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JOM Real Time Fib Study 10
JOM Real Time Fib Study 10
net/publication/233554859
Article in JOM: the journal of the Minerals, Metals & Materials Society · July 2010
DOI: 10.1007/s11837-010-0105-8
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4 authors, including:
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Enhanced for the Web again raised concerns about the reliabil- tial discovery,5 a large body of research
ity issues in electronic components due has been dedicated to determining the
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2 μm
WEB Figure 1. Time series SEM images showing whisker nucleation and growth. Time after deposition: (a) 14 h, (b) 14 h 20 min., (c) 14
h 40 min., (d) 17 h, (e) 21 h. View on-line to access movie or go to http://www.engin.brown.edu/faculty/Chason/research/whisker1
.html.
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truded from the surface occurs at a rate growing outward faster than the other. Figure 4h) forming on the hillock appear
of 1.08 × 10–22 m3/s. A similar rate was The extrusion of material is clearly oc- to be the remnants of grain boundaries
calculated for the other whiskers found curring by addition of Sn at the base of between the adjacent grains (pointed to
on the same sample in different areas. the hillock—the Sn that is in the hillock in Figure 4d) which, as the hillock grain
above the surface does not change its grew laterally, got absorbed into the
Hillocks
morphology after it first forms. hillocking grain.
The key difference between whiskers After the initial rotation, the base of It is interesting to note that the surface
and hillocks seems to be that the grains the hillock starts to widen at the same oxide around the hillock’s base does not
which form hillocks undergo lateral time that it is pushing up (Figure 4d–h), seem to be preventing it from growing
grain growth whereas the grains form- indicating an extensive amount of lateral in the upward direction. As the hillock
ing whiskers just grow in the upward di- grain growth by the hillock grain. As the grows, it carries the oxidized surface
rection. To illustrate this difference, im- hillock consumes adjacent grains, the with it. The features that were present
ages taken from regions where hillocks horizontal growth is roughly constrained on the Sn surface (for example the white
form are shown in Figure 4 for various by the grain boundaries on the surface, particle circled in Figure 4e and h) stay
time intervals after the initial deposition. appearing to consume an entire neigh- there and get lifted with the hillocks,
These images are taken from a sample boring grain and then slowing down be- and thus the surface of the hillock car-
with Sn thickness of 4 µm which had a fore consuming the next grain. Some of ries with it the history of the Sn surface
similar ratio of whiskers to hillocks as the neighboring grains are incorporated before the hillock appeared. After 76 h
the 2 µm Sn samples. The hillocks start into the growing hillock while other the lateral grain growth slows down and
nucleating after an incubation period of grains remain unchanged and determine stops; at this point the grain boundaries
8–10 h after Sn deposition. We have in- the hillock’s horizontal boundary. might have become pinned. After this,
cluded images from several hillocks to The sequence of growth often pro- the hillock is only observed to grow in
illustrate different features of growth. ceeds in a step-wise fashion, with an the upward direction for the duration of
In the first hillock example (Figure 4) increment in horizontal grain-growth the measurement.
the nucleation appears to start at a sin- followed by an increment in vertical
gle grain, similar to the initiation of the growth. This leads to the formation of
16 a
whisker. However, unlike the whisker, horizontal steps (striation marks) on the
Whisker Length (μm)
the top surface of the hillock rotates as side surface of the hillock as it grows.
it grows until the initial oxide-covered These striations correspond to the size 12
top surface of the hillock is oriented ap- of the hillock base at the time when it
8
proximately 90 relative to the surface was pushed out of the surface so that,
it started from. To highlight this, a line like growth rings on a tree, they can be
4
drawing of the hillock is shown in the in- used to recreate the history of the hill-
set in Figure 4a–d. The rotation appears ock’s morphology. Similarly, the verti- 0
to occur due to one side of the hillock cal ridge (as pointed to by the arrow in b
Rate of Whisker Growth (Å/s)
3.5
3
a b 2.5
Figure 2. (a) SEM
image of Sn surface 2
with a hole in oxide 1.5
layer made by FIB at
1
6 h after deposition,
(b) image after 0.5
138 h; no growth is 0
visible where oxide 20 30 400 50 10
was removed but Time (h)
hillock is observed Figure 3. Measurement of: (a) whisker
within approximately length vs. time; (b) instantaneous growth
10 µm. rate of whisker vs. time.
a b c d
e f g h
Figure 4. Time series SEM images showing hillock growth with surface rotation and extensive lateral grain growth. Time after
WEB deposition: (a) 6 h, (b) 12 h, (c) 18 h, (d) 32 h, (e) 44 h, (f) 56 h, (g) 76 h, (h) 138 h. Insets shows schematic of shape evolution
highlighting rotation of the original surface. Arrows point to grain boundary features in (d) that are visible as ridges on side of the
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a b c d
e f g h
Figure 5. Time series SEM images of hillock that appears to emerge from only a portion of the original grain. Time after deposition:
WEB (a) 6 h, (b) 13 h 30 min., (c) 13 h 40 min., (d) 15 h, (e) 20 h, (f) 40 h, (g) 96 h, (h) 138 h. Circle in (a) highlights region of interest.
