Laser-driven tin plasma expansion

with relevance to extreme ultraviolet

nanolithography
Diko Hemminga

EUV Plasma Processes

Advanced Research Center for Nanolithography (ARCNL)

and Department of Physics and Astronomy, and LaserLaB,

Vrije Universiteit, Amsterdam, The Netherlands

October 25 2021
Laser-produced tin plasma
Slitle
Extreme ultraviolet light * Not to scale

Laser Tin

• Damage to collector mirror

→ Reduced EUV throughput
Fast tin expansion • Optimizing solutions:
understanding tin expansion
“Light sources for high-volume manufacturing EUV lithography:

Collector mirror technology, performance, and power scaling”

I. Fomenkov et al. Adv. Opt. Techn. 6, 173 (2017)
2
Tin plasma expansion Slitle

• Quantify the expansion → ion kinetic energy distribution

• “Number of ions with a certain energy” or 𝑑𝑑 2 𝑁𝑁
(𝐸𝐸)
• Number of ions 𝛿𝛿𝑁𝑁 in a energy range 𝛿𝛿𝐸𝐸, in a solid angle 𝛿𝛿Ω 𝑑𝑑𝑑𝑑𝑑𝑑Ω
• By experiment and simulation

• Investigation of 1064 nm main pulse driven plasma on droplet

• Complementing studies on EUV emission from solid-state driven plasmas
“Radiation transport and scaling of optical depth in
Nd:YAG laser-produced microdroplet-tin plasma”

• This work has appeared in publication as

R. Schupp et al. Appl. Phys. Lett. 115, 124101 (2019)

D. J. Hemminga, L. Poirier, M. M. Basko, R. Hoekstra, W. Ubachs, O. O. Versolato, and

J. Sheil, Plasma Sources Sci. Technol. (2021) 30 105006
https://doi.org/10.1088/1361-6595/ac2224
3
Experimental measurements
Slitle

10 ns

ESA: Electrostatic analyser,

benchmarked by Faraday cup
Droplet radius 28 µm, 𝐼𝐼 = 2.1 ⋅ 1011 W/cm2, 1064 nm,
Gaussian temporally and spatially: 10 ns (FWHM), 60 µm (FWHM)
L. Poirier et al. submitted (2021) 4
Experimental ion kineticSlitle
energy distribution

“High-energy ions from Nd:YAG laser ablation of tin microdroplets:

comparison between experiment and a single-fluid hydrodynamic model”
5
D. J. Hemminga et al. Plasma Sources Sci. Technol. 30 105006 (2021)
Experimental ion kineticSlitle
energy distribution (2)

6
Experimental ion kineticSlitle
energy distribution (2)

Analytic models of plasma expansion

“Physics of Shock Waves and High

Temperature Hydrodynamic Phenomena”
“Ion energy spectrum of expanding laser-plasma with limited mass” “Plasma Expansion into Vacuum” Ya. B. Zeldovich and Yu. P. Raizer
(Academic, New York, 1966) 7
M. Murakami et al. Phys. Plasmas 12, 062706 (2005) P. Mora Phys. Rev. Lett. 90, 185002 (2003)
RALEF-2D Slitle

• Radiation-hydrodynamics code RALEF-2D

• Hydrodynamics
• Thermal conduction
• Radiation transport
• Laser absorption
• Equation of state and opacities

𝜌𝜌 𝑚𝑚𝑆𝑆𝑆𝑆 𝑣𝑣⃗
𝑉𝑉
𝑑𝑑 2 𝑁𝑁
(𝐸𝐸) ← Record the (i) number N of particles, and (ii) their energy E
𝑑𝑑𝑑𝑑𝑑𝑑Ω
“Development of a 2D radiation-hydrodynamics code RALEF for
laser plasma simulations”
M. M. Basko et al. GSI Report 2010-1, PLASMA-PHYSICS-25
(GSI Helmholtzzentrum für Schwerionenforschung GmbH, 2010) 8
Radiation-hydrodynamics in 2D
Slitle

