Practical Design Guidelines For The Development of

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IEEE TRANSACTIONS ON COMPONENTS, PACKAGING AND MANUFACTURING TECHNOLOGY 1

Practical Design Guidelines for the Development of


High-Precision Roll-to-Roll Slot-Die Coating
Equipment and the Process
Jinwoo Seong, Janghoon Park, Jongsu Lee, Byoungjoon Ahn, Joong Hyun Yeom, Jaemin Kim,
Tomi Hassinen, Sehun Rhee, Sunglim Ko, Dongjin Lee, and Kee-Hyun Shin

Abstract— This paper proposes practical design guidelines for Furthermore, advanced roll-to-roll (R2R) high-precision
roll-to-roll (R2R) slot-die coating equipment with a precision coating processes have drawn considerable attention given
mechanism enabling high-accuracy coating performance. The that they offer high throughput, cost-effectiveness, and
equipment is developed for specially fabricating organic pho-
tovoltaic devices. An R2R transportation module (capable of environmental friendliness [13].
unwinding, in-feeding, out-feeding, and rewinding), a slot-die For mass production applications involving the coating
coating module, a far-infrared drying module, and a cleanliness of large areas, the development of appropriate equipment
control module are incorporated into the equipment. When is necessary. Equipment and processes have already been
used to apply an organic solution, the developed equipment can developed for coating large areas as demanded by certain
provide an operating tension of 2.3%–11.3%, a coating velocity
of 2–7 m/min, a coating thickness of 28–95 nm, a uniformity applications. Blankenburg et al. [14] demonstrated the R2R
of 8%–23%, and a roughness of 2.86–7.71 nm. A review of slot-die coating of OPVs by using a laboratory-scale machine
this equipment on the basis of theoretical and experimental capable of handling a 50-mm web and a coating velocity of
approaches is included in the detailed equipment specifications 1–4 m/min when forming 39–196-nm (dry thickness) poly
and design guidelines for R2R slot-die coating machines. (3,4-ethylenedioxythiophene)-poly(styrenesulfonate) [PEDOT:
Index Terms— Roll-to-roll (R2R), slot-die coating, tension PSS] and poly(3-hexylthiophene):phenyl-C61-butyric
control. acid methyl ester [P3HT:PCBM] layers, respectively.
Andersen et al. [15] succeeded in up-scaling flexible OPVs
I. I NTRODUCTION
by using four R2R processing machines that were incorporated

T HERE is an increasing need for high-precision


coating technology. The technology is applied for
fabricating advanced electronic devices, such as organic
with R2R coaters, a testing machine, a laminating machine,
and a laser-cutting machine, and capable of handling a
width of 305 mm at a coating velocity of 1–20 m/min,
photovoltaic (OPV) devices [1]–[3], sensors [4], organic thin- while producing a wet film thickness of 6.25–37 μm
film transistors [5], fuel cells [6], batteries [7], [8], and die- (with all the layers deposited under different conditions).
sensitized solar cells [9], in addition to conventional products, Thus, the R2R-implemented coating production of OPVs
such as paper, adhesive tape, and photographic film [10]. has been attracting considerable attention as a promising
Conventional coating processes were designed to produce a next-generation technology.
thickness on the order of hundreds of micrometers [11], but The R2R process is based on web-handling technology.
more recent coating applications require the application of a Web-handling technology involves tension control and can
coating having a thickness of only a few micrometers [12]. be classified into lateral control [16], register control [17],
Manuscript received February 22, 2016; revised June 7, 2016 and velocity control [18], and taper tension control [19]. Because
August 18, 2016; accepted September 21, 2016. Recommended for publication the web is linked by a flexible, wide, and thin film between
by Associate Editor I. Fidan upon evaluation of reviewers’ comments. several rollers, the design is known as a “flexible linked
(Jinwoo Seong and Janghoon Park contributed equally to this work.)
(Corresponding author: Kee-Hyun Shin.) system [20].”
J. Seong, J. Park, J. Lee, B. Ahn, and J. Kim are with the Department To ensure highly precise manufacturing when using an
of Mechanical Design and Production Engineering, Konkuk University, R2R system, it is important to develop an accurate machine
Seoul 143-701, South Korea.
J. H. Yeom and S. Rhee are with the Department of Mechanical Engineering, by first fully understanding the process (required web han-
Hanyang University, Seoul 133-791, South Korea. dling performance) and the target application (thickness range,
T. Hassinen is with the VTT Technical Research Centre of Finland, required temperature, and cleanliness). Chang et al. [21]
02044 Espoo, Finland.
S. Ko, D. Lee, and K.-H. Shin are with the Flexible Display Roll-to-roll developed an R2R web handling machine for the reverse-offset
Research Center, School of Mechanical Engineering, Konkuk University, printing of multiple layers with an overlay accuracy of ±5 μm.
Seoul 143-701, South Korea (e-mail: khshin@konkuk.ac.kr). To improve the accuracy of the R2R machine, Kang et al. [22]
Color versions of one or more of the figures in this paper are available
online at http://ieeexplore.ieee.org. proposed a novel algorithm for the high-accuracy measurement
Digital Object Identifier 10.1109/TCPMT.2016.2613141 of a moving web that achieved a displacement error of less
2156-3950 © 2016 IEEE. Personal use is permitted, but republication/redistribution requires IEEE permission.
See http://www.ieee.org/publications_standards/publications/rights/index.html for more information.
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2 IEEE TRANSACTIONS ON COMPONENTS, PACKAGING AND MANUFACTURING TECHNOLOGY

