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2007 Orientation Control in Sol-Gel-Derived BiScO3-PbTiO3 Thin Films
2007 Orientation Control in Sol-Gel-Derived BiScO3-PbTiO3 Thin Films
2007 Orientation Control in Sol-Gel-Derived BiScO3-PbTiO3 Thin Films
Journal
Orientation Control in Sol–Gel-Derived BiScO3–PbTiO3 Thin Films
Hai Wen, Xiaohui Wang,*,w and Longtu Li
State Key Laboratory of New Ceramics and Fine Processing, Department of Materials Science and Engineering,
Tsinghua University, Beijing 100084, China
BiScO3–PbTiO3 (BSPT) thin films were fabricated via a sol–gel and Wu,20 which were consistent with Chen’s results. However,
method on Pt(111)/Ti/SiO2/Si(111) substrates. The effects of most of the current researches are focused on PZT thin films.
different factors on the orientation of the sol–gel-derived BSPT Few researches have been reported on other lead-based perovs-
thin films were investigated. The results showed that a higher kite ferroelectric thin films.
lead excess concentration, longer drying time, higher pyrolysis (1x)BiScO3–xPbTiO3 (BSPT) is a newly developed high-
temperature, longer pyrolysis time, higher crystallization tem- temperature piezoelectric solid solution system exhibiting a
perature, and longer crystallization time could enhance the (100) higher Curie temperature (TcB4501C) and comparable proper-
orientation of the BSPT thin films. Based on the experimental ties at the MPB (x 5 0.64) with respect to PZT,21–23 which has
results, a mechanism for the orientation evolution in the sol–gel- been considered as a potential candidate for the high-tempera-
derived BSPT thin films was proposed. The production of the ture microdevices required in automotive, aerospace, and relat-
(100) orientation was attributed to the (100)-oriented PbO ed industries. The BSPT thin films were first fabricated by
nanocrystals forming during the pyrolysis process due to the Trolier-Mckinstry24,25 on LaAlO3 single-crystal substrates
lattice match. through pulsed laser deposition. In our previous study,26,27 the
BSPT thin films were prepared on platinized silicon substrates
via a sol–gel method. In this study, the effects of different factors
I. Introduction on the orientation of the sol–gel-derived BSPT thin films have
been investigated. The growth mechanism of the film orientation
Table I. Experimental Details of the BiScO3–PbTiO3 Thin Films Prepared Via the Sol–Gel Method
Group Precursor Drying temperature Drying time Pyrolysis temperature Pyrolysis time Crystallization temperature Crystallization time
number solution (1C) (min) (1C) (s) (1C) (s)
P
III. Results and Discussion Iðl00Þ
p¼P (2)
(1) Microstructures and Phase Structures IðhklÞ
Typical SEM and AFM micrographs for the microstructure of
the sol–gel-derived BSPT thin films are shown in Fig. 1. As the where I is the maximum intensity of each peak and p0 5 p for the
figures show, the film exhibits a dense and uniform microstruc- randomly oriented BSPT powder.28 A larger Lotgering factor f
ture without any cracks. The grain size of the film is o50 nm. indicates a higher (100) orientation. In this study, the p0 value
The XRD patterns, shown in the figures, reveal that all the thin used in calculating the Lotgering factor f is measured from a
films are single-phase perovskite without any pyrochlore peaks self-made powder sample by the sol–gel method reported in our
being observed. Moreover, the strongest peaks are either (100) previous study.29
peaks or (110) peaks for all the samples, indicating that the sol– Figure 2 presents the Lotgering factor as a function of pyroly-
gel-derived BSPT thin films are either (100) oriented or ran- sis temperature for the sol–gel-derived BSPT thin films dried at
domly oriented. The intensities of the (111) peaks are very low 801C for 60 min, pyrolyzed at different temperatures for 200 s,
or even disappeared, for all the samples, indicating that the (111) and crystallized at 7001C for 500 s using the precursor solution
orientation has been strongly suppressed. SG-b. As the figure shows, when the pyrolysis temperature
increases from 3501 to 4001C, the Lotgering factor f does not
change much. However, when it comes to 4501C, the Lotgering
(2) Effects of Different Factors on the Orientation factor f exhibits a large increase from 0.23 to 0.41 and then a
To evaluate the (100) orientation degree of the sol–gel-derived slight increase to 0.43 for 5001C. This indicates that a higher
BSPT thin films, the Lotgering factor f is used, described as pyrolysis temperature may lead to a higher (100) orientation,
follows: especially when the pyrolysis temperature increases from 4001 to
4501C. The Lotgering factor as a function of pyrolysis time for
the sol–gel-derived BSPT thin films dried at 801C for 60 min,
pyrolyzed at 4501C for different times and crystallized at 7001C
f ¼ ðp p0 Þ=ð1 p0 Þ (1) for 500 s using the precursor solution SG-b is displayed in Fig. 3.
