Design and Simulation of MEMS-based

Piezoelectric Accelerometer
Siram.Sai krishna1, Nuti.V.S.Ayyappa sai1,Dr.K.Srinivasa Rao2
1. Lakireddy Bali Reddy College Of Engineering, Electronics and Instrumentation Engineering, Mylavaram, Andhra
Pradesh, India.
2.Professor & HOD, Dept. of Electronics and Instrumentation Engineering,Lakireddy Bali Reddy College Of
Engineering, Mylavaram, Andhra Pradesh, India.
Introduction: Results: Results from the simulation, sensitivities and
MEMS is a platform to combine mechanical and electrical potentials obtained are as follows.
components on unique base. Accelerometers had the
unique feature to measure acceleration, in which the type
which releases energy for the measurements are of this
type.

Figure5.Displacement for Quartz Figure 6.Potential obtained for Quartz

fig.1:Piezoelectric principle Figure 2. Design of Accelerometer

Construction & Computation: The construction

of this design involves two stages. They are, setting of Fig7:Displacement for ZnO Fig 8:Potential obtained for ZnO
geometry, applying of materials required to the respective
domains. According to the mathematical basis,

Fig 9: Displacement for the Fig 10:Potential obtained for the

varied geometry varied geometry

Res Type of 3 layer with 3 layer with 3 layer with 4 layer with
ult constru lead quartz ZnO lead
Computation is done to study the results with the help of typ ction zirconate zirconate
required parameters and different analysis procedures. For e titanate titanate
Displacement 0.0167 0.0207 7.6437*10-4 2.099*10-7
the evaluation of good results, the simulation is done with (µm)
different geometries, materials. Potential (V) 4.1003 2.0332 5.0855 0.977

The meshing of the constructed design is done in the way of

analysis for equal distribution and exact results.
Conclusions: The analysed model in this project
gives very good results and good potential output as its
thickness and its size is very low it can also be practically
possible to construct with the help of obtained results.
ZnO and PZT films are the two primary materials reported
for use in bulk- or surface-micromachined piezoelectric
MEMS accelerometers.

References:
[1]. N. Yazdi, F. Ayazi, and K. Najafi, “Micromachined
Figure 3. Displacement in the Figure 4. Electric potential obtained inertial sensors,” Proc. IEEE, vol. 86, pp.
piezoelectric layer 1640–1659, Aug. 1998.
Here the results are noticed to be 0.0167 displacement with a [2]. C. Song, B. Ha, and S. Lee, “Micromachined inertial
potential of 4.1003V. So from this we can say that this good sensors,” in Proc. 1999 IEEE/RSJ,
sensitivity but the better we can use when we simulate with International Conference on Intelligent Robots and
the other. Systems, vol. 2, pp. 1049–1056.