Fig. 2. Developed R2R slot-die coating system. (a) Blueprint of the


equipment. (b) Image of the actual system.

Fig. 1. OPV devices coated by R2R aimed at a specific target application. Furthermore, variation in tension can alter the surface tension
of the substrate, affecting the coating ability of the deposited
than 2.5 μm. Furthermore, Kim et al. [23] developed an liquid [30]. Moreover, instability in tension results in coating
R2R multilayer printing machine for use with multiple gap changes [31] and makes it difficult to control the alignment
applications, varying the type of ink used. because the variation in tension is closely related to the lateral
In this paper, the practical design guidelines of the special- behavior of the web [32]. This paper presents the design
ized R2R slot-die coating equipment and the description of the guidelines of the R2R machine and the systemic development
development process of the equipment are provided. The target process of the equipment from the viewpoint of achieving the
application was the production of OPV devices because these proposed evaluation index.
constitute the most advanced products manufactured by the
R2R coating process. OPV devices comprise multiple layers II. M ODULAR D ESIGN AND I NTEGRATION
sequentially stacked on the top of a web substrate. These OF ROLL - TO -ROLL S YSTEM
layers are the transparent conductive layer, electron transport A. System Configuration
layer (ETL), active layer (AL), hole transport layer (HTL),
Computer-aided design drawings and photographs of the
and cathode layer, as shown in Fig. 1. Thickness control with
constructed R2R system are shown in Fig. 2. The R2R system
the moving web could be achieved by tuning the materials
measures approximately 1 × 10 m2 and can be consid-
or adjusting process conditions. Slot-die coating, which is a
ered to have four sections: (A) unwinding and in-feeding,
typical premetered coating method, was employed to apply the
(B) coating, (C) drying, and (D) out-feeding and rewinding,
coatings in this paper [24].
as shown in Fig. 2(a). Fig. 2(b) shows a detailed image of the
An evaluation index was devised to evaluate the devel-
equipment. The unwinding and in-feeding section (A) consists
oped equipment. The R2R slot-die coating equipment was
of an unwinder (UW), offset pivot guide (lateral controller),
constructed to satisfy the geometry of the OPV device, as
dancer, in-feeder (IF), load cell (L/C), L/C display, and guide
shown in Fig. 1. The dry thickness of the layer should be kept
controller. Part B is the coating zone, which includes a backup
between 20–129 nm [12], [25] to ensure high performance.
roll and slot-die coater that can apply coatings up to 130 mm in
Therefore, for a strip having a width of 10 mm, the target dry
width. The drying section has a length of 18 m (C) and consists
thicknesses were set at 20 nm for the ETL/HTL and 100 nm
of several idle rolls, a thermocouple, a far-infrared (FIR)
for the AL. The objective surface roughness (root mean
ceramic lamp, and a fan. The out-feeding and rewinding
square) was set at 10 nm based on values previously obtained
section (D) consists of an active linear dancer, offset pivot
by other researchers [26], given the effect of roughness on
guide, a dancer, an out-feeder (OF), and a rewinder (RW).
performance [27]. Furthermore, layer uniformity, that is, the
The sections are supported by rollers and legs to allow easy
variation in thickness along the lateral and longitudinal axes
positioning. Each section (module) is linked by a polyethylene
of the web, should be controlled within 5% [28].
terephthalate (PET) web substrate having a width of 150 mm.
Finally, the variation in coating velocity and the accuracy
The modular design [33] of the system is such that it is easy to
of tension control of the web were set at less than 10 m/min
make additions to the process as well as rearrange the system
and 5%, respectively. The coating velocity depends on the
at the site.
drying section length such that, provided that there is sufficient
drying time, the velocity will be greater. The recent reports of
tension control performance are 2% (10 ± 0.1 N) [29]. Tension B. Hardware and Software
control should be within 5% because this value would lead The hardware and software specifications of the R2R system
to a disturbance that would affect the overlay accuracy [17]. are listed in Table I. The components were purchased or
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SEONG et al.: DEVELOPMENT OF HIGH-PRECISION R2R SLOT-DIE COATING EQUIPMENT 3