As shown in the figure, f increases with an increase in pyrolysis
time from 0.29 for 60 s to 0.66 for 300 s, except a small decrease
at 120 s, which is considered an experimental error.
Secondly, the effect of the crystallization process on the
orientation of sol–gel-derived BSPT thin films is investigated.
Figure 4 shows Lotgering factor as a function of crystallization
temperature for the sol–gel-derived BSPT thin films dried at
801C for 60 min, pyrolyzed at 4501C for 300 s, and crystallized
at different temperatures for 300 s using the precursor solution
SG-b. As the figure reveals, the Lotgering factor f increases with
increasing crystallization temperature, from 0.47 for 5501C to
0.67 for 8001C, indicating that a higher (100) orientation degree a large rapid increase before the drying time is less than 40 min,
can be obtained at a higher crystallization temperature. Figure 5 but a slow increase after 40 min.
shows the Lotgering factor as a function of crystallization time
for the sol–gel-derived BSPT thin films dried at 801C for 60 min, (3) Detailed Study on the Microstructure Evolution:
pyrolyzed at 4501C for 300 s, and crystallized at 7001C for HRTEM and FTIR
different times using the precursor solution SG-b. Examination To gain a further understanding on the orientation growth in the
of the figure indicates that f increases with the crystallization sol–gel-derived BSPT thin films, we investigate the microstruc-
time, from 0.56 for 120 s to 0.68 for 600 s. This means that a ture evolution of the samples by HRTEM and FTIR in this
longer crystallization process may enhance the (100) orientation. section.
However, it is noticeable that the Lotgering factor f does not In the previous discussion, it is observed that the Lotgering
change much when the crystallization time is o300 s. factor f exhibits a large increase as the pyrolysis temperature
Thirdly, the effect of lead excess concentration on the orien- increases from 4001 to 4501C (see Fig. 2), which indicates some
tation of the BSPT thin films was investigated. Figure 6 shows changes occurring in the film at 4501C that may enhance the
Lotgering factor f as a function of lead excess concentration for (100) orientation. Figure 8 presents the HRTEM micrographs
the sol–gel-derived BSPT thin films dried at 801C for 60 min, for plane view of the amorphous thin films dried at 801C for
pyrolyzed at 4501C for 300 s, and crystallized at 7001C for 300 s, 60 min, pyrolyzed at (a) 4001C and (b) 4501C for 300 s, respec-
using the precursor solution SG-a (0%), SG-b (10%), and SG-c tively, without crystallization. As shown in Fig. 8(a), the film is
(18%). As the figure shows, f increases with increasing lead completely amorphous with some special dark dots, which in-
excess concentration, from 0.15 for no lead excess to 0.81 for dicates that these dark regions have a higher average atomic
18% lead excess, which means that lead may play an important number than the surrounding areas. However, for the sample
role in the formation of BSPT (100) orientation. pyrolyzed at 4501C, as shown in Fig. 8(b), there are some crys-
Figure 7 presents Lotgering factor as a function of drying tallized regions (marked by the arrows in the figure) appearing
time for the sol–gel-derived BSPT thin films dried at 801C for in the amorphous film. It has been reported that PbO seeds
different times, pyrolyzed at 4501C for 300 s, and crystallized at precipitate from the amorphous phase when pyrolyzed at 4501C
6501C for 300 s using the precursor solution SG-c. Examination in PZT thin films.30 And these PbO seeds have a good lattice
of the figure indicates that f increases with increasing drying match with PZT (100) orientation (a 5 0.3974 nm for the oxygen
time, from 0.3 for 2 min to 0.74 for 60 min. Moreover, f exhibits sublattice in lead oxide and c 5 0.4146 for PZT perovskite),
may form at both the interface and the bulk of the film, when
the pyrolysis temperature increases to 4501C. These PbO
nanocrystals formed at the interface are oriented, which can
lead to a (100)-oriented BSPT thin film due to lattice match,
while those PbO nanocrystals formed in the bulk of the film
are misoriented, which cannot lead to an oriented BSPT thin
film. This may explain the large increase of Lotgering factor f
at 4501C in Fig. 2. When the pyrolysis time is prolonged, we
consider that there may be more PbO nanocrystals formed
from the amorphous phase at the interface, which would lead
to a stronger BSPT (100) orientation (seeing Fig. 3).
