THENI KAMMAVAR SANGAM

COLLEGE OF TECHNOLOGY
KODUVILARPATTI,
THENI - 625534

ELECTRONICS AND COMMUNICATION

ENGINEERING

CEC340
MEMS DESIGN
LABORATORY

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Reg. No : ……………………...
 THENI KAMMAVAR SANGAM COLLEGE
OF TECHNOLOGY
KODUVILARPATTI, THENI.

BONAFIDE CERTIFICATE

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Sem./Dept. : …………………………………
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Certified that this is the bonafide record of work done by the above student
in ....................................................................... Laboratory during the year 2023 – 2024

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Submitted for the Practical Examination held on .................................

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 PAGE MARKS STAFF
EXP.NO DATE CONTENTS
NO AWARDED INITIAL
EXP NO: 1 DATE: ___/___/____

DESIGN AND SIMULATION OF PIEZOELECTRIC CANTILEVER

AIM:

To investigate the piezoelectric effect in a cantilever structure for potential energy

harvesting or sensing applications.

THEORY:

The piezoelectric cantilever is a device that converts mechanical energy into electrical
energy through the piezoelectric effect. It consists of a beam, one end of which is fixed, while
the other is free to vibrate. When subjected to mechanical stress, the piezoelectric material
within the cantilever generates an electric charge proportional to the force applied. This
principle is utilized in various applications, such as vibration energy harvesters and sensors.
The performance of a piezoelectric cantilever is influenced by factors like the material
properties, the geometry of the cantilever, and the frequency of the applied force. Advanced
designs, such as those with hollow structures or varying layer widths, can enhance the energy
density and efficiency of these devices.

CALCULATIONS:

Piezoelectric Equation: The document outlines the piezoelectric equation relating

stress (T), electric field (E), and electric displacement (D) as

E
Di=d iq T q+ e kp E k

where, d iq is the piezoelectric coefficient

E
e kp is the dielectric permittivity

DESIGN SPECIFICATIONS:

1. Cantilever Dimensions: The length, width, and thickness of the cantilever structure.
2. Piezoelectric Material: The type and properties of the piezoelectric material used in
the cantilever.
3. Load Conditions: The expected mechanical stress or vibration levels that the
cantilever will experience in its intended application.
DESIGN METHODOLOGY:

Finite Element Analysis (FEA) will be employed to simulate the stress distribution
and voltage generation within the piezoelectric cantilever. FEA software allows for the
accurate modeling of complex structural behaviours under various loading conditions. By
inputting the material properties, geometry, and boundary conditions into the FEA software,
the stress distribution and voltage output of the cantilever can be predicted.

DESIGN PROCESS:

1. Modeling: Create a 3D model of the piezoelectric cantilever using CAD software.

2. Material Selection: Choose an appropriate piezoelectric material with the desired
properties.
3. FEA Setup: Define the material properties, boundary conditions, and loading
conditions in the FEA software.
4. Simulation: Run the FEA simulation to analyze the stress distribution and voltage
generation within the cantilever structure.
5. Optimization: Adjust the design parameters, such as cantilever dimensions or
material properties, to optimize the voltage output and power generation.

GEOMETRY OF PIEZOELECTRIC CANTILEVER:

Model of Simulation
RESULT:

Thus, the study of the piezoelectric cantilever has been successfully conducted. The
experimental investigation provided valuable insights into the piezoelectric effect and its
potential applications in energy harvesting or sensing.
EXP NO: 2 DATE: ___/___/____

DESIGN AND SIMULATION OF THERMO COUPLES

AIM:

To investigate the principles of thermocouples and their application in temperature

measurement.

THEORY:

Thermocouples operate based on the Seebeck effect, which describes the phenomenon
where a voltage is generated at the junction of two dissimilar metals when exposed to a
temperature gradient. This voltage is directly proportional to the temperature difference
between the hot and cold junctions of the thermocouple.

CALCULATIONS:

The output voltage (V) of a thermocouple can be calculated using the Seebeck
coefficient (S) of the metals involved and the temperature difference (ΔT) between the hot
and cold junctions. The relationship between temperature and voltage is typically nonlinear
and can be described by polynomial equations derived from experimental data.