TABLE I
S PECIFICATIONS OF THE R2R S YSTEM (F EEDING M ODULE )

modified in order to satisfy the target velocity and tension con-


trol. In the selection and design, emphasis was placed on the
resolution of hardware and software. Ethernet (transmission
control protocol/internet protocol) was used for communica-
tion between the programmed human machine interface based
on the Indra-Logic program (Bosch Rexroth Co., Ltd.) and
the motion controller. Moreover, Sercos III was employed for
communication between the motion controller and the motor
stand. As will be detailed in Section II-C, the UW and RW
were controlled by a passive dancer to follow up the reference
tension (operating tension for each section) with the pressure
of the pneumatic cylinder, Pc .

C. Control Logic
There are two methods for controlling web tension:
an L/C-based control method and a dancer-based control
method [34]. The L/Cs measure the tension to enable moni- Fig. 3. (a) Control diagram of the developed R2R slot-die coating system.
toring and feedback loop control based on a reference tension (b) Passive dancer simulation with different dancer roll materials of Al (top)
and SUS (bottom). (c) Linear active dancer simulation with web velocities
value. The L/C-based control method is widely used because of 2 and 7 m/min (bottom: input signal on x as step).
of its fast response [35]. On the other hand, the dancer can
absorb tension disturbances by the movement of a pendu-
lum [36]. There are two types of dancers: passive and active. Frechard et al. [38] improved the displacement speed
A passive dancer consists of a spring, damper, and idle roll. by using a new UW and RW mechanism design based
There is no actuator, therefore the dancer arm moves by on the active dancer with accumulators. In this paper, the
tension disturbances. An active dancer can dynamically move dancer system was adapted for high-precision tension control.
with actuators [37]. The schematic of the proposed system is shown in Fig. 3.
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4 IEEE TRANSACTIONS ON COMPONENTS, PACKAGING AND MANUFACTURING TECHNOLOGY

