ........................... Fig.24 MFNPL-02----0 .............................. Fig.10
LRTH-010047-0............................. Fig.05 LRTW-020066-0 ........................... Fig.24 MFPLG-6S-01-0 ............................ Fig.09
LRTH-010051-0............................. Fig.05 LRTX-010003-0 ............................ Fig.06 MFPLG-6S-02-0 ............................ Fig.10
LRTH-010052-0............................. Fig.04 LRTX-010004-0 ............................ Fig.06 MFTEE-02----0 .............................. Fig.10
LRTH-010053-0............................. Fig.19 LRTX-010005-0 ............................ Fig.06 MHCL-0038AS-0 ........................... Fig.09
LRTP-010003-0 ............................. Fig.16 LRTX-010006-0 ............................ Fig.06 MHCL-0068CS-0 ........................... Fig.09
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Parts Index
MSFBF6U-SUS ............................. Fig.08
MT060040MAP-0 .......................... Fig.08
MTDHOSE032--0 .......................... Fig.09
N
NCBZ-010050-0 ............................ Fig.14
NCBZ-010050-0 ............................ Fig.22
NCCZ-010004-0 ............................ Fig.14
NCCZ-010004-0 ............................ Fig.22
NCPZ-110226-5 ............................ Fig.11
NCPZ-110227-3 ............................ Fig.22
NSEZ-010140-2 ............................ Fig.22
NSEZ-110633-0............................. Fig.14
NSEZ-110633-0............................. Fig.22
NSTZ-010082-1............................. Fig.14
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E. WATER AND AIR PIPING

Piping Diagram [Drawing No.: 2RTH001-E]
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E-1
Piping part list
NCS : Non-contact setup MCR : Macro microscope SH SW : Cutting water flow rate sensor (shower) BL SW : Cutting water flow rate sensor (blade cooler)
FLCT : Flow rate controller
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No. DISCO Part ID Description Standard NCS MCR SH SW BL SW FLCT Remarks

SV19
1 LKBH-910034-1 SOLENOID VALVE (2S, D3) 2
SV26
2 LKBH-910035-1 SOLENOID VALVE (2S, D4) 1 SV24
3 LKBH-910036-1 SOLENOID VALVE (2S, D5) 1 SV18
SV09AB
SV12AB
4 LKBH-910037-1 VALVE UNIT (AIR) 1
SV14AB
SV16AB
SV20
SV21
5 LPVH-010064-0 VALVE UNIT (CLEAN AIR) 2 +1 +1
SV23
SV27
6 LKPV-010009-1 FITTING 1 -1
7 LKKH-010030-0 SOLENOID VALVE (5S) +1 SV11AB
8 LNEH-010022-1 FITTING (4D8-1/4) M 1
9 LJPH-910015-0 TUBE FITTING 2
10 LRTH-010053-0 SOLENOID VALVE (3S, D2.2) +1 SV22
11 LTKH-010051-0 AIR CLEAN UNIT 1
12 FKFH-010000-1 HANDHELD BLOWER 1
13 LJTH-010143-0 PRESSURE SENSOR 1
14 LNEH-010023-1 PRESSURE SENSOR 1
15 LELH-910033-1 VACUUM EJECTOR 1
16 LNLH-010050-0 THROTTLE VALVE (2D6) S 1
17 LNNG-010517-1 THROTTLE VALVE +1
18 LNLH-010049-0 THROTTLE VALVE (2D4) S 2 +1 +1
19 LKBP-910007-0 SPEED CONTROLLER 2 +2
20 LJKZ-910007-1 CHECK VALVE 3
21 LNEH-010010-2 FLOW METER (2L) 2 -2
22 LPUH-010078-1 FLOW CHECKER 1 +1 +1
E-2
Piping part list (Continued)
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23 LKKH-010029-0 MANIFOLD (WATER) 1
24 LJTH-910059-0 TUBE FITTING 1
25 LJPH-910052-0 TUBE FITTING 2
26 LELH-911203-0 TUBE FITTING (D6, M5) 1
27 LENT-910061-0 TUBE FITTING (D4, M5) 4 +1
28 LNEH-010006-0 FITTING (2D8-3D4) M 1
29 LJTH-910054-0 TUBE FITTING 2 +2 +2
30 LJTH-910057-0 UNION MINI TYPE (D6) 1
31 LJTH-910058-1 FITTING (3D4) Y 2 +1 +2
32 LJTH-910064-1 TUBE FITTING (D8-2XD6) 1
33 LJTP-910005-0 TUBE FITTING (D4, M5) 3 +2
34 LJTZ-911287-0 TUBE FITTING (D6, M5) 1
35 LHAH-911145-0 PLUG 1
36 LJPH-910056-0 TUBE FITTING (D6) 3
37 LKHX-912927-0 TUBE FITTING (D4) +2
38 LKKH-010033-0 TUBE FITTING (2XD8-3XD6) 1
39 LJLV-910515-0 PLUG 1
40 MFD12L-02-B-2 TUBE FITTING (D12, 1/4) 3
41 MFD08L-02-B-2 TUBE FITTING (D8, 1/4) 3 +1 +1
42 MFD08L-01-B-2 TUBE FITTING (D8, 1/8) 3 +2 +2 -3
43 MFD06L-02-B-1 TUBE FITTING (D6, 1/4) 7 +1 +1
44 MFD06L-01-B-1 TUBE FITTING (D6, 1/8) 3 -1
45 LKBH-510028-0 TUBE FITTING 1
46 MFD08S-02-B-2 TUBE FITTING (D8, 1/4) 1 +1
47 MFD06S-02-B-1 TUBE FITTING (D6, 1/4) 1 +1
48 LNEH-010024-0 ADAPTER (D8-D4) S +1
49 MFD06T----C-0 FITTING (3D6) T 1
E-3
Piping part list (Continued)
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50 MFD12S-03-B-2 TUBE FITTING (D12, 3/8) +3
51 MFD04L-02-C-0 FITTING (D4-1/4) L +1
52 LNHP-010098-0 FIX SPEED CONTROLLER (4X2.5 0.5) 1 -1
53 LELH-910034-0 TUBE FITTING 1
54 MFD04S-M5-A-2 FITTING (D4-M5) S 1 +2
55 MFELB-02----0 ELBOW 1
57 MFTEE-02----0 TEE 1
58 MFNPL-02----0 NIPPLE 2
60 MFPLG-6S-02-0 HEXAGON SOCKET PLUG 3 -2
61 MT060040MAP-0 TUBE 2
62 MT040025MAP-0 TUBE +2
63 MFD08S-01-B-2 FITTING (D8-1/8) S 2
64 LKKH-010042-9 FLOW CONTROLLER (2) +1
65 LKFH-010068-0 FILTER (INLINE) +1
66 LNEH-010030-1 SOLENOID VALVE (3S, D4) 1 SV25
67 MFPLG-6S-01-0 HEXAGON SOCKET PLUG 1
68 LKJV-010109-0 REDUCING UNION TEE (2-D6XD4) 1
Components of valve unit (part No. 4)
Valve No. Remarks DISCO Part ID Description Size of tube