Mathematically, this relationship can be expressed as:

1 2 1 3
V =S . ΔT + A .( ΔT ) + B .(ΔT ) +…
2 3
where, V is the output voltage
S is the Seebeck coefficient

ΔT is the temperature difference between the hot and cold junctions

A , B ,etc., are coefficients derived from experimental data to fit the nonlinear
relationship between temperature and voltage.
DESIGN SPECIFICATIONS:

1. Metal Combinations: Selection of appropriate metal pairs based on their Seebeck

coefficients and temperature range of operation.
2. Junction Design: Configuration of the junction type (e.g., welded, twisted, or
soldered) based on the application requirements.
3. Temperature Range: Determination of the temperature range over which the
thermocouple will be used.

DESIGN METHODOLOGY:

Analytical models or simulation tools can be utilized to predict the voltage output of
the thermocouple under different temperature gradients. These models take into account the
material properties of the thermocouple wires, the junction type, and the environmental
conditions.

DESIGN PROCESS:

1. Metal Selection: Choose appropriate metal combinations based on their Seebeck

coefficients and compatibility with the intended temperature range.
2. Junction Design: Design the junction geometry and construction method to
minimize thermal resistance and maximize sensitivity.
3. Simulation Setup: Configure the simulation environment with the chosen
thermocouple parameters, including material properties and temperature differentials.
4. Simulation Run: Execute the simulation to calculate the voltage output of the
thermocouple for various temperature differentials.
5. Analysis: Analyze the simulation results to understand the relationship between
temperature and voltage output and validate against experimental data if available.

RESULT:

Thus, the study of the thermocouple has been successfully conducted. This
information can be used to calibrate thermocouples for accurate temperature measurement in
practical applications.
EXP NO: 3 DATE: ___/___/____

DESIGN AND SIMULATION OF COMB DRIVE ACTUATORS

AIM:

To explore the design and functionality of comb drive actuators for applications in
micro-positioning and resonating systems.

THEORY:

Comb drive actuators harness the principle of electrostatic attraction between

interdigitated comb-like structures to generate mechanical motion. When a voltage is applied
across the comb fingers, an electrostatic force is produced, causing the fingers to move
relative to each other. This movement can be utilized for tasks such as micro-positioning of
mechanical components or generating vibrations for resonating applications.

CALCULATIONS:

The electrostatic force generated in a comb drive actuator can be calculated using the
formula:

ℇ0 . V 2 . t
F e= 2
2. g
where, F e is the electrostatic force

ℇ 0 is the permittivity of free space

V is the applied voltage
t is the thickness of the comb fingers
g is the gap between the fingers
DESIGN SPECIFICATIONS:

1. Number of Comb Fingers: Determination of the quantity of comb fingers based on

the desired force output and actuator size.
2. Finger Dimensions: Specification of the dimensions of the individual comb fingers,
including width, length, and thickness.
3. Gap Spacing: Definition of the gap distance between adjacent comb fingers, which
influences the actuator's sensitivity and range of motion.
4. Material Properties: Selection of suitable materials for the comb fingers to ensure
mechanical strength and electrostatic performance.

DESIGN METHODOLOGY:

The design of comb drive actuators involves a combination of electrostatic principles

and mechanical engineering concepts to optimize the actuator's performance. Finite Element
Analysis (FEA) simulations are often employed to model the electrostatic forces and
mechanical behaviour of the comb structure under different operating conditions.

DESIGN PROCESS:

1. Modelling: Creation of a detailed 3D model of the comb drive actuator in simulation

software, including accurate representation of the comb fingers, gaps, and support
structures.
2. Voltage Application: Simulation of the electrostatic force generated by applying a
voltage across the comb fingers and observing the resulting displacement or
deformation.
3. Optimization: Iterative refinement of the actuator design parameters to achieve the
desired performance metrics, such as force output, displacement range, and energy
efficiency.
4. Analysis: Evaluation of simulation results to assess the actuator's capabilities and
identify any design improvements or modifications needed.

RESULT:

Thus, the study of the comb drive actuator has been successfully conducted.