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Biomedical Microsystems-Srivastava Spring 2024
Biomedical Microsystems-Srivastava Spring 2024
Biomedical Microsystems-Srivastava Spring 2024
BB610
Marc J. Madou
Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition
CRC Press; 2 edition (March 13, 2002)
ISBN: 0-849-30826-7
Supplemental Texts: Any standard microfabrication textbook will prove valuable to the student.
Objectives
1. To gain an understanding of standard microfabrication techniques used in the construction of biomedical
microsystems.
2. To know the major classes, components, and applications of biomedical microsystems and to demonstrate
an understanding of the fundamental principles behind the operation of these systems
3. To understand the unique requirements, environments, and applications of biomedical microsystems.
4. To apply knowledge of microfabrication techniques and applications to the design and manufacturing of a
biomedical microsystems
Course Syllabus
• Introduction; Photolithography; Crystallography, Mask Design
• Wet and Dry Etching; Thin Film Deposition and Growth
• Electroplating, Molding, LIGA, Bonding and Sacrificial Processes
• Polymer Processing and Rapid Prototyping
• -TAS: Fluid Control Components, Sample Handling, Separation Components and Detection
• Cell Handling and Characterization Systems
• Systems for Biotechnology and PCR
• Biosensor Arrays and Implantable Devices
• Neural Interfaces
• Microsurgical Tools, Microneedles, and Drug Delivery
• Optical Biosensors
• Packaging of Microfluidic and Optical Systems
• Metrology
Grading
End Semester Exam 50%
Design Project 50%
Design Project
A team of graduate and undergraduate students will be required to complete a design project focused
around a biomedical microsystem. The project must be approved by the instructor and will be expected to
include the following sections in the final report: problem definition, motivation or rationale,
implementation methods considered (brainstorming), “customer” requirements, functional specifications,
modeling and scaling, effects, fabrication methodology, mask or CAD layout, packaging, testing
methodology/plan, and conformance to specifications.
Class Policies
Attendance: Failure to attend more than 90% of presented lectures will result in failure of the class unless
extenuating circumstances exist.
Cheating and Shared Work: Cheating on in-class assignments and exams will result in a zero on that
assignment. Shared work on take home assignments will result in a shared grade.