TABLE II
S IMULATION C ONDITIONS FOR PASSIVE D ANCER DYNAMICS

The derivative gain of this R2R system based on the pro- lesser than that of SUS, and the settling time improved by
portional and integral control logic makes the control signal approximately 2 s. The difference in variation in tension is not
unstable. large in the simulation, but the settling time of 2 s is significant
The dynamic passive dancer model at the UW section can considering the microsecond control of the R2R system.
be expressed as (1)–(4). Each model indicates the tension The coating zone was within the span of T4 after the
model of the dancer system at the downstream and upstream IF section, such that V3 was determined as the master drive
span lengths, the tangential velocity of a dancer roll, and the speed. Therefore, V3 was fixed to vop to attain a stable
tangential velocity of a dancer arm [36] coating velocity. Moreover, T4 is the most important parameter
1 affecting stable coating, given the transfer of tension T3 from
T˙1 (t) = [ AE{−V0 (t) + V1 (t)} + vop T0 (t) the upstream span length. Therefore, the passive dancer must
l1_u
accurately damp and regulate the variation in tension.
−vop T1 (t) + AEl2 θ̇ (t)] (1) Finally, a linear active dancer is the main tension control
1
T˙2 (t) = [ AE{−V1(t) + V2 (t)} + vop T1 (t) module of this developed system. In the section near the OF,
l1_d there are two operating modes: #1: L/C feedback to the linear
−vop T2 (t) + AEl2 θ̇ (t)] (2) active dancer, and #2: L/C feedback to the OF motor. The
˙ 2
Jd Vd (t) = {T2 (t) − T1 (t)}rd − bd Vd (t) (3) mode #2 logic is widely used in the R2R system, but we
24 2 implemented mode #1 logic and compared it to mode #2 logic.
J1_eq θ̈ (t) = −l2 {T1 (t) + T2 (t)} − l θ (t) − b θ̇(t) (4) A simple mathematical expression was derived to confirm the
0.078 1
dynamics of the linear active dancer, as shown in the following
where Ti is the variation in tension of the web in the i th [39]:
span, li_u is the upstream span length of the i th dancer, li_d is EA
the downstream span length of the i th dancer, A is the cross- T5 = · x (5)
l2_u
sectional area of the unstretched web, E is the elastic modulus
x = ω · p (6)
of the web, Vi is the variation in the tangential velocity of the
i th roll, vop is the operating tangential velocity of the roll, l1 is where x is the displacement of the dancer arm, and ω and p
the rod length from the hinge to cylinder, l2 is the rod length are the angular velocity and pitch of the linear guider,
from the hinge to dancer roll, θ is the angle of the dancer respectively. The variation in T5 was considered to follow
arm, Jd is the moment of inertia of the dancer idle roll, Vd is Hooke’s law. When T5 changed rapidly in a short time owing
the variation in the tangential velocity of the dancer roll, rd is to the movement of x of the linear dancer, which can be
the radius of the dancer roll, bd is the rotary bearing friction determined using (6), the span length between the V4 and V5
constant of the dancer roll, b is the rotary bearing friction rolls can be considered to be 0.6 m in length. The value
constant of the hinge, and Ji_eq is the equivalent moment of of p of the linear dancer was 10 μm, and when the input
inertia of the dancer. parameter ω was 8.3 · 10−4 rad/s that occurred as a step value,
For the fast response of the dancer system, the mechanical as shown in Fig. 3(c) (bottom graph). The smallest tension
design of the dancer roll and arm is very important. The weight variation control could be estimated to be 1 N, as shown in
of the dancer roll was reduced to have a low Jd and Ji_eq Fig. 3(c) (top graph). The settling time will decrease when
by using aluminum (Al) materials instead of steel use stain- the web velocity is increased. Tension control performances
less (SUS). Moreover, l1 and l2 were shortened to maintain below 3.3% could be theoretically achieved on the basis of
the previous ratio (0.5:1). The simulation result in Fig. 3(b) mode #2 (operating tension: 30 N).
indicates the variation in tension with the calculation time In actuators, the gear box ratio of the active dancer and
based on the measured condition in Table II. Disturbance was OF is 1:10 and 1:60, respectively, which indicates that the
induced in T0 with a step input of 3 N at 10 s, and the OF is more precise, as can be seen in Table I. In contrast,
observed tension was T2 . The simulation result showed that the backlash of the active dancer was lower than that of the OF.
the variation in tension of Al is approximately three times With regard to control architectures, as mentioned in Fig. 3,
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SEONG et al.: DEVELOPMENT OF HIGH-PRECISION R2R SLOT-DIE COATING EQUIPMENT 5

