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Chapter 6-Kikuchi Diffraction
Chapter 6-Kikuchi Diffraction
Chapter 6
Kikuchi Diffraction
Kikuchi Map of Si
= = ×
= = ×
= = ×
+ +
cos 2 =
+ + + +
+ +
cos 3 =
+ + + +
@ Department of Materials Science and Engineering, NTHU 15
@ Department of Materials Science and Engineering, NTHU 16
@ Department of Materials Science and Engineering, NTHU 17
Finding the Zone Axis
• The magnitude and the sign of the excitation error can be realized by
the positions of Kikuchi lines to the diffraction spots.
= =
• Setting = ,
= = = = = =
beamdirection
beamdirection
m 时
T D T D
-
D
↓
轉 beamdirection 讓 diffractonpoint
optical axis
opticalaxis 上 better contrast
在