Laser

“High-energy ions from Nd:YAG laser ablation of tin microdroplets:

comparison between experiment and a single-fluid hydrodynamic model”
9
D. J. Hemminga et al. Plasma Sources Sci. Technol. 30 105006 (2021)
Dynamics along a line towards
Slitle the detector

• Initial burst of ablation

10
Dynamics along a line towards
Slitle the detector

• Initial burst of ablation

• Second burst as intensity grows

11
Dynamics along a line towards
Slitle the detector

• Initial burst of ablation

• Second burst as intensity grows
• Density shell forms

12
Dynamics along a line towards
Slitle the detector

• Initial burst of ablation

• Second burst as intensity grows
• Density shell forms
• Quasi-spherical density shell persists as
intensity decreases

13
Dynamics along a line towards
Slitle the detector (2)

14
Simulated ion kinetic energy
Slitle distribution

“High-energy ions from Nd:YAG laser ablation of tin microdroplets:

comparison between experiment and a single-fluid hydrodynamic model”
15
D. J. Hemminga et al. Plasma Sources Sci. Technol. 30 105006 (2021)
Conclusions Slitle

• Results on ion kinetic energy distribution

• Simulations of plasma dynamics in 2D

I. Quasi-spherical expanding shell

II. Agreement in shape and absolute number

• Non-trivial density profile calculated explicitly

• Step towards better understanding and

predictive modelling
“High-energy ions from Nd:YAG laser ablation of tin microdroplets:
comparison between experiment and a single-fluid hydrodynamic model”
16
D. J. Hemminga et al. Plasma Sources Sci. Technol. 30 105006 (2021)
ARCNL Source Research: team
ARCNL EUV PP team:
Dion Engels (TU/e MSc student)
Zoi Bouza (TKI PhD)
James Byers (TKI PD @ UT)
Bo Liu (VIDI PhD)
Lars Behnke (VIDI PhD)
Lucas Poirier (ERC PhD)
Yahia Mostafa (ERC PhD)
Karl Schubert (PhD)
Adam Lassise (PD)
Javier Hernandez-Rueda (ERC PD)
Randy Meijer (PhD -> PD)
Laurens van Buuren (technician)
Ronnie Hoekstra (group leader)
Wim Ubachs (group leader)
Oscar Versolato (group leader)
ARCNL EUV G&I team:
Jan Mathijssen (PhD)
Zeudi Mazzotta (PD)
Stefan Witte (group leader)
Kjeld Eikema (group leader)
RUG-ARCNL team:
Subam Rai (PhD, RUG)
Klaas Bijlsma (PhD, RUG)
N.N. (PhD)
Mart Salverda (technician)
Ronnie Hoekstra (group leader)
SOURCE Plasma modeling team
John Sheil (group leader)
Diko Hemminga (PhD)
N.N. (PhD)
N.N. (PD)
Academic collaborators:
James Colgan (LANL): plasma theory (opacity)
A. Ryabtsev (ISAN): spectroscopy
M. Basko (KIAM, ISAN): plasma
J.R. Crespo López-Urrutia (MPIK): spectroscopy
H. Gelderblom (TU/e): fluids
A. Borschevsky (U. of Groningen): atomic theory
J. Berengut (UNSW Australia): atomic theory
Ahmed Diallo et al. (PPPL Princeton): thomson &
PIC modeling
Mendez, Rabalan (UAM-Madrid): charge
exchange
Muharrem Bayraktar, Fred Bijkerk, Marcelo
Ackermann (U. Twente): spectroscopy
Total staff currently involved in Source:
4 PI’s (~ 2 fte), 5- postdocs, 9 PhD students,
2 technicians; (3 vacancies)
17
 Appendix: Initial burst ofSlitle
laser-induced ablation

“High-energy ions from Nd:YAG laser ablation of tin microdroplets:

comparison between experiment and a single-fluid hydrodynamic model”
18
D. J. Hemminga et al. Plasma Sources Sci. Technol. 30 105006 (2021)