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The Morphology of LPCVD Polycrystalline Si

Preprint · March 2021

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Graham J. C. Carpenter Frank R Shepherd


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PREPRINT

Proc. Int. Conf. on Microscopy o Semiconducting Materials (1985), ed.


A.G.Cullis & D.B.Holt, Pub. Holger pp 145-150

The Morphology of LPCVD Polycrystalline Si

R.E. Mallard+, D.C. Houghton*, G.J.C. Carpenter** and F.R. Shepherd

+ Bell-Northern Research, Ottawa, Canada


* Present Address: National Research Council, Ottawa, Canada
** CANMET, Energy Mines and Resources, Ottawa, Canada
The Morphology of LPCVD Polycrystalline Si

R.E. Mallard+, D.C. Houghton*, G.J.C. Carpenter** and F.R. Shepherd

+ Bell-Northern Research, Ottawa, Canada


* Present Address: National Research Council, Ottawa, Canada
** CANMET, Energy Mines and Resources, Ottawa, Canada
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