Fig. 4. Experiment of linear active dancer system. (a) Photograph of linear Fig. 5. Evaluation of tension control of R2R system. (a) Detailed drawing
active dancer. (b) Acquired data of variation in tension for 600 s in the absence of feeding modules. (b) Closed-loop response of tension at L/C adjacent to
and presence of linear active dancer control, and the box charts of the tension UW, IF, OF, and RW.
values with linear active dancer (c) OFF and (d) ON.

two modes are controller-based and PI-control-based, but the decreased when the linear active dancer was turned ON.
tension signal to the linear module is fed back as x output Fig. 4(c) and (d) presents the box plots of these acquired data.
through mode #1 and the tension signal to the OF motor is fed The OF achieved tension control of approximately 2.66%.
back as V7 output through mode #2. In summary, the active After turning ON the linear active dancer, these values
dancer changes the micrometer scale of the span length, as decreased to a tension control accuracy of 1.81%.
shown in (5), and the OF changes the velocity of the web, The tension control of the developed system was evaluated
as shown in (1) and (2). For web tension control, velocity based on this control logic, as shown in Fig. 5. A–H in
control is general because it is presumed that the traction force Fig. 5(a) correspond to the UW, offset pivot guider, dancer,
between the web and roller is perfect, but for a sudden small L/C, IF, accumulator, OF, and RW, respectively. There are four
change in velocity, slippage can occur. An advantage of the L/Cs [D in Fig. 5(a)] in the feeding module. These measure the
active dancer is that tension control can be performed under tension to enable monitoring. The data for T3 , T4 , T7 , and T8
the condition of operating velocity. In that sense, the active were acquired and all exhibited good performance, as shown
dancer can be applied for improving tension control. in Fig. 5(b). The PET web is sensitive; it is known that the
PET substrate expands and shrinks when subjected to the high
temperature of the drying section [20]. To obtain good control
D. Tension Control accuracy for the drying operation, the temperature of the FIR
Fig. 4 shows the experimental results for tension control in dryer was set at 65 °C, and the tension was measured once
the presence (mode #1) and absence (mode #2) of the active the dryer temperature had reached its set value.
linear dancer. Fig. 4(a) shows that the linear active dancer vop and operating tension were set at 2 m/min and 3 kgf,
system can also be called an accumulator (the purpose of an respectively, and measured by the L/C for 100 s. The tension
accumulator is web accumulation). The operating tension was control accuracies of the four L/Cs were measured and found
set at 3 kgf, and T7 was measured at 2 m/min for 600 s in to be 5.13% (UW, T3 , average: 2.94 kgf, standard devia-
mode #2 (first 300 s) and mode #1 (last 300 s), as shown tion: 0.094 kgf), 11.3% (IF, T4 , average: 3.21 kgf, standard
in Fig. 4(b). It is clearly shown that the variation in tension deviation: 0.129 kgf), 2.3% (OF, T7 , average: 3.011 kgf,
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6 IEEE TRANSACTIONS ON COMPONENTS, PACKAGING AND MANUFACTURING TECHNOLOGY