It could also be observed that the drying time affects the ori-
entation of the sol–gel-derived BSPT thin films, as shown in
Fig. 7. To investigate the reason for this phenomenon, the cross-
sectional HRTEM micrograph of the amorphous BSPT thin
film dried at 801C for 2 min and pyrolyzed at 4501C for 300 s is
studied, as displayed in Fig. 10. Different from the sample dried
for 60 min, in this film most PbO nanocrystals that are misori-
ented appear in the bulk of the film (marked by white arrows in
Fig. 7. Lotgering factor as a function of drying time for the sample
the figure), with a few formed at the film–substrate interface. It
group VI.
is generally accepted that during the drying process, the solvents’
volatilization and aging of the film, such as condensation reac-
which may enhance the (100) orientation.31 Thus, we suppose tions, co-occur in the as-coated thin films. Thus, the drying time
that these crystallized regions in Fig. 8(b) may be PbO nano- actually defines the residual organic parts in the amorphous thin
crystals, while the dark regions in Fig. 8(a) are probably some films. Fe32 reported that a prior drying step before the pyrolysis
kind of transition status before the PbO nanocrystals come into might reduce the OH band concentration in the amorphous
existence. Because BSPT also has a lattice constant similar to PZT thin films, while the existence of the OH band could impart
PbO (c 5 0.4075 nm for BSPT perovskite), these PbO nano- excess thermodynamic phase energy to the film and then in-
crystals would enhance the (100) orientation of BSPT thin crease the driving force for crystallization. In this study, the
films due to lattice match as well. However, as shown in FTIR spectra of the amorphous BSPT thin films dried for dif-
Fig. 8(b), these PbO nanocrystals are all misoriented, which ferent times are shown in Fig. 11. As the figure shows, no OH
obviously cannot lead to (100)-oriented BSPT thin films and band could be observed in both samples, while peaks of acetate
will not explain the large increase of Lotgering factor f at groups around 1500 cm1 were found. Moreover, it is obvious
4501C. Hence, we continued to study the cross-sectional that the longer drying time may reduce the concentration of re-
HRTEM micrograph of the sample pyrolyzed at 4501C, as sidual acetate groups in the amorphous films. Combining this
shown in Fig. 9(a). In the figure, a well-oriented nanocrystal result with that in Fig. 10, we consider that the drying time may
with the scale of several 10 nm can be observed at the film– affect the nucleation place of the PbO nanocrsytals. When the
substrate interface. The EDS analysis on the nanocrystal, as drying time is short, the larger residual organic parts may
shown in Fig. 9(b), reveals that the nanocrystal mainly con- provide more sites for the crystallization of PbO nanocrystals
sists of merely two elements, Pb and O, which provides strong within the film bulk, which are misoriented, whereas a long
support to our previous supposition that the nanocrystals drying time will reduce the residual organic parts and more
may be PbO. Moreover, the EDS analysis on the uncrystal- PbO nanocrystals will form at the film–substrate interface,
lized region away from the interface, as presented in Fig. 9(c), which are oriented. Moreover, a longing drying time also re-
shows that the region consists of all the five elements: Pb, Ti, sults in a more rigid gel film, which may hinder the crystalliza-
Bi, Sc, and O. Nevertheless, due to the very small scale, it is tion of PbO within the film bulk as well. Because more oriented
very hard to operate select area electron diffraction on the PbO nanocrystals are formed, higher BSPT (100) orientations
PbO nanocrystal. These results suggest that PbO nanocrystals are produced.
Fig. 8. High-resolution transmission electron microscopy micrographs for the plan view of the amorphous thin films dried at 801C for 60 min,
pyrolyzed at (a) 4001C and (b) 4501C for 300 s without crystallization.
3252 Journal of the American Ceramic Society—Wen et al. Vol. 90, No. 10
Fig. 9. (a) High-resolution transmission electron microscopy micrograph for the cross-sectional view of the interface in the amorphous thin films dried
at 801C for 60 min and pyrolyzed at 4501C for 300 s without crystallization; (b) energy dispersive spectroscopy (EDS) analysis on the crystallized region
in (a); (c) EDS analysis on the uncrystallized region away from the interface in (a).
(4) Mechanism for the Orientation Evolution barrier for the two nucleation events becomes larger (see Eqs. (3)
It is well known that the crystallization of sol–gel-derived thin and (4)), which makes the heterogeneous nucleation more
films occurs by a nucleation-growth process. From a thermo- important.
dynamic perspective, the driving force (the energy difference be- Based on the experimental results and discussion above, we
tween the amorphous and crystalline states) plays a significant may propose a mechanism for the orientation evolution in sol–
role in determining the nucleation events that take place.33 From gel-derived BSPT thin films. Firstly, the as-coated thin film is
the classic Volmer–Weber nucleation theory,34 the energy dried at a low temperature (801–1001C). During this process,
barriers for homogeneous and heterogeneous nucleation, which solvents’ volatilization and aging of the film, such as condensa-
depend on the driving force, can be described by tion reactions, co-occur. The drying time may define the residual
organic parts in the as-dried thin film and gel film status. Then,
16pg3 the film is pyrolyzed at an intermediate temperature. When the
DGhomo ¼ (3) pyrolysis temperature is higher than 4501C, PbO nanocrystals
3ðDGv Þ2 precipitate from the amorphous film. These PbO nanocrystals
may form within the bulk film, which are misoriented, or at the
16pg3 film–substrate interface, which are (100) oriented. If the drying
DGhetero ¼ f ðyÞ (4)
3ðDGv Þ2