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بلا عنوان - مستندات Google
بلا عنوان - مستندات Google
M
University Of Thi-Qar
College Of Science
Department of Chemistry / MSc
Nanotechnology
Supervised by:
nergyDispersiveX-raySpectroscopy(EDX)isatechniquebasedonthe
E
collection and energy dispersion of X-rays created when high-energy
electrons bombard a sample.
The X-rays have energies that are characteristic of the elements in the
sample.
The EDS is attached to the Scanning Electron Microscope (SEM) and the
two techniques are often used together.
nergyDispersiveX-raySpectrometry(EDXS)istheroutinetechniquefor
E
determiningmaterials'elementalmakeupandcompositionintheScanning
orTransmissionElectronMicroscope(SEM/TEM).EDXSisalmostalways
shortened, and EDS is used instead.
nergy Dispersive X-ray (EDX) Analysis is the same method for
E
compositional analysis using an electron microscope.
Therefore,thetermsEDSandEDXarebothused(ofteninterchangeably)
totalkaboutthesamemethodorthesameequipment.Intheviewofsome,
they mean something subtly different:
EDX refers to the method (E
DX analysis) while EDS is the equipment
(E nergy Dispersive Spectrometer).
Principle
pplication of EDX
A
Materials evaluation and identification
1. Contaminants
2. Elemental diffusion profiles
3. Multiple spot analysis of areas from 1 micron to 10 cm in diameter
4. Material verification