to reach the target setting. The graph shows that the time
required to reach a given temperature is proportional to that
temperature. Furthermore, it was determined that the coating
process should not be started until the dryer has been allowed
to warm up for approximately 14 min to reach 80 °C.
The superiority of FIR annealing for OPV devices was
confirmed by a unit cell test. The OPV cell consisted of five
layers from the bottom to the top: indium tin oxide (ITO)
patterned glass, TiO2 , P3HT:PCBM, PEDOT:PSS, and Ag.
To obtain steady samples, each layer was printed in the same
conditions following the procedures of a previous study [41].
The printed OPV devices were treated by air, vacuum, and
FIR annealing with various times for the PEDOT:PSS and
Ag layers. The J –V (current density–voltage) curves of the
fabricated OPV devices were measured by a solar simulator
(IEC 904) under a 1-sun condition (AM1.5 100 mW/cm2 ),
Fig. 6. Temperature control module. (a) Drawing of drying equipment as shown in Fig. 6(c). The air oven did not show good
and web path. (b) Inside of dryer. Inset: increase in time with temperature. efficiency compared to the other treatments. The vacuum
(c) J –V curves of the unit cell of OPV devices with different thermal
treatments: air, vacuum oven, and FIR heater for 1–10 min. oven is comparable to the FIR annealing method, but a long
annealing time was needed to obtain an efficiency of 1.44%.
In the FIR cases, an efficiency of 1.46% was achieved by
standard deviation: 0.059 kgf), and 5.06% (RW, T8 , average: annealing for only 3 min (1.46%) similar to the vacuum oven.
3.054 kgf, standard deviation: 0.098 kgf). The tension values This result implies that the FIR annealing method can shorten
shifted toward the specific value because of the measure- the treatment time for OPV devices to approximately 70% of
ment error; thus, the steady-state error was considered when the vacuum oven method.
the accuracy of tension control was calculated. There are
many idler rollers between the L/Cs positioned between the F. Cleanliness Control
IF and OF; therefore, the values were different. The results Although the laboratory was itself a clean room, it was still
showed that the target tension control value was close to 5%, necessary to build a clean booth to prevent dust from adhering
except for IF, because this zone is set as an open tension zone to the coating surface. Clean booths were configured for the
with the master speed drive located near the backup roller. UW-IF section and OF-RW section, as shown in Fig. 7.
The frame of the booth was formed from extruded
E. Temperature Control aluminum (A6NOIS-T5) and assembled tightly to minimize
leaks. The transparent panels were acrylic with a thickness
The structured dryer system is shown in Fig. 6(a). Drying
of 5 mm and were sealed. The clean booth was fitted with two
and annealing of the applied coatings can be performed using
filters: a prefilter and a high-efficiency particulate air (HEPA)
various types of heat sources, including hot air, FIR light,
filter. The efficiency of the prefilter was 85% and that of the
near-infrared light, lasers, microwaves, and intense pulsed
HEPA filter was 99.97%. The filter fan unit was controlled
light (IPL); IPL has recently been the subject of considerable
to exhaust any dust. The local cleanliness of the constructed
research [40]. For a preliminary study [41], we selected an FIR
system was expected to be 1000 class in the designed
lamp as the main heat source. Although it has been estab-
specifications.
lished that IPL offers the most effective means of sintering
OPV devices [42], we also considered cost-effectiveness while
choosing the heat source. G. Coating Control
The dryer system configuration consists of 99 FIR ceramic A highly precise commercial slot-die coater (Naraenanotech
heaters, 27 idler rollers, and 10 thermocouples, as shown Co., Ltd.) was installed in the R2R system, as shown
in Fig. 6(a) and (b). The use of multiple FIR heaters and in Fig. 8(a). The coater features a coating nozzle, gap control,
thermocouples helped in ensuring that the temperature was backup roll, liquid tank, a linear stage, and a means of
maintained at a specific set value. The effective drying length adjusting the angular rotation of the nozzle. Table III lists the
was set at 18 m to ensure that annealing could be successfully specifications of the slot-die coating module. The machining
performed. In addition, the inlet blower was modified in the accuracy of the slot-die is important because it must be
developed drying module. The blowers were powered through capable of controlling thicknesses at the submicrometer level.
an inverter so that their rotational speed could be set at any Slot-die coating is a well-known R2R coating method that can
value between 0 and 1750 Hz. The role of the blowers is control the thickness of an applied coating by adjusting the
to exhaust harmful materials to the outside through filters process conditions, such as the coating gap, coating velocity,
while maintaining the temperature inside the system. The flow rate, and fluid characteristics (viscosity, surface tension,
exhaust rate was set to minimize the vibration of the web. and density) [43]. Fig. 8(b) (top) is a schematic of the coating
Fig. 6(b) (inset) indicates the time taken for the temperature process, whose salient parameters are the coating velocity (V ),
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SEONG et al.: DEVELOPMENT OF HIGH-PRECISION R2R SLOT-DIE COATING EQUIPMENT 7