SV16AB Spindle lock LKKH-010030-0 SOLENOID VALVE (5S) 4
SV14AB Scope area cover lock LKBH-920002-0 SOLENOID VALVE 4
SV12AB Lens shutter LKBH-920002-0 SOLENOID VALVE 4
SV09AB Splash cover lock LKBH-920002-0 SOLENOID VALVE 4
E-4
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Contact Information
Immediately get in touch with DISCO if any of the following situation arises:
・where an accident that involves injury or death, or an environment-related accident has occurred or
might occur during the operation of DISCO machine
・where it is necessary to transfer or dispose of DISCO machine
13-11, Omori-Kita 2-chome, Ota-ku, Tokyo 143-8580 Japan

[Overseas Sales Department]
Phone: 81-3-4590-1100 Fax: 81-3-4590-1075
For your nearest DISCO office, visit our website at:

http://www.disco.co.jp
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Technical+Reference+ (English) Dicing Saw DAD323

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Automatic Dicing Saw

Copyright of this document is owned by DISCO CORPORATION

This document is printed on recyclable Lint-Free Paper.

This manual is the 'Original instructions'.

C. ELECTRICAL PARTS ARRANGEMENT DIAGRAM

D. ILLUSTRATION AND PARTS LIST

E. WATER AND AIR PIPING

Cutting section (Continued)

* The values shown above are for reference.

Positive (+) Negative (-)

Control system Closed loop system using a rotary encoder

2.0kW spindle specification

1.8kW spindle specification [optional accessory]

Y-axis Index positioning accuracy

No. Specification Selection Specifications (Size) Qty

Elective accessories (Continued)

No. Specification Selection Instruction Manual Language Qty

No. Optional Accessories

Optional accessories list (Continued)

No. Optional Accessories

AC POWER LINE (for UPS model: N11A502DHR/N11A502DVR) ........................................................... B-1

C. ELECTRICAL PARTS ARRANGEMENT

Electrical Parts Arrangement Diagram

CONTROL BOX LAYOUT ........................................................................................................................... C-1

D. ILLUSTRATION AND PARTS LIST

Fig. No. Title

Fig. No. Title

List of illustrations (01-16)

MAIN BODY SECTION MAIN BODY SECTION MAIN BODY SECTION

List of illustrations (17-24)

FLOW RATE NON-CONTACT SETUP MICROSCOPE-AXIS

1.8kW SPINDLE WHEEL COVER WHEEL COVER

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E. WATER AND AIR PIPING

No. DISCO Part ID Description Standard NCS MCR SH SW BL SW FLCT Remarks

No. DISCO Part ID Description Standard NCS MCR SH SW BL SW FLCT Remarks

No. DISCO Part ID Description Standard NCS MCR SH SW BL SW FLCT Remarks

Components of valve unit (part No. 4)

Valve No. Remarks DISCO Part ID Description Size of tube

13-11, Omori-Kita 2-chome, Ota-ku, Tokyo 143-8580 Japan

For your nearest DISCO office, visit our website at:

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