Arrow in (f) points to horizontal band that forms when growth direction changes. View on-line to access movie, or go to http://www
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.engin.brown.edu/faculty/Chason/research/Hillock3.html.
WEB Figure 6. Time series SEM images of hillock growth comprising multiple grains on original surface. Time after deposition: (a) 6 h,
(b) 31 h, (c) 56 h, (d) 81 h, (e) 106 h. View on-line to access movie, or go to http://www.engin.brown.edu/faculty/Chason/research
/Hillock4.html.
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5f) are indications of the point where the trolling whisker/hillock growth since something in the underlying film.
direction of the hillock growth changed. their shape and orientation is intimately We also looked at the effect of re-
After roughly 40 h the remainder of the related to the way in which atoms are moving a larger area of the oxide by
grain that did not grow initially also incorporated into them. In the first part sputtering a region of size 50 × 50 µm.
starts growing. of the discussion, we consider the sig- Even though we would have expected to
Figure 6 shows surface images from nificance of the fact that whiskers don’t see some features forming in a region of
another hillock (same sample), in which start to form in regions where we have this size, we didn’t find any. We inter-
the growing feature appears to be the removed the surface oxide. In the second pret this to mean that modification of a
result of 3 or 4 initially separate grains part, we present a brief overview of the large area of the oxide can relieve stress
growing outward together in the form of driving forces and mechanisms that we and hence remove the driving force for
a pillar with little lateral growth beyond believe control whisker growth (based whisker/hillock growth.
what occurred before the hillock started on our own work and that of others) and
Growth Modes of Whiskers
to grow. After 81 h the hillock starts explain how we believe they relate to
to consume an adjacent grain which the morphologies that we observe. Although it is by now generally ac-
changes the growth mode and leads to cepted that stress is the driving force for
Role of the Surface Oxide in
rotation of the hillock. whisker growth,2,3,8,10,11,17–20 this knowl-
Whisker/Hillock Nucleation
Figure 7 shows one more hillock tak- edge alone does not explain how whis-
en from the same sample. In this case Tin surfaces exposed to air grow a kering occurs. To understand it, we must
one side of the hillocks seems to remain tenacious native oxide which plays an consider how the stress gets generated,
attached to the surface, perhaps due to important role in stress evolution by how this leads to the transport of mate-
its incapability to completely break the suppressing relaxation via diffusional rial to the whiskering grain and how this
surface oxide. As the hillock grows, the creep of atoms to the surface.10,14,15 In- material gets incorporated into the whis-
surface curves but there is no vertical deed, it has been shown that removal ker. At the end of the section, we discuss
growth. Finally it stops after roughly 50 of the surface oxide by sputtering3 or how these mechanisms are related to the
h. The halt in the growth may be due to chemical etching16 leads to relaxation of results of our FIB/SEM measurements.
the fact that the curving surface curved the stress in the layer. Therefore, it has The fundamental source of stress in
by 180 and hit the starting surface. This been suggested10,15,17 that whiskers form the Sn layer is the chemical reaction be-
appears likely as growth stopped imme- preferentially at weak spots in the oxide tween the Sn and Cu to form the Cu6Sn5
diately after hitting the surface. In com- which can be more easily cracked to al- intermetallic compound (IMC). In Sn
parison, other hillocks on the same sam- low material to flow out of the coating. coatings on Cu, IMC formation occurs
ple continued to grow suggesting that To address the role of the oxide in primarily on the Sn side of the Cu-Sn
the driving force for hillock formation nucleation we used the FIB to remove interface due to rapid diffusion of Cu
had not been depleted. This again points the oxide layer at selected regions on the into Sn.21 Because of this diffusional
out that the surface oxide is important in surface as described above and shown in asymmetry, the IMC growth is accom-
deciding the fate of the hillock. Figure 2. Importantly, we found that no panied by a large volume expansion
Finally, we found regions in which whisker or hillock-type features grew that generates stress in the Sn layer. In
grain growth could be observed under- out of these holes. Moreover, we found previous work,8,22 we have used finite
neath the surface with very little upward that a hillock-type feature did form at element analysis (FEA) to simulate the
movement. This caused enough change a distance of only 10 µm from the hole evolution of the resulting stress field
in the surface structure so that the grain (Figure 2b) which shows that the surface throughout layers of Sn with columnar
growth could be observed but no forma- modification did not remove the driving grain structures assuming that stress re-
tion of a surface feature could be seen. force for hillock formation. We believe laxation can occur by elastic and plas-
this result clearly indicates that it is not tic deformation and by grain boundary
DISCUSSION
sufficient to weaken the oxide to initiate diffusion. Two important results of this
The growth morphologies can pro- the growth of surface features. Instead, work are the average stress saturates in
vide insights into the mechanism con- whisker nucleation is determined by the Sn (at approximately –12 MPa) due
a b c d e
WEB Figure 7: Time series SEM images of hillock growth showing extensive rotation and little vertical growth. Time after deposition:
(a) 6 h, (b) 8 h, (c) 12 h, (d) 18 h, (e) 50 h. View on-line to access movie, or go to http://www.engin.brown.edu/faculty/Chason
/research/Hillock5.html.
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