TABLE III
S PECIFICATIONS OF THE S LOT-D IE C OATING M ODULE

Fig. 7. Constructed clean booth. (a) Clean booth containing unwinding,


in-feeding, and coating zone (#1) and out-feeding and rewinding zone (#2).
(b) Ceiling of clean booth. Fig. 8. (a) Slot-die coater and frame. (b) Schematic of slot-die coating
process (top) and calibration of pumping rate of PEIE and P3HT:PCBM
liquids (bottom).
flow rate ( fr ), strip width (w), number of strips (n), and wet
thickness (tw ). Kang et al. [44] and Krebs [25] proposed a
mathematical model to predict the thickness of the coated were performed using a range of liquids. Various combinations
layer. This can be expressed by the following: of coating parameters have been analyzed and optimized in
previous studies [28], [45]. Thus, the hardware of the coating
fr module should be precisely constructed from the viewpoint of
.
tw = (7)
nwV alignment and machining precision. Fig. 8(b) (bottom graph)
Based on the mathematical model, the significance of the shows the difference between the pump input value and
individual parameters can be evaluated. Multiple verifications the actual flow rates of P3HT:PCBM and polyethylenimine
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8 IEEE TRANSACTIONS ON COMPONENTS, PACKAGING AND MANUFACTURING TECHNOLOGY

1-chlorobenzene to 4.6 wt%, while PEIE (Sigma-Aldrich Co.,


Ltd.) was dissolved in 2-methoxyetahnol to 0.4 wt%. For
highly uniform coating, the ETL and AL materials were
examined by the wettability test. The contact angle of the
ITO-PET film was 70.90° before treatment; therefore, the
ITO-PET film was treated with O2 plasma. After the treatment,
it was reduced to 47°. Moreover, the AL materials easily
coated on the PEIE without the treatment process because it
has a low degree (approximately 16°) of nonpolar materials
(dimethyl-surfoxide).
The coating gap was set at 15 and 100 μm for the
ETL and AL, respectively, in order to obtain the target
thicknesses (20 and 100 nm). The coating thickness increased
in proportion to any increment in the coating gap [43]. The
coated wet layer consisted of five strips, each having a width
of 10 mm, which was dried by passing through an FIR dryer.
The coating velocity was increased from 4 to 7 m/min
Fig. 9. Coating experiment and evaluation. (a) Change in thickness of AL and and the flow rate was varied between 1.2 and 3.7 ml/min
comparison with viscocapillary and volume model with coating velocity (left)
and its roughness result. (b) Contour plot and optimized process conditions
for the AL coating case. Moreover, the AL was evaluated
of AL coated result. (c) Coating window of coating velocity and flow rate for in terms of its thickness and roughness [as measured using
stable coating strip. (d) TEM image of an ETL (PEIE) layer. an interferometer (NV-2000, Nanoscan Co., Ltd.)] based on
a measurement of the average and standard deviation for five
ethoxylated (PEIE) liquids. For each liquid case, a flow rate strips, as shown in Fig. 9(a). The thickness of the AL was
test was first performed to ensure precision of the discharge. found to vary between 48.9 and 94.65 μm and increased in
proportion to the coating velocity. The volume model of (7)
H. Velocity Control showed similarity with the experimental result. However, there
was a gap between the estimation and experiment because (7)
Coating velocity is important because it influences ten-
does not consider the increment of capillary force in the high-
sion and coating control, as mentioned in Section II-C.
velocity coating. The viscocapillary model can be expressed as
In the tension models of (1) and (2), the variation in tangential
velocity is considered as the main parameter to be controlled H0
tmin = (8)
for a stable tension. Moreover, coating velocity is easily 1 + 1.49Ca −2/3
modified with flow rate in the coating process for different
where tmin is the minimum wet thickness, H0 is the coat-
wet thicknesses. For the precise transportation of the web,
ing gap, and Ca is the capillary number defined as μV /σ
we selected high motor accuracy in our machine specifications,
(μ: viscosity, V : coating velocity, and σ : surface tension). The
as shown in Table I.
viscocapillary model estimated the dried thickness to range
Although the motor quality is good, slippage between the
between 11 and 16 nm (μ: 3.7 mPa · s and σ : 32.99 mN/m).
roller and web must be reexamined. In high-velocity web
There was a significant difference from the actual coating
motion, air could be entrained between the web and roller
result, but it is clear that the coating velocity is proportional
and cause slippage. To check slippage in the system, the
to the coating thickness [45].
tangential velocity of the web was measured. A rotary encoder
The uniformity of coating thickness was found to vary
(ENC-1-1V-5, Autonics Co., Ltd.) was installed on the web
by 7.7%, 10.3%, 9.6%, and 23% for each velocity. The
and roller, and acceleration from zero to the target velocity
lowest velocity produced a coating with the best uniformity.
was continuously acquired. The acceleration values from the
Furthermore, the roughness (root mean square) also exhibited
velocity of 0 to 1, 2, 3, 5, and 7 m/min were obtained as
the lowest value when the coating velocity was the lowest.
0.006275, 0.007805, 0.008, 0.007857, and 0.007818 m/s2 ,
The obtained roughness values were 2.86, 3.88, 5.07, and
respectively. This result has proved that slippage was not
7.71 nm for each coating velocity, and all values are within
critical in our operating ranges. However, it can be worse at
the limits of the target roughness. It is presumed that the
a high velocity of the web over 2 m/s (12 m/min) [32].
highest coating velocity could result in coating gap differences
(tremble of web) or tension disturbances [24].
III. C OATING P ROCESS AND E VALUATION We mapped a coating window for the AL experiment, as
OF C OATING P ERFORMANCE shown in Fig. 9(b) and (c). From the contour plot of the
A coating experiment was performed using two liquids, thickness values with different coating velocities and flow
as shown in Fig. 9. These were P3HT:PCBM and PEIE rate values, we determined that a thicker layer of AL could
represented by AL and ETL in the OPV device, respectively, be obtained with a high coating velocity and low flow rate, as
(Fig. 1). The weight percentage of the liquid determined shown in Fig. 9(b). Moreover, a thinner layer could be obtained
the dry thickness of the resulting coating [45]. P3HT:PCBM at a low coating velocity. This guideline can be applied to
(PH0148 and OS0266, 1-Material Co., Ltd.) was diluted in experiments using the same materials [45]. Furthermore,
This article has been accepted for inclusion in a future issue of this journal. Content is final as presented, with the exception of pagination.

SEONG et al.: DEVELOPMENT OF HIGH-PRECISION R2R SLOT-DIE COATING EQUIPMENT 9

IV. C ONCLUSION
A practical design process for high-precision R2R slot-die
coating equipment was developed to attain a given device
target. The equipment was designed to perform coating
with design guideline values for tension control, temperature
control, cleanliness control, and coating control based on
a mathematical simulation and an experiment. The tension
and velocity control performances (control accuracy), layer
thickness, layer roughness, and layer uniformity were set as
the main evaluation standards. Importantly, tension control was
based on the pendulum-type passive dancer and linear-type
active dancer. Moreover, coating performance was observed
with a mathematical model and was derived as a coating
window by comparison with the experimental result. The
equipment was constructed (assembled) to enable processing
with a high degree of manufacturing precision, with a fair
selection of components. The developed system was designed
based on a theoretical and an experimental approach that can
be utilized to construct an R2R coating system for the purpose
of product manufacturing. The constructed equipment could
be applied to many advanced products in addition to the OPV
modules considered in this paper. Moreover, the systemic
guidelines for construction and control will be extremely
useful to researchers in the field as well as to the industry.

ACKNOWLEDGMENT
Fig. 10. (a) Photograph of AL coating in FIR zone. (b) Rewound final This paper was written as part of Konkuk University’s
product on the glass. (c) Good-quality coated film with five strips. research support program for its faculty on sabbatical leave
in 2011.
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